CN203164815U - Accelerating power supply for electron beam rapid prototyping manufacturing equipment - Google Patents

Accelerating power supply for electron beam rapid prototyping manufacturing equipment Download PDF

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CN203164815U
CN203164815U CN2013200690807U CN201320069080U CN203164815U CN 203164815 U CN203164815 U CN 203164815U CN 2013200690807 U CN2013200690807 U CN 2013200690807U CN 201320069080 U CN201320069080 U CN 201320069080U CN 203164815 U CN203164815 U CN 203164815U
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voltage
output terminal
resistance
accelerating potential
accelerating
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韦寿祺
黄小东
陆思恒
郭华艳
王伟
蒋思远
陆苇
黄海
黄地送
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Guilin Shida Electrical And Mechanical Technology Engineering Co Ltd
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Guilin Shida Electrical And Mechanical Technology Engineering Co Ltd
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Abstract

The utility model discloses an accelerating power supply for electron beam rapid prototyping manufacturing equipment. According to a technical route including power frequency alternating-current input, power-frequency transformer boosting, high-voltage rectification and filtering, high-voltage electron tube series regulation, and parallel stabilized-voltage output by zinc oxide piezo-resistors or stabilized-voltage diodes, equivalent resistance of the high-voltage electron tubes is controlled by outputting high-voltage negative feedback signals and current signals of stabilized-voltage element parallel branches, voltage stabilization is performed automatically, and the current of the stabilized-voltage element parallel branches is limited. The high-voltage electron tubes are used as series regulating tubes, the zinc oxide piezo-resistors or stabilized-voltage diodes are used as parallel stabilized-voltage elements, and accordingly a direct-current high-voltage power supply and a control method thereof are provided; and the power supply has the advantages of high regulating speed, small output high-voltage ripple and high voltage stabilization precision.

Description

Electron beam rapid shaping manufacturing equipment accelerating power source device
Technical field
The utility model relates to electron beam rapid shaping manufacturing equipment, is specially electron beam rapid shaping manufacturing equipment accelerating power source device.
Background technology
Electron beam rapid shaping manufacturing technology be adopt electron beam under the control of computing machine by the information of part section profile deposite metal powder selectively, and by piling up layer by layer, finish until the whole fusings of whole part, remove unnecessary powder at last and just obtain required three-dimensional objects.Compare with laser and beam-plasma rapid shaping, the electron beam rapid shaping has very significantly advantage, as energy utilization factor height, rapidoprint extensively, no reflection events, process velocity is fast, vacuum environment is pollution-free and operating cost is low etc.The electron beam rapid shaping is the desirable rapid shaping manufacturing technology of the complicated metal parts of high-performance, in fields such as Aero-Space, automobile and biomedicines vast potential for future development is arranged.And electron beam rapid shaping manufacturing equipment is a kind of high-tech product that combines multiple technologies such as physical vacuum, precision optical machinery, electronic technology, electron optics, High-Voltage Technology, computing machine and control technology, and accelerating power source is its critical component.Electron beam rapid shaping manufacturing equipment requires the control accuracy height to accelerating power source, and output high pressure ripple factor is little, and governing speed is fast, and the output voltage dynamic fluctuation is little.
The utility model content
Technical problem to be solved in the utility model is at the high performance requirements of electron beam rapid shaping manufacturing equipment to accelerating power source, a kind of electron beam rapid shaping manufacturing equipment accelerating power source device is provided, and it has the advantages that governing speed is fast, output high pressure ripple is little and the precision of voltage regulation is high.
For addressing the above problem, the utility model is achieved through the following technical solutions:
A kind of electron beam rapid shaping of the utility model manufacturing equipment accelerating power source device comprises line filter, thyristor soft start unit, high-tension transformer, 12 pulsating wave high-voltage rectifying unit, the high-voltage rectifying filter capacitor, high-voltage rectifying filter capacitor discharge resistance, output hv filtering inductance, the output high-voltage filtering capacitor, output high-voltage filtering capacitor discharge current-limiting resistance, the voltage stabilizing element parallel branch, the accelerating potential sample circuit, voltage stabilizing element parallel branch current sampling resistor, the electronic beam current sample resistance, high-voltage electrical tube, central control unit and accelerating potential regulator.
The input end of line filter links to each other with external power source, and output terminal links to each other with the elementary winding of high-tension transformer through thyristor soft start unit.The high-tension transformer secondary winding connects the input end of 12 pulsating wave high-voltage rectifying unit, is connected on the output terminal of 12 pulsating wave high-voltage rectifying unit after high-voltage rectifying filter capacitor and the parallel connection of high-voltage rectifying filter capacitor discharge resistance.
Output hv filtering inductance and output high-voltage filtering capacitor are formed the LC filtering circuit.Wherein exporting hv filtering inductance and the end that links to each other of output high-voltage filtering capacitor joins by the negative electrode that the output high-voltage filtering capacitor discharges behind the current-limiting resistance with electron gun, the other end of output hv filtering inductance is connected on the negative output terminal of 12 pulsating wave high-voltage rectifying unit, and the other end of output high-voltage filtering capacitor is then through joining with the anode of the earth and electron gun behind the electronic beam current sample resistance.
