CN203171410U - Ultra-precision machining device for hard-and-brittle-material parts and for restraining abrasive particle streams - Google Patents

Ultra-precision machining device for hard-and-brittle-material parts and for restraining abrasive particle streams Download PDF

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Publication number
CN203171410U
CN203171410U CN 201320068477 CN201320068477U CN203171410U CN 203171410 U CN203171410 U CN 203171410U CN 201320068477 CN201320068477 CN 201320068477 CN 201320068477 U CN201320068477 U CN 201320068477U CN 203171410 U CN203171410 U CN 203171410U
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China
Prior art keywords
polishing tool
tool head
abrasive
abrasive flow
abrasive particle
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Withdrawn - After Issue
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CN 201320068477
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Chinese (zh)
Inventor
袁巧玲
孙建辉
周海清
单晓杭
金旭
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Zhejiang University of Technology ZJUT
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Zhejiang University of Technology ZJUT
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Abstract

Provided is an ultra-precision machining device for hard-and-brittle-material parts and for restraining abrasive particle streams. A set screw is installed in a center hole of a fixing base in a sleeved mode, a spring is arranged outside the set screw in a sleeved mode, the other end of the set screw is connected with a polishing tool head, and tightly presses the spring, the fixing base is fixed with an actuator, a counter bore is formed above the center hole of the fixing base, a force sensor is installed in the counter bore, a rubber ring is installed between the top end of the set screw and the force sensor, a workpiece is fixed on a recovery base, the polishing tool head is cylindrical, a threaded hole is formed in the center of the upper end face of the polishing tool head, a blind hole is formed from the lower end face of the polishing tool head to form an abrasive particle stream containing chamber, an abrasive material feeding hole is formed in the side face of the polishing tool head, the abrasive material feeding hole is communicated with the abrasive particle stream containing chamber, a boss which is used for installing the workpiece is arranged in the center of the recovery base, an abrasive particle stream recovery groove is formed in the periphery of the boss, a circle of abrasive particle stream baffle is arranged on the periphery of the abrasive particle stream recovery groove, and the abrasive particle stream baffle is higher than the upper surface of the workpiece. The ultra-precision machining device for the hard-and-brittle-material parts and for restraining the abrasive particle streams is high in accuracy and efficiency, and low in damage and cost.

