CN203140244U - Coating system - Google Patents
Coating system Download PDFInfo
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- CN203140244U CN203140244U CN 201320135864 CN201320135864U CN203140244U CN 203140244 U CN203140244 U CN 203140244U CN 201320135864 CN201320135864 CN 201320135864 CN 201320135864 U CN201320135864 U CN 201320135864U CN 203140244 U CN203140244 U CN 203140244U
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- Prior art keywords
- waste liquid
- coating
- liquid pool
- coating system
- platform
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Abstract
The utility model provides a coating system comprising a shower nozzle, a pre-coating platform, a waste reservoir and a coating platform, wherein the pre-coating platform, the waste reservoir and the coating platform are sequentially arranged; the shower nozzle can move to the upper part of the coating platform from the upper part of the pre-coating platform; the pre-coating platform comprises a mounting platform, a pre-coating plate and a scraper; the pre-coating plate is arranged on the upper surface of the mounting platform; the scraper can move to the other end from one end of the pre-coating plate; and a first baffle plate extending upwards is arranged at the other end of the pre-coating plate. A light-sensitive lacquer can be prevented from being left on the edge of the pre-coating plate when the light-sensitive lacquer on the pre-coating plate is scrapped by the scraper by providing the first baffle plate on the pre-coating plate. Thus, the light-sensitive lacquer can be prevented from being absorbed inside a vacuum pipeline of a vacuum-pumping system.
Description
Technical field
The utility model relates to the prize manufacturing equipment of film of LCD, especially, relates to used coating system in the described manufacturing equipment.
Background technology
Shown in Fig. 1 and Fig. 2 is color film (that is, Color Filter, the schematic diagram of producing in the LCD of used coating system in the time of CF).Wherein, Fig. 1 is the front view schematic diagram of coating system, and Fig. 2 is the vertical view of the coating system shown in Fig. 1.This coating system comprises shower nozzle 10 and the pre-coating platform 20 that is arranged in order, waste liquid pool 30 and coating platform 50, shower nozzle 10 can move to the top of described coating platform from the top of pre-coating platform 20, and pre-coating platform 20 comprises mounting platform 21, be arranged on the precoated plate 22 on these mounting platform 21 upper surfaces and can move to the scraper (not shown) of the other end from an end of this precoated plate 22.
When the spraying photoresist, shower nozzle 10 begins to move and spray photoresist to precoated plate 22 from a side of pre-coating platform 20.Shower nozzle 10 moves through waste liquid pool 30 subsequently, and when arriving described coating platform, the photoresist of shower nozzle 10 sprayings is more even.
The process of spraying photoresist is called pre-coating on the precoated plate 22.After pre-coating was finished, described scraper moved to the other end of this precoated plate 22 from an end of precoated plate 22, the waste liquid on the precoated plate 22 is struck off, and this waste liquid is guided in the waste liquid pool 30.Waste liquid pool 30 bottoms are provided with outage, and this outage and discharging tube are communicated with, waste liquid is guided to waste liquid pool 30 outsides.
Usually, precoated plate 22 is to be adsorbed on the mounting platform 21 by the vacuum suction hole on the mounting platform 21, utilizing described scraper to strike off in the process of the waste liquid on the precoated plate 22, waste liquid is very easy to remain on the edge of precoated plate 22, thereby the system that is evacuated sucks in the vacuum-pumping pipeline or sticks to the back side of precoated plate 22, therefore and cause precoated plate loosening or be uneven, need frequently carry out the levelness calibration.
Therefore, how to prevent that liquid photoresist waste liquid is evacuated system and sucks in the vacuum line and become the technical problem that this area needs to be resolved hurrily.
The utility model content
The utility model provides a kind of coating system, and when utilizing this coating system to carry out the process of pre-coating, photoresist can not remain on the edge of precoated plate, thereby can not be inhaled in the vacuum line of pumped vacuum systems.
