CN203069504U - Adjustable filter and non-dispersive gas detector - Google Patents
Adjustable filter and non-dispersive gas detector Download PDFInfo
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- CN203069504U CN203069504U CN 201220625553 CN201220625553U CN203069504U CN 203069504 U CN203069504 U CN 203069504U CN 201220625553 CN201220625553 CN 201220625553 CN 201220625553 U CN201220625553 U CN 201220625553U CN 203069504 U CN203069504 U CN 203069504U
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Abstract
The utility model provides an adjustable filter and a non-dispersive gas detector. The adjustable filter comprises a substrate and a cover plate opposite to each other, wherein a fixed reflection mirror is arranged on the surface of the base; a movable reflection mirror is arranged on the surface of the fixed reflection mirror through a plurality of anchoring points and is parallel to the fixed reflection mirror; the movable reflection mirror can move towards two directions of the base and the cover plate; the reflection rates of the fixed reflection mirror and the movable reflection mirror to the light of a working wave section are greater than that of other wave sections; the transmission rates of the substrate and the cover plate to the light of the working wave section are greater than that of other wave sections; a first limiting member is arranged between the substrate and the movable reflection mirror; and a second limiting member is arranged between the movable reflection mirror and the cover plate. The adjustable filter has the advantages that the filter is controlled by the limiting member to precisely output a beam of a characteristic absorption wavelength and a beam of a reference wavelength; and through the comparison of twice detection results, the interference is effectively reduced, and the detection precision of the non-dispersive gas detector is improved.
Description
Technical field
The utility model belongs to microelectromechanical systems (MEMS) field, relates to a kind of adjustable filter based on Fabry-Perot-type cavity and MEMS technology and on-dispersive gas detector.
Background technology
With non-dispersive infrared gas sensor (NDIR) be representative to absorb optical radiation with probe gas be the gas detector of ultimate principle, be to utilize gas to be measured in the absorption of characteristic absorpting spectruming line to radiation, thereby detect a class sensor of the information such as kind, concentration of gas.Advantage such as that non-dispersive infrared gas sensor has is highly sensitive, selectivity good, response speed is fast is applied to each industrial or agricultural field more and more widely.
Be example with infrared light as probing light, the basic comprising of non-dispersive infrared gas sensor comprises infrared origin, narrow band filter slice, air chamber and the infrared eye that is used for receiving and detecting infrared radiation.During work, by the wide spectrum infrared radiation of infrared origin emission, by forming the infrared radiation of the specific wavelength corresponding with the characteristic absorpting spectruming line of gas to be measured behind the narrow band filter slice.Above-mentioned infrared radiation is by being full of the air chamber of gas to be measured, thus since the characteristic absorption peak of its wavelength and gas to be measured coincide and caused infrared intensity to decay by gas absorption to be measured.According to Lambert-Beer's law, the degree that infrared radiation is absorbed decay is relevant with gaseous species to be measured, concentration etc., by with the relevant information that can obtain gas to be measured without the attenuated radiation intensity contrast.
In actual use, because the performance of infrared origin and infrared eye is along with service time and be subjected to the influence of factors such as variation of ambient temperature can produce drift, thereby influence accuracy of detection and the repeatability of non-dispersive infrared gas sensor.In addition, air chamber is subjected to the pollution of dust etc. also can directly reduce the accuracy of testing result.For overcoming the influence of above-mentioned unfavorable factor, non-dispersive infrared gas sensor often needs to be designed to more complicated form.For example, modulation forms the influence that AC signal can overcome device performance drift to a certain extent to infrared radiation to utilize chopper.Increase by one road reference light paths and form the adverse effect that the double light path non-dispersive infrared gas sensor can overcome the air chamber pollution.Therefore, non-dispersive infrared gas sensor has multiple different implementations such as Dan Shu-single wavelength, Dan Shu-dual wavelength, two-beam-dual wavelength.Structural form to several non-dispersive infrared gas sensors commonly used among the patent US6590710 B2 is described.
