CN203134772U - Base plate support device - Google Patents
Base plate support device Download PDFInfo
- Publication number
- CN203134772U CN203134772U CN 201320032323 CN201320032323U CN203134772U CN 203134772 U CN203134772 U CN 203134772U CN 201320032323 CN201320032323 CN 201320032323 CN 201320032323 U CN201320032323 U CN 201320032323U CN 203134772 U CN203134772 U CN 203134772U
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- CN
- China
- Prior art keywords
- backup pad
- upper backup
- liquid storage
- storage cylinder
- base plate
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Abstract
The utility model discloses a base plate support device. The base plate support device comprises a lower support plate and an upper support plate which is used for disposing a base plate, wherein the lower support plate is provided with support columns used for supporting the upper support plate and is further provided with level adjusters used for pushing up or lowering down the support columns to make the upper support plate be level. The base plate support device provides surface support for the base plate, guarantees no direct contact between the base plate and mechanical arms during a transportation process, so deformation because of relatively small contact areas between the mechanical arms and transmission equipment does not occur, the base plate can remain level constantly, the base plate support device facilitates normal extension of the base plate, bad effects such as break of the base plate, uneven thickness of an uncured orientation layer and base plate offset after combination are avoided, and thereby thickness requirements on the base plate can be reduced, and product quality, production capability and production efficiency can be effectively improved.
Description
Technical field
The utility model relates to LCD Technology, is specifically related to a kind of baseplate support device.
Background technology
At present, the equipment of carrying substrate as shown in Figure 1 mostly is manipulator 2.Manipulator 2 is less with the contact area of substrate, and substrate 1 is easily because of self gravitation effect generation deformation, even causes harmful effects such as substrate crushing, uncured oriented layer (PI) uneven thickness, 1 dislocation of involutory metacoxal plate.In addition, manipulator 2 directly contacts also with substrate 1 and very easily substrate 1 is caused scuffing.
The utility model content
In view of this, main purpose of the present utility model is to provide a kind of baseplate support device, is adversely affected in handling process to avoid substrate.
For achieving the above object, the technical solution of the utility model is achieved in that
A kind of baseplate support device, this device comprises lower supporting plate and the upper backup pad that is used for placing substrate, described lower supporting plate is provided with for the support column that supports described upper backup pad, also is provided with on the described lower supporting plate be used to raising or falling described support column so that the level governor that described upper backup pad is up to the standard.
Described support column is the liquid storage cylinder that is provided with the through hole that communicates with external atmosphere pressure, and described liquid storage cylinder and lower supporting plate are hollow structure, and the bottom end opening of described liquid storage cylinder also enters described lower supporting plate.
This device also comprises for the liquid level of described liquid storage cylinder being tested so that the horizontal checkout instrument that described upper backup pad is up to the standard.
Described horizontal checkout instrument is arranged on the top, inwall of described liquid storage cylinder or is outside.
Described horizontal checkout instrument is arranged on the inwall of described liquid storage cylinder or when outside, and all horizontal checkout instrument equate with distance between the described upper backup pad.
The quantity of the quantity of described liquid storage cylinder, horizontal checkout instrument and the quantity of level governor are one or more.
Described horizontal checkout instrument, level governor link to each other with processing module respectively; Wherein,
Described horizontal checkout instrument for the distance between the liquid level of test self and corresponding liquid storage cylinder, is given described processing module with this Distance Transmission;
Described processing module for raising at liquid storage cylinder according to the described level governor of receiving of distance control or falling processing, is up to the standard up to described upper backup pad.
Described upper backup pad is hollow, the surface of upper backup pad is provided with micropore, this micropore communicates with the inside of upper backup pad hollow, and described micropore by the conduit that arranges on the upper backup pad with can blow or air-breathing pneumatic means links to each other to described upper backup pad.
Described micropore becomes array arrangement.
Described lower supporting plate is the PPS plastics.
Baseplate support device of the present utility model provides planar support for substrate, guarantee that substrate does not directly contact manipulator in handling process, therefore can be because of not less and deformation takes place with the contact area of transmission equipment such as manipulator, and substrate can remain level, be conducive to the normal extension of substrate, can not cause harmful effects such as substrate crushing, uncured oriented layer uneven thickness, involutory metacoxal plate dislocation, therefore the thickness requirement to substrate can be reduced, the quality of product and production capacity, production efficiency can be effectively improved.
