CN203091218U - Photoresist recovery device and coating machine - Google Patents
Photoresist recovery device and coating machine Download PDFInfo
- Publication number
- CN203091218U CN203091218U CN 201320103774 CN201320103774U CN203091218U CN 203091218 U CN203091218 U CN 203091218U CN 201320103774 CN201320103774 CN 201320103774 CN 201320103774 U CN201320103774 U CN 201320103774U CN 203091218 U CN203091218 U CN 203091218U
- Authority
- CN
- China
- Prior art keywords
- photoresist
- container
- retracting device
- coating machine
- tracheae
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Coating Apparatus (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Abstract
The utility model discloses a photoresist recovery device and a coating machine. The photoresist recovery device comprises a first container and a gas leakage detection unit, wherein the first container is used for forming a closed space with a photoresist outlet so as to receive photoresist; and the gas leakage detection unit is used for detecting the tightness of the first container. The coating machine is provided with the photoresist recovery device. According to the photoresist recovery device disclosed by the utility model, the first container and the photoresist outlet form a closed space, so that the photoresist can be recovered without pollution and the condensation of the photoresist is prevented; and the photoresist recovery device can be used for recovering the photoresist on a coating machine. Moreover, the device is also used for detecting the tightness of the first container by use of the gas leakage detection unit so as to guarantee the tightness of the first container.
Description
Technical field
The utility model relates to photoresist and reclaims the field, particularly relates to a kind of photoresist retracting device and coating machine.
Background technology
Slit type coater is the key equipment during large scale TFT-LCD produces, for guaranteeing the coating effect, before each coating, all can make the dispense tip initialization from dispense tip a certain amount of photoresist that spues, and the photoresist that these spue can cause very big waste of material and treatment cost of waste liquor all as liquid waste processing.
And, at the PM(Priliminary of coating apparatus Maintenance, the pre-maintenance) and also all can be from slit dispense tip a large amount of photoresist that spues during detergent line.These photoresists that spue are not used in production but drain as waste liquid, and this photoresist that not only can waste a large amount of costlinesses also can bring dispose waste liquid expensive.When liquid photoresist waste liquid when constantly accumulation is condensed in equipment, have influence on the operating efficiency of equipment, need manpower to clean, thereby reduced the mobility of equipment.
The utility model content
The purpose of this utility model provides a kind of device that reclaims photoresist, reduces cost and protects environment to reach.
In order to solve the problems of the technologies described above, the utility model provides a kind of photoresist retracting device, comprising:
First container is used for forming confined space with the gum outlet of photoresist, to receive photoresist;
The gas leakage detecting unit is used to detect the seal of described first container.
In the above-mentioned retracting device, described first container comprises that cell body and is used for and the airtight interface that is connected of described gum outlet.
In the above-mentioned retracting device, described interface is an elastic interface.
In the above-mentioned retracting device, described gas leakage detecting unit comprises source of the gas, tracheae and pressure gauge, and described source of the gas communicates with first container by tracheae, and described tracheae is provided with pressure gauge.
In the above-mentioned retracting device, also be provided with on the described tracheae and be used to the control valve controlling described tracheae conducting and end.
In the above-mentioned retracting device, described device also comprises second an airtight container, and described second container is connected with first container by pipeline, is used for receiving the photoresist that first container flows out.
In the above-mentioned retracting device, described second container has an exhaust outlet that communicates with the external world.
In the above-mentioned retracting device, be provided with check valve in the described exhaust outlet.
The utility model also provides a kind of coating machine, comprises described photoresist retracting device.
In the above-mentioned coating machine, described coating machine also comprises a dispense tip, and described dispense tip is provided with gum outlet.
The beneficial effect of the technical solution of the utility model is: first container of photoresist retracting device of the present utility model and the gum outlet of photoresist form confined space, make photoresist under not contaminated situation, to reclaim, prevent condensing of photoresist, can be applied to the recovery of carrying out photoresist on the coating machine.And this device also utilizes the gas leakage detecting unit to detect the seal of first container, to guarantee the seal of first container.
Description of drawings
Fig. 1 is the structural representation of the photoresist retracting device of first kind of embodiment of the utility model;
Fig. 2 is the structural representation of the photoresist retracting device of second kind of embodiment of the utility model;
Fig. 3 is the structural representation of the photoresist retracting device of the third embodiment of the utility model.
