CN111594754B - Protective gas supplementing device for single crystal vapor phase growth - Google Patents

Protective gas supplementing device for single crystal vapor phase growth Download PDF

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Publication number
CN111594754B
CN111594754B CN202010707257.6A CN202010707257A CN111594754B CN 111594754 B CN111594754 B CN 111594754B CN 202010707257 A CN202010707257 A CN 202010707257A CN 111594754 B CN111594754 B CN 111594754B
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ring
limiting
single crystal
gas cylinder
sleeve
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CN111594754A (en
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孙寒羽
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Shenzhen Chaochun Technology Co.,Ltd.
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Yantai Qingzi New Material Technology Co ltd
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C7/00—Methods or apparatus for discharging liquefied, solidified, or compressed gases from pressure vessels, not covered by another subclass
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/02—Special adaptations of indicating, measuring, or monitoring equipment
    • F17C13/023—Special adaptations of indicating, measuring, or monitoring equipment having the mass as the parameter
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/04—Arrangement or mounting of valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/06—Closures, e.g. cap, breakable member
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/08—Mounting arrangements for vessels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2201/00—Vessel construction, in particular geometry, arrangement or size
    • F17C2201/01—Shape
    • F17C2201/0104—Shape cylindrical
    • F17C2201/0109—Shape cylindrical with exteriorly curved end-piece
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/01—Mounting arrangements
    • F17C2205/0103—Exterior arrangements
    • F17C2205/0107—Frames
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/01—Mounting arrangements
    • F17C2205/0123—Mounting arrangements characterised by number of vessels
    • F17C2205/013—Two or more vessels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/01—Mounting arrangements
    • F17C2205/0153—Details of mounting arrangements
    • F17C2205/0192—Details of mounting arrangements with external bearing means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
    • F17C2205/0311—Closure means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
    • F17C2205/0323—Valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0388—Arrangement of valves, regulators, filters
    • F17C2205/0394—Arrangement of valves, regulators, filters in direct contact with the pressure vessel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2221/00—Handled fluid, in particular type of fluid
    • F17C2221/01—Pure fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2225/00—Handled fluid after transfer, i.e. state of fluid after transfer from the vessel
    • F17C2225/01—Handled fluid after transfer, i.e. state of fluid after transfer from the vessel characterised by the phase
    • F17C2225/0107—Single phase
    • F17C2225/0123—Single phase gaseous, e.g. CNG, GNC
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
    • F17C2227/01—Propulsion of the fluid
    • F17C2227/0192—Propulsion of the fluid by using a working fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
    • F17C2227/04—Methods for emptying or filling
    • F17C2227/041—Methods for emptying or filling vessel by vessel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
    • F17C2250/06—Controlling or regulating of parameters as output values
    • F17C2250/0605—Parameters
    • F17C2250/0615—Mass or weight of the content of the vessel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
    • F17C2250/07—Actions triggered by measured parameters
    • F17C2250/072—Action when predefined value is reached
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2270/00—Applications
    • F17C2270/05—Applications for industrial use

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

The invention provides a protective gas supplementing device for single crystal vapor phase growth, and relates to the field of single crystal vapor phase growth. The protective gas supplementing device for single crystal vapor growth comprises a buffer chamber, wherein a flow guide pipe is connected and communicated with the front end of the buffer chamber, a sealing plate is fixedly mounted at the back of the buffer chamber, a connecting mechanism is connected to the inner part of the sealing plate in a rotating mode, a supporting mechanism is fixedly mounted in the middle of the sealing plate, an alarm mechanism is fixedly mounted on the inner side of the bottom end of the supporting mechanism, and gas cylinders are placed at two ends of the upper portion of the supporting mechanism. This single crystal is protective gas replenishing device for vapor phase growth can break the balance of gravity through setting up the gas cylinder that the quality equals behind one of them gas cylinder air feed to can realize rotatoryly, and then can close the gas cylinder through touching piece and kicking block contact on the top, the gas cylinder of the other end is opened the gas cylinder through touching piece and kicking block contact in the bottom, thereby realizes incessant air feed, temporary problem of short of gas when solving among the prior art and switching the gas cylinder.