The voltage stabilizing element parallel branch is composed in series by a plurality of zinc oxide voltage dependent resistor (VDR)s or voltage stabilizing diode.The voltage stabilizing element parallel branch is with after voltage stabilizing element parallel branch current sampling resistor is connected, and is in parallel with the accelerating potential sample circuit again, and one of two parallel branches terminate at the output terminal of output high-voltage filtering capacitor discharge current-limiting resistance, and the other end links to each other with the earth.
The positive output end of the anode of high-voltage electrical tube and 12 pulsating wave high-voltage rectifying unit joins, and the negative electrode of high-voltage electrical tube joins by electronic beam current sample resistance and the earth.The outside constant-current supply of filament two terminations of high-voltage electrical tube connects outside constant voltage source between the screen grid of high-voltage electrical tube and its negative electrode.The grid of high-voltage electrical tube connects on the output terminal of accelerating potential regulator.
2 road analog input ends of central control unit connect the sampled signal output terminal of accelerating potential sample circuit, the sampled signal output terminal of electronic beam current sample resistance respectively.An output terminal of central control unit connects thyristor soft start unit.
5 road input ends of accelerating potential regulator connect the given signal output part of accelerating potential of central control unit, the given signal output part of electronic beam current of central control unit, the sampled signal output terminal of accelerating potential sample circuit, the sampled signal output terminal of voltage stabilizing element parallel branch current sampling resistor and the sampled signal output terminal of electronic beam current sample resistance respectively.
As improvement, above-mentioned electron beam rapid shaping manufacturing equipment accelerating power source device also further comprises the fault distinguishing circuit, and the input end of this fault distinguishing circuit connects sampled signal output terminal, the sampled signal output terminal of voltage stabilizing element parallel branch current sampling resistor and the sampled signal output terminal of accelerating potential sample circuit of electronic beam current sample resistance.The output terminal of fault distinguishing circuit connects accelerating potential regulator and central control unit.
In the such scheme, described accelerating potential regulator is mainly by 2 transportation amplifier IC1, IC2,3 diode D1~D3, and 1 voltage stabilizing diode Z1,11 resistance R 1~R11, and 1 voltage amplifier is formed.Wherein the given signal output part of the electronic beam current of central control unit is connected to the in-phase input end of operational amplifier IC2 by resistance R 6, the in-phase input end of transportation amplifier IC2 joins by resistance R 7 and the earth, and the sampled signal output terminal of electronic beam current sample resistance connects the inverting input of transportation amplifier IC2 by resistance R 5.Resistance R 8 two ends are connected to inverting input and the output terminal of transportation amplifier IC2 respectively, and the output terminal of transportation amplifier IC2 successively is connected to the inverting input of operational amplifier IC1 by voltage stabilizing diode Z1, diode D2 and resistance R 4.The given signal output part of the accelerating potential of central control unit is connected to the inverting input of operational amplifier IC1 together by resistance R 3 by the sampled signal output terminal of resistance R 2 and voltage stabilizing element parallel branch current sampling resistor by the sampled signal output terminal of resistance R 1, accelerating potential sample circuit.The in-phase input end of operational amplifier IC1 joins by R9 and the earth.The output terminal of fault distinguishing circuit is connected to the in-phase input end of operational amplifier IC1 through diode D3.After diode D2 and resistance R 10 were in parallel, the negative electrode of diode D2 connect the inverting input of operational amplifier IC1, and the anode of diode D2 connects the output terminal of operational amplifier IC1.The output terminal of operational amplifier IC1 is connected to the input end of voltage amplifier by resistance R 11, and the output terminal of voltage amplifier is the grid that the output terminal of accelerating potential regulator is connected to high-voltage electrical tube.
As further improvement, the given signal output part of electronic beam current of the sampled signal output terminal of above-mentioned electronic beam current sample resistance, central control unit and the output terminal of fault distinguishing circuit also are connected with the input end of electronic beam current regulator in the electron beam rapid shaping manufacturing equipment.
In the such scheme, the elementary winding of described high-tension transformer is triangle or star connection.One group of secondary winding of high-tension transformer is delta connection, and another group secondary winding is star connection, and the line magnitude of voltage of two groups of secondary winding is identical.
In the such scheme, described 12 pulsating wave high-voltage rectifying unit is composed in series by two three-phase high-voltage rectifier bridges, or is composed in parallel by paralleing reactor by two three-phase high-voltage rectifier bridges.
The utility model is at the high performance requirements of electron beam rapid shaping manufacturing equipment to accelerating power source, providing a kind of is that pipe is adjusted in series connection with the high-voltage electrical tube, be DC high-voltage power supply and the control method thereof that the parallel voltage-stabilizing element constitutes with zinc oxide voltage dependent resistor (VDR) or voltage stabilizing diode, its advantage is that the control system governing speed is fast, output high pressure ripple is little, the precision of voltage regulation is high;
Compared with prior art, innovative point of the present utility model is as follows:
1, being that pipe is adjusted in series connection with the high-voltage electrical tube, is the structure of the DC high-voltage power supply of parallel voltage-stabilizing element formation with zinc oxide voltage dependent resistor (VDR) or voltage stabilizing diode;
2, high pressure regulator is the proportional governor structure, and feedback signal is the current sampling signal of accelerating potential sampled signal and parallel voltage-stabilizing element legs;
3, high pressure regulator plays the effect of stable regulation output voltage when the accelerating power source output voltage does not reach the total voltage stabilizing value of parallel voltage-stabilizing element legs, reaches the effect of playing restriction parallel voltage-stabilizing element legs electric current after total voltage stabilizing value of parallel voltage-stabilizing element legs at the accelerating power source output voltage;
4, be feedback signal with the electronic beam current sampled signal, adopt by the maximum output current of negative feedback means to accelerating power source and limit, reach overcurrent protection function.