The specific embodiment
For making the technical problems to be solved in the utility model, technical scheme and advantage clearer, be described in detail below in conjunction with the accompanying drawings and the specific embodiments.
As shown in Figure 1, be the structural representation of the photoresist retracting device of first kind of embodiment of the utility model, this photoresist retracting device comprises:
Gas leakage detecting unit 3 is used to detect the seal of described first container.
First container of photoresist retracting device of the present utility model and the gum outlet of photoresist form confined space, make photoresist to reclaim under not contaminated situation, have prevented condensing of photoresist.And this device also utilizes the gas leakage detecting unit to detect the seal of first container, to guarantee the seal of first container.
Consult Fig. 1 once more, photoresist retracting device of the present utility model can be used to reclaim any photoresist that flows out from gum outlet, the photoresist retracting device of this embodiment is applied on the coating machine 1, first container 2 that receives photoresist is an accumulator tank, accumulator tank is connected with dispense tip 11 contacts of coating machine 1, and form confined spaces with dispense tip 11, to receive the photoresist that dispense tip 11 flows down.Because the photoresist that dispense tip flows out is to reclaim under closed environment, has avoided being subjected to air pollution.And, also utilize the gas leakage detecting unit to come the seal of accumulator tank is detected, guaranteed the seal of first container.
As shown in Figure 2, structural representation for the photoresist retracting device of second kind of embodiment of the utility model, the retracting device of this embodiment and first kind of embodiment are basic identical, its difference is also to comprise second an airtight container 4, described second container 4 is connected with first container 2 by pipeline, is used for receiving the photoresist that first container flows out.Also be provided with valve on this pipeline, be used for ending and opening pipeline.Preferably, with reference to figure 3, described second container comprises staving 41 and exhaust outlet 42, and described exhaust outlet 42 communicates with the external world.Described second container is used for the temporary photoresist that reclaims, and second container has exhaust outlet to be beneficial to the smooth inflow of photoresist.More preferably, be provided with check valve in the described exhaust outlet 42, this check valve makes the gas in second container to discharge, but ambient atmos can not enter in second container, avoid the pollution of photoresist in second container, thereby prevented condensing of photoresist in second container.
As shown in Figure 3, structural representation for the photoresist retracting device of the third embodiment of the utility model, the retracting device of this embodiment and second kind of embodiment are basic identical, its difference is that first container 2 comprises cell body 21 and interface 22, described interface 22 is made of elastomeric material, for example be rubber, foam etc., be used for being connected with described gum outlet is airtight.Because interface 22 is elastomeric material formation, when reclaiming photoresist, makes by crooked interface that interface and gum outlet are airtight and be connected.When not reclaiming,, make cell body form closed space with sealing joint.
Gas leakage detecting unit 3 of the present utility model can be any parts that can detect the seal of described first container, preferably, this gas leakage detecting unit comprises source of the gas (not shown), tracheae 32 and pressure gauge 31, described source of the gas can be any parts that gas can be provided, for example compressor etc.This source of the gas communicates with first container 2 by tracheae 32, and described tracheae 32 is provided with pressure gauge 31, also is provided with on the described tracheae to be used to the control valve 33 controlling described tracheae conducting and end.The gas leakage detecting unit of this embodiment feeds a certain amount of gas by source of the gas in first container, closed control valve 33 is observed the seal that manometric reading is determined first container this moment.If it is bigger that manometric reading descends, illustrate that there is gas leakage in first container, should carry out the airtight test of first container this moment, and the photoresist of Hui Shouing can be avoided air pollution like this.When this retracting device was applied on the coating machine, the gas leakage detecting unit can adopt the air compressor of coating machine to realize, by feed compressed air in first container, detects the seal of first container.
The utility model also provides a kind of coating machine, comprises the photoresist retracting device described in the foregoing description.Wherein, described coating machine also comprises a dispense tip, and described dispense tip is provided with gum outlet.
Described coating machine comprises:
The coating machine body comprises a dispense tip 11, and this coating machine body flows out photoresist by dispense tip, with coating one deck photoresist on glass substrate;
Gas leakage detecting unit 3 is used to detect the seal of described first container.
