CN203061980U - Wire saw device, wire saw cluster and wire saw plant - Google Patents

Abstract

The utility model relates to a wire saw device, a wire saw cluster and a wire saw plant, and discloses the wire saw device 100 used for saw cutting of a plurality of cutting slices of a workpiece 10. The wire saw device comprises a wire guiding component, a first compartment 102 and a second compartment 104. The wire guiding component is provided with at least two wire guiding wheels 122 used for guiding a wire 20 to form at least one wire net provided with at least one working area 22, and each of the at least two wire guiding wheels is provided with a rotary axis. The first compartment 102 contains the wire guiding component and is provided with a first side portion of the compartment. The first side portion is basically parallel to the rotary axes. The first compartment 102 further comprises a second side portion of the compartment. The second side portion and the first side portion are opposite and are basically parallel to the rotary axes. The second compartment 104 is used for containing a wire spool used for supplying new wires. The second compartment 104 is adjacent to the first side portion.

Description

Jigsaw device, scroll saw cluster and scroll saw factory

Technical field

Embodiments of the invention relate to jigsaw device, scroll saw cluster, have the factory (plant) of two or more scroll saw clusters and the method that is used for operating line saw equipment and/or cluster.More specifically, they relate to, and the saw silk with improvement is handled (wire management) characteristic and scale enlarges the jigsaw device of characteristic, and be used for cutting or sawing such as silicon or quartzy block etc. stiff materials, for example be used for cutting silicon crystal circle, be used for the flitch saw, be used for the scroll saw cluster of harvester etc.

Background technology

Jigsaw device exists be used for from such as stiff materials cutting blocks of silicon etc. or brick shape body, thin slice semiconductor crystal wafer etc. for example.In such equipment, the saw silk of stretching is from the bobbin feeding, and guided and tensioning by the wheel that is used at cutting zone guiding saw silk.The saw silk operated by rotary motion that is used for sawing has grinding-material.As a kind of selection, grinding-material can be used as slip and provides.This can finish before the material that will be cut is touched in the saw wire connection soon.Therefore, grinding agent is sawed silk ribbon and is used for cutting material to cutting position.Select as another kind, grinding agent can utilize coating and be arranged on the saw silk.For example, diamond particles can for example be arranged on the metal saw silk by coating, and wherein diamond particles is embedded in the coating of saw silk.Thereby grinding agent firmly is connected with the saw silk.

Usually, the output of jigsaw device is on advanced person's level.Yet expectation further improves, particularly expects to use the high-throughput with high-throughput for photovoltaic (PV).

Therefore, must consider that tensioning is used for the saw silk of sawing PV wafer etc. and the saw silk is moved with very high speed.Sawing silk saws an one or more belt wheel of handling and/or saw the silk tensioning via providing, is fed into bobbin from bobbin.Belt wheel for example can change the direction of saw silk.Yet, change the distortion that the direction of sawing silk also can cause sawing silk.In addition, for example the inertia of belt wheel may hinder the urgent stopping period that stops immediately of belt wheel therein, and the possibility that the increase of belt wheel number can cause sawing the silk fracture increases.

For the demand of the section PV capacity of million kilowatts of factories and reduce the dollar of PV module/watt the lasting expectation of value, need to improve manufacturing capacity.By a plurality of jigsaw devices of the PV wafer that is provided for cutting into slices, the past has realized making the factory of considerable wafer.Yet, unless realize the increase of the output of a jigsaw device by process modification or by the improvement of jigsaw device, this strategy can not obtain enough raisings.

Now many saw silk slip scroll saws are standard and instrument that be the tool productivity made for the wafer that PV uses.It is usually designed to independently instrument.This instrument has five major function groups: silk manipulation, cooling group and Electric Appliance Cabinet/control module are handled, sawed to crop, slip.The change that need carry out normal form is to realize the output with the expectation of the high-throughput of factory for the manufacture of the PV wafer.

The utility model content

In view of foregoing, the jigsaw device of a plurality of sections that are used for the sawing stiff materials, the saw cluster of a plurality of sections that is used for the sawing stiff materials and the sawing factory that is used for a plurality of sections of sawing stiff materials are provided.According to dependent claims, specification and accompanying drawing, it is obvious that additive method of the present invention, advantage and feature will become.

A kind of jigsaw device of a plurality of sections for sawing workpieces is provided according to an embodiment.Jigsaw device comprises: saw silk guidance set, it has for guiding saw silk to form two saw silk directive wheels of at least one saw silk screen at least, described at least one saw silk screen has at least one working region, wherein at least two saw silk directive wheels each have rotation; First Room, it holds described saw silk guidance set; Second Room, it holds be used to the bobbin that new saw silk is provided, and wherein second Room is set to adjacent with first side of first Room; And the 3rd Room, it holds be used to another bobbin that batches used saw silk, and wherein the 3rd Room is set to adjacently with second side of first Room, and wherein second side is relative with first side basically.

A kind of jigsaw device of a plurality of sections for sawing workpieces is provided according to another embodiment.Jigsaw device comprises: saw silk guidance set, it has for guiding saw silk to form two saw silk directive wheels of at least one saw silk screen at least, described at least one saw silk screen has at least one working region, and wherein at least two saw silk directive wheels have rotation; First Room, first sidepiece that it holds saw silk guidance set and has the chamber, first sidepiece is basically parallel to rotation, and wherein first Room also comprises second sidepiece of chamber, and second sidepiece is relative with first sidepiece and be basically parallel to rotation; Second Room, it holds be used to the bobbin that new saw silk is provided, and wherein second Room is set to adjacent with first sidepiece; And the 3rd Room, it holds be used to another bobbin that batches used saw silk, and wherein the 3rd Room is set to adjacent with second sidepiece.

According to another embodiment, provide a kind of jigsaw device of a plurality of sections for sawing workpieces.Jigsaw device comprises: saw silk guidance set, it has for guiding saw silk to form two saw silk directive wheels of at least one saw silk screen at least, described at least one saw silk screen has at least one working region, and wherein at least two saw silk directive wheels have rotation; First Room, first sidepiece that it holds saw silk guidance set and has the chamber, first sidepiece is basically parallel to rotation, and wherein first Room also comprises second sidepiece of chamber, and second sidepiece is relative with first sidepiece and be basically parallel to rotation; Second Room, it holds be used to the bobbin that new saw silk is provided, and wherein second Room is set to adjacently with first sidepiece, and wherein at least one in bobbin and another bobbin has the bobbin rotations of the rotation that is basically parallel at least two saw silk directive wheels.

In embodiment of the present utility model, described saw silk guidance set is configured to for move described saw silk in described at least one working region along first direction, and wherein said saw silk is directed to described first Room along described first direction, and described saw silk is drawn from described first Room along described first direction.