Description

Protective gas supplementing device for single crystal vapor phase growth
Technical Field
The invention relates to the field of single crystal vapor phase growth, in particular to a protective gas supplementing device for single crystal vapor phase growth.
Background
Single crystal vapor growth is a growth technique that uses a gas of one or more substances, or a carrier gas that is bubbled through a liquid source and carries source vapor into a reaction chamber, which, when activated in some manner, chemically reacts at the substrate surface and deposits the desired thin film crystal.
Protective gas needs to be continuously filled in the process of monocrystal growth, and the protective gas needs to be continuously introduced, the existing solution is to rapidly replace the gas cylinder after the protective gas is about to be used, but the gap time exists in the process of replacing the gas cylinder.
Disclosure of Invention
Aiming at the defects of the prior art, the invention provides a protective gas supplementing device for single crystal vapor phase growth, which solves the problems in the background art.
In order to achieve the purpose, the invention is realized by the following technical scheme: the gas cylinder sealing device comprises a buffer chamber, wherein the front end of the buffer chamber is connected with and communicated with a flow guide pipe, a sealing plate is fixedly mounted at the back of the buffer chamber, the inner part of the sealing plate is rotatably connected with a connecting mechanism, a supporting mechanism is fixedly mounted at the middle part of the sealing plate, an alarm mechanism is fixedly mounted at the inner side of the bottom end of the supporting mechanism, gas cylinders are placed at two ends above the supporting mechanism and are clamped with the connecting mechanism, a limiting ring groove is formed in the middle part of the sealing plate, a sealing ring groove is formed in the front of the limiting ring groove, limiting blocks are fixedly mounted at the topmost end and the bottommost end in the groove of the limiting ring groove, ejector blocks are fixedly mounted at two sides of the limiting blocks, the connecting mechanism comprises a ring plate, the ring plate is rotatably connected at the middle part of the sealing ring groove, through holes are formed, the supporting mechanism comprises a central rod, the central rod is fixedly arranged at the center of one end of the sealing plate, which is far away from the annular plate, a supporting sleeve is sleeved on the outer surface of the central rod, the supporting sleeve is rotatably connected with the central rod, the outer surfaces of the central rod, which are positioned at the two sides of the supporting sleeve, are rotatably connected with a supporting table, the two sides of the upper surface of the supporting sleeve are provided with placing grooves, clamping shafts are fixedly arranged at the two sides of the axial direction of the supporting sleeve, the front clamping shaft and the rear clamping shaft are rotatably connected through a rotating shaft, a limiting sleeve is fixedly arranged at one side, which is far away from the central rod, of the outer surface of the rotating shaft, one end, which is far away from the rotating shaft, of the limiting sleeve is in edge contact with the upper surface of the supporting sleeve, a limiting bolt is inserted, a fixed rod is fixedly arranged inside the supporting table above the alarm, a lantern ring is fixedly arranged at one end of the fixed rod, which is far away from the supporting table, an electrified coil is fixedly arranged inside the lantern ring, the electrified coil is electrically connected with the alarm through a conducting wire, a ring rod is fixedly arranged at the bottom end of the supporting sleeve, an iron sleeve is fixedly sleeved at one side, which is close to the supporting sleeve, of the outer surface of the ring rod, the ring rod is sleeved inside the electrified coil, the gas cylinder comprises a gas storage cylinder, the gas storage cylinder is clamped inside the placing groove, a control head is connected and communicated with the top end of the gas storage cylinder, the control head is clamped inside the clamping ring, a fixed plate is fixedly arranged inside the control head, a gas outlet hole penetrating through the fixed plate is formed in the surface of the fixed plate, magnetic suction pads are fixedly arranged at two sides, which are far away from the gas storage, the touch block runs through the control head and extends to the outer side of the control head, and the touch block is located at one end outside the control head and is sleeved inside the semi-ring connecting groove.
Preferably, the connection part of the draft tube and the buffer chamber is rounded, and the cross section of the buffer chamber is conical.
Preferably, the cross-sectional shape of stop collar is the semicircle form, and the inboard fixed mounting of stop collar has the rubber pad.
Preferably, the width of the sealing ring groove is larger than that of the limiting ring groove, and the limiting ring groove and the sealing ring groove are concentric.