General use multilayer film form the narrow-band interference filter plate in the tradition non-dispersive infrared gas sensor, and the logical centre wavelength of its band is fixed, and therefore a specific interference filter element can only be for a kind of detection of gas characteristic spectral line.If the use reference beam need to use the another one interference filter element, the logical centre wavelength of its band is typically chosen near the of gas characteristic spectral line to be measured but the wavelength that do not overlap with characteristic spectral line.For example, be used for the sensor that CO2 detects, detect wavelength and be chosen in 4.2um usually, and reference wavelength can be chosen in 3.8um.Above-mentioned a pair of interference filter element only can detect a kind of gas.If a non-dispersive infrared gas sensor need detect several gas with various, often adopt a plurality of interference filter elements with different centre wavelengths are installed on the runner, switch by being rotated between the different spectral lines.The shortcoming that this method exists comprise that volume increases, price rises, there is mechanical noise in whirligig and the life-span limited etc.
For overcoming above-mentioned deficiency, patent US5646729 provides a kind of non-dispersive infrared gas sensor.Its characteristics are to arrange in the light path MEMS Fabry-Perot adjustable filter, utilize electrostatic force to change distance between two catoptrons of fabry-perot filter, the wavelength that sees through of realizing wave filter switches between detection wavelength and reference wavelength, thereby only use single filter, single infrared eye, the structure of similar Dan Shu-single wavelength can realize that classic method must use the dual wavelength of two filter plates, two detectors to detect.And wavelength need not whirligig when switching, and compares with traditional non-dispersive infrared gas sensor, has advantages such as cost is low, the life-span is long, volume is little, low in energy consumption.
But, the moving reflector of above-mentioned MEMS Fabry-Perot adjustable filter be given a shock, external factor such as acceleration does the time spent and also can produce displacement, thereby cause that two distances between the catoptron change.Its result can cause the centre wavelength that sees through of fabry-perot filter to produce skew, causes the detection error of non-dispersive infrared gas sensor.
The utility model content
Technical problem to be solved in the utility model is, a kind of adjustable filter and on-dispersive gas detector are provided, and can effectively overcome the adverse effect that the dust of air chamber and moisture etc. pollute.
In order to address the above problem, the utility model provides a kind of adjustable filter, comprise the substrate and the cover plate that are oppositely arranged, one stationary mirror is set on the surface of described substrate, one moving reflector is arranged at stationary mirror surface and parallel with stationary mirror by a plurality of anchor points, described moving reflector can basad direction and cover plate direction both direction move; Described stationary mirror and moving reflector to the reflection of light rate of service band greater than all the other wave bands, described substrate to the optical transmission rate of service band greater than all the other wave bands; Be provided with first limiting component between described stationary mirror and the moving reflector, be provided with second limiting component between described moving reflector and the cover plate.
Optionally, described first limiting component is arranged on stationary mirror surface or moving reflector surface.
Optionally, described second limiting component is arranged on moving reflector surface or lid surface.
Optionally, the position of described first limiting component and second limiting component is aimed at mutually along the direction perpendicular to moving reflector.
Optionally, described first limiting component and/or second limiting component are close-shaped.
Optionally, described stationary mirror is arranged alternately by two kinds of materials with different refraction coefficients with moving reflector and constitutes, and described two kinds of materials are respectively polysilicon and silicon dioxide.
The utility model further provides a kind of on-dispersive gas detector, comprise radiation source, adjustable filter, air chamber, and detector, the broad-spectrum light radiation of radiation source emission becomes narrow-band radiated after by adjustable filter, through be in the then attenuation by absorption of characteristic absorption wave band of gas to be measured behind the air chamber as if the light of this wave band, be detected device again and receive and export corresponding electric signal, described adjustable filter is above-mentioned any adjustable filter, described radiation source is arranged on the cover plate of adjustable filter, after the cavity filtering of radiant light by described moving reflector and stationary mirror formation, outgoing from substrate.
Optionally, described cover plate has a cavity on the surface near moving reflector one side; Described cavity surface covers an adiabatic membrane, and described radiation source is by the unsettled opening part that is arranged at cavity of heat insulation film.
Optionally, further on the surface that substrate deviates from described stationary mirror antireflective film is set, to increase the transmitance of service band optical radiation.