Description of drawings
Fig. 1 is the utility model electron beam rapid shaping manufacturing equipment accelerating power source device embodiment schematic diagram;
Fig. 2 is the schematic diagram of a kind of 12 pulsating wave high-voltage rectifying unit;
Fig. 3 is the schematic diagram of another kind of 12 pulsating wave high-voltage rectifying unit;
Fig. 4 is accelerating potential regulator schematic diagram;
Number in the figure is: 1, line filter; 2, thyristor soft start unit; 3, high-tension transformer; 4,12 pulsating wave high-voltage rectifying unit; 4-1, paralleing reactor; 5, high-voltage rectifying filter capacitor; 6, high-voltage rectifying filter capacitor discharge resistance; 7, output hv filtering inductance; 8, output high-voltage filtering capacitor; 9, output high-voltage filtering capacitor discharge current-limiting resistance; 10, voltage stabilizing element parallel branch; 11, accelerating potential sample circuit; 12, voltage stabilizing element parallel branch current sampling resistor; 13, electronic beam current sample resistance; 14, high-voltage electrical tube; 15, central control unit; 16, accelerating potential regulator; 16-1, voltage amplifier; 17, fault distinguishing circuit.
Embodiment
A kind of electron beam rapid shaping manufacturing equipment accelerating power source device, as shown in Figure 1, it is mainly by line filter 1, thyristor soft start unit 2, high- tension transformer 3,12 pulsating wave high-voltage rectifying unit 4, high-voltage rectifying filter capacitor 5, high-voltage rectifying filter capacitor discharge resistance 6, output hv filtering inductance 7, output high-voltage filtering capacitor 8, output high-voltage filtering capacitor discharge current-limiting resistance 9, voltage stabilizing element parallel branch 10, accelerating potential sample circuit 11, voltage stabilizing element parallel branch current sampling resistor 12, electronic beam current sample resistance 13, high-voltage electrical tube 14, central control unit 15, accelerating potential regulator 16, fault distinguishing circuit 17 is formed.
The input end of line filter 1 links to each other with external power source, and output terminal is connected with the input end of thyristor soft start unit 2.Be used for cutting off electromagnetic interference (EMI) EMI route of transmission.
The output terminal of thyristor soft start unit 2 links to each other with the elementary winding of high-tension transformer 3.Thyristor soft start unit 2 is used for suppressing the starting current of high-tension transformer 3 as high-tension transformer 3 service entrance switchs.During high-tension transformer 3 startings, the thyristor conduction angle increases to full conducting gradually.Break down or when shutting down, thyristor is in cut-off state.
The elementary winding of high-tension transformer 3 is triangle or star connection; One group of secondary winding of high-tension transformer 3 is delta connection, and another group secondary winding is star connection, and the line magnitude of voltage of two groups of secondary winding is identical.The elementary output with thyristor soft start unit 2 of high-tension transformer 3 links to each other, and secondary input with 12 pulsating wave high-voltage rectifying unit 4 links to each other.
12 pulsating wave high-voltage rectifying unit 4 can be composed in series (as shown in Figure 2) by two three-phase high-voltage rectifier bridges, also can compose in parallel (as shown in Figure 3) by paralleing reactor 4-1 by two three-phase high-voltage rectifier bridges.
Be connected on the output terminal of 12 pulsating wave high-voltage rectifying unit 4 after high-voltage rectifying filter capacitor 5 and 6 parallel connections of high-voltage rectifying filter capacitor discharge resistance.Wherein the effect of high-voltage rectifying filter capacitor discharge resistance 6 is discharge loop to be provided for high-voltage rectifying filter capacitor 5 for shutting down the back.
Output hv filtering inductance 7 and output high-voltage filtering capacitor 8 are formed the LC filtering circuit.Wherein exporting hv filtering inductance 7 joins with the negative electrode of the end that links to each other of output high-voltage filtering capacitor 8 by output high-voltage filtering capacitor discharge current-limiting resistance 9 backs and electron gun, the other end of output hv filtering inductance 7 is connected on the negative output terminal of 12 pulsating wave high-voltage rectifying unit 4, and the other end of output high-voltage filtering capacitor 8 then joins through the anode of electronic beam current sample resistance 13 backs with the earth and electron gun.
Voltage stabilizing element parallel branch 10 is composed in series by a plurality of zinc oxide voltage dependent resistor (VDR)s or voltage stabilizing silicon stack (being voltage stabilizing diode), and the accelerating power source maximum output voltage is determined by the voltage stabilizing element series connection voltage stabilizing value of voltage stabilizing element parallel branch 10.