In embodiment of the present utility model, described saw silk has a saw silk position in being directed to described first Room time, described saw silk position allow described saw silk with deflection angle of saw silk direction or the angle littler than this deflection angle, be directed on the described saw guidance set.

In embodiment of the present utility model, described saw silk has a saw silk position in being directed to described first Room time, described saw silk position allow described saw silk with deflection angle of saw silk direction or the angle littler than this deflection angle, be directed on the described saw guidance set.

In embodiment of the present utility model, described jigsaw device also comprises the saw silk actuation unit that is arranged in described second Room.

In embodiment of the present utility model, described jigsaw device also comprises saw silk tracking system and saw silk clamping system.

In embodiment of the present utility model, between described bobbin and described saw silk guidance set, three to seven belt wheels are set.

According to another embodiment, provide a kind of scroll saw cluster of a plurality of sections for sawing workpieces.The scroll saw cluster comprises first jigsaw device and at least the second jigsaw device.Each comprises first jigsaw device and at least the second jigsaw device: saw silk guidance set, it has for guiding saw silk to form two saw silk directive wheels of at least one saw silk screen at least, described at least one saw silk screen has at least one working region, and wherein at least two saw silk directive wheels have rotation; First Room, first sidepiece that it holds saw silk guidance set and has the chamber, first sidepiece is basically parallel to rotation, and wherein first Room also comprises second sidepiece of chamber, and second sidepiece is relative with first sidepiece and be basically parallel to rotation; Second Room, it holds be used to the bobbin that new saw silk is provided, and wherein second Room is adjacent with first sidepiece, and wherein at least one in bobbin and another bobbin has the bobbin rotation of the rotation that is basically parallel at least two saw silk directive wheels.

In embodiment of the present utility model, described scroll saw cluster also comprises: the driver chamber, it is used for holding at least the first driver for described at least two the saw silk directive wheels that drive described first jigsaw device, and is used for holding at least the second driver for described at least two the saw silk directive wheels that drive described at least the second jigsaw device.

In embodiment of the present utility model, wherein described second Room of described second Room of said first jigsaw device and described second jigsaw device is adjacent.

In embodiment of the present utility model, wherein in described scroll saw cluster, also be provided with the 4th jigsaw device.

According to another one embodiment, provide a kind of scroll saw factory.Scroll saw factory comprise factory first level, be arranged on factory first level top factory second level, be arranged on the tri-layer of factory of second level top of factory and at least one scroll saw cluster.Wherein at least one scroll saw cluster is arranged on second level or tri-layer of factory, is arranged on usually on second level of factory.

Embodiment is also at device that be used for to realize disclosed method, and comprises for carrying out each described method step device feature.These method steps can nextport hardware component NextPort, the computer by the appropriate software programming, both any combination mode or carry out in any other mode.In addition, according to embodiments of the invention also at the operation method of described device.It comprises the method step for each function of implement device.

Description of drawings

For mode that can understood in detail above-mentioned feature of the present invention, but reference example is more specifically described the invention that summarizes above.Accompanying drawing relates to embodiments of the invention and is described below:

Figure 1A and 1B show vertical view and the side view of the jigsaw device that illustrates embodiment described here of the function group that has again layout;

Fig. 2 A and 2B show and illustrate embodiment described here and have vertical view and the side view that the jigsaw device of silk tension assembly was followed the tracks of and sawed to the saw silk that is included;

Fig. 3 shows another the another jigsaw device of layout again that illustrates embodiment described here and have a function group;

Fig. 4 shows a part that illustrates embodiment described here and have another jigsaw device of another saw silk control system;

Fig. 5 shows the jigsaw device that illustrates embodiment described here;

Fig. 6 shows the diagram according to the described section of embodiment described here factory;

Fig. 7 shows according to embodiment described here and illustrates the part of jigsaw device or the scroll saw cluster of slip distribution system; And

Fig. 8 shows illustrated operation according to the flow chart of the method for embodiment scroll saw cluster described here.

The specific embodiment

To mention various embodiment of the present invention particularly now, its one or more examples illustrate in the drawings.In the description of drawings below, identical Reference numeral refers to identical assembly.Usually, difference with respect to each embodiment is only described.Each example provides in the mode of explanation of the present invention, and does not mean that as restriction of the present invention.In addition, can be used on other embodiment or with other embodiment as the feature of the part of embodiment diagram or explanation and to be used in combination, to produce additional embodiments.This specification intention comprises such modification and variant.

Figure 1A and Figure 1B show vertical view and the side view of jigsaw device 100.Jigsaw device 100 comprises for the chamber of difference in functionality group (compartment).Only shown in Figure 1 as the chamber that the part of embodiment described here provides.Jigsaw device 100 comprises be used to first Room 102 that holds saw silk guidance set.Saw silk guidance set comprises at least two directive wheels.Usually, as shown in Figure 1B, saw silk guidance set can comprise four saw silk directive wheels 122.Saw silk directive wheel 122 forms saw silk screen 24 thereby one or more working regions 22 is provided.Workpiece 10 is cut into wafer in working region 22.Shown in Figure 1A, saw silk 20 supplies to the chamber 102 from second Room 104.Second Room 104 holds for 22 bobbins 112 that new saw silk is provided to the working region.

The saw silk directive wheel 122 that forms saw silk screen 24 is driven by motor 150, and motor 150 is arranged in another chamber 108.Therefore, saw silk directive wheel is around they rotation rotations separately.According to typical embodiment, saw silk directive wheel is formed with groove, makes the saw silk at the first groove place and enters saw silk guidance set at first direction.The saw silk is guided to next groove by a groove from saw silk directive wheel subsequently, thereby forms the saw silk screen by a plurality of substantially parallel saw silks.Thereby workpiece 10 can be cut into wafer.

According to embodiment described here, chamber 102 has the side or has sidepiece 102a, and it is basically parallel to the rotation of saw silk directive wheel 122.Second Room 104 is arranged on sidepiece 102a place or contiguous first Room, adjoins sidepiece 102a, and wherein new saw silk is directed to first Room 102 from second Room 104.Usually, for rectangular chamber, a side can be basically parallel to the rotation of directive wheel.For the chamber 102 of other shapes, for the chamber 102 of other shapes, at least a portion of chamber 102 can be basically parallel to the rotation of directive wheel, and wherein the side 102a of chamber is parallel to rotation.

As described here, the rotation of bobbin 112 also is basically parallel to the rotation of saw silk directive wheel 122.Therefore, the function group is re-arranged to making, saw silk 20 can be by the working region of as far as possible directly leading.Therefore, can utilize straight line saw the Silk Road directly with respect to sawing a tensioning, the tracking of saw silk or for example sawing some deviations of silk actuation units for other that reduce to vibrate.With respect to Fig. 2 A, this can understand in Fig. 4 better.