Optionally, further on the surface that substrate deviates from described stationary mirror one aperture diaphragm is set, described aperture diaphragm is aimed at described moving reflector along the direction perpendicular to moving reflector.
The utility model also provides a kind of on-dispersive gas detector, comprise radiation source, air chamber, adjustable filter, and detector, the broad-spectrum light radiation of radiation source emission is injected adjustable filter by air chamber, gas to be measured in the air chamber only absorbs the light of characteristic wavelength, adjustable filter leaches the light of described characteristic absorption wavelength, the light that leaches through adjustable filter is detected the device reception again and exports corresponding electric signal, described adjustable filter is above-mentioned any adjustable filter, described detector is arranged on the cover plate of adjustable filter, radiant light is incident from substrate, and after the cavity filtering by described moving reflector and stationary mirror formation, absorbed by described detector.
Optionally, described cover plate has a cavity on the surface near moving reflector one side; Described cavity surface covers an adiabatic membrane, and described detector is by the unsettled opening part that is arranged at cavity of heat insulation film.
Optionally, further on the surface that substrate deviates from described stationary mirror antireflective film is set, to increase the transmitance of service band optical radiation.
Optionally, further on the surface that substrate deviates from described stationary mirror one aperture diaphragm is set, described aperture diaphragm is aimed at described moving reflector along the direction perpendicular to moving reflector.
Advantage of the present utility model is, by the height of controlling limiting component one output wavelength of wave filter accurately being navigated to is the characteristic absorption wavelength of gas in the air chamber just, this light is by gas absorption to be measured after then passing through air chamber, thereby obtains light through the attenuation degree of air chamber; And the height of controlling another limiting component makes wave filter export the light of another reference wavelength, the light of this wavelength can be by gas absorption to be measured, decay is mainly by existing factors such as dust and moisture to cause in the air chamber, by the comparison to twice testing result, can remove the air chamber internal contamination to the influence of testing result, thereby the on-dispersive gas of realizing Dan Shu-dual wavelength detects, and can effectively overcome the adverse effect that the dust of air chamber and moisture etc. pollute.Utilize adjustable filter of the present utility model, further overcome shortcomings such as the high and two groups of detector performances of cost that the on-dispersive gas sensor of traditional Dan Shu-dual wavelength needs two groups of filter plates and detector to bring do not match.
Description of drawings
Accompanying drawing 2A is the synoptic diagram that the moving reflector of the described adjustable filter of embodiment in the accompanying drawing 1 is urged to first limiting component and stationary mirror contact position;
Accompanying drawing 2B is the synoptic diagram that the moving reflector of adjustable filter described in the accompanying drawing 1 is urged to second limiting component and lid surface contact position;
Accompanying drawing 2C is the moving reflector of adjustable filter in the accompanying drawing 1 corresponding synoptic diagram that sees through centre wavelength when driving between first limiting component and second limiting component;
Accompanying drawing 3 is synoptic diagram of another embodiment structure of adjustable filter described in the utility model;
Accompanying drawing 4 forms the structural representation of a kind of embodiment of on-dispersive gas sensor for utilizing the adjustable filter shown in the accompanying drawing 1;
Accompanying drawing 5 forms the synoptic diagram of the another kind of embodiment of on-dispersive gas sensor for utilizing the adjustable filter shown in the accompanying drawing 3.
Embodiment
The adjustable filter that the utility model is provided below in conjunction with accompanying drawing and the embodiment of on-dispersive gas detector elaborate.
Said fixing catoptron 18 and moving reflector 13 can be Bragg mirrors, generally by having different refraction coefficients, and the two kinds of membraneous materials (for example polysilicon and silicon dioxide) that preferably have big refraction coefficient difference alternately constitute, by adjusting the thickness of every kind of film, can make stationary mirror 18 and moving reflector 13 have higher reflectivity at a specific service band.Stationary mirror 18 and moving reflector 13 also can be the catoptrons of other type, for example adopt some common light absorbing materials, and the reflection of light rate to a certain specific service band of can also accomplishing is greater than all the other wave bands.The optical transmission rate of substrate 11 and 12 pairs of service bands of cover plate for example adopts some common light absorbing materials greater than all the other wave bands, can accomplish that projection ratio to the light of a certain specific service band is greater than all the other wave bands.