Description

The constraint abrasive Flow ultra-precision processing apparatus of hard brittle material part
Technical field
The utility model relates to ultra-precision processing apparatus.
Background technology
Hard brittle material such as optical glass, engineering ceramics has very good mechanical properties such as hardness height, wearability and corrosion stability are good and unique optical property, its machining accuracy and surface quality require also more and more stricter, and the Ultraprecision Machining of hard brittle material part becomes one of active demand and challenging processing technique field of tool.
There is open defect in traditional mechanical polishing method at aspects such as the controlled removal of material, surface damage and working (machining) efficiencies, is difficult to satisfy the processing request of the low injured surface of high accuracy ultra-smooth, no longer is applicable to the ultraprecise processing of this type of hard brittle material.
The polishing processing that how to realize the high accuracy high quality and high efficiency is hard brittle material ultraprecise processing urgent problem.Adopt computer-controlled certainty polishing (CCOS) technology, by the removal function of determining, carry out the controlled polishing of pointwise, can obtain the high-quality finished surface of high accuracy, Kai Fa advanced polishing technology such as the polishing of computer control small abrasive nose on this basis, ion beam polishing, air bag polishing, abradant jet polishing, magnetorheological polishing and the polishing of magnetic jet etc. have represented the developing direction of Ultraprecise polished technology.But the air bag polishing clearance is limited, is difficult to remove for the high-frequency information that exists in the workpiece, and this also is ubiquitous phenomenon in the computer control optical surface forming technique.Ion beam polishing etc. can obtain high surface roughness, but material removing rate is extremely low, usually only for behind the glossings such as CMP, further reduce surface of the work damage layer, improve surface quality, and the processing cost height.Magnetorheological polishing is easy to generate the medium-high frequency error when effectively removing the low frequency face shape error, thereby worsens the image quality of optical system, and is particularly remarkable for the high energy-gathering system high-resolution of light laser detection system.On the other hand, magnetorheological device is complicated, need be at the different different magnetic flow liquids of workpiece material configuration, and processing cost is higher.Because abrasive flows does not have constraint, causes little abradant jet to be dispersed to surface of the work, is not the boundling of determining, therefore the machining accuracy of little abradant jet is on the low side.In addition, little abrasive jet causes machining damage easily to the mechanical shock of surface of the work, can not satisfy the actual needs of low damage optical element polishing.Magnetic jet polishing technology has reduced the angle of divergence of abrasive Flow, has potential unique advantage in the certainty of complicated surfaces such as the spill optical element of high steepness and inner chamber is precise polished.But the polishing of magnetic jet needs special magnetic flow liquid, and the same with magnetorheological polishing, processing cost is higher.
Summary of the invention
The utility model is at the deficiency that machining accuracy is lower, operating efficiency is lower, damage is big, cost is high of the polishing processing of existing hard brittle material part, the utility model proposes a kind of high accuracy, high efficiency, low damage, the constraint abrasive Flow ultra-precision processing apparatus of hard brittle material part cheaply.
The technical scheme that its technical problem that solves the utility model adopts is:
A kind of constraint abrasive Flow ultra-precision processing apparatus of hard brittle material part, comprise polishing tool head, spring, holding screw, the power sensor, holder, reclaim base and executing agency, described holding screw is sleeved in the holder centre bore, described spring housing is contained in outside the holding screw, the described holding screw other end is connected with polishing tool head and holddown spring, described holder and executing agency are fixed, there is counterbore described holder centre bore top, installing force sensor in the described counterbore, between described holding screw top and the power sensor rubber ring is installed, described workpiece is fixed on and reclaims on the base;
Described polishing tool head is column type, there is screwed hole at center, described polishing tool head upper surface, described polishing tool head is beaten blind hole and is formed the abrasive Flow cavity volume from the lower surface, there is the abrasive material charging hole described polishing tool head side, described abrasive material charging hole communicates with the abrasive Flow cavity volume, the tool heads of described polishing tool head for the insensitive elastomeric material of abrasive wear is made;
Described recovery base center has abrasive Flow accumulator tank, described accumulator tank to be with a circle abrasive Flow baffle plate outward for the boss of workpiece is installed around the described boss, described abrasive Flow baffle plate is higher than workpiece surface.
Further, there is abrasive Flow to reclaim outlet in the described accumulator tank, described abrasive Flow reclaims outlet and is connected with the charging aperture that reclaims pump by pipeline, the discharging opening of described recovery pump and the charging aperture of agitating device are connected, the discharging opening of described agitating device is connected with the charging aperture of charging pump, and the abrasive material charging hole of the discharge opening of described charging pump and polishing tool head upper surface is connected.Described Pressure gauge is installed between the connection tracheae of agitating device and feeding device, on described charging pump and the recovery pump flow regulator is arranged.