To achieve these goals, the utility model provides a kind of coating system, described coating system comprises shower nozzle and the pre-coating platform, waste liquid pool and the coating platform that are arranged in order, described shower nozzle can move to the top of described coating platform from the top of described pre-coating platform, described pre-coating platform comprises mounting platform, be arranged on the precoated plate on the described mounting platform upper surface and can move to the scraper of second end from first end of described precoated plate, wherein, second end of described precoated plate is provided with upwardly extending first baffle plate.
Preferably, the both sides of described precoated plate extend beyond two sides of described mounting platform respectively, and at least one side in the both sides of described precoated plate is provided with the second baffle of downward extension.
Preferably, extend to the top of described waste liquid pool in the both sides of described precoated plate near a side of described waste liquid pool, the opposite side in the both sides of described precoated plate is provided with described second baffle.
Preferably, the degree of depth of described waste liquid pool increases gradually from an end to the other end, and the sidewall bottom of a darker end of described waste liquid pool is provided with the outage with described waste liquid pool exterior.
Preferably, described outage is a plurality of, and a plurality of described outages evenly distribute along the width of described waste liquid pool.
Preferably, described coating system also comprises the cleaning device that cleaning fluid can be provided, and the sidewall of a more shallow end of described waste liquid pool is provided with inlet opening, and described cleaning fluid enters in the described waste liquid pool by described inlet opening.
Preferably, described cleaning device comprises the cleaning fluid supply pipe that is communicated with described inlet opening, and described cleaning fluid supply pipe is provided with first switch valve.
Preferably, described inlet opening is a plurality of, and a plurality of described inlet openings evenly distribute along the width of described waste liquid pool.
Preferably, described cleaning fluid supply pipe comprises feed tube and a plurality of distributing pipes that are communicated with this feed tube, and described distributing pipe is corresponding one by one with described inlet opening, and described first switch valve is connected between described feed tube and the described distributing pipe.
Preferably, described cleaning device also comprises second switch valve and control air supply pipe, described first switch valve is pneumatic operated valve, the control mouth of described first switch valve links to each other with described control air supply pipe, described second switch valve is arranged on the described control air supply pipe, to control the break-make of described air supply pipe.
In the time of can preventing from utilizing scraper to scrape photoresist on the precoated plate by first baffle plate is set at precoated plate, photoresist can not remain on the edge of precoated plate, thereby can prevent that photoresist is inhaled in the vacuum line of pumped vacuum systems.
Description of drawings
Accompanying drawing is to be used to provide further understanding of the present utility model, and constitutes the part of specification, is used from explanation the utility model with the following specific embodiment one, but does not constitute restriction of the present utility model.In the accompanying drawings:
Fig. 1 is the front view schematic diagram of the part of existing coating system;
Fig. 2 is the vertical view schematic diagram of the part of the coating system shown in Fig. 1;
Fig. 3 is the front view schematic diagram of the part of coating system provided by the utility model;
Fig. 4 is the c-c cutaway view of the coating system shown in Fig. 3;
Fig. 5 is the vertical view schematic diagram of the part of the coating system shown in Fig. 3;
Fig. 6 is the A-A cutaway view of the part of the coating system shown in Fig. 3;
Fig. 7 is that the B of a part of the coating system shown in Fig. 3 is to view.
Description of reference numerals
10: shower nozzle 20: the pre-coating platform
21: mounting platform 22: precoated plate
Baffle plate 24 in 23: the first: second baffle
30: waste liquid pool 31: outage
32: inlet opening 40: cleaning device
41: 42: the first switch valves of cleaning fluid supply pipe
43: second switch valve 44: control air supply pipe
45: controller 50: the coating platform
The specific embodiment
Below in conjunction with accompanying drawing the specific embodiment of the present utility model is elaborated.Should be understood that the specific embodiment described herein only is used for description and interpretation the utility model, is not limited to the utility model.