Continue with reference to the accompanying drawings 1, the surface of moving reflector 13 arranges first limiting component 14 and second limiting component 15 respectively, with the critical localisation of accurate restriction moving reflector 13 motions.When moving reflector 13 moved to stationary mirror 18 directions, the minor increment between moving reflector 13 and the stationary mirror 18 was d1, and obviously, this numerical value is the height of first limiting component 14; When moving reflector 13 when moving away from catoptron 18 directions, the ultimate range between moving reflector 13 and the stationary mirror 18 is d2, obviously, this numerical value is the height that distance between substrate 11 and the cover plate 12 deducts second limiting component 15.
Specifically, accompanying drawing 2A is the synoptic diagram that the moving reflector 13 of the described adjustable filter 2 of embodiment in the accompanying drawing 1 is urged to first limiting component 14 and stationary mirror 18 contact positions.By driving methods such as static, piezoelectricity, two material heat expansions, make moving reflector 13 to stationary mirror 18 motions, first limiting component 14 contacts with stationary mirror 18 and is stopped and stop, spacing between this moment moving reflector 13 and the stationary mirror 18 is d1, corresponding adjustable filter 2 be λ 1 through centre wavelength.According to the wavelength formula of Fabry-Perot, λ 1=2d1/m, m are integer.Owing to adopted first limiting component 14, as long as guarantee that added driving signal slightly transships, can guarantee that each moving reflector 13 all can accurately move to the position of d1, thereby guarantee that it is the accuracy of λ 1 that adjustable filter 2 sees through centre wavelength.
When by different driving methods such as static, piezoelectricity, two material heat expansions moving reflector being driven, need further arrange according to selected type of drive and drive required structure.For example, when adopting static to drive, need electrode be set respectively on substrate surface, lid surface and moving reflector surface, between every two arrays of electrodes, apply opposite voltage, drive moving reflector by electrostatic attraction.When adopting the piezoelectricity mode to drive, need piezoelectric be set at moving reflector, after applying electric signal, piezoelectric can produce mechanical force and further drive moving reflector.When adopting two material heat expansion modes to drive, two kinds of materials that need have different heat expansion coefficient moving reflector setting, after applying electric signal, the heat of generation causes two kinds of thermal expansions that material is different, further produces mechanical force and drives moving reflector.
Accompanying drawing 2B is the synoptic diagram that the moving reflector 13 of adjustable filter 2 described in the accompanying drawing 1 is urged to second limiting component 15 and cover plate 12 surperficial contact positions.Moving reflector 13 is to cover plate 12 motion, and the surface of second limiting component 15 contact with the surface of cover plate 12 and stopped and stop, and the spacing between this moment moving reflector 13 and the stationary mirror 18 is d2, and the adjustable filter 2 of correspondence is λ 2 through centre wavelength.Owing to adopted second limiting component 15, each moving reflector 13 all can accurately move to the position of d2, thereby assurance adjustable filter 2 is the accuracy of λ 2 through centre wavelength.
Accompanying drawing 2C is the moving reflector 13 of adjustable filter 2 in the accompanying drawing 1 corresponding synoptic diagram that sees through centre wavelength when driving between first limiting component 14 and second limiting component 15.When the spacing between moving reflector 13 and the stationary mirror 18 was d1, corresponding was λ 1 through centre wavelength, and λ 1 can be used as the reference wavelength of gas to be measured.When the spacing between moving reflector 13 and the stationary mirror 18 was d2, corresponding was λ 2 through centre wavelength, and λ 2 can be used as the detection wavelength of gas to be measured.Otherwise λ 1 also can be used as the detection wavelength of gas to be measured, and with the reference wavelength of λ 2 as gas to be measured.
First limiting component 14 and the position of second limiting component 15 can be selected along aiming at mutually perpendicular to the direction of moving reflector 13, with the intensity of the machinery that improves moving reflector 13.In addition, first limiting component 14 and second limiting component 15 can be made as annular or closed form such as square, can further realize strengthening the effect of the physical strength of moving reflector 13, improve the flatness of moving reflector 13 effectively.