Preferably, the snap ring is rotatably connected inside the limit ring groove, the outer diameter of the snap ring is the same as the width of the limit ring groove, and the inner diameter of the snap ring is the same as the outer diameter of the control head.
Preferably, the cross-sectional shape of the touch block is a half-ring shape, and the thickness of the touch block is the same as that of the top block.
Compared with the prior art, the invention has the following beneficial effects: 1. this single crystal is protective gas replenishing device for vapor phase growth can break the balance of gravity through setting up the gas cylinder that the quality equals behind one of them gas cylinder air feed to can realize rotatoryly, and then can close the gas cylinder through touching piece and kicking block contact on the top, the gas cylinder of the other end is opened the gas cylinder through touching piece and kicking block contact in the bottom, thereby realizes incessant air feed, temporary problem of short of gas when solving among the prior art and switching the gas cylinder.
2. This protective gas replenishing device for single crystal vapor growth passes through from the electrical coil at the in-process loop bar that the gas cylinder descends, when the gas in the gas cylinder finishes using soon, can insert the electrical coil with the iron cover in, the magnetic flux of electrical coil increases, and wire transmission signal gives the alarm, can remind operating personnel to change the gas cylinder to the untimely problem of the bottle of taking a breath among the prior art has been solved.
3. This protective gas replenishing device for single crystal vapor growth can take place to remove the back through setting up two magnetism and inhale the pad and fix the baffle, has solved the easy landing of baffle after lacking the fixing and has leaded to the intermittent problem of air feed.
4. The protective gas supplementing device for single crystal vapor phase growth can be used for inserting the control head of the gas cylinder into the clamping ring by arranging the clamping ring and arranging the semi-ring connecting groove on the clamping ring, and meanwhile, the clamping connection can be realized by matching the semi-ring connecting groove with the touch block, so that the problem that the gas cylinder is not well connected with the clamping ring in the prior art is solved.
Drawings
FIG. 1 is a schematic view of the structure of the present invention.
FIG. 2 is a schematic view of the connection of the support mechanism of the present invention.
FIG. 3 is a schematic half-sectional view of the structure at B in FIG. 1 according to the present invention.
FIG. 4 is an enlarged view of the invention at A in FIG. 2.
FIG. 5 is a schematic view of the connection of the support sleeve of the present invention.
FIG. 6 is a schematic view of a half section of a buffer chamber according to the present invention.
FIG. 7 is an enlarged, semi-sectional view of the structure of FIG. 5 at C.
Fig. 8 is a schematic semi-sectional view of the gas cylinder of the present invention.
Wherein, the buffer chamber-1, the draft tube-2, the sealing plate-3, the connecting mechanism-4, the supporting mechanism-5, the alarm mechanism-6, the gas cylinder-7, the limit ring groove-301, the sealing ring groove-302, the limit block-303, the top block-304, the ring plate-401, the through hole-402, the snap ring-403, the semi-ring connecting groove-404, the center rod-501, the support sleeve-502, the support table-503, the placing groove-504, the clamping shaft-505, the rotating shaft-506, the limit sleeve-507, the limit bolt-508, the rubber pad-509, the alarm-601, the fixed rod-602, the lantern ring-603, the electrified coil-604, the ring rod-605, the iron sleeve-606, the lead-607, the gas storage cylinder-701, the gas, Control head-702, fixing plate-703, air outlet-704, magnetic suction pad-705, baffle-706 and touch block-707.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
First embodiment, as shown in fig. 1 to 8, a shield gas replenishing apparatus for single crystal vapor phase growth includes a buffer chamber 1, a draft tube 2 connected to a front end of the buffer chamber 1 and penetrating therethrough, a portion of the draft tube 2 connected to the buffer chamber 1 being rounded, and the buffer chamber 1 having a tapered cross-sectional shape. Can guarantee through such setting that the gas that flows can be gentle, the back fixed mounting of surge chamber 1 has closing plate 3, closing plate 3's inside rotation is connected with coupling mechanism 4, closing plate 3's middle part fixed mounting has supporting mechanism 5, supporting mechanism 5's the inboard fixed mounting in bottom has alarm mechanism 6, gas cylinder 7 has been placed at supporting mechanism 5's top both ends, gas cylinder 7 and coupling mechanism 4 joint, spacing annular 301 has been seted up at closing plate 3's middle part, closing plate 3 is located the place ahead of spacing annular 301 and has seted up sealed annular 302, the width of sealed annular 302 is greater than the width of spacing annular 301, spacing annular 301 is concentric