Further again, the lower surface was crushed on the surface of the work when described polishing tool head drove original state by executing agency.
Technical conceive of the present utility model is: polishing tool head adds an adjustable elastic pressure in advance by spring, and when the pressure that polishing tool does not have abrasive Flow or abrasive Flow in front was big inadequately, the polishing tool lower surface was crushed on the surface of the work; In case the abrasive Flow pressure in the polishing tool is greater than adding elastic pressure, polishing tool lower surface and surface of the work form a slit, and abrasive Flow flows out from this slit along the polishing tool end face, force abrasive particle that surface of the work is polished processing.Described power sensor can be measured the current location abrasive Flow to the pressure size of polishing tool head, configure the initial value of cell pressure, in the process when the sensor force value greater than when setting value, the actuating mechanism controls polishing tool head continues processing in current location, carries out the processing of the next position up to the power value again smaller or equal to setting value.
Abrasive Flow is under the constraint of polishing tool, changed the generation type of abrasive water-jet fully, need not can realize jet processing by minimum superfine nozzle, rubbing head is pressed to surface of the work during machining state, abrasive flows is under the constraint of polishing tool head, changed jet direction, flowed out along the tangential high speed with surface of the work by the polishing tool end surface.Using this method polishes and adds the processing mode that man-hour loose abrasive Flow normal direction is sprayed and change into the tangential abrasive Flow Machining mode of obligating, not only solved the instability problem at jet beam interface, and make abrasive particle move along surface of the work, strengthened the shear action of abrasive particle to surface of the work, the normal direction percussion of abrasive particle to surface of the work that weakened mainly is that the surface of the work material is removed in shearing and the scratching effect of abrasive Flow.Therefore, this method both can reduce impact injury, had stronger material again and removed ability.
Abrasive Flow can be recovered recycling by accumulator tank, has saved processing cost, has reduced environmental pollution.
The beneficial effects of the utility model are: high accuracy, high efficiency, low damage, low cost.
Description of drawings
Fig. 1 is a kind of constraint abrasive Flow ultra-precision processing apparatus schematic diagram of hard brittle material part.
Fig. 2 is the system principle schematic diagram.
The specific embodiment
Below in conjunction with accompanying drawing the utility model is further described.
See figures.1.and.2, a kind of constraint abrasive Flow ultra-precision processing apparatus of hard brittle material part, comprise polishing tool head 5, spring 4, holding screw 3, power sensor 13, holder 2, reclaim base 6 and executing agency 1, described holding screw 3 is sleeved in holder 2 centre bores, described spring 4 is sleeved on outside the holding screw 3, described holding screw 3 other ends and polishing tool head 5 are by being threaded and holddown spring 4, described holder 2 is fixing by bolt and executing agency 1, there is counterbore described holder 2 centre bores top, installing force sensor 13 in the described counterbore, between described holding screw 3 tops and the power sensor 13 rubber ring is installed, described workpiece 8 is fixed on by pin 7 and reclaims on the base 6.
Described polishing tool head 5 is column type, there is screwed hole at center, described polishing tool head 5 upper surface, described polishing tool head 5 is beaten blind hole and is formed the bigger abrasive Flow cavity volume 10 of diameter from the lower surface, there is abrasive material charging hole 11 described polishing tool head 5 sides, described abrasive material charging hole 11 communicates with abrasive Flow cavity volume 10, described polishing tool head 5 adopts to be made the insensitive elastomeric material of abrasive wear, described recovery base 6 centers are for installing the boss of workpiece, the abrasive Flow accumulator tank is arranged around the described boss, described accumulator tank is with a circle abrasive Flow baffle plate outward, described abrasive Flow baffle plate is higher than workpiece surface, there is abrasive Flow to reclaim outlet 9 in the described accumulator tank, described abrasive Flow reclaims outlet 9 and is connected with the charging aperture that reclaims pump 19 by pipeline 15, the charging aperture of the discharging opening of described recovery pump 19 and agitating device 18 is connected, the discharging opening of described agitating device 18 is connected with the charging aperture of charging pump 16, and the abrasive material charging hole 11 of the discharge opening of described charging pump 16 and polishing tool head upper surface is connected.Described Pressure gauge 17 is installed between the connection tracheae of agitating device 18 and feeding device 16, on described charging pump 16 and the recovery pump 18 flow regulator is arranged.
Further, be pressed on the surface of workpiece 8 by executing agency 1 its lower surface of control under described polishing tool head 5 original states, described power sensor 13 can be measured the current location abrasive Flow to the pressure size of polishing tool head, configure the initial value of cell pressure, in the process when the sensor force value greater than when setting value, the actuating mechanism controls polishing tool head continues processing in current location, carries out the processing of the next position up to the power value again smaller or equal to setting value.