Accompanying drawing 3 is synoptic diagram of another embodiment structure of adjustable filter described in the utility model, comprising: substrate 11, cover plate 12, moving reflector 13 and stationary mirror 18.The wave band of 11 pairs of work of substrate has high permeability.Stationary mirror 18 is arranged at the upper surface of substrate 11.Moving reflector 13 is fixedly supported to the top of substrate 11 by anchor point 16 or other fixed form, and forms spacing d0 between the stationary mirror 18.Substrate 11 is passed through anchor point 17 bondings with cover plate 12.Stationary mirror 18 and moving reflector 13 can be Bragg mirrors, also can be the catoptrons of other type, for example adopt some common light absorbing materials, and the reflection of light rate to a certain specific service band of can also accomplishing is greater than all the other wave bands.
Different with the structure shown in the accompanying drawing 1, first limiting component 14 of structure shown in this embodiment and second limiting component 15 are separately positioned on the surface of substrate 11 and cover plate 12, but can realize accurately limiting the purpose of the critical localisation of moving reflector 13 motions equally.Similarly, first limiting component 14 also can be selected along aiming at mutually perpendicular to the direction of moving reflector 13 with the position of second limiting component 15; First limiting component 14 and second limiting component 15 also can be made as closed forms such as annular or square.
Accompanying drawing 2A is to be example with the specific implementation shown in the accompanying drawing 1 to the course of work of the described adjustable filter of accompanying drawing 2C, but those skilled in the art will appreciate that the embodiment shown in the accompanying drawing 3 also can and reach same effect by similar method work.
Accompanying drawing 4 comprises: radiation source 41, adjustable filter 42, air chamber 43 and detector 44 for utilizing the structural representation of a kind of embodiment of the described adjustable filter 2 formation on-dispersive gas sensors of embodiment in the accompanying drawing 1.
Described radiation source 41 is arranged at the cover plate 12 of adjustable filter 42 near the surface of moving reflector 13 1 sides, in this embodiment, further has a cavity 26 on the surface of close moving reflector 13 1 sides of described cover plate 12; Described cavity 26 surface coverage one adiabatic membrane 25, described radiation source 41 is by the heat insulation film 25 unsettled opening parts that are arranged at cavity 26.The advantage that cavity 26 and adiabatic membrane 25 be set be can with the surrounding environment thermal insulation, when applying identical heating power, can effectively improve the temperature of radiation source, thereby improve radiation efficiency.Radiation source 41 for example is commonly used to do the infrared band radiation that gas detects, but adopts heating resistor devices such as polysilicon or tinsel for comprising the broad-spectrum radiate of continuous wavelength, can launch the infrared band radiation by electrical heating.
The light of radiation source 41 radiation becomes narrow-band radiated after by adjustable filter 42.Stationary mirror 18 is alternately formed by silicon dioxide layer 22, polysilicon layer 23, silicon dioxide layer 22, polysilicon layer 23 four-level membranes; Moving reflector 13, moving reflector 13 is alternately formed by polysilicon layer 23, silicon dioxide layer 22, polysilicon layer 23 three-layer thin-films.Be subjected to the restriction of first limiting component 14 and second limiting component 15 by moving reflector 13, drive between stationary mirror 18 and cover plate 12 and switch, corresponding sees through centre wavelength at λ 1, switches between the λ 2, and the light after the filtration is through substrate 11 outgoing.