Description of drawings
Fig. 1 is the principle schematic of manipulator carrying substrate;
Fig. 2 is the stereogram of the baseplate support device of the utility model embodiment;
Fig. 3 is the front view of the baseplate support device of the utility model embodiment;
Fig. 4 is the operation principle schematic diagram of the baseplate support device of the utility model one embodiment;
Fig. 5 is the operation principle schematic diagram of the baseplate support device of another embodiment of the utility model;
Description of reference numerals:
1, substrate; 2, manipulator; 3, upper backup pad; 4, lower supporting plate; 5, level governor; 6, liquid storage cylinder; 7, liquid; 8, conduit; 9, horizontal checkout instrument.
Embodiment
In conjunction with Fig. 2,3 as can be known, baseplate support device of the present utility model comprises that the size of the upper backup pad 3(upper backup pad 3 that be arranged in parallel can be more than or equal to the size of substrate) and lower supporting plate 4, upper backup pad 3 and lower supporting plate 4 can be arranged in parallel.Lower supporting plate 4 is provided with for the one or more support column (as liquid storage cylinder 6) that supports upper backup pad 3, also is provided with on the lower supporting plate 4 be used to the level governor 5 that raises or fall each support column.Described support column can be for cylinder, cuboid etc., as long as can support upper backup pad 3.
When practical application, lower supporting plate 4 can be positioned over the manipulator for carrying substrate, 3 of upper backup pads are used for supporting substrate, height by the one or more level governor 5 of manual or electronic adjustment, make corresponding level governor 5 can raise or fall the respective support post, so that the upper backup pad 3 maintenance levels that support column is supported.Like this, substrate just can directly not contact manipulator in handling process, therefore can be because of not less and deformation takes place with the contact area of transmission equipment such as manipulator, and substrate can remain level, be conducive to the normal extension of substrate, can not cause harmful effects such as substrate crushing, uncured oriented layer uneven thickness, involutory metacoxal plate dislocation.
Particularly, when described support column is liquid storage cylinder 6, need be on liquid storage cylinder 6 (as the top or be higher than other position of liquid level) through hole is set so that the liquid 7 in the liquid storage cylinder 6 communicates with external atmosphere pressure, and can carry out as shown in Figure 4 setting.Among Fig. 4, liquid storage cylinder 6 is hollow structure with lower supporting plate 4, and accommodates liquid 7, and the bottom end opening of liquid storage cylinder 6 also enters lower supporting plate 4.The opening of liquid storage cylinder 6 bottoms makes the liquid 7 in each liquid storage cylinder 6 and the lower supporting plate 4 be communicated with, and therefore the liquid level of the liquid 7 in all liquid storage cylinders 6 should be in same horizontal plane.In this case, just can raise or fall processing liquid storage cylinder 6, make the liquid level of the liquid 7 in each liquid storage cylinder 6 top and the corresponding liquid storage cylinder 6 keep identical distance, the upper backup pad 3 that liquid storage cylinder 6 is supported is parallel with the liquid 7 formed liquid levels in all liquid storage cylinders 6, and namely upper backup pad 3 is on the horizontal plane.
In order to realize above-mentioned effect, can carry out setting as shown in Figure 5.Among Fig. 5, the top of each liquid storage cylinder 6 is provided with horizontal checkout instrument 9.Horizontal checkout instrument 9 can be the device that infrared transceiver, laser transceiver, microwave transceiver etc. can detection ranges, can send signals such as corresponding infrared light, laser or ultrasonic wave, and receiving signal through the liquid level reflection, the time difference by receiving and transmitting signal records the distance that needs.Usually, a horizontal checkout instrument 9 is used for testing at the liquid level of a liquid storage cylinder 6.In addition, on lower supporting plate 4, be provided with level governor 5 at each liquid storage cylinder 6, level governor 5 can be realized raising or fall at liquid storage cylinder 6 by modes such as manual, electronic, hydraulic pressure.Usually, the quantity of the quantity of liquid storage cylinder 6, horizontal checkout instrument 9 and the quantity of level governor 5 are one or more; In addition, the quantity of the quantity of the quantity of liquid storage cylinder 6, horizontal checkout instrument 9 and level governor 5 is normally identical.