As shown in Fig. 3 to Fig. 7, the utility model provides a kind of coating system, described coating system comprises shower nozzle 10 and the pre-coating platform 20 that is arranged in order, waste liquid pool 30 and coating platform 50, shower nozzle 10 can move to the top of described coating platform from the top of pre-coating platform 20, shower nozzle 10 is strip, and the moving direction of length direction and this shower nozzle 10 is perpendicular.Pre-coating platform 20 comprises mounting platform 21, be arranged on the precoated plate 22 on mounting platform 21 upper surfaces and can move to the scraper of second end from first end of precoated plate 22, wherein, second end of precoated plate 22 is provided with upwardly extending first baffle plate 23.Should be understood that, " first end, second end " described herein lay respectively on precoated plate 22 length directions two ends (namely, left and right directions among Fig. 3 and Fig. 5, also be the length direction of precoated plate 22 simultaneously), the length direction of precoated plate 22 described herein is perpendicular to the moving direction of shower nozzle 10.
Owing to be provided with upwardly extending first baffle plate 23 on second end of precoated plate 22, therefore, when described scraper moves to second end of precoated plate 22 from first end of precoated plate 22, first baffle plate 23 blocks the photoresist that is thrown away by described scraper, and then can prevent that the liquid photoresist waste liquid that is struck off by described scraper is thrown to the outside of precoated plate 22 because of effect of inertia, and remain on the edge of second end of precoated plate 22, be evacuated system and suck probability in the vacuum line thereby reduced liquid photoresist waste liquid, and therefore can reduce and the bad probability of precoated plate 22 absorption occurs.
In addition, can prevent that described scraper from throwing away second end of liquid photoresist waste liquid from precoated plate 22 because first baffle plate 23 is set, therefore, first baffle plate 23 can also avoid liquid photoresist waste liquid to pollute surrounding environment.
In order to guarantee that shower nozzle 10 sprays photoresist equably, see that preferably can utilize two high-accuracy steel disc amalgamations to form shower nozzle 10, as shown in Figure 4, like this, when spraying, photoresist sprays the slit between two steel discs.The as can be seen from Figure 4 slit between two steel discs and two steel discs.
As Fig. 5 and shown in Figure 7, the both sides of precoated plate 22 can extend beyond two sides of mounting platform 21 respectively.In the utility model, can be provided with the second baffle of downward extension at least one side of precoated plate 22.Should be understood that the both sides of precoated plate 22 refer to the both sides (that is, the above-below direction among Fig. 5) of these precoated plate 22 widths, the width of precoated plate 22 described herein is consistent with the moving direction of shower nozzle 10.
As shown in Figure 7, extend to the top of waste liquid pool 30 in the both sides of precoated plate 22 near a side of waste liquid pool 30, other side of one in the both sides of precoated plate 22 is provided with the second baffle 24 of downward extension.
The advantage that precoated plate 22 is set to said structure is: one, second baffle 24 can guide the liquid photoresist waste liquid that is struck off by described scraper to flow downward, prevent that described liquid photoresist waste liquid from entering the gap between precoated plate 22 and the mounting platform 21, thereby can prevent that liquid photoresist waste liquid is evacuated system and sucks in the vacuum line; Its two, the opposite side of precoated plate 22 extends to the top of waste liquid pool 30, can guarantee that liquid photoresist waste liquid all flows in the waste liquid pool 30, but not flows into the gap between waste liquid pool 30 and the mounting platform 21.
Certainly, can second baffle all be set in the both sides of precoated plate 22, can prevent the bottom surface of liquid photoresist waste liquid from the marginal flow of precoated plate 22 any sides to precoated plate 22 like this, thereby preventing that liquid photoresist waste liquid is sucked enters in the vacuum pipe.
In the utility model, the concrete structure of waste liquid pool 30 there is not special requirement, as long as can store the liquid photoresist waste liquid that struck off from precoated plate 22 by described scraper and this liquid photoresist waste liquid is discharged.For example, coating system provided by the utility model can utilize the waste liquid pool 30 shown in Fig. 2.
