CN203055468U - One-dimensional micro motion platform having single-side flexible pivot four-bar mechanism - Google Patents
One-dimensional micro motion platform having single-side flexible pivot four-bar mechanism Download PDFInfo
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- CN203055468U CN203055468U CN 201320033910 CN201320033910U CN203055468U CN 203055468 U CN203055468 U CN 203055468U CN 201320033910 CN201320033910 CN 201320033910 CN 201320033910 U CN201320033910 U CN 201320033910U CN 203055468 U CN203055468 U CN 203055468U
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- bar mechanism
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Abstract
The utility model relates to a one-dimensional micro motion platform having a single-side flexible pivot four-bar mechanism. The one-dimensional micro motion platform having the single-side flexible pivot four-bar mechanism comprises a motion platform (1), a foundation (2), a double-parallel four-bar mechanism, a translation rod (3), a support block (4), a driver (5) and an adjusting screw (6), wherein the motion platform (1) is connected with the foundation (2) through the double-parallel four-bar mechanism and is further connected with the translation rod (3), the translation rod (3) is connected with the support block (4) through a double-side flexible pivot (7), two ends of the driver (5) are respectively fit with and close to the foundation (2) and the support block (4), and pre-compression is adjusted through the adjusting screw (6). The one-dimensional micro motion platform having the single-side flexible pivot four-bar mechanism employs the flexible pivot, guarantees no gap, no friction, no need for lubrication and high precision of motion transmission, further employs a symmetrical structure in a motion direction and improves linearity of the motion platform; a whole positioning platform is formed by processing a material block, so the motion platform and the foundation are on a same level; the one-dimensional micro motion platform having the single-side flexible pivot four-bar mechanism is applied to the precise micro displacement field.
Description
Technical field
The utility model relates to a kind of one dimension micromotion platform with monolateral flexible hinge four-bar mechanism, particularly a kind of big stroke precision micro-displacement locating platform that can be used for one dimension.
Background technology
Accurate microposition technology is the important component part in advanced manufacturing technology field, also is scientific and technological forward position one of gordian technique in the nanometer technology one by one of 21 century, and its development is the basis of other sophisticated technology.Conventional micrometric displacement positioning system often adopts the scheme of driven by servomotor and precision lead screw transmission, but this locator meams is because the existence of thread pitch and gearing friction, and its bearing accuracy generally can only reach micron order.Along with subject development such as microelectronics industry, aerospace, bioengineering, more high-precision sub-micron even nanoscale positioning requirements have been proposed the micrometric displacement positioning system.
Piezoelectric ceramic actuator has that volume is little, big, the precision of exerting oneself and advantages such as resolution height and good frequency response, it is the desirable driver of realizing high-precision micro displacement, can realize sub-micron and nano grade positioning precision with piezoelectric ceramics as the micrometric displacement positioning system of driver, obtain using widely in modern aerospace, fiber alignment, scanning tunnel microscope, robot, cell manipulation, integrated circuit manufacturing, ultraprecise processing etc.
Summary of the invention
The purpose of this utility model is at the deficiencies in the prior art, and a kind of structural symmetry, low sub-micron and the nano level one dimension micromotion platform with monolateral flexible hinge four-bar mechanism of motion coupling are provided.
The technical solution of the utility model is:
A kind of one dimension micromotion platform with monolateral flexible hinge four-bar mechanism, it comprises motion platform (1), pedestal (2), two parallelogram lindage, translation bar (3), back-up block (4), driver (5), adjusts screw (6), it is characterized in that: motion platform (1) is connected with pedestal (2) by two parallelogram lindages, is connected with translation bar (3) again; Translation bar (3) is connected with back-up block (4) by bilateral flexible hinge (7); Driver (5) two ends respectively with pedestal (2) and back-up block (4) fit near, and adjust precompression by adjusting screw (6).
The utility model adopts two parallelogram lindages, is designed to symmetrical structure, can effectively reduce coupling error.
In the technical program, in order to overcome the phase shift of driver carry-out bit to less deficiency, two link design of two parallelogram lindages are become the lever enlarger.
For the shift value of the input end that guarantees two connecting rods with stressedly equate that the displacement output terminal of driver acts on the mid point of translation bar by bilateral flexible hinge.
Compared with prior art, the present invention has following advantage:
The precision micro-displacement platform of the present invention design can utilize the line cutting to process at an integral material, and having guaranteed no gap that motion transmits, do not had friction, need not to lubricate, high precision,
Designed lever enlarger has amplified the output displacement of driver, has increased the stroke of motion platform.
Designed symmetrical structure has guaranteed the linearity of motion.
Description of drawings
Fig. 1 is overall schematic of the present utility model.
Fig. 2 is the bilateral flexible hinge synoptic diagram in the utility model.
Fig. 3 is the monolateral flexible hinge synoptic diagram in the utility model.
Embodiment
Below in conjunction with drawings and the specific embodiments, the utility model is further described:
As shown in the figure 1, a kind of one dimension micromotion platform with monolateral flexible hinge four-bar mechanism, it comprises motion platform (1), pedestal (2), two parallelogram lindage, translation bar (3), back-up block (4), driver (5), adjusts screw (6), motion platform (1) is connected with pedestal (2) by two parallelogram lindages, is connected with translation bar (3) again; Translation bar (3) is connected with back-up block (4) by bilateral flexible hinge (7); Driver (5) two ends respectively with pedestal (2) and back-up block (4) fit near, and adjust precompression by adjusting screw (6).
Described pair of parallelogram lindage is made up of connecting rod (8), connecting rod (9), connecting rod (10), connecting rod (11), and is symmetrical in platform direction of motion X and Y-direction; Two parallelogram lindages link to each other with pedestal (2) by monolateral flexible hinge (12), monolateral flexible hinge (13), monolateral flexible hinge (14), monolateral flexible hinge (15), and link to each other with motion platform (1) by monolateral flexible hinge (16), monolateral flexible hinge (17), monolateral flexible hinge (18), monolateral flexible hinge (19).
