CN203037932U - Microstructure amplifying device using reflection Talbot effect for imaging - Google Patents
Microstructure amplifying device using reflection Talbot effect for imaging Download PDFInfo
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- CN203037932U CN203037932U CN 201220424419 CN201220424419U CN203037932U CN 203037932 U CN203037932 U CN 203037932U CN 201220424419 CN201220424419 CN 201220424419 CN 201220424419 U CN201220424419 U CN 201220424419U CN 203037932 U CN203037932 U CN 203037932U
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- light path
- reflection
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- imaging
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Abstract
The utility model discloses a microstructure amplifying device using a reflection Talbot effect for imaging. The microstructure amplifying device comprises a light source (1), a converging lens (2) disposed on an outgoing light path of the light source (1), a calibration light path and an amplifying light path which can be switched with each other disposed on an outgoing light path of the converging lens (2), a sample holding platform (6) disposed on an outgoing light path of a light path finishing structure, and a reflection Talbot imaging screen (7) disposed on a reflection light path. Laser is used as a light source in the microstructure amplifying device. After laser waveforms are reconditioned by the light paths, the laser irradiates opaque periodic structure samples, so that reflection self-imaging is formed after irradiation. The microstructure amplifying device can be used in various observation and control systems of laser micromachine structures, and especially can be used in a photonic crystal on a silicon substrate and preparation of waveguide photons. The microstructure amplifying device enables on-line reflection Talbot imaging amplification and microscopic analysis of samples in a vacuum chamber, so amplification and microscopy processes of the microstructures on the silicon substrate are greatly simplified and production efficiency is improved.
Description
Technical field
The utility model relates to a kind of device that utilizes the laser machine semiconductor material, especially a kind of microstructure multiplying arrangement that utilizes the imaging of the safe platinum effect of reflection.
Background technology
Current photon technology has been permeated each science and technology and industrial field, and safe platinum (Talbot) effect is the image effect that has of one's own of transmission periodic structure sample, so can only be used for thin periodic structure transmission sample.Traditional transmission Talbot effect is in imaging and the existing good application of information industry, but this application only is confined in the thin transmission sample of periodic structure.In the silicon production run, form microstructure by photon processing at silicon, and in order to ensure the quality of production, need amplify and micro-monitoring this microstructure, and prior art will realize amplification and the micro-monitoring of the microstructure on the silicon, need the comparatively operation of trouble, and can't realize online amplification and micro-monitoring, influenced production efficiency.
The utility model content
The purpose of this utility model is: a kind of microstructure multiplying arrangement that utilizes the imaging of the safe platinum effect of reflection is provided, it can realize that the reflection of opaque periodic structure sample is from imaging, it is quoted in the photon preparation of photonic crystal on silica-based and waveguide, can realize the safe platinum imaging amplification of online reflection and microscopic analysis to the sample in the vacuum chamber, simplified silica-based amplification and the micro-operation that goes up microstructure greatly, improved production efficiency, to overcome the deficiencies in the prior art.
The utility model is achieved in that the microstructure multiplying arrangement that utilizes the imaging of the safe platinum effect of reflection, comprise light source, ejaculation light path at light source is provided with plus lens, ejaculation light path at plus lens is provided with the calibration light path that can switch mutually and amplifies light path, ejaculation light path in light path finishing structure is provided with the sample mounting table, finally is provided with the safe platinum picture screen of reflection on the reflected light path of sample mounting table.
The sample mounting table is in the vacuum chamber.
The calibration light path is followed successively by eyepiece, object lens and lens along the exposure pathways of laser.
Amplify light path along the exposure pathways of laser, be followed successively by extender lens and lens.
The diffraction that common safe platinum effect is a peacekeeping two-dimensional grating transmission sample is from imaging, the utility model has been found the safe platinum effect of reflection, and utilize this effect that the non-transmission sample of periodic structure is reflected the imaging of safe platinum effect, the safe platinum effect of reflection in the utility model is that reflection Thailand platinum on a peacekeeping 2 D photon crystal of silica-based structures is from imaging, it not only has the periodic structure of a peacekeeping two dimension as structure, also has the fine structure of high-resolution.