This embodiment is with the detection wavelength of λ 1 as gas to be measured, and λ 2 is example as the reference wavelength of gas to be measured.When the distance between moving reflector 13 and the stationary mirror 18 is d1, what filter the back outgoing mainly is that wavelength is the light of λ 1, the characteristic absorption wavelength that can to make this wavelength by the height of controlling first limiting component 14 be gas in the air chamber 43 just, this light is by gas absorption to be measured after then passing through air chamber 43, radiation after attenuation by absorption is detected device 44 and receives and export corresponding electric signal, thereby obtains light through the attenuation degree of air chamber 43; When the distance between moving reflector 13 and the stationary mirror 18 is d2, what filter the back outgoing mainly is that wavelength is the light of λ 2, obviously the light of this wavelength can not be the characteristic wavelength of gas to be measured again, so can be by gas absorption to be measured, but owing to may have factors such as dust and moisture in the air chamber, this light also can slightly be decayed, and the light after the decay is detected device 44 and receives and export corresponding electric signal.By the comparison to twice testing result, can remove air chamber 43 internal contaminations to the influence of testing result, thereby the on-dispersive gas of realizing Dan Shu-dual wavelength detects, can effectively overcome the adverse effect that the dust of air chamber 43 and moisture etc. pollute.
In addition, can be further on the surface that substrate 11 deviates from described stationary mirror 18 antireflective film 27 be set, to increase the transmitance of service band optical radiation, can also further an aperture diaphragm 28 be set, described aperture diaphragm 28 can utilize the metal film definition, and aims at described moving reflector 13 along the direction perpendicular to moving reflector 13.
Accompanying drawing 5 forms the synoptic diagram of the another kind of embodiment of on-dispersive gas sensor for utilizing the adjustable filter shown in the accompanying drawing 3, comprising: radiation source 51, air chamber 53, adjustable filter 52, detector 54.Compare with last embodiment, adjustable filter 52 is arranged between air chamber 53 and the detector 54.Radiation source 51 adopts common broad-spectrum radiate source, by gas to be measured in the air chamber 53 be broad-spectrum radiate also, have only the radiation corresponding with gas characteristic absorption line λ to be measured 2 to be absorbed decay.
Broad-spectrum radiate after being absorbed incides in the adjustable filter 52 by substrate 11, and described detector 54 is arranged at the cover plate 12 of adjustable filter 52 near the surface of moving reflector 13 1 sides.Stationary mirror 18 is alternately formed by silicon dioxide layer 22, polysilicon layer 23, silicon dioxide layer 22, polysilicon layer 23 four-level membranes; Moving reflector 13, moving reflector 13 is alternately formed by polysilicon layer 23, silicon dioxide layer 22, polysilicon layer 23 three-layer thin-films.Moving reflector 13 is subjected to the restriction of first limiting component 14 and second limiting component 15, drives between stationary mirror 18 and cover plate 12 and switches, and corresponding sees through centre wavelength at λ 1, switches between the λ 2.In this embodiment, further has a cavity 26 on the surface of close moving reflector 13 1 sides of described cover plate 12; Described cavity 26 surface coverage one adiabatic membrane 25, described detector 54 is by the heat insulation film 25 unsettled opening parts that are arranged at cavity 26.The advantage that cavity 26 and adiabatic membrane 25 be set be can with the surrounding environment thermal insulation, when receiving the equal-wattage radiation, can avoid heat diffusion in environment, effectively improve the receiving efficiency of detector 54, thereby improve detection efficiency.
This embodiment is with the detection wavelength of λ 1 as gas to be measured, and λ 2 is example as the reference wavelength of gas to be measured.When the distance between moving reflector 13 and the stationary mirror 18 is d1, what filter the back outgoing mainly is that wavelength is the light of λ 1, the characteristic absorption wavelength that can to make this wavelength by the height of controlling first limiting component 14 be gas in the air chamber 53 just, then detector 54 receives and exports corresponding electric signal under this state, thereby obtains the light of this wavelength through the attenuation degree of air chamber 53; When the distance between moving reflector 13 and the stationary mirror 18 is d2, what filter the back outgoing mainly is that wavelength is the light of λ 2, obviously the light of this wavelength can not be the characteristic wavelength of gas to be measured again, so can be by gas absorption to be measured, but owing to may have factors such as dust and moisture in the air chamber, this light also can slightly be decayed, and the other detector 54 after adjustable filter 52 filters of the light after the decay receives, and exports corresponding electric signal.By the comparison to twice testing result, can remove air chamber 53 internal contaminations to the influence of testing result, thereby the on-dispersive gas of realizing Dan Shu-dual wavelength detects, can effectively overcome the adverse effect that the dust of air chamber 53 and moisture etc. pollute.