According to the another embodiment that can make up with other embodiment described here, rearranging of function group can be described by such fact extraly or alternatively, namely, the axis of bobbin or the axis of a plurality of bobbins to the distance of the axis of next saw silk directive wheel (for example, in the axis of saw silk directive wheel nearest) can more than or equal to 1 times of the size of net, be at least 2 times of size of net or or even 4 times of the size of net.Therefore, the size of netting usually can be defined as the distance of (that is, the saw wire connection is touched between two consecutive points of directive wheel) edge saw silk between two saw silk directive wheels.

Saw silk is derived from first Room 102 usually, and is supplied to through belt wheel 160 for example, arrives on the bobbin 114.Bobbin 114 arranges to be used for batching used saw silk.According to the exemplary embodiments that can make up with other embodiment described here, bobbin 112 and 114 has marginal portion 115 and mid portion 116.Usually, mid portion 116 can be cylindrical or conical, and the saw silk is supplied with or is fed on the mid portion 116 from middle part 116.According to can with the another embodiment of other embodiment combinations described here, bobbin 114 can be arranged on another, for example in the 3rd Room 106.The 3rd Room is set to the sidepiece 102b of adjacent chamber 102, and wherein sidepiece 102b is relative with sidepiece 102a.Therefore, can provide chamber 102,104 and 106 T shape or Z-shaped layout.

According to some embodiment that can make up with other embodiment described here, jigsaw device also can comprise one or more slip nozzles 182.Slip nozzle 182 is provided to slip and/or cooling fluid on the saw silk in the working region 22, the cutting that makes the slip that provides and/or cooling fluid be used for workpiece 10.

Shown in Figure 1A, first Room 102, second Room 104 and the 3rd Room 106 arrange with landing tee office.Perhaps, as shown in Figure 3, first Room, second Room and the 3rd Room are with Z-shaped layout setting.These layouts form embodiments of the invention, and can make up with other embodiment described here.These layouts allow rearranging of in jigsaw device function group.Therefore, handle for the saw silk that new or fresh saw silk is provided and rearranged with respect to working region or crop respectively for the saw silk manipulation of batching used saw silk.As below will describing in detail, this makes jigsaw device improve, and provide the design that is used for jigsaw device and the option of integrating jigsaw device with cluster and manufacturing shop in the variation aspect the program example.Thereby, saw silk steering characteristic, the synergy of improvement, simplification and the improved operability of design of workshop can be provided.

As described here, saw silk actuation unit will be understood that to handle the cutting zone of jigsaw device (for example, wafer jigsaw device) or working region the saw silk supply and from the equipment of the supply of the saw silk of the cutting zone of jigsaw device or working region.Usually, scroll saw comprises for two directive wheels carrying and guide the saw silk at saw silk moving direction at least, yet saw silk actuation unit provides the control of sawing thread tension.In addition, the saw silk that is provided by saw silk actuation unit forms the saw silk screen in cutting zone.Usually, the part of saw silk screen will be considered to the net that formed by single saw silk actuation unit.According to some embodiment, can arrange more than a strap saw silk, make whole saw silk screen be formed by the part more than of saw silk screen.Should be appreciated that the saw silk screen can comprise the working region part more than, wherein the working region part is defined as the zone of carrying out sawing process therein.Therefore, according to some embodiment described here, the saw silk screen can have a plurality of zones that each is formed by the saw silk from different saw silk actuation units.In addition, the diagram shown in Figure 1B illustrates working region, top 22 and working region, bottom 22.But cut workpiece 10 or more than one workpiece in each working region 22.

For the jigsaw device in modern times wafer sawing device etc. for example, expectation is with the stiff materials of higher speed cutting such as semi-conducting material (for example silicon, quartz etc.) etc.Saw silk speed, namely the saw silk moves through jigsaw device, saw silk actuation unit and will be by the speed of the material of sawing respectively, can be 10m/s or higher for example.Usually, saw silk speed can be in 8 to 20m/s scope.Yet, 25m/s or 30m/s or or even also expect more than or equal to the higher saw silk speed of 40m/s, and can realize under certain condition.

For the saw silk that launches and reel with the saw silk speed of expectation, bobbin rotates with the rotary speed up to several thousand rpms.For example, for launching and reel the saw silk, can arrange 1000 to 2000rpm.

During the cutting process in the scroll saw mode, machine launches new saw silk 20 from bobbin 112.During the expansion of bobbin 112, the axis that the saw silk leaves the position axle along the line at saw silk mid portion 116 places, bearing area moves, that is, mobile in the direction that parallels to the axis at saw silk 20.Along with the bobbin unwinding, the saw silk alternately moves by side to opposite side (from the flange to the flange) from one of bobbin.

As mentioned above, in order to launch the saw silk with the saw silk speed of expectation, bobbin is with the rotational speed up to several thousand rpms.For example, 1000 to 2000rpm can be provided to for launching the saw silk.Therefore, saw silk 20 diverse locations that leave bobbin 112 places are also with sizable velocity variations, and the saw silk is directed to the also correspondingly variation of angle of cutting zone.Thereby the angle between the saw silk at bobbin place and stationary saw silk position subsequently periodically changes.This changes the variation that produces vibration and the influence contact angle with belt wheel subsequently friction in the saw silk.These variations are harmful to process, and this is because because they are for example along with saw silk adapts to peak tension amplitude and moving up and down on subsequently the groove of belt wheel for example, in the saw silk, and cause high risk saw thread to rupture.In addition, this may be even more important when the less saw filament diameter of needs and coated with CVD (chemical vapor deposition) diamond saw silk, because saw silk even easier fracture in these cases.

For this reason, shown in Fig. 2 A and Fig. 2 B, first belt wheel 262 can be set to removable belt wheel, and it can longitudinally move on the direction that is parallel to the bobbin axis.This moves by arrow 261 indications among Fig. 2 A.Removable belt wheel can be equipped with tracking system, and this system allows it to follow position from a side of bobbin to the saw silk of mobile opposite side, makes the saw silk always enter belt wheel tangently.For example, such belt wheel has been described in european patent application No.EP 09153051.9, this application is incorporated herein by reference, specifically referring to the description of the tracking system on Fig. 3 A and Fig. 3 B and the corresponding description in european patent application No.EP 09153051.9.Yet, in view of sizable tension force sometimes of saw silk, be difficult to enough firmly support belt wheel so that belt wheel can bear high saw thread tension.If removable belt wheel is not enough firmly supported, harmful distortion and vibration of belt wheel support member, removable belt wheel and saw silk may take place.These vibrations can cause sawing harmful vibration of silk again, and in some cases even can cause the fracture of saw silk.Therefore, saw silk actuation unit as illustrating in further detail with reference to figure 4 can be set.

In jigsaw device 100, there is saw silk actuation unit.According to different embodiment, jigsaw device can be harvester, flitch saw, scroll saw or a plurality of scroll saw.Yet the function group rearranges that to be of value to particularly the sawing of fragment of brick body be the wafer sawing device of a plurality of wafers as described herein.

