CN203065567U - Target material base cylinder and base cylinder joint - Google Patents
Target material base cylinder and base cylinder joint Download PDFInfo
- Publication number
- CN203065567U CN203065567U CN 201320090934 CN201320090934U CN203065567U CN 203065567 U CN203065567 U CN 203065567U CN 201320090934 CN201320090934 CN 201320090934 CN 201320090934 U CN201320090934 U CN 201320090934U CN 203065567 U CN203065567 U CN 203065567U
- Authority
- CN
- China
- Prior art keywords
- foundation
- target
- cooling
- target foundation
- water inlet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000013077 target material Substances 0.000 title abstract description 14
- 239000000498 cooling water Substances 0.000 claims abstract description 128
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 48
- 238000007733 ion plating Methods 0.000 claims abstract description 40
- 238000009413 insulation Methods 0.000 claims abstract description 26
- 229910001220 stainless steel Inorganic materials 0.000 claims description 23
- 239000010935 stainless steel Substances 0.000 claims description 23
- 230000000630 rising effect Effects 0.000 claims description 22
- 238000007789 sealing Methods 0.000 claims description 11
- 239000002826 coolant Substances 0.000 claims description 8
- 230000006835 compression Effects 0.000 claims description 3
- 238000007906 compression Methods 0.000 claims description 3
- 238000003860 storage Methods 0.000 claims description 3
- 125000006850 spacer group Chemical group 0.000 claims description 2
- 238000009826 distribution Methods 0.000 abstract description 5
- 238000009776 industrial production Methods 0.000 abstract description 3
- 238000002360 preparation method Methods 0.000 abstract description 3
- 239000011253 protective coating Substances 0.000 abstract description 3
- 230000001105 regulatory effect Effects 0.000 abstract description 2
- 238000005516 engineering process Methods 0.000 description 7
- 239000011248 coating agent Substances 0.000 description 6
- 238000000576 coating method Methods 0.000 description 6
- 238000010276 construction Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000001755 magnetron sputter deposition Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 238000007738 vacuum evaporation Methods 0.000 description 2
- 235000007516 Chrysanthemum Nutrition 0.000 description 1
- 244000189548 Chrysanthemum x morifolium Species 0.000 description 1
- 230000001154 acute effect Effects 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005524 ceramic coating Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000008358 core component Substances 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000007888 film coating Substances 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- 230000003245 working effect Effects 0.000 description 1
Images
Landscapes
- Particle Accelerators (AREA)
Abstract
The utility model relates to the field of surface protective coating preparation, and in particular relates to a target material base cylinder for ion plating guns and a base cylinder joint. An insulation sleeve of the target material base cylinder is arranged outside the target material base cylinder, a permanent magnet or a magnetic ring and a cooling water inlet pipeline are arranged on the inner side of the target material base cylinder, and the permanent magnet or the magnetic ring is arranged on the exterior of the cooling water inlet pipeline; one end of the target material base cylinder is connected with a cooling water channel base, the cooling water inlet pipeline extends into the cooling water channel base to be communicated with the water inlet of the cooling water channel base, and the channel between the cooling water channel base and the target material base cylinder is communicated with a water outlet; and the other end of the target material base cylinder is connected with the connecting pipe of the target material base cylinder. The base cylinder is simple, compact and effective in structure, the length of a cooling water sleeve can be freely set, and the position of a target material in a vacuum chamber can be freely regulated; and the base cylinder is convenient to operate and simple in target material replacement, has good position adjustability, facilitates a whole machine design, satisfies various requirements of industrial production on plasma distribution in the vacuum chamber and the like.
Description
Technical field
The utility model relates to the surface protection coating preparation field, specifically a kind of target foundation and foundation joint for the ion plating rifle.
Background technology
The surface protection coating technology is to improve tool and mould and the important channel in mechanical part quality and work-ing life, PVD technology as one of material surface guard technology, with its functional, favorable environment protection and huge advantages such as synergy widely, can improve the mechanical properties such as wear resistance, solidity to corrosion, thermotolerance and fatigue resistance of tool and mould and machinery part surface, improve added value of product greatly, to guarantee reliably and the constantly operation under high speed, high temperature, high pressure, heavy duty and strong corrosive medium operating mode of modern mechanical parts and tool and mould.PVD mainly is divided into vacuum evaporation, magnetron sputtering and three types of ion plating.In actual applications, high-quality protective coating must have fine and close weave construction, no penetrance pin hole, high rigidity, and characteristics such as matrix bond is firm.Vacuum evaporation and magnetron sputtering be because particle energy and ionization level are low, causes that rete is loose porous, poor mechanical property, is difficult to obtain good coating and the bonding force between the matrix, seriously limited the application of such technology in the protective coating preparation field.