When concrete the application, a horizontal checkout instrument 9(in all horizontal checkout instrument 9 is defined as the datum-plane tester with this horizontal checkout instrument) test self (because at this moment horizontal checkout instrument 9 is arranged at the top of liquid storage cylinder 6, therefore also can think the distance between the liquid level in test upper backup pad 3 and corresponding liquid storage cylinder 6 approx) and corresponding liquid storage cylinder 6 in liquid level between distance, should distance as reference range, and reference range is transferred to the processing module (not shown) by data wire.Distance between the liquid level in other horizontal checkout instrument 9 test upper backup pads 3 and the corresponding liquid storage cylinder 6, and give processing module with the Distance Transmission that obtains, processing module is according to distance and the described reference range received, control level governor 5 raises at liquid storage cylinder 6 or falls processing, till upper backup pad 3 that 9 tests of all horizontal checkout instrument obtain and the distance between the liquid level in the corresponding liquid storage cylinder 6 were reference range, namely upper backup pad 3 was up to the standard.Such as: the distance that processing module will be received compares with reference range, if the distance of receiving is greater than reference range, then send the instruction that descends for corresponding level governor 5 by data wire, this level governor 5 descends and also drives corresponding liquid storage cylinder 6 and descend, and makes liquid level in this liquid storage cylinder 6 and the distance between the upper backup pad 3 reach reference range; If the distance of receiving is less than reference range, then send for corresponding level governor 5 by data wire and raise instruction, this level governor 5 rises and also drives corresponding liquid storage cylinder 6 and rise, and makes liquid level in this liquid storage cylinder 6 and the distance between the upper backup pad 3 reach reference range.
Certainly, horizontal checkout instrument 9 also can be arranged on the inwall that is positioned at liquid 7 tops in the liquid storage cylinder 6; In addition, if liquid storage cylinder 6 is transparent, so also horizontal checkout instrument 9 can be arranged at liquid storage cylinder 6 outsides.The position that arranges regardless of horizontal checkout instrument 9, as long as all horizontal checkout instrument 9 equate (with the level of assurance based on horizontal checkout instrument 9 realization upper backup pads 3) with distance between the upper backup pad 3, and the distance that horizontal checkout instrument 9 can measure between the liquid level of the liquid in self and the liquid storage cylinder 6 smoothly gets final product.In this case, horizontal checkout instrument 9 can be tested the distance between the liquid level in self and the corresponding liquid storage cylinder 6 equally, and realizes the level of upper backup pad 3 based on this distance and aforesaid corresponding operating principle.
Need to prove that upper backup pad 3 can use modes such as vacuum suction or Electrostatic Absorption to realize the fixing of substrate.Upper backup pad 3 can be hollow, can be provided with into the micropore of array arrangement on the surface of upper backup pad 3, this micropore communicates with the inside of upper backup pad 3 hollows, and described micropore can link to each other with pneumatic means by the conduit 8 that arranges on the upper backup pad 3, and this pneumatic means can be to upper backup pad 3 air blowings or air-breathing.When substrate was placed on the upper backup pad 3, described pneumatic means can be blown to substrate by conduit 8, the inside of upper backup pad 3 hollows, described micropore, with the deformation of elimination substrate, and the normal extension of realization substrate.Lower supporting plate 4 can be little by deformation, high temperature resistant, the corrosion resistance material constitutes, for example PPS plastics (Phenylene sulfide, polyphenylene sulfide) or other high molecular polymer etc.
In conjunction with above description as seen, baseplate support device of the present utility model provides planar support for substrate, guarantee that substrate does not directly contact manipulator in handling process, therefore can be because of not less and deformation takes place with the contact area of transmission equipment such as manipulator, and substrate can remain level, be conducive to the normal extension of substrate, can not cause harmful effects such as substrate crushing, uncured oriented layer uneven thickness, involutory metacoxal plate dislocation, therefore the thickness requirement to substrate can be reduced, the quality of product and production capacity, production efficiency can be effectively improved.
The above is preferred embodiment of the present utility model only, is not for limiting protection range of the present utility model.
Claims (10)
1. baseplate support device, it is characterized in that, this device comprises lower supporting plate and the upper backup pad that is used for placing substrate, described lower supporting plate is provided with for the support column that supports described upper backup pad, also is provided with on the described lower supporting plate be used to raising or falling described support column so that the level governor that described upper backup pad is up to the standard.
2. device according to claim 1 is characterized in that,
Described support column is the liquid storage cylinder that is provided with the through hole that communicates with external atmosphere pressure, and described liquid storage cylinder and lower supporting plate are hollow structure, and the bottom end opening of described liquid storage cylinder also enters described lower supporting plate.
3. device according to claim 2 is characterized in that, this device also comprises for the liquid level of described liquid storage cylinder being tested so that the horizontal checkout instrument that described upper backup pad is up to the standard.
4. device according to claim 3 is characterized in that, described horizontal checkout instrument is arranged on the top, inwall of described liquid storage cylinder or is outside.
5. device according to claim 4 is characterized in that, described horizontal checkout instrument is arranged on the inwall of described liquid storage cylinder or when outside, and all horizontal checkout instrument equate with distance between the described upper backup pad.
