CN203128654U - Chemical vapor deposition (CVD) device adopting electromagnetic heating - Google Patents
Chemical vapor deposition (CVD) device adopting electromagnetic heating Download PDFInfo
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- CN203128654U CN203128654U CN 201220724439 CN201220724439U CN203128654U CN 203128654 U CN203128654 U CN 203128654U CN 201220724439 CN201220724439 CN 201220724439 CN 201220724439 U CN201220724439 U CN 201220724439U CN 203128654 U CN203128654 U CN 203128654U
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- electromagnetism
- intake section
- heating
- transport tape
- cvd equipment
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Abstract
The utility model relates to the design field of a semiconductor production device, and in particular relates to a chemical vapor deposition (CVD) device adopting the electromagnetic heating. According to the CVD device adopting the electromagnetic heating, through a roller group which is matched with a conveyor belt, a dynamic sealing effect between a shell and the conveyor belt can be realized; through an air inlet for inert gas to enter and an exhaust port for the inert gas to exit, a material to be coated on the conveyor belt can be prevented from chemically reacting with the air; and through a movable electromagnetic mixing device, the entire electromagnetic mixing device is miniaturized. The CVD device has the characteristics of small occupied space and low cost.
Description
Technical field
The utility model relates to the design field of semiconductor production equipment, relates in particular to the CVD equipment that adopts the electromagnetism heating.
Background technology
Chemical vapour deposition (English: Chemical Vapor Deposition, be called for short CVD) is a kind of chemical technology that is used for producing purity height, solid-state material that performance is good.Semiconductor industry is used this technology film of growing up.Typical CVD processing procedure is that wafer (substrate) is exposed under one or more different precursors, produces the film that desire deposits at substrate surface generation chemical reaction or decomposition.Usually also can produce different byproducts concomitantly in the reaction process, but understand along with air-flow is pulled away mostly, and can not stay in the reaction chamber.
Chemical vapour deposition technique extensively uses in the semiconductor coated film field, because the process need of semiconductor coated film carries out with the outside air state of contact or under near the state of vacuum in isolation.In the prior art, each technical process of semi-conductor integrated manufacturing system all needs to carry out under airtight environment, after finishing a technical process, need semi-conductor half cost is taken out, to carry out next step art breading, but it is had relatively high expectations to the vacuum of space after taking out, and therefore causes the integrated producing apparatus of semi-conductor to make difficulty, factory building huge.Producer's investment is founded the factory need bear a large amount of fund input in early stage on the one hand, usually build the time that the semiconductor integrated manufacturing system needs the several years on the other hand, as seen it is big and of long duration to build semiconductor integrated manufacturing system fund input amount at present, and causes the difficulty of producer's turnover of funds easily.
The utility model content
The purpose of this utility model is to overcome the defective of prior art, aims to provide the CVD equipment that adopts the electromagnetism heating and realizes modularization and miniaturized design to realize the CVD filming equipment in the semiconductor production equipment, thereby reduce the manufacturing cost of CVD filming equipment.
The utility model is to realize like this, adopt the CVD equipment of electromagnetism heating, comprise a housing, described housing both lateral sides is respectively equipped with the entrance and exit that passes through for the transport tape of placing material to be plated, and described transport tape is separated into epicoele and cavity of resorption with described housing, the entrance and exit place is provided with the described transport tape of dynamic clamp respectively and drives the cylinder group that it moves in the described housing, each described cylinder group comprises the last cylinder that is attached at the transport tape upside and the bottom roll that is attached at the transport tape downside, also is provided with first servomotor that drives described cylinder group running on the described housing; Offer the inlet mouth that enters for rare gas element and the venting port that leaves on the described housing, be provided with mobile electromagnetism mixing device in the described cavity of resorption, described electromagnetism mixing device has one towards described transport tape and sprays the air nozzle of working gas.
Particularly, be provided with a screw mandrel that rotates in the described cavity of resorption, described electromagnetism mixing device is provided with the threaded hole adaptive with described screw mandrel, and described electromagnetism mixing device is installed on the described screw mandrel by described threaded hole.