And the ion coating plating technology because simple in structure, ionization level is high, projectile energy is high, can easily obtain high rigidity, the ceramic coating of high-wearing feature, compound coating that additive method is difficult to obtain, be applied in instrument, above the mould, life-span is significantly improved, realized effect low-cost, high yield preferably; In addition, the ion coating plating technology has low temperature, two characteristics of high energy, almost can be on any base material film forming, range of application is very wide.The used arc source structure of arc ion plating is cold cathode arc source, the behavior of electric arc is moved about fast by cathode surface is many, highly Ming Liang cathode spot is controlled, and the motion of cathode spot has very big influence to the physical property of arc plasma and plated film characteristic subsequently.And ion plating arc source is the source of arc plasma discharge, is the core component of ion plating technique.In order better to improve the quality of deposit film and effectively to utilize target, improve discharge stability, must reasonably control the motion of arc spot.And effective control of arc spot must have rational physical construction to cooperate with magnetic field structure, and with regard to the small size arc source structure that industry is at present used always, target material structure commonly used has disc, cylindrical, conical, truncated cone-shaped; Magnetic field structure commonly used has axial divergent magnetic field, axial focusing magnetic field, rotatingfield etc.; And the arc source structure that different targets cooperates with magnetic field configuration is all different, and design is complicated, bad adaptability, and function singleness, conversion target and magnetic approach must a complete set ofly be changed whole arc source if desired, have caused greatly waste.
For industrial plated film production, the stability of product, large-area uniformity, high efficiency all are to consider.And because the arc source is point source, the distribution of arc source leading portion plasma body all is inhomogeneous, traditional arc source complicated in mechanical structure, and target generally can not surpass the furnace wall in the stationkeeping of vacuum chamber, is difficult to satisfy for some special producing demands; Part arc source structure volume is excessive, the window diameter is too little, and the plasma body intersection region is not obvious, is difficult to realize the even plated film production of industrialization, product percent of pass and homogeneity reduce greatly, this also is that magnetic filters one of reason of can not industrialization producing, and magnetic filter is bulky, is difficult in a body of heater and realizes intensive distribution, therefore the plasma body transmission window is narrow, be difficult between the window intersect, form the low vacancy district of plasma density easily, it is unfavorable that plated film is produced.
The utility model content
The purpose of this utility model is to provide a kind of target foundation for the ion plating rifle and foundation joint, in order to improve shortcomings such as conventional arc ion plating arc source structure complexity, bad adaptability.
To achieve these goals, the technical solution of the utility model is:
A kind of target foundation and foundation joint comprise: cooling-water duct base, target foundation, target foundation insulation covering, cooling water inlet pipe road, permanent magnet or magnetic guiding loop, water outlet, water-in, and concrete structure is as follows:
The arranged outside target foundation insulation covering of target foundation, the inboard of target foundation arranges permanent magnet or magnetic guiding loop and cooling water inlet pipe road, and permanent magnet or magnetic guiding loop are arranged at the outside in cooling water inlet pipe road; One end of target foundation is connected with the cooling-water duct base, and the cooling water inlet pipe road extends in the cooling-water duct base, communicates with the water-in of cooling-water duct base, and the cooling-water duct base communicates with water outlet with passage between the target foundation; The other end of target foundation is connected with an end of target foundation pipe connecting.
Described target foundation and foundation joint, the other end of target foundation pipe connecting arranges the target shielding case, and target shielding case inboard arranges the disc target.
Described target foundation and foundation joint, target foundation insulation covering is provided with the insulation covering dish.
Described target foundation and foundation joint, the arranged outside ion plating rifle chassis insulating disc of target foundation insulation covering, ion plating rifle chassis, ion plating rifle chassis binding.