Because the initialization of coating machine before each coating, all can be when the PM of equipment and detergent line from dispense tip a large amount of photoresist that spues.These photoresists that spue are not used in production but drain as waste liquid, and this photoresist that not only can waste a large amount of costlinesses also can bring dispose waste liquid expensive.Liquid photoresist waste liquid constantly accumulates in equipment and condenses simultaneously, needs manpower to clean the mobility that also can reduce equipment.For this reason, coating machine of the present utility model is provided with first container that forms confined space with dispense tip at the gum outlet of dispense tip, makes photoresist to reclaim under not contaminated situation, has prevented condensing of photoresist.And this coating machine also utilizes the gas leakage detecting unit to detect the seal of first container, to guarantee the seal of first container.
First container of the utility model coating machine comprises cell body and interface, and described interface is an elastic interface, is used for being connected with described gum outlet is airtight.The gas leakage detecting unit of this coating machine is used to detect the seal of described first container, comprises source of the gas, tracheae and pressure gauge, and described source of the gas communicates with first container by tracheae, and described tracheae is provided with pressure gauge.
Coating machine of the present utility model also comprises second an airtight container, and described second container is connected with first container by pipeline, is used for receiving the photoresist that first container flows out.Also have on this second container one with the extraneous exhaust outlet that communicates, be provided with check valve in the described exhaust outlet, make that the gas in second container can be discharged, but ambient atmos can not enter in second container, thereby avoid that photoresist is polluted in second container.
Technique scheme has following technique effect: coating machine of the present utility model is provided with first container that forms confined space with dispense tip at the gum outlet of dispense tip, make photoresist under not contaminated situation, to reclaim, and prevented condensing of photoresist.And this coating machine also utilizes the gas leakage detecting unit to detect the seal of first container, to guarantee the seal of first container.
The above is a preferred implementation of the present utility model; should be understood that; for those skilled in the art; under the prerequisite that does not break away from principle described in the utility model; can also make some improvements and modifications, these improvements and modifications also should be considered as protection domain of the present utility model.
Claims (10)
1. a photoresist retracting device is characterized in that, comprising:
First container is used for forming confined space with the gum outlet of photoresist, to receive photoresist;
The gas leakage detecting unit is used to detect the seal of described first container.
2. photoresist retracting device according to claim 1 is characterized in that, described first container comprises that cell body and is used for and the airtight interface that is connected of described gum outlet.
3. photoresist retracting device according to claim 2 is characterized in that, described interface is an elastic interface.
4. according to the arbitrary described photoresist retracting device of claim 1-3, it is characterized in that described gas leakage detecting unit comprises source of the gas, tracheae and pressure gauge, described source of the gas communicates with first container by tracheae, and described tracheae is provided with pressure gauge.
5. photoresist retracting device according to claim 4 is characterized in that, also is provided with on the described tracheae to be used to the control valve controlling described tracheae conducting and end.
6. according to the arbitrary described photoresist retracting device of claim 1-3, it is characterized in that described device also comprises second an airtight container, described second container is connected with first container by pipeline, is used for receiving the photoresist that first container flows out.
7. photoresist retracting device according to claim 6 is characterized in that, described second container has an exhaust outlet that communicates with the external world.
8. photoresist retracting device according to claim 7 is characterized in that, is provided with check valve in the described exhaust outlet.
9. a coating machine is characterized in that, comprises the arbitrary described photoresist retracting device of claim 1-8.