Particularly, described electromagnetism mixing device comprises the mixing bunker with hybrid chamber, the support frame that coats described mixing bunker, and described support frame is provided with around the electromagnetic induction coil of described mixing bunker periphery, described electromagnetic induction coil external AC power supply.
Particularly, described mixing bunker comprises the intake section that is positioned at the bottom, be connected with intake section and be positioned at the top and form described hybrid chamber mixing portion, described intake section is contained in the described support frame, be provided with the air inlet cavity that some and described mixing portion gas circuit is communicated with in the described intake section, described air nozzle is located at described mixing portion.
Particularly, the elongated slit of described air nozzle, described mixing portion comprises by described air nozzle to both sides extended two oblique and with described oblique horizontal plane that is connected with described intake section respectively, the lateral cross section of described mixing portion is isosceles triangle; Described air inlet cavity is two, and described intake section is provided with the partition wall that is extended to described mixing portion by its bottom, and two described air inlet cavities are surrounded by described partition wall and described intake section sidewall and form.
Particularly, two through holes that are communicated with external feed stream equipment are offered in the bottom of described intake section, and two described through holes are connected with two described air inlet cavities respectively.
Particularly, the close described intake section of described mixing portion has the protuberance that protrudes from described intake section.
Particularly, described electromagnetism mixing device also comprises second servomotor of being located at described housing sidewall and driving described screw mandrel rotation.
Particularly, each described surface of going up cylinder and bottom roll is provided with elastic layer, each described mutual elasticity in surface, both ends that goes up cylinder and bottom roll is pressed, each described going up has the gap of passing through for described transport tape between cylinder and the bottom roll, and mutual elasticity is pressed between each described upward cylinder and bottom roll and the described transport tape.
Particularly, above-mentioned CVD equipment comprises Controlling System, also comprises Controlling System, and described Controlling System comprises film thickness monitoring system, temperature measuring equipment, System Controlled by Measuring Pressure, video monitoring apparatus.
The beneficial effects of the utility model: the CVD equipment of the employing electromagnetism heating that the utility model provides arranges described cylinder group by adopting between described housing and described transport tape, utilize the relation of being tightly connected of described cylinder group and housing and described transport tape, reach the dynamic seal design between described housing and the described transport tape; By offer the inlet mouth that enters for rare gas element and the venting port that leaves at described housing, when advancing the CVD plated film, make rare gas element enter described enclosure interior by described inlet mouth earlier, gas in the described housing is discharged by described venting port, so can in described housing, form the rare gas element of high density, make in the coating process, avoid being positioned over material to be coated and air generation chemical reaction on the described transport tape; Simultaneously, CVD equipment of the present utility model adopts mobile electromagnetism mixing device, with the mobile fixing electromagnetism mixing device that substitutes, and can be so that the microminiaturization of whole electromagnetism mixing device.
Description of drawings
Fig. 1 is the external structure synoptic diagram of the utility model one preferred embodiment;
Fig. 2 is the structural representation after Fig. 1 removes housing one sidewall;
Fig. 3 is the structural representation after Fig. 1 removes housing;
Fig. 4 is the structural representation of another angle of Fig. 3;
Fig. 5 is the structural representation of electromagnetism mixing device;
Fig. 6 is the sectional view of Fig. 5;
Fig. 7 is the structural representation of mixing bunker;
Fig. 8 is the sectional view of Fig. 7 cross section.
Embodiment
In order to make the purpose of this utility model, technical scheme and advantage clearer, below in conjunction with drawings and Examples, the utility model is further elaborated.Should be appreciated that specific embodiment described herein only in order to explaining the utility model, and be not used in restriction the utility model.
Please refer to accompanying drawing 1 ~ 8, adopt the CVD equipment of electromagnetism heating, comprise a housing 1, described housing 1 both lateral sides is respectively equipped with entrance 11 and the outlet of passing through for the transport tape 2 of placing material 8 to be plated 12, and described transport tape 2 is separated into epicoele 13 and cavity of resorption 14 with described housing 1, entrance 11 and outlet 12 places are provided with the described transport tape 2 of dynamic clamp respectively and drive its cylinder group that moves 3 in the described housing 1, each described cylinder group 3 comprises the last cylinder 31 that is attached at transport tape 2 upsides and the bottom roll 32 that is attached at transport tape 2 downsides, also is provided with first servomotor 4 that drives described cylinder group 3 runnings on the described housing 1.By adopting described cylinder group 3 is set between described housing 1 and described transport tape 2, utilizes the relation of being tightly connected of described cylinder group 3 and described housing 1 and described transport tape 2, reach the dynamic seal design between described housing 1 and the described transport tape 2.So, can be convenient to CVD equipment of the present utility model and can realize that good sealing is connected by described transport tape 2 with all the other technical modules of semi-conductor integrated manufacturing system.