The saw silk actuation unit of Fig. 2 A and Fig. 2 B comprises the bobbin 112 with bobbin axis.The bobbin axis is basically parallel to the rotation of saw silk directive wheel 122 usually.Thereby substantially parallel can be regarded as rotation can with+-5 ° depart from.Bobbin is carried by mandrel.Mandrel is pivotally mounted to the frame part of jigsaw device.On bobbin 112, the fresh or new saw silk 20 that will be fed into the saw silk screen loads in the saw silk bearing area of bobbin 112 or mid portion 116.Saw silk bearing area has along the saw silk loaded length of the direction of bobbin axis.

First belt wheel 262 is shown in Fig. 2 A.Here and under normal conditions, belt wheel has the groove that is applicable to guiding saw silk.In addition, belt wheel generally can have for the saw silk guide position that namely guides a strap saw silk at belt wheel in the belt wheel groove.First belt wheel 262 is applicable to from bobbin 112, directly receives saw silk 20 from bobbin 112 particularly, and changes the direction of saw silk then.First belt wheel is pivotally mounted to the belt wheel load bearing unit, and the belt wheel 262 of winning is rotated around the first belt wheel axis.The belt wheel load bearing unit is connected to jigsaw device conversely, more specifically is connected to the frame part of jigsaw device, makes that the belt wheel load bearing unit can be longitudinally mobile along the belt wheel movement locus, and namely the track on 262 edges of first belt wheel is vertically movably.In addition, as general aspect, the first belt wheel movement locus can have at least 90% the length of length of the belt wheel bearing area of mid portion 116.Here, belt wheel bearing area or mid portion 116 are that the saw silk of bobbin 112 can namely usually be the length from the flange to the flange or from the marginal portion to the marginal portion of bobbin from the longitudinal component of bobbin appearance.

The belt wheel movement locus of belt wheel 262 is basically parallel to the bobbin axis of bobbin 112.According to the embodiment that can make up with any other embodiment described here, the motion of other directions is stackable to above-mentioned motion.For example, curvilinear path and/or inclined trajectory with respect to the bobbin axis can be set.

The axis orientation of first belt wheel 262 is the angle basic 90 ° with respect to the bobbin axis.Here, this angle is defined as space angle, i.e. angle between the axis in the plane crossed over of many axis (if desired, thereby make axis intersect after the parallel movements in many axis and cross over the plane).This angle is defined as absolute value, namely always on the occasion of.According to some embodiment, the belt wheel mobile device can be set.The belt wheel mobile device pointed out by the arrow 261 among Fig. 2 A, and is applicable to the belt wheel load bearing unit is moved along the belt wheel movement locus with two-way mode.The belt wheel mobile device is applicable to belt wheel 262.Saw silk location detecting apparatus can be set in addition, and it also can be along with the motion tracking order is moved the position of wishing on the bobbin 112 so that belt wheel is positioned to.The belt wheel mobile device can be for example such as linear electric machine, cylinder, have the linear actuator of worm geared motor, frame pinion and rack etc., make that the belt wheel mobile device can be along belt wheel movement locus mobile belt wheel on rectilinear direction at least.Therefore, can move the belt wheel load bearing unit by the frame part with respect to jigsaw device and come mobile belt wheel.

Another embodiment according to making up with other embodiment described here can arrange a saw silk location detecting apparatus.Saw silk location detecting apparatus detects belt wheel position along the direction (: along the bobbin axis) of motion path here, and more specifically, it detects the saw silk through the saw silk position at the surveyed area place of saw silk location detecting apparatus.Therefore, can access the position that saw silk leaves bobbin 112 or place, saw silk bearing area (if needs, by triangulation).

Saw silk location detecting apparatus can be connected to the belt wheel mobile device.Therefore, for example, can be between saw silk location detecting apparatus and belt wheel mobile device be connected in signalization receiving element, controller, be used for the computer of the correct belt wheel position of calculating etc.In specific embodiment, controller is operably connected to saw silk position detecting device to receive detected saw silk position.Controller is determined the target location, and movement directive is sent to the first belt wheel mobile device, so that the first belt wheel mobile device moves to the target location with first belt wheel.Particularly, the target location can be and saw a position that the position of leaving the bobbin place is corresponding.

According to the another embodiment that can make up with other embodiment described here, belt wheel mobile device and/or its each controller can comprise teaching ability, make how controller study from previous dislocation detects provides the saw silk from bobbin.According to the target location, the saw silk is to leave bobbin with respect to belt wheel 262 rectangular angles.The first belt wheel mobile device (261), belt wheel location detecting apparatus 271 and the first belt wheel positioner can be generically and collectively referred to as saw silk tracking system.

The saw silk is directed to second belt wheel 264 from mobile belt wheel, and it provides the position to make belt wheel not entering saw silk guidance set, i.e. saw silk directive wheel under the situation of other deviations at least one direction or the screen.That is, the saw silk remains at least one plane.Second belt wheel 264 is applicable to from first belt wheel 262, directly receives the saw silk from first belt wheel particularly, and changes the direction of saw silk.The layout of chamber, bobbin and the orientation thereof of holding bobbin 112 can be set to allow before the saw silk enters cutting zone, reducing the deviation of sawing silk.

After second belt wheel 264, be provided with two other belt wheel 266 and 268.Other belt wheel can have than belt wheel 262 with/264 or the vertical substantially rotation of rotation.Belt wheel 266 and 268 shown in Fig. 2 A and Fig. 2 B provides the clamping system that is used for saw silk 20.Therefore, shown in Fig. 2 B, such movement that tension arm can be shown in arrow 271 makes the tension force of adjustable saw silk.

Further illustrate as Fig. 2 A and Fig. 2 B, belt wheel 160 and 262 can be arranged at least one working region 22 and be used for batching between the bobbin 114 of used saw silk.By making removable belt wheel belt wheel 262 also be used for used saw silk, can improve used saw silk rolling on bobbin.Though not shown in Fig. 2 A and Fig. 2 B, also can arrange for used saw thread to the similar clamping systems that arrange by belt wheel 266 and 268.This can help to provide the saw thread tension of expectation in the working region and at bobbin 114, and can be used on two-way sawing, namely also comprises the situation of the sawing that saw silk moves up the negative side.

In addition, as general aspect, the belt wheel movement locus of first belt wheel 262 can be arranged such that, for saw silk 20 withdraw from bobbin 112 or enter bobbin 114 places any position, exist at least one position of first belt wheel to make the saw silk substantially vertically enter first belt wheel with the belt wheel axis at the belt wheel movement locus.This layout allows not have to turn round saws silk.Here, " nothing is turned round " refers to volume or the belt wheel that the saw silk entered substantially tangently and withdrawed from saw silk actuation unit.