Claims (3)

1. the constraint abrasive Flow ultra-precision processing apparatus of a hard brittle material part, it is characterized in that: comprise polishing tool head, spring, holding screw, the power sensor, holder, reclaim base and executing agency, described holding screw is sleeved in the holder centre bore, described spring housing is contained in outside the holding screw, the described holding screw other end is connected with polishing tool head and holddown spring, described holder and executing agency are fixed, there is counterbore described holder centre bore top, installing force sensor in the described counterbore, between described holding screw top and the power sensor rubber ring is installed, described workpiece is fixed on and reclaims on the base;
Described polishing tool head is column type, there is screwed hole at center, described polishing tool head upper surface, described polishing tool head is beaten blind hole and is formed the abrasive Flow cavity volume from the lower surface, there is the abrasive material charging hole described polishing tool head side, described abrasive material charging hole communicates with the abrasive Flow cavity volume, the tool heads of described polishing tool head for the insensitive elastomeric material of abrasive wear is made;
Described recovery base center has abrasive Flow accumulator tank, described accumulator tank to be with a circle abrasive Flow baffle plate outward for the boss of workpiece is installed around the described boss, described abrasive Flow baffle plate is higher than workpiece surface.
2. the constraint abrasive Flow ultra-precision processing apparatus of hard brittle material part as claimed in claim 1, it is characterized in that: have abrasive Flow to reclaim outlet in the described accumulator tank, described abrasive Flow reclaims outlet and is connected with the charging aperture that reclaims pump by pipeline, the discharging opening of described recovery pump and the charging aperture of agitating device are connected, the discharging opening of described agitating device is connected with the charging aperture of charging pump, and the abrasive material charging hole of the discharge opening of described charging pump and polishing tool head upper surface is connected;
Described Pressure gauge is installed between the connection tracheae of agitating device and feeding device, on described charging pump and the recovery pump flow regulator is arranged.
3. the constraint abrasive Flow ultra-precision processing apparatus of hard brittle material part as claimed in claim 1 or 2 is characterized in that: the lower surface was crushed on the surface of the work when described polishing tool head drove original state by executing agency.
CN 201320068477 2013-02-05 2013-02-05 Ultra-precision machining device for hard-and-brittle-material parts and for restraining abrasive particle streams Withdrawn - After Issue CN203171410U (en)

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Application Number Priority Date Filing Date Title
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103084961A (en) * 2013-02-05 2013-05-08 浙江工业大学 Restraint grain flow ultra-precision machining device of hard and brittle material part
CN104786128A (en) * 2015-02-03 2015-07-22 浙江工业大学 Precise fluid round disc polishing device for ultra-smooth surface based on three-phase abrasive particle flow
CN110153707A (en) * 2019-04-25 2019-08-23 孙树峰 A kind of spontaneous abrasive Flow complex machining device of laser-spraying liquid bunch and method

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103084961A (en) * 2013-02-05 2013-05-08 浙江工业大学 Restraint grain flow ultra-precision machining device of hard and brittle material part
CN104786128A (en) * 2015-02-03 2015-07-22 浙江工业大学 Precise fluid round disc polishing device for ultra-smooth surface based on three-phase abrasive particle flow
CN104786128B (en) * 2015-02-03 2017-03-15 浙江工业大学 Super-smooth surface precision fluid disk burnishing device based on three-phase abrasive Flow
CN110153707A (en) * 2019-04-25 2019-08-23 孙树峰 A kind of spontaneous abrasive Flow complex machining device of laser-spraying liquid bunch and method
CN110153707B (en) * 2019-04-25 2020-06-16 孙树峰 Laser-jet liquid beam autogenous abrasive flow combined machining device and method

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Granted publication date: 20130904

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