Offer the inlet mouth 15 that enters for rare gas element and the venting port 16 that leaves on the described housing 1, so, CVD equipment of the present utility model is before plated film, can rare gas element be full of described housing 1 inside by described inlet mouth 15, described housing 1 inner original gas is discharged by described venting port 16, finally make to make the described housing 1 interior rare gas element that forms high density in the coating process, avoid being positioned over material to be coated and air generation chemical reaction on the described transport tape 2.Further, described inlet mouth 15 is equipped with inlet mouth valve and drain tap respectively with venting port 16, by controlling the open and-shut mode of described air intake valve and drain tap, and then controls air input and the free air delivery of rare gas element.
Be provided with mobile electromagnetism mixing device 5 in the described cavity of resorption 14, described electromagnetism mixing device 5 has one towards described transport tape 2 and sprays the air nozzle 51 of working gas.In the prior art, the electromagnetism mixing device normally adopts fixed set-up mode, and so for making jet scope bigger, the opening of the air nozzle 51 that designs is also bigger, causes the volume of electromagnetism mixing device also bigger like this, and its manufacturing cost therefore uprises.The utility model adopts portable electromagnetism mixing device 5, and wherein, the move mode of described electromagnetism mixing device 5 can be the movement of linear reciprocating, also can adopt the reciprocating type movement of XY plane formula, at this its move mode is not done concrete restriction.So, by adopting mobile electromagnetism mixing device 5, with the mobile fixing electromagnetism mixing device that substitutes, can be so that the microminiaturization of whole electromagnetism mixing device.
In the present embodiment, be provided with a screw mandrel 52 that rotates in the described cavity of resorption 14, described electromagnetism mixing device 5 is provided with the threaded hole 53 adaptive with described screw mandrel 52, and described electromagnetism mixing device 5 is installed on the described screw mandrel 52 by described threaded hole 53.Wherein, described screw mandrel 52 is parallel with horizontal plane, so, can change described electromagnetism mixing device 5 position in the horizontal direction by rotating described screw mandrel 52.
In the present embodiment, described electromagnetism mixing device 5 comprises the mixing bunker 54 with hybrid chamber 543, the support frame 55 that coats described mixing bunker 54, described support frame 55 is provided with the electromagnetic induction coil (not drawing among the figure) around described mixing bunker 54 peripheries, described electromagnetic induction coil external AC power supply.So, when the CVD equipment that the utility model provides was in running order, described electromagnetic induction coil was connected alternating-current, can make in the described mixing bunker 54 and form the alternating magnetic fields eddy current, thereby working gas through described mixing bunker 54 is heated and excites.
In the present embodiment, described mixing bunker 54 comprises the intake section 541 that is positioned at the bottom, be connected with intake section 541 and be positioned at the top and form the mixing portion 542 of described hybrid chamber 543, described intake section 541 is contained in the described support frame 55, be provided with the air inlet cavity 5411 that some and described mixing portion 542 gas circuits are communicated with in the described intake section 541, described air nozzle 51 is located at described mixing portion 542.So, working gas enters in the described mixing bunker 54 via described intake section 541, working gas is in the process of described intake section 541 of flowing through, via being arranged at the electromagnetic induction coil heating on the described support frame 55 and exciting, enter described mixing portion 542 again, can in described mixing portion 542, mix fully, with the quality that improves final plated film and the use that reduces gas raw material.