Described target foundation and foundation joint, the cooling-water duct base is made up of the stainless steel cylinder on top and the right cylinder of bottom, stainless steel cylinder top is provided with cooling-water duct base band of column cover, the cooling-water duct base band of column cover length and target foundation lower external thread: length of thread is consistent under the target foundation, cooling-water duct base band of column cover internal diameter is consistent with target foundation external diameter, cooling-water duct base band of column cover external diameter is consistent with the stainless steel outside diameter of cylinder, the stainless steel barrel bore is consistent with target foundation internal diameter, form cooling-water duct base upper step, cooling-water duct base band of column cover inwall is provided with screw thread, be connected with the target foundation by band of column cover internal thread, cooling-water duct base upper step is provided with cooling-water duct base annular seal groove, sealing-ring in the compression seal groove of target foundation bottom forms the sealing with the cooling-water duct base; Top stainless steel cylinder side wall has a step diplopore, outer hole internal diameter is greater than the endoporus internal diameter, this step diplopore is as the open holes of rising pipe, rising pipe and outer hole form combines closely, the rising pipe external diameter is consistent with outer hole internal diameter, the rising pipe internal diameter is consistent with the endoporus internal diameter, and the rising pipe bottom contacts with diplopore step rising pipe brace table, and diplopore has a segment distance from the right cylinder top of bottom; The right cylinder center of bottom has a step three holes, last hole internal diameter is consistent with cooling water inlet pipe road external diameter, the mesopore internal diameter is consistent with cooling water inlet pipe road internal diameter, and last hole and mesopore form a step cooling water inlet pipe road brace table, and bottom, cooling water inlet pipe road is connected with this step contact; Following hole internal diameter is greater than the mesopore internal diameter, following hole and mesopore form step-shaped hole, this step-shaped hole is as the water inlet pipe open holes, water inlet pipe and following hole form combines closely, the water inlet pipe external diameter is consistent with following hole internal diameter, the water inlet pipe internal diameter is consistent with the mesopore internal diameter or greater than mesopore, and the water inlet pipe bottom contacts with step water inlet pipe brace table between following hole, the mesopore and is connected; Form cooling-water duct bottom water storage cavity between cooling-water duct base, target foundation and the cooling water inlet pipe road.
Described target foundation and foundation joint, the cooling-water duct base is installed in target foundation bottom, and the cooling-water duct base is connected with water-cooled tube.
Described target foundation and foundation joint, target foundation are the stainless steel cylinder, and cylinder outer wall is provided with target foundation annular seal groove, by forming sealing between the sealing-ring in the target foundation annular seal groove and the target foundation insulation covering; Target foundation top is provided with band of column cover, band of column cover length is consistent with the target foundation pipe connecting length of target base, band of column cover external diameter is consistent with target foundation external diameter, band of column cover internal diameter is consistent with the target foundation pipe connecting external diameter of target base, band of column cover internal diameter is greater than target foundation internal diameter, form the foundation upper step, the internal diameter of target foundation is consistent with the target foundation pipe connecting internal diameter of target base, band of column cover inwall is provided with screw thread, be connected with the target foundation pipe connecting of target base by upper internal threaded, the foundation upper step is provided with annular seal groove, the sealing-ring in the annular seal groove is pressed in the target foundation pipe connecting bottom of target base, forms the sealing with the target foundation; Form cooling-water duct between target foundation and the cooling water inlet pipe road; Target foundation bottom outer wall is provided with one section screw thread: screw thread under the target foundation is connected with the cooling-water duct base by screw thread under the target foundation.
Described target foundation and foundation joint, cooling water inlet pipe road are stainless steel tube, and an annular round platform is arranged at top, cooling water inlet pipe road, and as permanent magnet or magnetic guiding loop brace table, annular round platform and target foundation have a spacer segment, form the water coolant water exit.
Advantage of the present utility model and beneficial effect are:
1, the utility model is applicable to multiple target material structure, multiple target size, the axial magnetic field that solenoid produces behind the target can effectively be controlled the spots moving of multiple target material structure, can utilize the discharge of target top surface, device in the vacuum chamber is carried out plated film, also can utilize the target sideflash, realize multiple special plated film demand, as post arc plated film, the inwall plated film, polynary composite film coating etc.
2, the utility model simple structure is effectively compact, the length of watercooling jacket can freely be set, the position of free adjustment target in vacuum chamber, easy and simple to handle, the position adjustability is good, be convenient to complete machine design and satisfy industrial production to the various demands of plasma distribution in the vacuum chamber.
