CN203084767U - Quartz wafer counting machine - Google Patents
Quartz wafer counting machine Download PDFInfo
- Publication number
- CN203084767U CN203084767U CN 201320057237 CN201320057237U CN203084767U CN 203084767 U CN203084767 U CN 203084767U CN 201320057237 CN201320057237 CN 201320057237 CN 201320057237 U CN201320057237 U CN 201320057237U CN 203084767 U CN203084767 U CN 203084767U
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- CN
- China
- Prior art keywords
- light source
- box body
- blowing box
- slide block
- wafer
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
The utility model discloses a quartz wafer counting machine including a feeding box module and a visual module. The feeding box module includes a linear guideway. The linear guideway is connected with a bottom board of a feeding box fixedly. A feeding box body is arranged on the bottom board of the feeding box. The linear guideway is arranged on a linear guideway slide block. The linear guideway can slide along the linear guideway slide block. The linear guideway is connected with a rack through the linear guideway slide block. The visual module includes a camera fixing rod. The camera fixing rod is fixed on the rack. The top end of the camera fixing rod is connected with an industrial camera fixedly through the camera fixing board. A light source is arranged on the rack fixedly. The industrial camera is arranged right above the light source vertically. The light source is connected with a light source power supply. The light source is provided with a light source switch. The light source is arranged below the feeding box body fixedly. The bottom part of the feeding box body is provided with a light hole. The quartz wafer counting machine provided by the utility model can obtain the quantity of quartz wafers automatically and improve the counting efficiency.
Description
Technical field
The utility model relates to a kind of process equipment of semiconductor wafer, is specifically related to a kind of quartz wafer tablet counter.
Background technology
At present, several pieces of quartz wafer are by manually finishing, and several pieces efficient are very low.
Summary of the invention
Technical problem to be solved in the utility model provides a kind of quartz wafer tablet counter, and it can obtain the quantity of wafer automatically.
For solving the problems of the technologies described above, the technical solution of the utility model quartz wafer tablet counter is:
Comprise blowing cartridge module 2, vision module 3; Blowing cartridge module 2 comprises line slideway 6, line slideway 6 fixedly connected blowing box plates 10, and blowing box plate 10 is provided with blowing box body 7; Line slideway 6 is movably set on the line rail slide block 14, and line slideway 6 rail slide block 14 along the line slides; Line slideway 6 is connected with frame 1 by line rail slide block 14; Vision module 3 comprises camera fixed bar 11, and camera fixed bar 11 is fixedly set on the frame 1; The top of camera fixed bar 11 is by camera fixed head 12 fixedly connected industrial cameras 13; Be set with light source 15 on the frame, industrial camera 13 is vertically corresponding above light source 15; Light source 15 connects light source power 4; Light source 15 is provided with light source switch 5; Light source 15 is fixedly set in the below of blowing box body 7, and the bottom of blowing box body 7 was provided with unthreaded hole.
Be provided with wafer slide block 8 in the described blowing box body 7, wafer slide block 8 connects blowing box plate 10 by extension spring 9.
Described line slideway 6 rail slide blocks 14 along the line slide, and drive blowing box body 7 and move, and make blowing box body 7 skid off or push; Line slideway 6 drives blowing box body 7 and skids off, and places wafer in blowing box body 7, and wafer slide block 8 compresses wafer under the pulling force effect of extension spring 9; Line slideway 6 drives blowing box body 7 and pushes, and the rail slide block 14 along the line under the effect of line slideway 6 of the wafer after compressing slides; When blowing box body 7 touches light source switch 5, light source 15 is lighted; Industrial camera 13 is gathered the number of wafers image under the cooperation of light source 15, draw the quantity of wafer.
The technique effect that the utility model can reach is:
The utility model can obtain the quantity of wafer automatically, improves several pieces efficient.
Description of drawings
Below in conjunction with the drawings and specific embodiments the utility model is described in further detail:
Fig. 1 is the synoptic diagram of the utility model quartz wafer tablet counter;
Fig. 2 is the synoptic diagram of blowing cartridge module of the present utility model;
The synoptic diagram of Fig. 3 vision module of the present utility model.
Description of reference numerals among the figure:
1 is frame, and 2 is the blowing cartridge module,
3 is vision module, and 4 is light source power,
5 is light source switch, and 6 is line slideway,
7 is the blowing box body, and 8 is the wafer slide block,
9 are extension spring, and 10 is the blowing box plate,
11 is the camera fixed bar, and 12 is the camera fixed head,
13 is industrial camera, and 14 is line rail slide block,
15 is light source.