In the present embodiment, described air nozzle 51 elongated slits, described mixing portion 542 comprises by described air nozzle 51 to both sides extended two oblique 5421 and with described oblique 5421 horizontal plane 5422 that is connected with described intake section 541 respectively, and the lateral cross section of described mixing portion 542 is isosceles triangle; Described air inlet cavity 5411 is two, and described intake section 541 is provided with partition wall 5412, the two described air inlet cavities 5411 that extended to described mixing portion 542 by its bottom and is surrounded by described partition wall 5412 and described intake section 541 sidewalls and form.So, two described air inlet cavities 5411 of described intake section 541 are two described oblique 5421 of corresponding described mixing portion 542 respectively, working gas via described intake section 541 heating with excite after enter described portion's 542 inner chambers that mix; Under described oblique 5421 guide effect, can obtain better mixed effect, and after described oblique 5421 guiding, the working gas of ejection is more even.
In the present embodiment, the bottom of described intake section 541 is offered two through hole 5413, two described through holes 5413 that are communicated with the external feed stream equipment and is connected with two described air inlet cavities 5411 respectively.So, working gas will directly be flowed to the described air nozzle 51 in top by the through hole 5413 of described mixing bunker 54 bottoms, can utilize whole mixing bunker 54 integral layout structurally more fully, enter to realize microminiaturized design.
In the present embodiment, described mixing portion 542 has the protuberance 5423 that protrudes from described intake section 541 near described intake sections 541.So, earlier excessive via the mitigation of described protuberance 5423 when working gas enters described mixing portion 542 via described air inlet cavity 5411, can make mixed effect better.
In the present embodiment, described electromagnetism mixing device 5 also comprises second servomotor 6 of being located at described housing 1 sidewall and driving described screw mandrel 52 rotations.
In the present embodiment, each described surface of going up cylinder 31 and bottom roll 32 is provided with elastic layer (not drawing among the figure), each described mutual elasticity in surface, both ends that goes up cylinder 31 and bottom roll 32 is pressed, each described going up has the gap of passing through for described transport tape 2 between cylinder 31 and the bottom roll 32, and mutual elasticity is pressed between each described upward cylinder 31 and bottom roll 32 and the described transport tape 2.Wherein, described elastic layer adopts silicon rubber to be made.Technique scheme has been given the concrete sealing means of described cylinder group 3, by being in contact with one another part, described upward cylinder 31, bottom roll 32 and substrate 2 be arranged to Elastic Contact, so, in described cylinder group 3 operation process of described substrate 2 companions, can keep good sealing effectiveness constantly, realize dynamic seal.In addition, owing to adopt the mode of shrink-fit between described cylinder group 3 and the described transport tape 2, therefore, will inevitably produce a large amount of heats because of friction each other, for the heat that makes the heat that produces can in time distribute, also be provided with the water-cooling system 7 that described cylinder group 3 is lowered the temperature in the described housing 1.
In the present embodiment, above-mentioned CVD equipment comprises Controlling System, and described Controlling System comprises the film thickness monitoring system that adopts the infrared external reflection principle to be made, temperature measuring equipment, the System Controlled by Measuring Pressure of monitoring described epicoele and following cavity pressure that employing infrared measurement of temperature method is made, the video monitoring apparatus of monitoring described epicoele and cavity of resorption internal medium.In view of described film thickness monitoring system, temperature measuring equipment, System Controlled by Measuring Pressure and video monitoring apparatus are prior art respectively, carefully do not state at this.
The above only is the utility model preferred embodiment; its structure is not limited to the above-mentioned shape of enumerating; all any modifications of within spirit of the present utility model and principle, doing, be equal to and replace and improvement etc., all should be included within the protection domain of the present utility model.
Claims (10)
1. adopt the CVD equipment of electromagnetism heating, comprise a housing, it is characterized in that: described housing both lateral sides is respectively equipped with the entrance and exit that passes through for the transport tape of placing material to be coated, and described transport tape is separated into epicoele and cavity of resorption with described housing, the entrance and exit place is provided with the described transport tape of dynamic clamp respectively and drives the cylinder group that it moves in the described housing, each described cylinder group comprises the last cylinder that is attached at the transport tape upside and the bottom roll that is attached at the transport tape downside, also is provided with first servomotor that drives described cylinder group running on the described housing; Offer the inlet mouth that enters for rare gas element and the venting port of discharge on the described housing, be provided with mobile electromagnetism mixing device in the described cavity of resorption, described electromagnetism mixing device has one towards described transport tape and sprays the air nozzle of working gas.