Different with the last embodiment shown in the accompanying drawing 4 is that last embodiment adopts the mode that absorbs after the first filtering, and light emitting devices and adjustable filter are integrated; This step adopts earlier and absorbs, and the mode of back filtering integrates absorption means and adjustable filter.Which kind of mode no matter, adjustable filter is all accurately controlled the position of moving reflector by two limit assemblies, be implemented in the accurate filtering that detects between wavelength and the reference wavelength.
Similarly, can be further on the surface that substrate 11 deviates from described stationary mirror 18 antireflective film 27 be set, to increase the transmitance of service band optical radiation, can also further an aperture diaphragm 28 be set, described aperture diaphragm 28 can utilize the metal film definition, and aims at described moving reflector 13 along the direction perpendicular to moving reflector 13.
The above only is preferred implementation of the present utility model; should be pointed out that for those skilled in the art, under the prerequisite that does not break away from the utility model principle; can also make some improvements and modifications, these improvements and modifications also should be considered as protection domain of the present utility model.
Claims (14)
1. an adjustable filter comprises the substrate and the cover plate that are oppositely arranged, it is characterized in that:
One stationary mirror is set on the surface of described substrate, and a moving reflector is arranged at stationary mirror surface and parallel with stationary mirror by a plurality of anchor points, described moving reflector can basad direction and cover plate direction both direction move;
Described stationary mirror and moving reflector to the reflection of light rate of service band greater than all the other wave bands, described substrate and cover plate to the optical transmission rate of service band greater than all the other wave bands;
Be provided with first limiting component between described stationary mirror and the moving reflector, be provided with second limiting component between described moving reflector and the cover plate.
2. adjustable filter according to claim 1 is characterized in that, described first limiting component is arranged on stationary mirror surface or moving reflector surface.
3. adjustable filter according to claim 1 is characterized in that, described second limiting component is arranged on moving reflector surface or lid surface.
4. adjustable filter according to claim 1 is characterized in that, the position of described first limiting component and second limiting component is aimed at mutually along the direction perpendicular to moving reflector.
5. adjustable filter according to claim 1 is characterized in that, described first limiting component and/or second limiting component are close-shaped.
6. adjustable filter according to claim 1 is characterized in that, described stationary mirror is arranged alternately by two kinds of materials with different refraction coefficients and constitutes; Described moving reflector also is arranged alternately by two kinds of materials with different refraction coefficients and constitutes.
7. on-dispersive gas detector, comprise radiation source, adjustable filter, air chamber, and detector, the broad-spectrum light radiation of radiation source emission becomes narrow-band radiated after by adjustable filter, through then being absorbed decay if the light of this wave band is in the characteristic absorption wave band of gas to be measured behind the air chamber, be detected device again and receive and export corresponding electric signal, it is characterized in that, described adjustable filter is any described adjustable filter of a claim 1～6, described radiation source is arranged on the cover plate of adjustable filter, after the cavity filtering of radiant light by described moving reflector and stationary mirror formation, outgoing from substrate.
8. on-dispersive gas detector according to claim 7 is characterized in that, described cover plate has a cavity on the surface near moving reflector one side; Described cavity surface covers an adiabatic membrane, and described radiation source is by the unsettled opening part that is arranged at cavity of heat insulation film.
9. on-dispersive gas detector according to claim 7 is characterized in that, further on the surface that substrate deviates from described stationary mirror antireflective film is set, to increase the transmitance of service band optical radiation.
10. on-dispersive gas detector according to claim 7, it is characterized in that, further on the surface that substrate deviates from described stationary mirror one aperture diaphragm is set, described aperture diaphragm is aimed at described moving reflector along the direction perpendicular to moving reflector.
11. on-dispersive gas detector, comprise radiation source, air chamber, adjustable filter, and detector, the broad-spectrum light radiation of radiation source emission is injected adjustable filter by air chamber, gas to be measured in the air chamber only absorbs the light of characteristic wavelength, adjustable filter leaches the light of described characteristic absorption wavelength, the light that leaches through adjustable filter is detected the device reception again and exports corresponding electric signal, it is characterized in that, described adjustable filter is any described adjustable filter of a claim 1～6, described detector is arranged on the cover plate of adjustable filter, radiant light is incident from substrate, and after the cavity filtering by described moving reflector and stationary mirror formation, absorbed by described detector.