Fig. 4 shows another saw silk actuation unit 400 according to some embodiment that can make up with other embodiment described here.The embodiment of Fig. 4 comprises the bobbin 112 that is installed on the mandrel, and belt wheel 420,430 and 440 is arranged to particularly, and tonneau guides the saw silk with saw silk tracking system.Described the example of sawing the silk tracking system among the european patent application No.09153051.9 that submit to, that be entitled as " Wire saw device and method for operating same " on February 17th, 2009, this application is with incorporated herein by reference with the degree of disclosure non-contravention.

Saw silk changes the angle and changes the angle by second belt wheel 430 with 180 ° second direction with 90 ° first direction by first belt wheel 420 and changes direction, and wherein first belt wheel 420 is connected to saw silk mobile system or follows the tracks of a saw silk position movably.Because bigger second direction changes the angle, the major part (particularly under the situation of peak tension) of saw thread tension is absorbed by second belt wheel, and wherein second belt wheel is firmly supported by the frame part of jigsaw device 100.Because the firm support by frame part, second belt wheel 430 is can be than first belt wheel 420 movably easier and more stably bear tension force.Therefore reduced harmful distortion and vibration of removable belt wheel 420 and saw silk.So, also can reduce to saw the vibration of other assemblies of the assembly of silk itself, saw silk actuation unit or jigsaw device.In addition, reduced the risk of saw silk fracture.Therefore, can realize higher saw silk speed and higher saw silk handling capacity.

Usually, if saw silk changes the angle with the first direction that is not more than 120 ° and changes direction by first belt wheel, if and saw silk changes the angle with the second direction that is not less than 60 ° and change direction by second belt wheel, then saw second belt wheel 430 that thread tension to a certain degree can firmly be connected and absorb.In the example of Fig. 4, direction changes angle and the location independent of first belt wheel 420 on first movement locus, but more at large, above-mentioned condition should be satisfied in first belt wheel 420 at least one position on first movement locus.According to can with some embodiment of any embodiment combination of described here other, even above-mentioned condition is all satisfied in first belt wheel 42, any position of 0 on first movement locus.In certain embodiments, first direction changes the angle smaller or equal to 100 °, perhaps even smaller or equal to 90 °.In addition, in certain embodiments, second direction changes the angle and is not less than 90 °, is not less than 120 ° even 180 °.Here, direction changes the integration that the angle is restricted to the deflection angle of saw silk deflection.Therefore, for example, 1/4th deflection angles of changing the line of production and giving birth to 90 °, and three 1/4th deflection angles of changing the line of production and giving birth to 270 °.Deflection angle is got and is made absolute value, and therefore always do not consider under the situation of polarization direction on the occasion of.

In addition, useful configuration that substitute and common can be expressed as follows: in configuration, second direction changes the angle and changes the angle greater than first direction.In this configuration, can be greater than the load that is received by first belt wheel by the load that second belt wheel receives owing to the saw thread tension of sawing silk.Again, this can help to be avoided the excessive load on removable first belt wheel.That another substitutes and usually useful configuration can be expressed as follows: in configuration, direction change the angle be selected as making second belt wheel 430 since the saw thread tension of saw silk 20 than the bigger load of first belt wheel, 420 receptions.

In Fig. 4, first and second directions change the angle and point to coiling direction respect to one another.The special absorption of sawing thread tension effectively that this allows pack placement especially and allows to be undertaken by second belt wheel.In addition, the first belt wheel axis 422 and the second belt wheel axis 432 are substantially parallel mutually.More generally, in an embodiment, the first belt wheel axis 422 and the second belt wheel axis 432 can relative to each other have the angle less than 90 °.

In addition, the belt wheel movement locus among Fig. 4 and between first belt wheel 420 and second belt wheel 430 20 the saw silk partial parallel of saw silk 20, wherein first belt wheel 420 is along the bobbin axis movably.Therefore, for any position of first belt wheel 420, the saw silk between first and second belt wheels (namely is parallel to the belt wheel movement locus) and extends on the direction of belt wheel movement locus.The orientation that this means saw silk 20 is not subjected to the influence of first position of belt wheel 420 on the belt wheel movement locus.In addition, for any position of first belt wheel, first belt wheel and second belt wheel be arranged such that mutually, and the saw silk withdraws from from first belt wheel tangently, and tangent second belt wheel that is fed into, and perhaps do not have and turn round.

In addition, show the 3rd belt wheel 440 and four-tape wheel 450.Four-tape wheel 450 changes the direction of sawing silk from the 3rd belt wheel 440 reception saw silks and with the four directions to changing the angle.Four-tape wheel 450 is pivotally mounted to framework to rotate around four-tape wheel axis.Therefore, the four directions is about 90 ° to changing the angle.In other embodiments, the four directions can be between 60 ° and 120 ° to changing the angle.Four-tape wheel axis is basically parallel to the bobbin axis.In addition, four-tape wheel axis is basically perpendicular to the first belt wheel axis, the second belt wheel axis and the 3rd belt wheel axis.In other embodiments, four-tape wheel axis can be basically parallel at least one in these axis.

The embodiment of Fig. 4 also comprises the saw thread tension device for the tension force of control saw silk.Saw thread tension device comprises and is pivotally mounted to framework with the 5th belt wheel 266 around the rotation of the 5th belt wheel axis, and is pivotally mounted to framework with the 6th belt wheel 268 around the rotation of the 6th belt wheel axis.Displaceable element 271 is installed on the frame part of jigsaw device movably.The motor that moves through of displaceable element 271 is controlled, and perhaps displaceable element 271 is for example by spring prebias, with control saw thread tension.In Fig. 4, displaceable element 271 is shown as the swingle of prebias.Saw thread tension device receives saw silk 20 and will saw silk 20 from four-tape wheel 450 and is provided to saw silk screen or first working region 22 (being provided to the right side of the saw silk actuation unit shown in Fig. 4).More accurately, the 5th belt wheel 266 receives saw silk 20 and changes the angle with the 5th direction from four-tape wheel 450 and makes the deflection of saw silk, and the 6th belt wheel 268 receives saw silk 20 and changes the angle with the 6th direction from the 5th belt wheel 26 and makes the deflection of saw silk then.Can near new saw first a saw silk directive wheel that contacts, the 7th belt wheel be set, to avoid sawing the vibration between an actuation unit 400 and the working region 22.

Continue the description of Fig. 4, except the following saw silk processing section 400 that also will be called as elementary saw silk processing section 300, the saw silk actuation unit of Fig. 4 also has secondary saw silk processing section.Here, introduce " elementary " and " secondary " for the ease of identification, and do not mean that grade or the functional sequence of saw silk processing section, bobbin etc.Secondary saw silk processing section can be constructed to elementary saw silk processing section similar.Secondary saw silk processing section or saw silk actuation unit are arranged on saw silk guidance set and are used for batching between the bobbin of used saw silk.