2. the CVD equipment of employing electromagnetism according to claim 1 heating, it is characterized in that: be provided with a screw mandrel that rotates in the described cavity of resorption, described electromagnetism mixing device is provided with the threaded hole adaptive with described screw mandrel, and described electromagnetism mixing device is installed on the described screw mandrel by described threaded hole.
3. the CVD equipment of employing electromagnetism according to claim 2 heating, it is characterized in that: described electromagnetism mixing device comprises the mixing bunker with hybrid chamber, the support frame that coats described mixing bunker, described support frame is provided with around the electromagnetic induction coil of described mixing bunker periphery, described electromagnetic induction coil external AC power supply.
4. the CVD equipment of employing electromagnetism according to claim 3 heating, it is characterized in that: described mixing bunker comprises the intake section that is positioned at the bottom, be connected with intake section and be positioned at the top and form described hybrid chamber mixing portion, described intake section is contained in the described support frame, be provided with the air inlet cavity that some and described mixing portion gas circuit is communicated with in the described intake section, described air nozzle is located at described mixing portion.
5. the CVD equipment of employing electromagnetism according to claim 4 heating, it is characterized in that: described air nozzle is the long strip shape slit, described mixing portion comprises by described air nozzle to both sides extended two oblique and with described oblique horizontal plane that is connected with described intake section respectively, and the lateral cross section of described mixing portion is isosceles triangle; Described air inlet cavity is two, and described intake section is provided with the separation wall that is extended to described mixing portion by its bottom, and two described air inlet cavities are surrounded by described separation wall and described intake section sidewall and form.
6. the CVD equipment of employing electromagnetism according to claim 5 heating, it is characterized in that: two through holes that are communicated with the external feed stream equipment are offered in the bottom of described intake section, and two described through holes are connected with two described air inlet cavities respectively.
7. the CVD equipment of employing electromagnetism according to claim 5 heating is characterized in that: described mixing portion has the protuberance that protrudes from described intake section near described intake section.
8. the CVD equipment of employing electromagnetism according to claim 2 heating, it is characterized in that: described electromagnetism mixing device also comprises to be located at described housing sidewall and to drive second servomotor that described screw mandrel rotates.
9. the CVD equipment of employing electromagnetism according to claim 1 heating, it is characterized in that: each described surface of going up cylinder and bottom roll is provided with elastic layer, each described mutual elasticity in surface, both ends that goes up cylinder and bottom roll is pressed, each described going up has the gap of passing through for described transport tape between cylinder and the bottom roll, and mutual elasticity is pressed between each described upward cylinder and bottom roll and the described transport tape.
10. according to the CVD equipment of each described employing electromagnetism heating of claim 1 ~ 9, it is characterized in that: comprise Controlling System, described Controlling System comprises film thickness monitoring system, temperature measuring equipment, System Controlled by Measuring Pressure, video monitoring apparatus.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220724439 CN203128654U (en) | 2012-12-25 | 2012-12-25 | Chemical vapor deposition (CVD) device adopting electromagnetic heating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220724439 CN203128654U (en) | 2012-12-25 | 2012-12-25 | Chemical vapor deposition (CVD) device adopting electromagnetic heating |
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| Publication Number | Publication Date |
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| CN203128654U true CN203128654U (en) | 2013-08-14 |
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| CN 201220724439 Expired - Lifetime CN203128654U (en) | 2012-12-25 | 2012-12-25 | Chemical vapor deposition (CVD) device adopting electromagnetic heating |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103074596A (en) * | 2012-12-25 | 2013-05-01 | 王奉瑾 | CVD equipment adopting electromagnetic heating |
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2012
- 2012-12-25 CN CN 201220724439 patent/CN203128654U/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103074596A (en) * | 2012-12-25 | 2013-05-01 | 王奉瑾 | CVD equipment adopting electromagnetic heating |
| CN103074596B (en) * | 2012-12-25 | 2014-12-31 | 王奉瑾 | CVD equipment adopting electromagnetic heating |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20130814 Effective date of abandoning: 20141231 |
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| RGAV | Abandon patent right to avoid regrant |