3, each parts can independent fabrication and installation in the utility model, and loading and unloading can be changed separately easily, and regulation range is big, and cost is low, are easy to promote.
Description of drawings
Fig. 1 is the utility model structural representation.
Fig. 2 is the cooling-water duct understructure synoptic diagram of the utility model ion plating gun apparatus.
Fig. 3 (a)-Fig. 3 (b) is the target construction of sill pillar synoptic diagram of the utility model ion plating gun apparatus; Wherein, Fig. 3 (a) is sectional view; Fig. 3 (b) is front view.
Fig. 4 is the cooling water inlet pipe structural representation of the utility model ion plating gun apparatus.
Among the figure, 1 cooling-water duct base; 2 target foundation; 3 target foundation insulation coverings; 4 cooling water inlet pipe roads; 5 permanent magnets or magnetic guiding loop; 6 water outlets; 7 water-ins; 8 cooling-water duct base band of column covers; 9 cooling-water duct base annular seal grooves; 10 rising pipe brace tables; 11 cooling water inlet pipe road brace tables; 12 water inlet pipe brace tables; 13 band of column covers; 14 annular seal grooves; 15 target foundation annular seal grooves; Screw thread under the 16 target foundation; 17 permanent magnets or magnetic guiding loop brace table; 18 insulation covering dishes.
Embodiment
Below by embodiment and accompanying drawing the utility model is described in further detail.
Shown in Fig. 1-4, the utility model is used for target foundation and the foundation joint of ion plating rifle, mainly comprise: cooling-water duct base 1, target foundation 2, target foundation insulation covering 3, cooling water inlet pipe road 4, permanent magnet or magnetic guiding loop 5, water outlet 6, water-in 7, cooling-water duct base band of column cover 8, cooling-water duct base annular seal groove 9, rising pipe brace table 10, cooling water inlet pipe road brace table 11, water inlet pipe brace table 12, band of column cover 13, annular seal groove 14, target foundation annular seal groove 15, screw thread 16 under the target foundation, permanent magnet or magnetic guiding loop brace table 17, insulation covering dish 18 etc., concrete structure is as follows:
As shown in Figure 1, the arranged outside target foundation insulation covering 3 of target foundation 2, target foundation insulation covering 3 is provided with insulation covering dish 18.Wherein, the outside of target foundation insulation covering can arrange ion plating rifle chassis insulating disc, ion plating rifle chassis, ion plating rifle chassis binding, one side on ion plating rifle chassis arranges ion plating rifle chassis binding, ion plating rifle chassis binding separates by the insulation covering dish on the target foundation insulation covering and ion plating rifle chassis, between ion plating rifle chassis and the ion plating rifle chassis binding, form sealing by sealing-ring is set in the binding sealing groove of ion plating rifle chassis, the opposite side on ion plating rifle chassis arranges ion plating rifle chassis insulating disc.
The inboard of target foundation 2 arranges permanent magnet or magnetic guiding loop 5 and cooling water inlet pipe road 4, and permanent magnet or magnetic guiding loop 5 are arranged at the outside in cooling water inlet pipe road 4.One end of target foundation 2 is connected with cooling-water duct base 1, and cooling water inlet pipe road 4 extends in the cooling-water duct base 1, communicates with the water-in 7 of cooling-water duct base 1, and cooling-water duct base 1 communicates with water outlet 6 with passage between the target foundation 2.The other end of target foundation 2 is connected with an end of target foundation pipe connecting, and the other end of target foundation pipe connecting arranges the target shielding case, and target shielding case inboard arranges the disc target.