with sealed annular 302. The gas leakage of the sealing ring groove 302 can be limited as much as possible by the arrangement, the limiting blocks 303 are fixedly arranged at the topmost end and the bottommost end in the groove of the limiting ring groove 301, the top blocks 304 are fixedly arranged at two sides of the limiting blocks 303, the connecting mechanism 4 comprises a ring plate 401, the ring plate 401 is rotatably connected to the middle part of the sealing ring groove 302, through holes 402 are formed in two axial sides of the ring plate 401, a snap ring 403 is fixedly arranged at the outer part of the through hole 402 at the rear end of the ring plate 401, a semi-ring connecting groove 404 is formed in the center of the back surface of the snap ring 403, the supporting mechanism 5 comprises a central rod 501, the central rod 501 is fixedly arranged at the center of one end far away from the ring plate 401, the outer surface of the central rod 501 is sleeved on the supporting sleeve 502, a clamping sheet is fixed on the surface of the central, the rotation speed of the device can be reduced by the cards after the spring pieces are elastically deformed, the rotation speed of the gas cylinder can be reduced to a specified speed by setting a certain number of cards determined by calculation, so that the highest point is reached when one gas cylinder exhausts gas, the support sleeve 502 is rotatably connected with the central rod 501, the outer surfaces of the central rod 501, which are positioned at two sides of the support sleeve 502, are rotatably connected with the support table 503, the two sides of the upper surface of the support sleeve 502 are provided with the placing grooves 504, the two axial sides of the support sleeve 502, which are positioned at two sides of the central rod 501, are fixedly provided with the clamping shafts 505, the front clamping shaft 505 and the rear clamping shaft 505 are rotatably connected through the rotating shaft 506, one side, which is far away from the central rod 501, of the outer surface of the rotating shaft 506 is fixedly provided with the limit sleeve 507, the cross section of the limit sleeve 507 is semi-, one end of a limiting sleeve 507 far away from a rotating shaft 506 is in contact with the edge of the upper surface of a support sleeve 502, a limiting bolt 508 is inserted into the upper surface of the edge of the limiting sleeve 507, the limiting bolt 508 penetrates through the limiting sleeve 507 and the support sleeve 502 and extends to the lower part of the support sleeve 502, an alarm mechanism 6 comprises an alarm 601, the alarm 601 is fixedly installed on the inner side of a support table 503, a fixed rod 602 is fixedly installed inside the support table 503 and above the alarm 601, one end of the fixed rod 602 far away from the support table 503 is fixedly provided with a lantern ring 603, an electrified coil 604 is fixedly installed inside the lantern ring 603, the electrified coil 604 is electrically connected with the alarm 601 through a lead 607, a ring rod 605 is fixedly installed at the bottom end of the support sleeve 502, an iron sleeve 606 is fixedly sleeved on one side of the outer surface of the ring rod 605 close to the support sleeve 502, magnetic flux can be increased through, the alarm 601 starts buzzing, the ring rod 605 is sleeved inside the electrified coil 604, the gas cylinder 7 comprises a gas storage cylinder 701, the gas storage cylinder 701 is clamped inside the placing groove 504, the top end of the gas storage cylinder 701 is connected with and penetrates through the control head 702, the clamping ring 403 is rotatably connected inside the limiting ring groove 301, the outer diameter of the clamping ring 403 is the same as the width of the limiting ring groove 301, and the inner diameter of the clamping ring 403 is the same as the outer diameter of the control head 702. Through the stability that snap ring 403 and control head 702 are connected can be guaranteed through such setting, can guarantee simultaneously that snap ring 403 can rotate in spacing annular groove 301, control head 702 joint is in the inside of snap ring 403, the inside fixed mounting of control head 702 has fixed plate 703, venthole 704 that runs through fixed plate 703 is seted up on the surface of fixed plate 703, the both sides fixed mounting that the one end that fixed plate 703 was kept away from gas storage cylinder 701 is located venthole 704 has magnetic suction pad 705, sliding connection has baffle 706 between two magnetic suction pads 705, the one end fixed mounting that baffle 706 was kept away from fixed plate 703 has touch block 707, touch block 707 runs through control head 702 and extends to the outside of control head 702, the cross sectional shape of touch block 707 is the semiannular, the thickness of touch block 707 is the same with the thickness of kicking block 304. Through the arrangement, the top block 304 can be ensured to be pressed to the touch block 707, and the touch block 707 is positioned outside the control head 702, and one end of the touch block 707 is sleeved inside the half-ring connecting groove 404.