Voltage stabilizing element parallel branch current sampling resistor 12 is connected in series with voltage stabilizing element parallel branch 10.Be used for measuring the current value that flows through voltage stabilizing element parallel branch 10, the voltage signal U that output is directly proportional with current value y
Voltage stabilizing element parallel branch 10 is with after voltage stabilizing element parallel branch current sampling resistor 12 is connected, be attempted by the output terminal of accelerating power source, the output terminal that is high-pressure side and output high-voltage filtering capacitor discharge current-limiting resistance 9 is that the negative electrode of electron gun joins, and low pressure end and the earth join.
Accelerating potential sample circuit 11 is attempted by the output terminal of accelerating power source, and namely the output terminal of high-pressure side and output high-voltage filtering capacitor discharge current-limiting resistance 9 is that the negative electrode of electron gun joins, and low pressure end and the earth join.Be used for measuring the accelerating potential value, output is proportional to the voltage signal U of accelerating potential a
Electronic beam current sample resistance 13 is for detection of the electron beam flow valuve, and this resistance two ends output is proportional to the voltage signal U of electronic beam current (electric current that contains voltage stabilizing element parallel branch and accelerating potential sample circuit) size e
The positive output end of the anode of high-voltage electrical tube 14 and 12 pulsating wave high-voltage rectifying unit 4 joins, and the negative electrode of high-voltage electrical tube 14 joins by electronic beam current sample resistance 13 and the earth; The outside constant-current supply of filament two terminations of high-voltage electrical tube 14, the indirect outside constant voltage source of the screen grid of high-voltage electrical tube 14 and negative electrode.The grid of high-voltage electrical tube 14 connects on the output terminal of accelerating potential regulator 16.The duty of high-voltage electrical tube 14 is by grid voltage U cControl.
Central control unit has 2 road analog input ends, and this 2 road analog input end connects the sampled signal output terminal 11 of accelerating potential sample circuit, the sampled signal output terminal of electronic beam current sample resistance 13 respectively.An output terminal of central control unit 15 connects thyristor soft start unit 2.Central control unit 15 is made up of industrial computer or Programmable Logic Controller PLC, central control unit 15 acting as in the accelerating power source system: 1, the soft start of control high-tension transformer 3; 2, numeral is set through digital-to-analog conversion DAC and is produced the given signal U of accelerating potential a *Send into accelerating potential regulator 16, the setting waveform for generation of accelerating potential comprises the setting of lifting slope and operating voltage; 3, numeral is set through digital-to-analog conversion DAC and is produced the given signal U of electronic beam current e *Send into accelerating potential regulator 16 and electronic beam current regulator, for generation of the setting waveform of electronic beam current, comprise the setting of lifting slope and work electronic beam current; 4, receive the accelerating potential sampled signal U that accelerating potential sample circuit 11 is sent here a, be used to indicate etc.; 5, receive the electronic beam current sampled signal U that electronic beam current sample resistance 13 is sent here e, be used to indicate etc.; 6, receive the output signal U of fault distinguishing circuit 17 Er, be used for interlock protection and the fault prompting of fault multiple protective, equipment other parts.
5 road input ends of accelerating potential regulator 16 receive the given signal U of accelerating potential of central control unit 15 respectively a *, central control unit 15 the given signal U of electronic beam current e *, accelerating potential sample circuit 11 sampled signal U a, voltage stabilizing element parallel branch current sampling resistor 12 sampled signal U ySampled signal U with electronic beam current sample resistance 13 eDuring operate as normal, when accelerating potential is lower than the voltage stabilizing value of voltage stabilizing element, the given signal U of accelerating potential a *With accelerating potential sampled signal U aCompare, deviation is by removing to control the grid of high-voltage electrical tube 14 after amplifying; When accelerating potential reaches the voltage stabilizing value of voltage stabilizing element, the given signal U of accelerating potential a *With accelerating potential sampled signal U aAfter comparing, again with voltage stabilizing element parallel branch current sampling signal U yCompare, total departure is by removing to control the grid of high-voltage electrical tube 14 after amplifying.In addition, when fault distinguishing circuit 17 has output, the output of accelerating potential regulator 16 will be blocked, and make high-voltage electrical tube 14 end.
In the utility model, described accelerating potential regulator 16 as shown in Figure 4, it is mainly by 2 transportation amplifier IC1, IC2,3 diode D1~D3, voltage stabilizing diode Z1,11 resistance R 1~R11, and voltage amplifier 16-1 forms.The given signal U of the electronic beam current of central control unit 15 wherein e *Be connected to the in-phase input end of operational amplifier IC2 by resistance R 6, the in-phase input end of transportation amplifier IC2 joins the sampled signal U of electronic beam current sample resistance 13 by resistance R 7 and the earth eThe inverting input that connects transportation amplifier IC2 by resistance R 5.Resistance R 8 two ends are connected to inverting input and the output terminal of transportation amplifier IC2 respectively, and the output terminal of transportation amplifier IC2 successively is connected to the inverting input of operational amplifier IC1 by voltage stabilizing diode Z1, diode D2 and resistance R 4.The given signal U of the accelerating potential of central control unit 15 a *Sampled signal U by resistance R 1, accelerating potential sample circuit 11 aSampled signal U by resistance R 2 and voltage stabilizing element parallel branch current sampling resistor 12 yBe connected to the inverting input of operational amplifier IC1 together by resistance R 3.The output signal U of fault distinguishing circuit 17 ErBe connected to the in-phase input end of operational amplifier IC1 through diode D3.The in-phase input end of operational amplifier IC1 joins by R9 and the earth.After diode D2 and resistance R 10 were in parallel, the negative electrode of diode D2 connect the inverting input of operational amplifier IC1, and the anode of diode D2 connects the output terminal of operational amplifier IC1.The output signal U of operational amplifier IC1 1Be connected to the input end of voltage amplifier 16-1, the output voltage U of voltage amplifier 16-1 by resistance R 11 cFor delivering to the grid of high-voltage electrical tube 14.