As shown in Figure 2, cooling-water duct base 1 mainly comprises: cooling-water duct base band of column cover 8, cooling-water duct base annular seal groove 9, rising pipe brace table 10, cooling water inlet pipe road brace table 11, water inlet pipe brace table 12 etc., and concrete structure is as follows:
Cooling-water duct base 1 is made up of the thicker stainless steel cylinder in top and the right cylinder of bottom, stainless steel cylinder top is provided with cooling-water duct base band of column cover 8, the cooling-water duct base band of column overlaps 8 length and target foundation 2 lower external thread: screw thread 16 length are consistent under the target foundation, it is consistent with target foundation 2 external diameters that the cooling-water duct base band of column overlaps 8 internal diameters, it is consistent with the stainless steel outside diameter of cylinder that the cooling-water duct base band of column overlaps 8 external diameters, the stainless steel barrel bore is consistent with target foundation 2 internal diameters, form cooling-water duct base upper step, the cooling-water duct base band of column overlaps 8 inwalls and is provided with screw thread, be connected with target foundation 2 by band of column cover internal thread, cooling-water duct base 1 upper step is provided with cooling-water duct base annular seal groove 9, sealing-ring in the target foundation 2 bottom compression seal grooves 9 forms the effective sealing with cooling-water duct base 1; Top stainless steel cylinder side wall has a step diplopore, outer hole internal diameter is slightly larger than the endoporus internal diameter, this step diplopore is as the open holes of rising pipe, rising pipe and outer hole form combines closely, the rising pipe external diameter is consistent with outer hole internal diameter, the rising pipe internal diameter is consistent with the endoporus internal diameter, and the rising pipe bottom contacts with diplopore step (rising pipe brace table 10), and diplopore has certain distance from the right cylinder top of bottom; The right cylinder center of bottom has a step three holes, last hole internal diameter is consistent with cooling water inlet pipe road external diameter, the mesopore internal diameter is consistent with cooling water inlet pipe road internal diameter, last hole and mesopore form a step (cooling water inlet pipe road brace table 11), and 4 bottoms, cooling water inlet pipe road are connected with this step contact; Following hole internal diameter is slightly larger than the mesopore internal diameter, following hole and mesopore form step-shaped hole, this step-shaped hole is as the water inlet pipe open holes, water inlet pipe and following hole form combines closely, the water inlet pipe external diameter is consistent with following hole internal diameter, the water inlet pipe internal diameter is consistent with the mesopore internal diameter or be slightly larger than mesopore, and the water inlet pipe bottom contacts with step (water inlet pipe brace table 12) between following hole, the mesopore and is connected; The stainless steel cylinder that top is thicker and the cylindrical length of bottom are regulated according to actual needs, form cooling-water duct bottom water storage cavity between cooling-water duct base 1, target foundation 2 and the cooling water inlet pipe road 4, the water coolant of whole ion plating rifle flows into from cooling-water duct base 1 bottom water inlet pipe, flow out from cooling-water duct base 1 sidewall rising pipe, form the effective cooling to the ion plating rifle.Cooling-water duct base 1 is installed in target foundation 2 bottoms, and cooling-water duct base 1 is connected with water-cooled tube; The power connection terminal is installed on the target foundation 2; Install by target foundation insulation covering 3 and target foundation 2 on ion plating rifle chassis, and the ion plating gun apparatus is connected and installed by open holes and the vacuum chamber on ion plating rifle chassis.
Shown in Fig. 3 (a)-Fig. 3 (b), target foundation 2 mainly comprises: screw thread 16 etc. under band of column cover 13, annular seal groove 14, target foundation annular seal groove 15, the target foundation, and concrete structure is as follows:
As shown in Figure 4, cooling water inlet pipe road 4 is a thin-wall stainless steel elongated tubular, certain compressive strength is arranged, and cooling water inlet pipe road 4 closely is connected with target base cooling water inlet pipe by the sealing-ring in the sealing groove of target base cooling water inlet pipe outer wall, forms the water coolant water entry; One annular round platform is arranged at 4 tops, cooling water inlet pipe road, as permanent magnet or magnetic guiding loop brace table 17, annular round platform and target foundation 2 have certain interval, form the water coolant water exit, the water coolant that cools off the water outlet outflow from the target base disk at interval flows out by this water coolant water exit, flow in target foundation 2 cooling-water ducts, form effective circulation of water coolant.
In ion plating rifle when work,, the insulated wire corral is enclosed within around the target foundation insulation covering 3 of target base rear end, and contacts by a dead ring (ion plating rifle chassis insulating disc) between the ion plating rifle chassis, and solenoid leads to direct current, by the intensity in voltage magnetic field.The magnetic field that solenoid produces axial magnetic flux formation is the rotational symmetry divergent magnetic field, form the acute angle that points to the target edge with the disc target, under this action of a magnetic field, the arc spot is done the chrysanthemum shape motion of continuous contraction and expansion, and stronger magnetic field can be pushed the arc spot to the edge of target.The utility model simple structure is effectively compact, the length of watercooling jacket can freely be set, the position of free adjustment target in vacuum chamber, easy and simple to handle, target are changed easily, the position adjustability is good, be convenient to the complete machine design and satisfy industrial production to the various demands of plasma distribution in the vacuum chamber.