12. on-dispersive gas detector according to claim 11 is characterized in that, described cover plate has a cavity on the surface near moving reflector one side; Described cavity surface covers an adiabatic membrane, and described detector is by the unsettled opening part that is arranged at cavity of heat insulation film.
13. on-dispersive gas detector according to claim 11 is characterized in that, further on the surface that substrate deviates from described stationary mirror antireflective film is set, to increase the transmitance of service band optical radiation.
14. on-dispersive gas detector according to claim 11, it is characterized in that, further on the surface that substrate deviates from described stationary mirror one aperture diaphragm is set, described aperture diaphragm is aimed at described moving reflector along the direction perpendicular to moving reflector.
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| CN 201220625553 CN203069504U (en) | 2012-11-23 | 2012-11-23 | Adjustable filter and non-dispersive gas detector |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103048283A (en) * | 2012-11-23 | 2013-04-17 | 姜利军 | Adjustable filter and non-dispersion gas detector |
| CN108204857A (en) * | 2016-12-17 | 2018-06-26 | 中国石油天然气股份有限公司 | Vibration signal detecting system and its assembly method |
| JP2018523846A (en) * | 2015-07-15 | 2018-08-23 | テクノロジー イノベーション モメンタム ファンド（イスラエル）リミテッド パートナーシップＴｅｃｈｎｏｌｏｇｙ Ｉｎｎｏｖａｔｉｏｎ Ｍｏｍｅｎｔｕｍ Ｆｕｎｄ（ｉｓｒａｅｌ）Ｌｉｍｉｔｅｄ Ｐａｒｔｎｅｒｓｈｉｐ | Adjustable MEMS etalon |
| JP2020500337A (en) * | 2016-11-20 | 2020-01-09 | ユニスペクトラル リミテッド | Adjustable MEMS etalon device |
| CN114981701A (en) * | 2019-09-25 | 2022-08-30 | 深圳市海谱纳米光学科技有限公司 | Adjustable optical filter device |
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2012
- 2012-11-23 CN CN 201220625553 patent/CN203069504U/en not_active Expired - Fee Related
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103048283A (en) * | 2012-11-23 | 2013-04-17 | 姜利军 | Adjustable filter and non-dispersion gas detector |
| CN103048283B (en) * | 2012-11-23 | 2015-03-18 | 姜利军 | Adjustable filter and non-dispersion gas detector |
| JP2018523846A (en) * | 2015-07-15 | 2018-08-23 | テクノロジー イノベーション モメンタム ファンド（イスラエル）リミテッド パートナーシップＴｅｃｈｎｏｌｏｇｙ Ｉｎｎｏｖａｔｉｏｎ Ｍｏｍｅｎｔｕｍ Ｆｕｎｄ（ｉｓｒａｅｌ）Ｌｉｍｉｔｅｄ Ｐａｒｔｎｅｒｓｈｉｐ | Adjustable MEMS etalon |
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| JP2020500337A (en) * | 2016-11-20 | 2020-01-09 | ユニスペクトラル リミテッド | Adjustable MEMS etalon device |
| US11474343B2 (en) | 2016-11-20 | 2022-10-18 | Unispectral Ltd. | Tunable MEMS etalon device |
| JP7269882B2 (en) | 2016-11-20 | 2023-05-09 | ユニスペクトラル リミテッド | Tunable MEMS etalon device |
| CN108204857A (en) * | 2016-12-17 | 2018-06-26 | 中国石油天然气股份有限公司 | Vibration signal detecting system and its assembly method |
| CN108204857B (en) * | 2016-12-17 | 2020-11-03 | 中国石油天然气股份有限公司 | Vibration signal detection system and assembly method thereof |
| CN114981701A (en) * | 2019-09-25 | 2022-08-30 | 深圳市海谱纳米光学科技有限公司 | Adjustable optical filter device |
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