The input end of fault distinguishing circuit 17 receives the sampled signal U of electronic beam current sample resistance 13 e, voltage stabilizing element parallel branch current sampling resistor 12 sampled signal U ySampled signal U with accelerating potential sample circuit 11 aThe output signal U of fault distinguishing circuit 17 ErDeliver to accelerating potential regulator 16, central control unit 15 and electronic beam current regulator.Voltage signal U on the fault distinguishing circuit 17 detected electrons line sample resistances 13 eIf surpass the higher limit of setting and be judged to the electronic beam current over current fault; Fault distinguishing circuit 17 detects the voltage signal U on the voltage stabilizing element parallel branch current sampling resistor 12 yIf surpass the higher limit of setting and be judged to the voltage stabilizing element over current fault; Fault distinguishing circuit 17 detects the output voltage signal U that accelerates high-pressure sampling circuit 11 aIf, surpass the higher limit of setting and be judged to accelerating potential overvoltage fault, if being judged to accelerating power source, the negative kick variation of generation produces the effluve fault; Generation fault distinguishing circuit 17 output signal U of above-mentioned arbitrary fault ErAll become high level, and block the output of accelerating potential regulator 16 and electronic beam current regulator immediately; If produce the effluve fault, the output U of accelerating potential regulator 16, electronic beam current regulator and central control unit 15 a *And U e *Signal automatically terminates blockade after being blocked the 1-3 millisecond, and the realization high pressure is restarted automatically; Surpass set point number at setting-up time section inner high voltage discharge fault frequency and then be judged to " permanent fault ", this moment and the same mains supply power supply and the given signal of accelerating potential of cutting off of measure of handling other fault type, pending fault is manually restarted high pressure after getting rid of again.
The sampled signal U of electronic beam current sample resistance 13 in addition e, central control unit 15 the given signal U of electronic beam current e *Output signal U with fault distinguishing circuit 17 ErAlso be admitted to the input end of electronic beam current regulator in the electron beam rapid shaping manufacturing equipment respectively.
The control method of a kind of electron beam rapid shaping manufacturing equipment accelerating power source device of realizing based on above-mentioned accelerating power source device, adopt industrial frequency AC input → Industrial Frequency Transformer boost → adjustings → zinc oxide voltage dependent resistor (VDR)s are adjusted in 14 series connection of high-voltage rectifying filtering → high-voltage electrical tube or voltage stabilizing diode is the technology path that parallel voltage-stabilizing is exported, by exporting the negative-feedback signal U of high pressure aCurrent signal U with voltage stabilizing element parallel branch 10 yRemove to control the equivalent resistance of high-voltage electrical tube 14, carry out automatic voltage regulation, and the electric current of restriction voltage stabilizing element parallel branch 10.
The industrial frequency AC input is under central control unit 15 controls, and the conduction angle of thyristor soft start unit 2 thyristors increases to full conducting gradually by 0, enters operate as normal.
If Ua* is lower for the accelerating potential set-point, and the accelerating power source output voltage values is when being lower than the total voltage stabilizing value of voltage stabilizing element parallel branch 10, and voltage stabilizing element parallel branch 10 no currents pass through, this moment voltage stabilizing element parallel branch 10 current sampling signal U yBe zero, have only the given signal U of accelerating potential so a *With accelerating potential sampled signal U aCompare, deviation is by going to control the grid of high-voltage electrical tube 14, the output voltage values of accelerating power source and the proportional relation of accelerating potential set-point after amplifying; If accelerating potential set-point U a *Surpass some critical values, and accelerating potential reaches the voltage stabilizing value of voltage stabilizing element, have electric current to pass through in the voltage stabilizing element parallel branch this moment, so the given signal U of accelerating potential a *With accelerating potential sampled signal U aAfter comparing, again with voltage stabilizing element parallel branch 10 current sampling signal U yCompare, total departure is by removing to control the grid of high-voltage electrical tube 14 after amplifying, and the output voltage values of accelerating power source is stabilized in total voltage stabilizing value of voltage stabilizing element parallel branch 10, and the current value of voltage stabilizing element parallel branch 10 is proportional to accelerating potential set-point U a *With critical value U AN *Difference; If accelerating potential set-point U a *Equal critical value U AN *, the output voltage values of accelerating power source equals total voltage stabilizing value of voltage stabilizing element parallel branch 10, but the voltage stabilizing element parallel branch still no current pass through.Above-mentioned high pressure regulator employing ratio is regulated, and simple in structure, governing speed is fast.Non-normal working: 1, electronic beam current surpasses its set-point, and deviation surpasses the higher limit of setting, and by negative feedback, reduces the output of high pressure regulator 16 by the electronic beam current sampled signal, thus the restriction electronic beam current; When 2, fault distinguishing circuit 17 has output, the output of accelerating potential regulator 16 will be blocked, and make high-voltage electrical tube 14 end.