10. coating machine according to claim 9 is characterized in that described coating machine also comprises a dispense tip, and described dispense tip is provided with gum outlet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320103774 CN203091218U (en) | 2013-03-07 | 2013-03-07 | Photoresist recovery device and coating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320103774 CN203091218U (en) | 2013-03-07 | 2013-03-07 | Photoresist recovery device and coating machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203091218U true CN203091218U (en) | 2013-07-31 |
Family
ID=48842662
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201320103774 Expired - Fee Related CN203091218U (en) | 2013-03-07 | 2013-03-07 | Photoresist recovery device and coating machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203091218U (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103769351A (en) * | 2014-01-20 | 2014-05-07 | 北京京东方显示技术有限公司 | Photoresist recovering system |
| CN103910493A (en) * | 2014-03-21 | 2014-07-09 | 京东方科技集团股份有限公司 | Photoresist recovery device, coating system and coating method |
| CN104209241A (en) * | 2014-08-26 | 2014-12-17 | 中天光伏材料有限公司 | Precise coating glue recycling device |
| CN106091993A (en) * | 2016-06-29 | 2016-11-09 | 南京华信藤仓光通信有限公司 | Reduce the method and device that optical fiber coloring is uneven |
| CN106321585A (en) * | 2016-11-22 | 2017-01-11 | 倪兆刚 | Color steel adhesive recovery device and recovery method |
| CN109290118A (en) * | 2018-10-31 | 2019-02-01 | 重庆市兴林电器有限公司 | Coating apparatus for fan blade |
| US10741427B2 (en) | 2016-11-22 | 2020-08-11 | Boe Technology Group Co., Ltd. | Coating apparatus for reducing waste of coating liquid, method for recycling coating liquid by utilization of the same, and method for cleaning the same |
-
2013
- 2013-03-07 CN CN 201320103774 patent/CN203091218U/en not_active Expired - Fee Related
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103769351A (en) * | 2014-01-20 | 2014-05-07 | 北京京东方显示技术有限公司 | Photoresist recovering system |
| CN103769351B (en) * | 2014-01-20 | 2016-08-17 | 北京京东方显示技术有限公司 | A kind of photoresist recovery system |
| CN103910493A (en) * | 2014-03-21 | 2014-07-09 | 京东方科技集团股份有限公司 | Photoresist recovery device, coating system and coating method |
| CN103910493B (en) * | 2014-03-21 | 2016-05-04 | 京东方科技集团股份有限公司 | Photoresist retracting device, coating system and coating process |
| CN104209241A (en) * | 2014-08-26 | 2014-12-17 | 中天光伏材料有限公司 | Precise coating glue recycling device |
| CN106091993A (en) * | 2016-06-29 | 2016-11-09 | 南京华信藤仓光通信有限公司 | Reduce the method and device that optical fiber coloring is uneven |
| CN106321585A (en) * | 2016-11-22 | 2017-01-11 | 倪兆刚 | Color steel adhesive recovery device and recovery method |
| US10741427B2 (en) | 2016-11-22 | 2020-08-11 | Boe Technology Group Co., Ltd. | Coating apparatus for reducing waste of coating liquid, method for recycling coating liquid by utilization of the same, and method for cleaning the same |
| CN109290118A (en) * | 2018-10-31 | 2019-02-01 | 重庆市兴林电器有限公司 | Coating apparatus for fan blade |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN203091218U (en) | Photoresist recovery device and coating machine | |
| CN206740340U (en) | A kind of building waterproof package seal checker | |
| CN204039357U (en) | A kind of waste oil high efficiente callback device | |
| CN203447806U (en) | Recovery device for solution polymerized styrene-butadiene rubber solvent | |
| CN204369583U (en) | A kind of sewage disposal intermittent discharge device | |
| CN109519568A (en) | A kind of electrolysis accident chlorine negative regualtion water-sealed device | |
| CN206414869U (en) | Ink wash waste liquid recovery apparatus is used in a kind of novel green printing | |
| CN207209040U (en) | A kind of hydrochloric acid tank positive/negative-pressure water seal arrangement | |
| CN205157124U (en) | Leakage detecting equipment | |
| CN207786265U (en) | A kind of circular treatment oily sludge glows exhaust gas processing device | |
| CN203963503U (en) | High pressure helium recycle and reuse device in a kind of leak-testing | |
| CN206754379U (en) | Agitating shaft gas blowing seal structure in a kind of tank for sludge hydrolytic processing equipment | |
| CN104072326B (en) | Producer draws recycling and processing device, the method for material displacement vent gas | |
| CN203687010U (en) | Condensate water recovery system | |
| CN204142445U (en) | Water closet cistern fittings sealing propertytest machine | |
| CN202558660U (en) | Waste liquor recycling device | |
| CN205404050U (en) | Valve seal testing arrangement | |
| CN203534774U (en) | Sealing detecting device for bottle cap with unidirectional-conduction plastic valve | |
| CN204320040U (en) | A kind of gas station recovery ammonia dilution re-use device | |
| CN202876408U (en) | Vacuum device for rectifying nitrobenzene | |
| CN220912577U (en) | Helium detection system with helium purification function | |
| CN203294385U (en) | Medicine bottling on-line air drying device | |
| CN107954204A (en) | The separating mechanism of labeling clout | |
| CN203635025U (en) | Waste gas condensate acid water recovery device | |
| CN208413899U (en) | A kind of chelate resin tower pickling water reclamation system |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130731 |