Preferably, the degree of depth that waste liquid pool 30 can be set to this waste liquid pool 30 increases (namely gradually from an end to the other end, the basal surface of waste liquid pool 30 tilts), the sidewall of a darker end of waste liquid pool 30 bottom be provided with the outage 31(of waste liquid pool 30 exterior as shown in Figure 6), can prevent like this that liquid photoresist waste liquid from depositing in waste liquid pool 30 solidifies.Described scraper strikes off liquid photoresist waste liquid and enters after the waste liquid pool 30 from precoated plate 22, described liquid photoresist waste liquid can flow to the darker end of this waste liquid pool 30 along the basal surface of waste liquid pool 30 from a more shallow end, and flows out waste liquid pools 30 by outage 31.Should be understood that, " end, the other end " of waste liquid pool 30 described herein lay respectively on waste liquid pool 30 length directions two ends (namely, left and right directions among Fig. 3 and Fig. 5, also be waste liquid pool 30 length directions simultaneously), the length direction of waste liquid pool 30 described herein is perpendicular to the moving direction of shower nozzle 10.
Though only show the situation that an outage 31 is set among Fig. 5 and Fig. 6, should be understood that, for the liquid photoresist waste liquid in the waste liquid pool 30 is thoroughly discharged, preferably, can a plurality of outages 31 be set at waste liquid pool 30.Further preferably, a plurality of outage 31 evenly distributes along the width (being the above-below direction among Fig. 5) of waste liquid pool 30.Herein, the width of waste liquid pool 30 is consistent with the moving direction of shower nozzle 10, perpendicular to the moving direction of scraper.
In order to prevent that described liquid photoresist waste liquid from solidifying in waste liquid pool 30, preferably, as shown in Figure 5 and Figure 6, described coating system can also comprise the cleaning device 40 that cleaning fluid can be provided, at this moment, can inlet opening 32 be set at the sidewall of the more shallow end of waste liquid pool 30, described cleaning fluid enters in the described waste liquid pool 30 by inlet opening 32.
In order to save cleaning fluid, can regularly clean waste liquid pool 30.For example, can after finishing a spraying process, clean waste liquid pool 30 again.For the ease of control, preferably, cleaning device 40 can comprise the cleaning fluid supply pipe 41 that is communicated with inlet opening 32, and cleaning fluid supply pipe 41 is provided with first switch valve 42.Can control the time interval of cleaning waste liquid pool 30 by the switch of controlling first switch valve 42.The switch of can the artificially controlling first switch valve 42 also can be controlled the switch of first switch valve 42 by automaton, specifically is introduced hereinafter.
Though only show the situation that an inlet opening 32 is set among Fig. 5 and Fig. 6, should be understood that, cover the basal surface of waste liquid pool 30 equably in order to make cleaning fluid, preferably, a plurality of inlet openings 32 can be set.Further preferably, a plurality of inlet opening 32 evenly distributes along the width of waste liquid pool 30.
A cleaning fluid supply pipe 41 can be set on each inlet opening 32, and first switch valve 42 all is set on every cleaning fluid supply pipe 41.For simplified structure, preferably, a plurality of distributing pipe (not shown) that cleaning fluid supply pipe 41 can comprise feed tube and be communicated with this feed tube, described distributing pipe is corresponding one by one with described inlet opening, and first switch valve 42 is connected between described feed tube and the described distributing pipe.Cleaning fluid flows into by described feed tube, and distributes to a plurality of distributing pipes by first switch valve 42, is entered in the waste liquid pool 30 by these a plurality of distributing pipes then.
Usually, operate first switch valve 42 and all need bigger power.For the ease of controlling first switch valve 42, preferably, cleaning device 40 can also comprise second switch valve 43 and control air supply pipe 44, at this moment, first switch valve 42 is pneumatic operated valve, the control mouth of first switch valve 42 links to each other with control air supply pipe 44, and second switch valve 43 is arranged on the control air supply pipe 44, with the break-make of control air supply pipe 44.
When second switch valve 43 is opened, the control mouth of control air flow first switch valve 42 in the control air supply pipe 44, first switch valve 42 is opened by the control air, thereby allows cleaning fluid to flow in the waste liquid pool 30.When second switch valve 43 cut out, control air supply pipe 44 was cut off, and first switch valve 42 also cuts out, and cleaning fluid can not flow in the waste liquid pool 30.
In order to control blanking time and the duration of cleaning waste liquid pool 30, preferably, described coating system can also comprise controller 45, and second switch valve 43 is magnetic valve, and controller 45 is electrically connected with described second switch valve 43.