When the gas cylinder is used, two full-gas cylinders 7 are placed in the placing groove 504, the control head 702 is inserted into the clamping ring 403, the rotary support sleeve 502 rotates clockwise by ninety degrees, the touch block 707 in the control head 702 on the left side can be jacked up through the top block 304, the touch block 707 extrudes the baffle 706, the baffle 706 is pushed to be separated from the magnetic suction pad 705 on one end and simultaneously contacts with the magnetic suction pad 705 on the other end, the gas outlet hole 704 can be opened, protective gas can be discharged into the buffer chamber 1 from the gas storage cylinder 701, the support sleeve 502 is placed to ensure that the two ends are balanced, after the gas cylinder is used for a period of time, the highest point is reduced due to the loss of gas in the used gas cylinder 7, finally the gas cylinder 7 rises, when the top block 304 reversely jacks up the touch block 707 to seal the gas cylinder 7, the gas cylinder 7 on the other end is just opened to be exhausted, and the buffer chamber 1 can be continuously supplied with gas periodically, the loop bar 605 passes through from the electrified coil 604 in the in-process that the gas cylinder 7 descends, and when the gas in the gas cylinder 7 was used up soon, can insert the electrified coil 604 with the iron cover 606 through supporting the rotation of cover 502, the magnetic flux of electrified coil 604 increases, and wire 607 transmission signal gives alarm 601, can remind operating personnel to change gas cylinder 7.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims (6)

1. A protective gas replenishing apparatus for single crystal vapor phase growth, comprising a buffer chamber (1), characterized in that: the front end of the buffer chamber (1) is connected with and penetrates through the flow guide pipe (2), the sealing plate (3) is fixedly mounted at the back of the buffer chamber (1), the connecting mechanism (4) is rotatably connected inside the sealing plate (3), the supporting mechanism (5) is fixedly mounted in the middle of the sealing plate (3), the alarm mechanism (6) is fixedly mounted on the inner side of the bottom end of the supporting mechanism (5), the gas cylinders (7) are placed at two ends above the supporting mechanism (5), and the gas cylinders (7) are clamped with the connecting mechanism (4);
a limiting ring groove (301) is formed in the middle of the sealing plate (3), a sealing ring groove (302) is formed in the front of the limiting ring groove (301) of the sealing plate (3), limiting blocks (303) are fixedly mounted at the topmost end and the lowest end in the groove of the limiting ring groove (301), and ejector blocks (304) are fixedly mounted on two sides of each limiting block (303);
the connecting mechanism (4) comprises a ring plate (401), the ring plate (401) is rotatably connected to the middle of the sealing ring groove (302), through holes (402) are formed in two axial sides of the ring plate (401), a clamping ring (403) is fixedly installed at the rear end of the ring plate (401) and located outside the through holes (402), and a semi-ring connecting groove (404) is formed in the center of one end, far away from the ring plate (401), of the clamping ring (403);
the supporting mechanism (5) comprises a central rod (501), the central rod (501) is fixedly installed in the center of one end, far away from the ring plate (401), of the sealing plate (3), a supporting sleeve (502) is sleeved on the outer surface of the central rod (501), the supporting sleeve (502) is rotatably connected with the central rod (501), and a supporting table (503) is rotatably connected to the outer surface, located on the two sides of the supporting sleeve (502), of the central rod (501);
the supporting sleeve is characterized in that placing grooves (504) are formed in two sides of the upper surface of the supporting sleeve (502), clamping shafts (505) are fixedly mounted on two sides, located on a central rod (501), of the two axial sides of the supporting sleeve (502), the front clamping shaft and the rear clamping shaft (505) are rotatably connected through a rotating shaft (506), a limiting sleeve (507) is fixedly mounted on one side, away from the central rod (501), of the outer surface of the rotating shaft (506), one end, away from the rotating shaft (506), of the limiting sleeve (507) is in edge contact with the upper surface of the supporting sleeve (502), a limiting bolt (508) is inserted into the upper surface of the edge of the limiting sleeve (507), and the limiting bolt (508) penetrates through the limiting sleeve (507) and the supporting sleeve (502) and extends to the lower;