Claims (8)
1. a target foundation and foundation joint is characterized in that, comprising: cooling-water duct base, target foundation, target foundation insulation covering, cooling water inlet pipe road, permanent magnet or magnetic guiding loop, water outlet, water-in, and concrete structure is as follows:
The arranged outside target foundation insulation covering of target foundation, the inboard of target foundation arranges permanent magnet or magnetic guiding loop and cooling water inlet pipe road, and permanent magnet or magnetic guiding loop are arranged at the outside in cooling water inlet pipe road; One end of target foundation is connected with the cooling-water duct base, and the cooling water inlet pipe road extends in the cooling-water duct base, communicates with the water-in of cooling-water duct base, and the cooling-water duct base communicates with water outlet with passage between the target foundation; The other end of target foundation is connected with an end of target foundation pipe connecting.
2. according to the described target foundation of claim 1 and foundation joint, it is characterized in that the other end of target foundation pipe connecting arranges the target shielding case, target shielding case inboard arranges the disc target.
3. according to the described target foundation of claim 1 and foundation joint, it is characterized in that target foundation insulation covering is provided with the insulation covering dish.
4. according to the described target foundation of claim 1 and foundation joint, it is characterized in that the arranged outside ion plating rifle chassis insulating disc of target foundation insulation covering, ion plating rifle chassis, ion plating rifle chassis binding.
5. according to the described target foundation of claim 1 and foundation joint, it is characterized in that, the cooling-water duct base is made up of the stainless steel cylinder on top and the right cylinder of bottom, stainless steel cylinder top is provided with cooling-water duct base band of column cover, the cooling-water duct base band of column cover length and target foundation lower external thread: length of thread is consistent under the target foundation, cooling-water duct base band of column cover internal diameter is consistent with target foundation external diameter, cooling-water duct base band of column cover external diameter is consistent with the stainless steel outside diameter of cylinder, the stainless steel barrel bore is consistent with target foundation internal diameter, form cooling-water duct base upper step, cooling-water duct base band of column cover inwall is provided with screw thread, be connected with the target foundation by band of column cover internal thread, cooling-water duct base upper step is provided with cooling-water duct base annular seal groove, sealing-ring in the compression seal groove of target foundation bottom forms the sealing with the cooling-water duct base; Top stainless steel cylinder side wall has a step diplopore, outer hole internal diameter is greater than the endoporus internal diameter, this step diplopore is as the open holes of rising pipe, rising pipe and outer hole form combines closely, the rising pipe external diameter is consistent with outer hole internal diameter, the rising pipe internal diameter is consistent with the endoporus internal diameter, and the rising pipe bottom contacts with diplopore step rising pipe brace table, and diplopore has a segment distance from the right cylinder top of bottom; The right cylinder center of bottom has a step three holes, last hole internal diameter is consistent with cooling water inlet pipe road external diameter, the mesopore internal diameter is consistent with cooling water inlet pipe road internal diameter, and last hole and mesopore form a step cooling water inlet pipe road brace table, and bottom, cooling water inlet pipe road is connected with this step contact; Following hole internal diameter is greater than the mesopore internal diameter, following hole and mesopore form step-shaped hole, this step-shaped hole is as the water inlet pipe open holes, water inlet pipe and following hole form combines closely, the water inlet pipe external diameter is consistent with following hole internal diameter, the water inlet pipe internal diameter is consistent with the mesopore internal diameter or greater than mesopore, and the water inlet pipe bottom contacts with step water inlet pipe brace table between following hole, the mesopore and is connected; Form cooling-water duct bottom water storage cavity between cooling-water duct base, target foundation and the cooling water inlet pipe road.
6. according to claim 1 or 5 described target foundation and foundation joints, it is characterized in that the cooling-water duct base is installed in target foundation bottom, the cooling-water duct base is connected with water-cooled tube.