High pressure regulator 16 structures as shown in Figure 4, the given signal U of electronic beam current e *Deliver to the in-phase input end of operational amplifier IC2 by resistance R 6, the in-phase input end of operational amplifier IC2 joins electronic beam current sampled signal U by resistance R 7 and the earth eDeliver to the inverting input of operational amplifier IC2 by resistance R 5, resistance R 8 two ends are connected to inverting input and the output terminal of operational amplifier IC2, the output signal U of operational amplifier IC2 respectively 2Successively deliver to the inverting input of operational amplifier IC1 by voltage stabilizing diode Z1, diode D2 and resistance R 4.The output of operational amplifier IC2 For the ease of analyzing, make R7=R8, R5=R6, then During operate as normal, electronic beam current can not surpass setting value, i.e. U under the effect of electronic beam current regulator e≤ U e *So, U 2For just, diode D2 bears back-pressure and blocks U 2Deliver to the inverting input of operational amplifier IC1; If improper reason causes that electronic beam current surpasses setting value, i.e. U e>U e *, U 2Become negatively, work as U 2Negative value is enough big, and V falls in the voltage stabilizing of deduction voltage stabilizing diode Z1 Z1, i.e. (U 2-V Z1) signal delivers to the inverting input of operational amplifier IC1 by resistance R 4.
The given signal U of accelerating potential a *By resistance R 1, accelerating potential sampled signal U aBy resistance R 2, the current sampling signal U of voltage stabilizing element parallel branch yDeliver to the inverting input of operational amplifier IC1 together by resistance R 3.The in-phase input end of operational amplifier IC1 joins fault-signal U by resistance R 9 and the earth ErDeliver to the in-phase input end of operational amplifier IC1 by diode D3.The negative electrodes of diode D2 and resistance R 10 back diode D2 in parallel connect the inverting input of operational amplifier IC1, and the anode of diode D2 connects the output terminal of operational amplifier IC1, the output signal U of operational amplifier IC1 1Deliver to the control end of voltage amplifier 16-1, the output signal U of voltage amplifier 16-1 by resistance resistance R 11 cDeliver to the grid of high-voltage electrical tube 14.U when fault-signal is invalid ErBe low level, the blocking effect U of diode D3 ErThe accelerating potential regulator is not had effect, and voltage stabilizing diode Z1 and/or diode D1 are in blocking state, the output signal of operational amplifier IC1
Figure BDA00002826214300081
U in the formula a *, U aAnd U yCalculate with absolute value, make R1=R2=R3 for the ease of analysis, then
Figure BDA00002826214300082
If accelerating potential set-point U a *Lower, and the accelerating power source output voltage values is when being lower than the total voltage stabilizing value of voltage stabilizing element, voltage stabilizing element parallel branch 10 no currents pass through, i.e. U y=0, so
Figure BDA00002826214300083
U 1Be variable negative voltage, have only the given signal U of accelerating potential in the high pressure regulator 3 a *With accelerating potential sampled signal U aCompare, deviation is by removing to control the grid of high-voltage electrical tube 14, the output voltage values of accelerating power source and accelerating potential set-point U after amplifying a *Proportional relation.If accelerating potential set-point U a *Surpass some critical value U AN *, and accelerating potential reaches total voltage stabilizing value of voltage stabilizing element, have electric current to pass through in the voltage stabilizing element parallel branch 10 this moment, i.e. U y≠ 0, so U 1Be variable negative voltage, the given signal U of accelerating potential a *With accelerating potential sampled signal U aAfter comparing, again with voltage stabilizing element parallel branch current sampling signal U yCompare, total departure is by removing to control the grid of high-voltage electrical tube 14 after amplifying, and the output voltage values of accelerating power source is stabilized in total voltage stabilizing value of voltage stabilizing element parallel branch, accelerating potential sampled signal U aBe fixed value U AN, the current value of voltage stabilizing element parallel branch 10 is proportional to accelerating potential set-point U a *With critical value U AN *Difference.If accelerating potential set-point U a *Equal critical value U AN *, the output voltage values of accelerating power source equals total voltage stabilizing value of voltage stabilizing element parallel branch, but voltage stabilizing element parallel branch 10 still no current pass through,
Figure BDA00002826214300085
U 1Be variable negative voltage; If U 2For bearing and reached the voltage stabilizing value of Z1, at this moment U 1 = - R 11 R 1 ( U a * - U a - U y ) + R 11 R 4 ( U 2 - V Z 1 ) Or U 1 = - R 11 R 1 ( U a * - U a ) + R 11 R 4 ( U 2 - V Z 1 ) , U in the formula a *, U a, U y, U 2And V Z1Calculate U with absolute value 1Be variable negative voltage, because resistance R 4 is much smaller than resistance R 1, R2 and R3, signal (U 2-V Z1) form by negative feedback, make U 2Negative maximal value is limited in V Z1Near; In case fault-signal is effective, U ErBe positive level, U ErNamely deliver to the in-phase input end of IC1 by D3, under the effect of D2, IC1 becomes voltage follower and exports positive level, U 1Be timing, the negative maximum voltage signal of voltage amplifier 16-1 output, high-voltage electrical tube 14 is cut off.