Controller is controlled second switch valve 43 after the 45 interval scheduled times and is opened, thereby allows first switch valve 42 to open, and allows cleaning fluid to enter in the waste liquid pool 30.
Preferably, controller 45 can be the PLC controller.
Be understandable that above embodiment only is the illustrative embodiments that adopts for principle of the present utility model is described, yet the utility model is not limited thereto.For those skilled in the art, under the situation that does not break away from spirit of the present utility model and essence, can make various modification and improvement, these modification and improvement also are considered as protection domain of the present utility model.
Claims (10)
1. coating system, described coating system comprises shower nozzle and the pre-coating platform, waste liquid pool and the coating platform that are arranged in order, described shower nozzle can move to the top of described coating platform from the top of described pre-coating platform, described pre-coating platform comprises mounting platform, be arranged on the precoated plate on the described mounting platform upper surface and can move to the scraper of second end from first end of described precoated plate, it is characterized in that second end of described precoated plate is provided with upwardly extending first baffle plate.
2. coating system according to claim 1 is characterized in that, the both sides of described precoated plate extend beyond two sides of described mounting platform respectively, and at least one side in the both sides of described precoated plate is provided with the second baffle of downward extension.
3. coating system according to claim 2 is characterized in that, extends to the top of described waste liquid pool in the both sides of described precoated plate near a side of described waste liquid pool, and the opposite side in the both sides of described precoated plate is provided with described second baffle.
4. according to any described coating system in the claim 1 to 3, it is characterized in that, the degree of depth of described waste liquid pool increases gradually from an end to the other end, and the sidewall bottom of a darker end of described waste liquid pool is provided with the outage with described waste liquid pool exterior.
5. coating system according to claim 4 is characterized in that, described outage is a plurality of, and a plurality of described outages evenly distribute along the width of described waste liquid pool.
6. coating system according to claim 4, it is characterized in that, described coating system also comprises the cleaning device that cleaning fluid can be provided, and the sidewall of a more shallow end of described waste liquid pool is provided with inlet opening, and described cleaning fluid enters in the described waste liquid pool by described inlet opening.
7. coating system according to claim 6 is characterized in that, described cleaning device comprises the cleaning fluid supply pipe that is communicated with described inlet opening, and described cleaning fluid supply pipe is provided with first switch valve.
8. coating system according to claim 7 is characterized in that, described inlet opening is a plurality of, and a plurality of described inlet openings evenly distribute along the width of described waste liquid pool.
9. coating system according to claim 8, it is characterized in that, described cleaning fluid supply pipe comprises feed tube and a plurality of distributing pipes that are communicated with this feed tube, and described distributing pipe is corresponding one by one with described inlet opening, and described first switch valve is connected between described feed tube and the described distributing pipe.
10. coating system according to claim 7, it is characterized in that, described cleaning device also comprises second switch valve and control air supply pipe, described first switch valve is pneumatic operated valve, the control mouth of described first switch valve links to each other with described control air supply pipe, described second switch valve is arranged on the described control air supply pipe, to control the break-make of described air supply pipe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320135864 CN203140244U (en) | 2013-03-22 | 2013-03-22 | Coating system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320135864 CN203140244U (en) | 2013-03-22 | 2013-03-22 | Coating system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203140244U true CN203140244U (en) | 2013-08-21 |
Family
ID=48967800
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201320135864 Expired - Lifetime CN203140244U (en) | 2013-03-22 | 2013-03-22 | Coating system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203140244U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108672223A (en) * | 2018-07-16 | 2018-10-19 | 苏州黎元新能源科技有限公司 | A kind of slit-type squash type coating apparatus and its substrate platform |
-
2013
- 2013-03-22 CN CN 201320135864 patent/CN203140244U/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108672223A (en) * | 2018-07-16 | 2018-10-19 | 苏州黎元新能源科技有限公司 | A kind of slit-type squash type coating apparatus and its substrate platform |
| CN108672223B (en) * | 2018-07-16 | 2024-08-13 | 黎元新能源科技(无锡)有限公司 | Slit type extrusion type coating equipment and substrate platform thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20130821 |