6. according to each described device of claim 3 to 5, it is characterized in that,
The quantity of the quantity of described liquid storage cylinder, horizontal checkout instrument and the quantity of level governor are one or more.
7. device according to claim 6 is characterized in that, described horizontal checkout instrument, level governor link to each other with processing module respectively; Wherein,
Described horizontal checkout instrument for the distance between the liquid level of test self and corresponding liquid storage cylinder, is given described processing module with this Distance Transmission;
Described processing module for raising at liquid storage cylinder according to the described level governor of receiving of distance control or falling processing, is up to the standard up to described upper backup pad.
8. device according to claim 1 is characterized in that,
Described upper backup pad is hollow, the surface of upper backup pad is provided with micropore, this micropore communicates with the inside of upper backup pad hollow, and described micropore by the conduit that arranges on the upper backup pad with can blow or air-breathing pneumatic means links to each other to described upper backup pad.
9. device according to claim 8 is characterized in that, described micropore becomes array arrangement.
10. device according to claim 1 is characterized in that, described lower supporting plate is the PPS plastics.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320032323 CN203134772U (en) | 2013-01-22 | 2013-01-22 | Base plate support device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320032323 CN203134772U (en) | 2013-01-22 | 2013-01-22 | Base plate support device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203134772U true CN203134772U (en) | 2013-08-14 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201320032323 Expired - Lifetime CN203134772U (en) | 2013-01-22 | 2013-01-22 | Base plate support device |
Country Status (1)
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| CN (1) | CN203134772U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104409397A (en) * | 2014-11-28 | 2015-03-11 | 昆山国显光电有限公司 | Wet etching device |
| CN105652608A (en) * | 2016-04-14 | 2016-06-08 | 京东方科技集团股份有限公司 | Exposure machine and exposing method |
| CN105702881A (en) * | 2016-01-21 | 2016-06-22 | 京东方科技集团股份有限公司 | Substrate jacking device, substrate packaging equipment and method |
| CN106340478A (en) * | 2016-10-09 | 2017-01-18 | 无锡宏纳科技有限公司 | Support bench of wafer spray apparatus |
-
2013
- 2013-01-22 CN CN 201320032323 patent/CN203134772U/en not_active Expired - Lifetime
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104409397A (en) * | 2014-11-28 | 2015-03-11 | 昆山国显光电有限公司 | Wet etching device |
| CN104409397B (en) * | 2014-11-28 | 2017-06-16 | 昆山国显光电有限公司 | Wet-method etching device |
| CN105702881A (en) * | 2016-01-21 | 2016-06-22 | 京东方科技集团股份有限公司 | Substrate jacking device, substrate packaging equipment and method |
| CN105702881B (en) * | 2016-01-21 | 2017-11-07 | 京东方科技集团股份有限公司 | A kind of substrate jacking system, substrate package device and method |
| US10205133B2 (en) | 2016-01-21 | 2019-02-12 | Boe Technology Group Co., Ltd. | Substrate lifting device, substrate packaging apparatus and substrate packaging method |
| CN105652608A (en) * | 2016-04-14 | 2016-06-08 | 京东方科技集团股份有限公司 | Exposure machine and exposing method |
| CN105652608B (en) * | 2016-04-14 | 2017-11-07 | 京东方科技集团股份有限公司 | Exposure machine and exposure method |
| CN106340478A (en) * | 2016-10-09 | 2017-01-18 | 无锡宏纳科技有限公司 | Support bench of wafer spray apparatus |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: BEIJING BOE PHOTOELECTRICITY SCIENCE + TECHNOLOGY Effective date: 20150625 Owner name: JINGDONGFANG SCIENCE AND TECHNOLOGY GROUP CO., LTD Free format text: FORMER OWNER: BEIJING BOE PHOTOELECTRICITY SCIENCE + TECHNOLOGY CO., LTD. Effective date: 20150625 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20150625 Address after: 100015 Jiuxianqiao Road, Beijing, No. 10, No. Patentee after: BOE TECHNOLOGY GROUP Co.,Ltd. Patentee after: BEIJING BOE OPTOELECTRONICS TECHNOLOGY Co.,Ltd. Address before: 100176 Beijing city in Western Daxing District economic and Technological Development Zone, Road No. 8 Patentee before: BEIJING BOE OPTOELECTRONICS TECHNOLOGY Co.,Ltd. |
|
| CX01 | Expiry of patent term |
Granted publication date: 20130814 |
|
| CX01 | Expiry of patent term |