As improvement, the control method of above-mentioned electron beam rapid shaping manufacturing equipment accelerating power source device also further comprises emergency protection control, i.e. voltage signal U on the fault distinguishing circuit 17 detected electrons line sample resistances 13 eIf surpass the higher limit of setting and be judged to the electronic beam current over current fault.Fault distinguishing circuit 17 detects the voltage signal U on the voltage stabilizing element parallel branch current sampling resistor 12 yIf surpass the higher limit of setting and be judged to voltage stabilizing element parallel branch 10 over current faults.Fault distinguishing circuit 17 detects the output voltage signal that accelerates high-pressure sampling circuit 11, if be judged to accelerating potential overvoltage fault above the higher limit of setting, is judged to accelerating power source generation effluve fault if the negative kick of generation changes.The generation fault distinguishing circuit output signal U of above-mentioned arbitrary fault ErAll become high level, and block the output of accelerating potential regulator 16 and electronic beam current regulator immediately.Fault distinguishing circuit 17 output signals are sent to central control unit 15 simultaneously, are used for the interlock protection of fault demonstration and other control module of electron beam rapid shaping manufacturing equipment.If produce the effluve fault, the output of accelerating potential regulator 16 and electronic beam current regulator, the output signal U of central control unit 15 a *And U e *After being blocked the 1-2 millisecond simultaneously, automatically terminate blockade, the realization high pressure is restarted automatically.Surpass set point number at setting-up time section inner high voltage discharge fault frequency and then be judged to " permanent fault ", manually restart high pressure with the same mains supply power supply and the given signal of cutting off of measure of handling other fault type, pending fault again after getting rid of this moment.

Claims (6)

1. electron beam rapid shaping manufacturing equipment accelerating power source device is characterized in that: comprise line filter (1), thyristor soft start unit (2), high-tension transformer (3), 12 pulsating wave high-voltage rectifying unit (4), high-voltage rectifying filter capacitor (5), high-voltage rectifying filter capacitor discharge resistance (6), output hv filtering inductance (7), output high-voltage filtering capacitor (8), output high-voltage filtering capacitor discharge current-limiting resistance (9), voltage stabilizing element parallel branch (10), accelerating potential sample circuit (11), voltage stabilizing element parallel branch current sampling resistor (12), electronic beam current sample resistance (13), high-voltage electrical tube (14), central control unit (15) and accelerating potential regulator (16);
The input end of line filter (1) links to each other with external power source, and the elementary winding with high-tension transformer (3) links to each other output terminal through thyristor soft start unit (2); High-tension transformer (3) secondary winding connects the input end of 12 pulsating wave high-voltage rectifying unit (4), is connected on the output terminal of 12 pulsating wave high-voltage rectifying unit (4) after high-voltage rectifying filter capacitor (5) and high-voltage rectifying filter capacitor discharge resistance (6) parallel connection;
Output hv filtering inductance (7) and output high-voltage filtering capacitor (8) are formed the LC filtering circuit; Wherein export hv filtering inductance (7) and the end that links to each other of output high-voltage filtering capacitor (8) by output high-voltage filtering capacitor discharge current-limiting resistance (9) after and the negative electrode of electron gun join, the other end of output hv filtering inductance (7) is connected on the negative output terminal of 12 pulsating wave high-voltage rectifying unit (4), and the anode that the other end of output high-voltage filtering capacitor (8) then passes through electronic beam current sample resistance (13) back and the earth and electron gun joins;
Voltage stabilizing element parallel branch (10) is composed in series by a plurality of zinc oxide voltage dependent resistor (VDR)s or voltage stabilizing diode, voltage stabilizing element parallel branch (10) is with after voltage stabilizing element parallel branch current sampling resistor (12) is connected, in parallel with accelerating potential sample circuit (11) again, one of two parallel branches terminate at the output terminal of output high-voltage filtering capacitor discharge current-limiting resistance (9), and the other end links to each other with the earth;
The positive output end of the anode of high-voltage electrical tube (14) and 12 pulsating wave high-voltage rectifying unit (4) joins, and the negative electrode of high-voltage electrical tube (14) joins by electronic beam current sample resistance (13) and the earth; The outside constant-current supply of filament two terminations of high-voltage electrical tube (14), the indirect outside constant voltage source of the screen grid of high-voltage electrical tube (14) and its negative electrode; The grid of high-voltage electrical tube (14) connects on the output terminal of accelerating potential regulator (16);
Central control unit has 2 road analog input ends to connect the sampled signal output terminal of accelerating potential sample circuit (11) and the sampled signal output terminal (13) of electronic beam current sample resistance respectively; An output terminal of central control unit (15) connects thyristor soft start unit (2);
5 road input ends of accelerating potential regulator (16) connect the given signal output part of accelerating potential of central control unit (15), the given signal output part of electronic beam current of central control unit (15), the sampled signal output terminal of accelerating potential sample circuit (11), the sampled signal output terminal of voltage stabilizing element parallel branch current sampling resistor (12) and the sampled signal output terminal of electronic beam current sample resistance (13) respectively.