7. according to the described target foundation of claim 1 and foundation joint, it is characterized in that, the target foundation is the stainless steel cylinder, and cylinder outer wall is provided with target foundation annular seal groove, by forming sealing between the sealing-ring in the target foundation annular seal groove and the target foundation insulation covering; Target foundation top is provided with band of column cover, band of column cover length is consistent with the target foundation pipe connecting length of target base, band of column cover external diameter is consistent with target foundation external diameter, band of column cover internal diameter is consistent with the target foundation pipe connecting external diameter of target base, band of column cover internal diameter is greater than target foundation internal diameter, form the foundation upper step, the internal diameter of target foundation is consistent with the target foundation pipe connecting internal diameter of target base, band of column cover inwall is provided with screw thread, be connected with the target foundation pipe connecting of target base by upper internal threaded, the foundation upper step is provided with annular seal groove, the sealing-ring in the annular seal groove is pressed in the target foundation pipe connecting bottom of target base, forms the sealing with the target foundation; Form cooling-water duct between target foundation and the cooling water inlet pipe road; Target foundation bottom outer wall is provided with one section screw thread: screw thread under the target foundation is connected with the cooling-water duct base by screw thread under the target foundation.
8. according to the described target foundation of claim 1 and foundation joint, it is characterized in that, the cooling water inlet pipe road is stainless steel tube, one annular round platform is arranged at top, cooling water inlet pipe road, as permanent magnet or magnetic guiding loop brace table, annular round platform and target foundation have a spacer segment, form the water coolant water exit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320090934 CN203065567U (en) | 2013-02-28 | 2013-02-28 | Target material base cylinder and base cylinder joint |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320090934 CN203065567U (en) | 2013-02-28 | 2013-02-28 | Target material base cylinder and base cylinder joint |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203065567U true CN203065567U (en) | 2013-07-17 |
Family
ID=48764381
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201320090934 Expired - Fee Related CN203065567U (en) | 2013-02-28 | 2013-02-28 | Target material base cylinder and base cylinder joint |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203065567U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112342513A (en) * | 2020-10-10 | 2021-02-09 | 同济大学 | Linear type multifunctional magnetron sputtering coating equipment and coating method |
-
2013
- 2013-02-28 CN CN 201320090934 patent/CN203065567U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112342513A (en) * | 2020-10-10 | 2021-02-09 | 同济大学 | Linear type multifunctional magnetron sputtering coating equipment and coating method |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN107227445B (en) | A kind of arc ion plating apparatus of deposited tube inside coating | |
| CN102497721B (en) | Plasma device with double-hollow cathode and double-hollow cathode and applications | |
| CN101812667B (en) | Magnetron sputtering plating film cathode device | |
| CN203378130U (en) | Anode of supersonic speed plasma spray gun and supersonic speed plasma spray gun | |
| CN101954324B (en) | Plasma spray gun used for low-pressure plasma spraying | |
| CN103952677A (en) | Method for coating inner wall of electron-enhanced plasma discharge tube | |
| CN203065567U (en) | Target material base cylinder and base cylinder joint | |
| CN102936718A (en) | Multi-structure coupling magnetic field adaptability type rotating arc ion plating device | |
| CN102953034B (en) | Special multifunctional ion plating gun having compact structure | |
| CN109202072A (en) | A kind of electron gun arrangements of coaxial powder-feeding | |
| CN203159702U (en) | Ion plating device compatible with multi-structure coupled magnetic field | |
| CN203065563U (en) | Ion-plating arc source head | |
| CN101660144A (en) | Plasma torch for chemical vapor deposition | |
| KR20030077369A (en) | Non-Transferred Type Plasma Torch With Step-Shaped Nozzle | |
| CN202945316U (en) | Simple and adjustable multifunctional multi-structure adaptive ion plating device | |
| CN203065564U (en) | Target base plate for ion-plating gun | |
| CN107385397B (en) | A kind of intelligence arc source | |
| CN104404463B (en) | Planar magnetron sputtering target | |
| CN203065562U (en) | Arc source head for ion plating gun device | |
| CN210093634U (en) | Transfer arc plasma gun for producing metal nano powder | |
| CN101289737A (en) | Program controlled and compounding magnetic field controlled vaporizing ionization source for round cathode surface arc spot | |
| KR100715292B1 (en) | High Power Plasma Torch with Hollow Electrodes for Material Melting Process | |
| CN211497773U (en) | HiPIMS discharging target device regulated and controlled by pulsed magnetic field | |
| CN105112872A (en) | Pulse magnetron sputtering device for preparing inner surface coating of cylinder part and application of pulse magnetron sputtering device | |
| CN103205711B (en) | The compatible axial guide field assisting ion plating appts of a kind of non-equilibrium dynamic arch |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130717 Termination date: 20160228 |