In the example modes (after this being called elementary sawing to secondary bobbin) of operation, elementary saw silk processing section will be sawed silk and will be provided to the saw silk screen from elementary first bobbin 112, make the saw silk be used in the sawing in the net.Then, secondary saw silk processing section reception is from the saw silk of net.Therefore, saw silk 20 is transported to secondary saw thread tension device from net, be transported to other belt wheel and from belt wheel finally be wound up on the bobbin 114 (referring to, for example Fig. 2 A and Fig. 2 B).

Usually, to be wound up into the bobbin (for example, the second bobbin type) on it be different types for the bobbin (for example, the first bobbin type) that new saw silk is provided and used saw silk.For example, providing the bobbin of new saw silk is from the disposable bobbin of sawing silk manufacturer.On the other hand, therefore such bobbin is not suitable for receiving used saw silk owing to can not bear the height saw thread tension of used saw silk sometimes.In order during the sawing of secondary bobbin, to support different bobbin types elementary, elementary mandrel (being the mandrel of elementary saw silk processing section) is applicable to the bobbin of the carrying first kind, and secondary mandrel (being the mandrel of secondary saw silk processing section) is applicable to the bobbin of carrying second type (that is second type that, is different from the first kind).

In addition, in some embodiment that can make up with other any embodiment here, a saw silk actuation unit can be supported two-way sawing.Here, two-way sawing is understood that such sawing process, and namely during sawing, the saw silk at first is transported to secondary bobbin from elementary bobbin, and is transferred back elementary bobbin from secondary bobbin then, and is transported to secondary bobbin from elementary bobbin again.Therefore, for two-way sawing, (elementary) bobbin 112 is applicable to the saw silk is provided to the saw silk screen, and is applicable to from the used saw silk of saw silk screen reception.Similarly, secondary bobbin 114 is provided to the saw silk screen and is applicable to from the saw silk screen and receive used saw thread applicable to sawing silk.

For two-way sawing, controller is applicable to and sends actuation commands to elementary mandrel and secondary mandrel, described actuation commands makes the mandrel of winning launch the saw silk in first step and is wound up on second bobbin, and makes that in second step second mandrel launches to saw silk and be wound up on first bobbin.

If use for example have slip than the jig saw silk or have the saw silk of coating (for example diamond coatings), then above-mentioned saw silk actuation unit is particularly useful.Therefore, for section, can with the embodiment of other embodiment combinations described here in, saw silk processing section described here and jigsaw device are applicable to have the thinner saw silk to the diameter between about 150 μ m etc. less than about 200 μ m, all 80 μ m according to appointment.In addition, the saw silk that saw silk processing section described here and jigsaw device are applicable to coating for example has the saw silk of the nickel coating that wherein is embedded with diamond particles.Such saw silk can have diameter usually at the heart yearn less than about 200 μ ms of all 80 μ m according to appointment between about 150 μ m.For thinner saw silk, the distortion of saw silk can increase the risk of the fracture of saw silk or infringement coating, and it is favourable therefore not having the operation turned round.Using (squaring applications) saw filament diameter for flitch can be smaller or equal to about 400 μ m, and for example 250 μ m are to 350 μ m.

Fig. 3 illustrates another jigsaw device 100 according to embodiment described here.Jigsaw device 100 comprises the chamber for the difference in functionality group.Jigsaw device 100 comprises be used to first Room 102 that holds saw silk guidance set.Saw silk guidance set comprises at least two saw silk directive wheels.Saw silk directive wheel 122 forms the saw silk screen thereby one or more working regions 22 is provided.Workpiece is cut into wafer in the working region.As shown in Figure 3, saw silk 20 is fed into first Room 102 from second Room 104.Second Room 104 holds the bobbin 112 for the new saw silk of 22 supplies to the working region.The saw silk directive wheel 122 that forms saw silk screen 24 is driven by motor 150, and wherein motor 150 is arranged in another chamber 108.Therefore, saw silk directive wheel is around they rotation rotations separately.Second Room 104 and another chamber 108 are set to reference Figure 1A and the described embodiment of Figure 1B similar.

According to embodiment described here, first Room 102 has side or sidepiece 102a, and sidepiece 102a is basically parallel to the rotation of saw silk directive wheel 122.Second Room 104 is arranged on sidepiece 102a place or contiguous first Room, adjoins sidepiece 102a, and wherein new saw silk is directed to first Room 102 from second Room 104.Usually, for rectangular chamber, a side can be basically parallel to the rotation of directive wheel.For the chamber 102 of other shapes, at least a portion of chamber 102 can be basically parallel to the rotation of directive wheel, and wherein the side 102a of chamber is parallel to rotation.

As described here, the rotation of bobbin 112 also is basically parallel to the rotation of saw silk directive wheel 122.Therefore, the function group is re-arranged to making, saw silk 20 can be by the working region of as far as possible directly leading.

The saw silk is drawn and is guided to the chamber 306 from first Room 102 usually.Chamber 306 is arranged such that bobbin 114 can batch the saw silk from the position that used saw silk leaves last saw silk directive wheel 122 basically.Bobbin 114 arranges to be used for batching used saw silk.The 3rd Room is set to the sidepiece 102b of adjacent chamber 102, and wherein sidepiece 102b is relative with sidepiece 102a.Therefore, in the embodiment shown in fig. 3, can provide chamber 102,104 and 106 Z-shaped layout.

As Figure 1A and shown in Figure 3, first Room 102, second Room 104 and the 3rd Room 106 are with landing tee office or Z-shaped layout setting.These layouts form embodiments of the invention, and can make up with other embodiment described here.Rearranging of these layouts function groups of permission in jigsaw device.Therefore, handle for the saw silk that new or fresh saw silk is provided and rearranged with respect to working region or crop respectively for the saw silk manipulation of batching used saw silk.

Have the opposite side portion chamber adjacent, that be used for supplying with the chamber of new saw silk and be used for batching used saw silk with the chamber of the saw silk guidance set that is used for providing at least one working region, the number of belt wheel and number of times that the saw silk changes a direction (it can cause the distortion of saw silk) are reduced.Under the situation of not saw silk tracking and under the situation of saw silk tensioning, do not need belt wheel in theory.If in saw silk actuation unit, need the saw silk to follow the tracks of and the tensioning of saw silk, then be provided with at least three belt wheels according to embodiment described here, four belt wheels (referring to for example Fig. 2 A and Fig. 2 B) can be set usually.According to can only having 7 belt wheels with the another embodiment of other embodiment combinations described here, as shown in Figure 4 even more complicated saw silk actuation unit, perhaps even only have 6 belt wheels (only suppose to remove for security reasons and the belt wheel shown in Figure 4 467 of setting).Therefore, according to embodiment described here, in the saw silk actuation unit that the function group is re-arranged, 7 or belt wheel still less (perhaps or even 6 belt wheels or still less) can be set.For example, can arrange or even 4 belt wheels or still less or 3 belt wheels or still less, namely in addition 4 or 3 belt wheels will be enough to provide tracking system and the tensioning of saw silk.