2. electron beam rapid shaping manufacturing equipment accelerating power source device according to claim 1, it is characterized in that: also further comprise fault distinguishing circuit (17), the input end of this fault distinguishing circuit (17) connects sampled signal output terminal, the sampled signal output terminal of voltage stabilizing element parallel branch current sampling resistor (12) and the sampled signal output terminal of accelerating potential sample circuit (11) of electronic beam current sample resistance (13); The output terminal of fault distinguishing circuit (17) connects accelerating potential regulator (16) and central control unit (15).
3. electron beam rapid shaping manufacturing equipment accelerating power source device according to claim 2, it is characterized in that: described accelerating potential regulator (16) is mainly by 2 transportation amplifier IC1, IC2,3 diode D1~D3, voltage stabilizing diode Z1,11 resistance R 1~R11, and voltage amplifier (16-1) is formed; Wherein
The given signal output part of electronic beam current of central control unit (15) is connected to the in-phase input end of operational amplifier IC2 by resistance R 6, the in-phase input end of transportation amplifier IC2 joins by resistance R 7 and the earth, and the sampled signal output terminal of electronic beam current sample resistance (13) connects the inverting input of transportation amplifier IC2 by resistance R 5; Resistance R 8 two ends are connected to inverting input and the output terminal of transportation amplifier IC2 respectively, and the output terminal of transportation amplifier IC2 successively is connected to the inverting input of operational amplifier IC1 by voltage stabilizing diode Z1, diode D2 and resistance R 4;
The given signal output part of accelerating potential of central control unit (15) is connected to the inverting input of operational amplifier IC1 together by resistance R 3 by the sampled signal output terminal of resistance R 2 and voltage stabilizing element parallel branch current sampling resistor (12) by the sampled signal output terminal of resistance R 1, accelerating potential sample circuit (11); The in-phase input end of operational amplifier IC1 joins by R9 and the earth; The output terminal of fault distinguishing circuit (17) is connected to the in-phase input end of operational amplifier IC1 through diode D3; After diode D2 and resistance R 10 were in parallel, the negative electrode of diode D2 connect the inverting input of operational amplifier IC1, and the anode of diode D2 connects the output terminal of operational amplifier IC1; The output terminal of operational amplifier IC1 is connected to the input end of voltage amplifier (16-1) by resistance R 11, and the output terminal of voltage amplifier (16-1) is the grid that the output terminal of accelerating potential regulator (16) is connected to high-voltage electrical tube.
4. according to the described electron beam rapid shaping of claim 2 manufacturing equipment accelerating power source device, it is characterized in that: the given signal output part of electronic beam current of the sampled signal output terminal of electronic beam current sample resistance (13), central control unit (15) and the output terminal of fault distinguishing circuit (17) also are connected with the input end of electronic beam current regulator (19) in the electron beam rapid shaping manufacturing equipment.
5. electron beam rapid shaping manufacturing equipment accelerating power source device according to claim 1, it is characterized in that: the elementary winding of described high-tension transformer (3) is triangle or star connection; One group of secondary winding of high-tension transformer (3) is delta connection, and another group secondary winding is star connection, and the line magnitude of voltage of two groups of secondary winding is identical.
6. electron beam rapid shaping manufacturing equipment accelerating power source device according to claim 1, it is characterized in that: described 12 pulsating wave high-voltage rectifying unit (4) is composed in series by two three-phase high-voltage rectifier bridges, or is composed in parallel by paralleing reactor (4-1) by two three-phase high-voltage rectifier bridges.
CN2013200690807U 2013-02-06 2013-02-06 Accelerating power supply for electron beam rapid prototyping manufacturing equipment Withdrawn - After Issue CN203164815U (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103235626A (en) * 2013-02-06 2013-08-07 桂林狮达机电技术工程有限公司 Accelerator power supply device of rapid prototyping manufacturing equipment for electron beams and control method of accelerator power supply device
CN105140916A (en) * 2015-09-06 2015-12-09 桂林电子科技大学 Electronic curtain accelerating power source apparatus
CN110461506A (en) * 2017-01-17 2019-11-15 信实精密电子有限公司 Charged particle beam control during additive layer manufacture

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103235626A (en) * 2013-02-06 2013-08-07 桂林狮达机电技术工程有限公司 Accelerator power supply device of rapid prototyping manufacturing equipment for electron beams and control method of accelerator power supply device
CN103235626B (en) * 2013-02-06 2014-12-31 桂林狮达机电技术工程有限公司 Accelerator power supply device of rapid prototyping manufacturing equipment for electron beams and control method of accelerator power supply device
CN105140916A (en) * 2015-09-06 2015-12-09 桂林电子科技大学 Electronic curtain accelerating power source apparatus
CN110461506A (en) * 2017-01-17 2019-11-15 信实精密电子有限公司 Charged particle beam control during additive layer manufacture
US11318555B2 (en) 2017-01-17 2022-05-03 Reliance Rg Limited Charged particle beam control during additive layer manufacture

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