Described connecting rod (8), connecting rod (10) link to each other with translation bar (3) by monolateral flexible hinge (20), monolateral flexible hinge (21) respectively, constitute the lever enlarger, wherein monolateral flexible hinge (12), monolateral flexible hinge (14) are fixing rounded ends, bilateral flexible hinge (20), bilateral flexible hinge (21) are the displacement input ends, and monolateral flexible hinge (16), monolateral flexible hinge (17) are the displacement output terminals.
Described driver is piezoelectric ceramic actuator.
Described whole platform (1) is to be processed by a block of material, and is symmetrical in platform direction of motion.
Described flexible hinge is straight circular arc type flexible hinge.
Described driver produces displacement and acts on the back-up block (4), and act on the middle part of translation bar (3) by bilateral flexible hinge (7), make translation bar (3) along the translation of x direction, rotate by the bilateral flexible hinge (20) at translation bar (3) two ends and connecting rod (8) and the connecting rod (10) in the two parallelogram lindages of (21) pulling, connecting rod (8) promotes motion platform (1) by monolateral flexible hinge (16), connecting rod (10) simultaneously by monolateral flexible hinge (17) and moves again.
Claims (6)
1. one dimension micromotion platform with monolateral flexible hinge four-bar mechanism, it comprises motion platform (1), pedestal (2), two parallelogram lindage, translation bar (3), back-up block (4), driver (5), adjusts screw (6), it is characterized in that: motion platform (1) is connected with pedestal (2) by two parallelogram lindages, is connected with translation bar (3) again; Translation bar (3) is connected with back-up block (4) by bilateral flexible hinge (7); Driver (5) two ends respectively with pedestal (2) and back-up block (4) fit near, and adjust precompression by adjusting screw (6).
2. a kind of one dimension micromotion platform with monolateral flexible hinge four-bar mechanism according to claim 1, it is characterized in that described pair of parallelogram lindage be made up of connecting rod (8), connecting rod (9), connecting rod (10), connecting rod (11), and be symmetrical in platform direction of motion X and Y-direction; Two parallelogram lindages link to each other with pedestal (2) by monolateral flexible hinge (12), monolateral flexible hinge (13), monolateral flexible hinge (14), monolateral flexible hinge (15), and link to each other with motion platform (1) by monolateral flexible hinge (16), monolateral flexible hinge (17), monolateral flexible hinge (18), monolateral flexible hinge (19).
3. a kind of one dimension micromotion platform with monolateral flexible hinge four-bar mechanism according to claim 2, it is characterized in that described connecting rod (8), connecting rod (10) link to each other with translation bar (3) by monolateral flexible hinge (20), monolateral flexible hinge (21) respectively, constitute the lever enlarger, wherein monolateral flexible hinge (12), monolateral flexible hinge (14) are fixing rounded ends, bilateral flexible hinge (20), bilateral flexible hinge (21) are the displacement input ends, and monolateral flexible hinge (16), monolateral flexible hinge (17) are the displacement output terminals.
4. a kind of one dimension micromotion platform with monolateral flexible hinge four-bar mechanism according to claim 1 is characterized in that described driver (5) is piezoelectric ceramic actuator.
5. a kind of one dimension micromotion platform with monolateral flexible hinge four-bar mechanism according to claim 1 is characterized in that whole motion platform (1) is to be processed by a block of material, and is symmetrical in platform direction of motion.
6. a kind of one dimension micromotion platform with monolateral flexible hinge four-bar mechanism according to claim 1 is characterized in that described flexible hinge is straight circular arc type flexible hinge.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320033910 CN203055468U (en) | 2013-01-23 | 2013-01-23 | One-dimensional micro motion platform having single-side flexible pivot four-bar mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320033910 CN203055468U (en) | 2013-01-23 | 2013-01-23 | One-dimensional micro motion platform having single-side flexible pivot four-bar mechanism |
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| Publication Number | Publication Date |
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| CN203055468U true CN203055468U (en) | 2013-07-10 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201320033910 Expired - Fee Related CN203055468U (en) | 2013-01-23 | 2013-01-23 | One-dimensional micro motion platform having single-side flexible pivot four-bar mechanism |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104999452A (en) * | 2015-06-26 | 2015-10-28 | 中国矿业大学 | Three-freedom-degree micro-operation robot |
| CN109029124A (en) * | 2018-08-21 | 2018-12-18 | 广东工业大学 | Displacement amplifying mechanism, laser deflection device and the anti-unmanned plane laser gun of machine-carried type |
| CN112629640A (en) * | 2019-10-08 | 2021-04-09 | 南京理工大学 | Self-adaptive broadband vibration measurement system based on fiber Fizeau interference |
-
2013
- 2013-01-23 CN CN 201320033910 patent/CN203055468U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104999452A (en) * | 2015-06-26 | 2015-10-28 | 中国矿业大学 | Three-freedom-degree micro-operation robot |
| CN109029124A (en) * | 2018-08-21 | 2018-12-18 | 广东工业大学 | Displacement amplifying mechanism, laser deflection device and the anti-unmanned plane laser gun of machine-carried type |
| CN112629640A (en) * | 2019-10-08 | 2021-04-09 | 南京理工大学 | Self-adaptive broadband vibration measurement system based on fiber Fizeau interference |
| CN112629640B (en) * | 2019-10-08 | 2023-09-26 | 南京理工大学 | Self-adaptive broadband vibration measuring system based on optical fiber Fizeau interference |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130710 Termination date: 20140123 |