Can improve the guiding of the saw silk in the working region according to the new layout of the function group of embodiment described here.In addition, the new layout of function group can be improved the characteristic of the scale expansion of jigsaw device.Therefore, the factory that is used for section that PV (photovoltaic) uses is not the simple expansion of number of tools, unless independent instrument will have the leap of productivity, otherwise this will can not produce the remarkable leap of productivity.According to can with the another embodiment of other embodiment combinations described here, the design of instrument can make and integrate improvement in comprehensive mode in manufacturing works.Therefore, can consider collaborative purpose better.Fig. 5 shows scroll saw cluster 500.For example, scroll saw cluster 500 comprises four jigsaw devices 100.Each jigsaw device 100 comprises first Room 102 that is configured to hold saw silk guidance set, and wherein saw silk guidance set provides one or more working regions 22.In addition, each jigsaw device 100 comprises the 3rd Room 106 that configuration is held second Room 104 of the bobbin with new or fresh saw silk and is used for holding the bobbin that batches used saw silk.

According to the layout again of function group, be used for driving the motor 150 of sawing the silk directive wheel and can be arranged in shared chamber 508.In addition, the scroll saw cluster can be re-arranged to making, second Room 104 and the 3rd Room 106 that are close to jigsaw device 100 are arranged to adjacent one another are.Therefore, be provided with maintaining district 510.Maintaining district 510 is configured such that, new saw silk can be arranged in the middle of from second Room 104 in a maintaining district 510 two.In addition, used saw silk can be from removing from two of the jigsaw device in the middle of the 3rd Room 106 in a maintaining district 510.

Such layout allows million kilowatts integrated manufacturing works, wherein can more effectively carry out cutting for section and/or wafer that PV uses.Have the jigsaw device 100 of the layout again of function group, have the modularity of improvement, and can form scroll saw cluster 500.Therefore, can realize the synergy of function.Another embodiment according to making up with other embodiment described here can utilize Z-shaped jigsaw device 100 shown in Figure 3 to carry out the layout of cluster shown in Figure 5 500 similarly.Therefore, the size of chamber 106 may need change.

According to some embodiment that can make up with other embodiment described here, the elementary cell of jigsaw device 100 can comprise the dual workbench that has for the single position of workpiece, it supports one or more workpiece, makes workpiece can be arranged on (referring to for example Figure 1B) in working region, top 22 and the working region, bottom 22.Saw silk directive wheel 122 has the length on axis direction, and this length is enough to make two or three brick shape bodies can be adjacent to be arranged on the axial direction of saw silk directive wheel.For example, the length of saw silk directive wheel can be 400mm to the length available of 800mm and/or each position can be 450 to 650mm.Therefore, cluster shown in Figure 5 comprises four elementary cells.Thereby, can realize the year output of about 20MW with the floor space that reduces.Can realize approximately annual 5000000 to the 6000000 wafer (year output of 156mm * 156mm) with the floor space that reduces.

According to can with the another embodiment of other embodiment combinations described here, scroll saw cluster 500 can be disposed in as shown in Figure 6 the manufacturing works.Usually, by being the scroll saw cluster on a layer 710 such as slicing layer etc., making slip and/or cooling fluid on another layer 720, and by being arranged on such as other equipments of electric power, control appliance or other cooling waters etc. on another layer 730, can further improve synergy.To understand, this layout not necessarily relates to the different floor of building, but also can relate to the different workshop in the floor that is arranged on building.Therefore, the attendant with certain skills works at a layer and also is fine, and can be implemented in the personnel's on the layer specialization.Usually, layer not only is interpreted as the floor of building, and can relate to different grades.

As shown in Figure 6, electric power can be from being used for providing the central location 762 of electric power to provide, the cooling water etc. that is used for motor driver can provide from the central location 764 that is used for cooling water, and also can provide from central location 766 such as other feeding mechanisms of compressed air, compression drying air etc.For the slicing processes of using slip, slip can be provided by jar 752.Fresh slip is fed to scroll saw cluster 500 by pipeline 753.According to the another embodiment that can make up with other embodiment described here, also can the jar (not shown) with fresh slip be set at each scroll saw cluster 500.According to another other or the embodiment replaced, the quality examination of slip can be respectively inspection between jar 752 and the jar that is used for each scroll saw cluster 500 or a plurality of clusters.For example can carry out quality examination to density, viscosity, joint-cutting content, size distribution (PSD) and/or water content etc.Used slip is collected (wherein Fig. 6 only shows a sieve) by sieve 758.Used slip can from described sieve supply to for used slip the jar 754.Extraly or alternatively, can independent jar 754 be set at each scroll saw cluster 500.According to some embodiment, filter can be set be used for used slip.For example, filter can be arranged in the pipeline 755.Used slip is renewable or handle to reuse whole or in part.This points out by jars 752 part pipeline 755, be used for fresh slip by alter course.According to the another embodiment that can make up with other embodiment described here, aforesaid at the described embodiment of slip, under the situation of using the diamond saw silk, also can be provided to for cooling fluid.

For the above-mentioned layout again of function group, as describing in further detail with reference to 7 in figure, can improve slip and distribute.Fig. 7 shows a cutter unit with four saw silk directive wheels 122, two working regions 22 and four slip nozzles 182.Yet this only is used for illustrative purposes, and concept shown in Figure 7 also can be used for scroll saw cluster 500 (referring to for example Fig. 5).The slip that is used for a cluster distributes the jar 752 that comprises for fresh slip.

Slip nozzle 182 is arranged on the peak in the slip distribution system, makes slip distribute under constant voltage.According to typical embodiment, each cluster can have a slurry tank 752 and slip agitator for example.According to some embodiment, can pump 757 be set to each slip nozzle 182, make and can control each nozzle individually.Therefore, carry out under constant voltage to flowing of each nozzle.Because therefore the peak of nozzle in distribution system only provide the pressure that comes self-pumping.Can heat exchanger 756 be set for each slip distribution duct 753.Therefore, can improve quality and control for the slip of cutting process.Slip is collected by sieve 758, wherein can sieve 758 be set for one, two or more slip nozzles 182.Slip utilizes slurry filtration device 759 to filter and can supply in the jar 754, or also partly supplies in the jar 752.According to the embodiment of another replacement, slip can supply in the jar 754, and can carry out regeneration or the processing of used slip, makes used slip can be inserted into again whole or in part in the jar 752.Under the situation of section factory 600, after regeneration, also can supply to the fresh slurry tank for whole manufacturing works from the used slip of jar 754.