the alarm mechanism (6) comprises an alarm (601), the alarm (601) is fixedly installed on the inner side of a supporting table (503), a fixing rod (602) is fixedly installed above the alarm (601) inside the supporting table (503), one end, far away from the supporting table (503), of the fixing rod (602) is fixedly installed with a lantern ring (603), an electrified coil (604) is fixedly installed inside the lantern ring (603), the electrified coil (604) is electrically connected with the alarm (601) through a wire (607), a ring rod (605) is fixedly installed at the bottom end of a supporting sleeve (502), an iron sleeve (606) is fixedly sleeved on one side, close to the supporting sleeve (502), of the outer surface of the ring rod (605), and the ring rod (605) is sleeved inside the electrified coil (604);
the gas cylinder (7) comprises a gas cylinder (701), the gas cylinder (701) is clamped inside a placement groove (504), a control head (702) is connected and penetrated at the top end of the gas cylinder (701), the control head (702) is clamped inside a clamping ring (403), a fixing plate (703) is fixedly installed inside the control head (702), an air outlet (704) penetrating through the fixing plate (703) is formed in the surface of the fixing plate (703), magnetic suction pads (705) are fixedly installed on two sides of the air outlet (704) at one end, far away from the gas cylinder (701), of the fixing plate (703), a baffle (706) is connected between the two magnetic suction pads (705) in a sliding mode, a touch block (707) is fixedly installed at one end, far away from the fixing plate (703), of the baffle (706), the touch block (707) penetrates through the control head (702) and extends to the outer side of the control head (702), and the touch block (707) is located at one end, outside the control head (702), and is sleeved inside the semi.
2. A protective gas supplying apparatus for vapor phase growth of a single crystal according to claim 1, wherein: the connection part of the draft tube (2) and the buffer chamber (1) is rounded, and the section of the buffer chamber (1) is conical.
3. A protective gas supplying apparatus for vapor phase growth of a single crystal according to claim 1, wherein: the cross-sectional shape of stop collar (507) is the semicircle form, and rubber pad (509) is fixed mounting to the inboard of stop collar (507).
4. A protective gas supplying apparatus for vapor phase growth of a single crystal according to claim 1, wherein: the width of the sealing ring groove (302) is larger than that of the limiting ring groove (301), and the limiting ring groove (301) and the sealing ring groove (302) are concentric.
5. A protective gas supplying apparatus for vapor phase growth of a single crystal according to claim 1, wherein: the clamping ring (403) is rotatably connected inside the limiting ring groove (301), the outer diameter of the clamping ring (403) is the same as the width of the limiting ring groove (301), and the inner diameter of the clamping ring (403) is the same as the outer diameter of the control head (702).
6. A protective gas supplying apparatus for vapor phase growth of a single crystal according to claim 1, wherein: the cross-sectional shape of the touch block (707) is a half-ring shape, and the thickness of the touch block (707) is the same as that of the top block (304).
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JP2019143672A (en) * 2018-02-19 2019-08-29 株式会社タツノ Hydrogen charger
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Publication number Priority date Publication date Assignee Title
JPH10259899A (en) * 1997-03-19 1998-09-29 Yamato Sanki Nishi:Kk Gas supply abnormality alarm device
CN203200370U (en) * 2013-04-17 2013-09-18 浙江昀丰新能源科技有限公司 Crystal growth cooling device
CN107218507A (en) * 2017-07-17 2017-09-29 力合科技（湖南）股份有限公司 A kind of air feed equipment and mobile laboratory
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CN210601030U (en) * 2019-10-09 2020-05-22 潍坊众成自动化设备有限公司 Prevent gaseous partial shipment device of special type that emptys

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Patentee before: Yantai Qingzi New Material Technology Co.,Ltd.