Embodiment
As shown in Figure 1, the utility model quartz wafer tablet counter comprises blowing cartridge module 2, vision module 3; As shown in Figure 2, blowing cartridge module 2 comprises line slideway 6, line slideway 6 fixedly connected blowing box plates 10, and blowing box plate 10 is provided with blowing box body 7; Line slideway 6 is movably set on the line rail slide block 14, and line slideway 6 rail slide block 14 along the line slides; Line slideway 6 is connected with frame 1 by line rail slide block 14;
Be provided with wafer slide block 8 in the blowing box body 7, wafer slide block 8 connects blowing box plate 10 by extension spring 9;
As shown in Figure 3, vision module 3 comprises camera fixed bar 11, and camera fixed bar 11 is fixedly set on the frame 1; The top of camera fixed bar 11 is by camera fixed head 12 fixedly connected industrial cameras 13;
Be set with light source 15 on the frame, industrial camera 13 is vertically corresponding above light source 15;
The course of work of the present utility model is as follows:
Claims (3)
1. a quartz wafer tablet counter is characterized in that: comprise blowing cartridge module (2), vision module (3); Blowing cartridge module (2) comprises line slideway (6), the fixedly connected blowing box plate of line slideway (6) (10), and blowing box plate (10) is provided with blowing box body (7); Line slideway (6) is movably set on the line rail slide block (14), and line slideway (6) rail slide block (14) along the line slides; Line slideway (6) is connected with frame (1) by line rail slide block (14);
Vision module (3) comprises camera fixed bar (11), and camera fixed bar (11) is fixedly set on the frame (1); The top of camera fixed bar (11) is by the fixedly connected industrial camera of camera fixed head (12) (13);
Be set with light source (15) on the frame, the vertically corresponding top of industrial camera (13) in light source (15);
Light source (15) connects light source power (4); Light source (15) is provided with light source switch (5); Light source (15) is fixedly set in the below of blowing box body (7), and the bottom of blowing box body (7) was provided with unthreaded hole.
2. quartz wafer tablet counter according to claim 1 is characterized in that: be provided with wafer slide block (8) in the described blowing box body (7), wafer slide block (8) connects blowing box plate (10) by extension spring (9).
3. quartz wafer tablet counter according to claim 1 is characterized in that: described line slideway (6) rail slide block (14) along the line slides, and drives blowing box body (7) and moves, and makes blowing box body (7) skid off or push;
Line slideway (6) drives blowing box body (7) and skids off, and places wafer in blowing box body (7), and wafer slide block (8) compresses wafer under the pulling force effect of extension spring (9);
Line slideway (6) drives blowing box body (7) and pushes, and the rail slide block along the line (14) under the effect of line slideway (6) of the wafer after compressing slides; When blowing box body (7) touches light source switch (5), light source (15) is lighted;
Industrial camera (13) is gathered the number of wafers image under the cooperation of light source (15), draw the quantity of wafer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320057237 CN203084767U (en) | 2013-02-01 | 2013-02-01 | Quartz wafer counting machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320057237 CN203084767U (en) | 2013-02-01 | 2013-02-01 | Quartz wafer counting machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203084767U true CN203084767U (en) | 2013-07-24 |
Family
ID=48830586
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201320057237 Expired - Lifetime CN203084767U (en) | 2013-02-01 | 2013-02-01 | Quartz wafer counting machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203084767U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103077422A (en) * | 2013-02-01 | 2013-05-01 | 浙江大学台州研究院 | Quartz wafer counting machine |
| CN107945180A (en) * | 2017-12-26 | 2018-04-20 | 浙江大学台州研究院 | Come from the visible detection method of the shallow cut in quartz wafer surface of polishing |
| CN108190408A (en) * | 2018-01-17 | 2018-06-22 | 龙利得包装印刷股份有限公司 | A kind of information-based complete intelligent carton production system |
-
2013
- 2013-02-01 CN CN 201320057237 patent/CN203084767U/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103077422A (en) * | 2013-02-01 | 2013-05-01 | 浙江大学台州研究院 | Quartz wafer counting machine |
| CN107945180A (en) * | 2017-12-26 | 2018-04-20 | 浙江大学台州研究院 | Come from the visible detection method of the shallow cut in quartz wafer surface of polishing |
| CN108190408A (en) * | 2018-01-17 | 2018-06-22 | 龙利得包装印刷股份有限公司 | A kind of information-based complete intelligent carton production system |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C56 | Change in the name or address of the patentee | ||
| CP02 | Change in the address of a patent holder |
Address after: Truman town Yuhuan County Taizhou city Zhejiang province 317605 Hu Xing Industrial Park (Wu Jiaduan) Chu Chau talent dream factory Patentee after: RESEARCH INSTITUTE OF ZHEJIANG University TAIZHOU Address before: 317600 Yuhuan County Zhejiang Automobile & Motorcycle Industrial Zone Zhejiang Taizhou Motorcycle & motorcycle Research Institute Patentee before: RESEARCH INSTITUTE OF ZHEJIANG University TAIZHOU |
|
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20130724 |