As shown in Figure 7, be used for the distributed lines pipeline 753 that slip is assigned to slip nozzle 182 from jar 752 is set to independent pipeline at each nozzle 182.Under quality can the situation of some compromise, some slip nozzles 182 also can common pump 757 and heat exchanger 756.For example, top two and/or following two the slip nozzles 182 among Fig. 7 can be shared a slip and distribute.Yet according to the embodiment useful to quality, each slip nozzle 182 in jigsaw device or scroll saw cluster has corresponding pump 757 and corresponding heat exchanger 756, so that fresh slip is supplied to a slip nozzle from jar 752.Therefore, at a cluster jar is set usually.As shown in Figure 6, extraly or alternatively, can also arrange cutting manufacturing works and share jar, this shares jar and can for example fresh slip be assigned at the set jar of each cluster or be assigned to each cluster.

Therefore, according to typical embodiment, cluster shown in Figure 5 can have a slurry tank, slip agitator, not have return tank, for be constant voltage to nozzle mobile, have temperature control to each nozzle, according to the nozzle at the peak of distribution system do not have saltation point, do not have the slip distributor (pipeline that separates that namely is used for each nozzle), have 16 slip nozzles, have 16 shurry pumps, for example have density and/or a viscosimeter and/or have heat exchanger unit.In each working region 22, cut in four chambers with single fragment of brick position, and use the saw silk of four mistakes, wherein the saw silk is handled and be divided into new saw silk and used saw thread in the chamber that separates.New saw silk and the pollution that has reduced the new saw silk part that is caused by used saw silk separating of used saw silk.In addition, as mentioned above, can improve maintaining.

This also can understand according to Fig. 8, and Fig. 8 illustrates the flow chart of the method for operation saw silk cluster.In step 802, will newly saw silk and supply to the jigsaw device 100 from the first maintaining district 510.In step 804, supply to second jigsaw device of scroll saw cluster from identical maintaining district 510 newly sawing silk.And in step 806, the operation scroll saw is with cutting crystal wafer etc.

As mentioned above, layout can provide in the following advantage one or multinomial again: thus reduce the quantity of belt wheel and reduce the distortion of saw silk, separate the bobbin that the saw silk is handled and is used for new saw silk and used saw thread, and improve the slip distribution system.Therefore, according to the embodiment that can make up with other embodiment described here, chamber separately or chamber can be set particularly to be used for the manipulation of saw silk and to be used for new (fresh) saw silk and the used bobbin of sawing silk.Particularly for that cluster of liking described here, can improve the unloading of wafer of loading for the fragment of brick body of cutting, cutting and the loading and unloading of saw wire spool.For example, can also improve accessibility by for the shared maintaining district of similar maintaining task and/or by being used for the shared chamber of motor (being driver and/or actuator).Therefore, cluster described here is made for every MW PV and has been reduced floor space, and this makes possessory cost reduce.Therefore, must consider possessory cost and be the critical aspects of PV manufacturing works by the cost of its every MW photovoltaic power that causes.In addition, the vertical layout of wafer manufacturing works makes floor space further reduce, and can reduce the slip distribution based on good controllable pressure with such as the slip state of uniformity etc.

Though aforementioned content, can design other and additional embodiments of the present invention at embodiments of the invention under the situation that does not break away from its base region, and scope of the present invention is determined by claim subsequently.

Claims (14)

1. jigsaw device that is used for a plurality of sections of sawing workpieces, described jigsaw device comprises:

Saw silk guidance set, it has for guiding saw silk (20) to form two saw silk directive wheels (122) of at least one saw silk screen at least, described at least one saw silk screen has at least one working region (22), and each has rotation wherein said at least two saw silk directive wheels;

First Room (102), it holds described saw silk guidance set;

Second Room (104), it holds be used to the bobbin (116) that new saw silk is provided, and it is adjacent with first side of described first Room that wherein said second Room is set to; And

The 3rd Room (106), it holds be used to another bobbin (116) that batches used saw silk, and it is adjacent with second side of described first Room that wherein said the 3rd Room is set to, and wherein said second side is relative with described first side.

2. jigsaw device according to claim 1 also comprises

At least one (112) in wherein said bobbin and described another bobbin have the bobbin rotation, and described bobbin rotation is parallel to the rotation of described at least two saw silk directive wheels.

3. jigsaw device according to claim 2, wherein said saw silk guidance set is configured to for move described saw silk in described at least one working region along first direction, and wherein said saw silk is directed to described first Room along described first direction, and described saw silk is drawn from described first Room along described first direction.

4. jigsaw device according to claim 1, wherein said saw silk has a saw silk position in being directed to described first Room time, described saw silk position allow described saw silk with deflection angle of saw silk direction or the angle littler than this deflection angle, be directed on the described saw guidance set.

5. jigsaw device according to claim 2, wherein said saw silk has a saw silk position in being directed to described first Room time, described saw silk position allow described saw silk with deflection angle of saw silk direction or the angle littler than this deflection angle, be directed on the described saw guidance set.

6. according to each the described jigsaw device in the claim 1 to 5, also comprise the saw silk actuation unit that is arranged in described second Room.

7. according to each the described jigsaw device in the claim 1 to 5, also comprise saw silk tracking system and saw silk clamping system.

8. according to each the described jigsaw device in the claim 1 to 5, wherein between described bobbin and described saw silk guidance set, three to seven belt wheels (262,264,266,268 are set; 420,430,440,450,467).

9. according to each the described jigsaw device in the claim 1 to 5, wherein said first Room (102) has first sidepiece (102a) of chamber and second sidepiece (102b) of chamber, described first sidepiece is parallel to rotation, described second sidepiece is relative with described first sidepiece and be parallel to rotation, wherein said second Room is adjacent with described first sidepiece, and wherein said the 3rd Room is adjacent with described second sidepiece.

10. scroll saw cluster that is used for a plurality of sections of sawing workpieces, described scroll saw cluster comprises:

First jigsaw device, it is according to each the jigsaw device in the claim 1 to 5; And

At least the second jigsaw device, it is according to each the jigsaw device in the claim 1 to 5.

11. scroll saw cluster according to claim 10 also comprises:

Driver chamber (508), it is used for holding at least the first driver for described at least two the saw silk directive wheels that drive described first jigsaw device, and is used for holding at least the second driver for described at least two the saw silk directive wheels that drive described at least the second jigsaw device.

12. scroll saw cluster according to claim 10, wherein described second Room of described second Room of said first jigsaw device and described second jigsaw device is adjacent.

13. scroll saw cluster according to claim 10 wherein is provided with four according to each the jigsaw device in the claim 1 to 5.

14. a scroll saw factory, it comprises:

First level (720) of described factory is arranged on second level (710) of factory of described first level top of described factory, and the tri-layer (730) of described factory that is arranged on described second level top of described factory; And

According at least one scroll saw cluster (500) of claim 10, wherein said at least one scroll saw cluster is arranged on described second level or tri-layer of described factory.

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