The theory of utilizing Gaussian plane ripple irradiation reflection sample to produce the safe platinum picture of reflection is derived and provided with experiment: the safe platinum of the reflection of Gaussian plane ripple illumination similarly is equidistant adjacent picture, its image-forming range r
2For:
r
2 = r
m= mβ [1]
β = (2 d
2)/λ [2]
D in the formula is grating constant, and λ is the radiation source wavelength, and m is positive integer.
The theory of utilizing Gaussian Spherical Beam irradiation reflection sample to produce the safe platinum picture of reflection is derived and provided with experiment: the reflection Talbot of spherical wave illumination similarly is the adjacent picture of non-equidistance, its image-forming range r
2For:
r
m = mβ/ [1- (mβ)/ R
1] [3]
β = (2 d
2)/λ [4]
R in the formula
1Be the radius-of-curvature of lighting ball ground roll at the sample place.The magnification of the reflection Talbot picture of spherical wave illumination is:
M
m = 1＋r
m/ R
1 [5]
Can learn according to above formula, by the wave front that light path finishing spherical wave is amplified in regulation and control, the magnification of the safe platinum picture of the reflection that gets final product requiredly.
Owing to adopt above-mentioned technical scheme, compared with prior art, the utility model adopts laser as light source, behind the waveform by light path finishing laser, opaque periodic structure sample is shone, and makes the irradiation back produce reflection from imaging.And utilize this image-forming principle can realize amplification and microscopic analysis to microstructure; Designed a cover simultaneously corresponding to the light channel structure of the safe platinum imaging of reflection and the wavefront shaping technique of throwing light on for imaging.The diffraction that common safe platinum effect is a peacekeeping two-dimensional grating transmission sample is from imaging, and the utility model is that the safe platinum of reflection on a peacekeeping 2 D photon crystal of silica-based structure is from imaging, it not only has the periodic structure of a peacekeeping two dimension as structure, also has the fine structure of high-resolution.The utility model can be applicable in the observation and control system of various Laser Micro-Machining structures, particularly in the preparation of the photon of the photonic crystal on silica-based and waveguide, it can realize the safe platinum imaging amplification of online reflection and microscopic analysis to the sample in the vacuum chamber, simplify silica-based amplification and the micro-operation that goes up microstructure greatly, improved production efficiency.The utility model is simple in structure, is easy to industrialization, and effect is good.
Description of drawings
Fig. 1 is the safe platinum imaging calibration of the reflection of embodiment 1 light channel structure figure;
Fig. 2 is the safe platinum amplification imaging of the reflection light channel structure figure of embodiment 1;
Fig. 3 is the micro-structure diagram of the reflection sample of embodiment 1;
Fig. 4 is the safe platinum imaging calibration of the reflection of embodiment 2 light channel structure figure;
Fig. 5 is the safe platinum amplification imaging of the reflection light channel structure figure of embodiment 2;
Fig. 6 is the micro-structure diagram of the reflection sample of embodiment 2.
Embodiment
The accent Q ps pulsed laser and ns pulsed laser that adopts the 1064nm wavelength is prepared the photon crystal structure of a peacekeeping two dimension at P type silicon chip, and the cycle size of space of this structure distributes from 0.1mm to 0.8mm, and this sample is hereinafter to be referred as the reflection sample; Utilize the safe platinum effect imaging method of reflection that the microstructure of this reflection sample is amplified and microscopic analysis.
Utilize the safe platinum effect of reflection to realize that microstructure is amplified and the method for microscopic analysis, the good 532nm(green glow of the employing coherence of elder generation) laser of wavelength is as imaging source 1, make the high bass wave of laser through behind the plus lens 2, enter telescopical eyepiece 3-1 earlier along the backlight road, again from telescopical object lens 3-2 bright dipping, finally by lens 5 tailored waveforms, obtain the Gaussian plane ripple of laser, the Gaussian plane ripple is radiated on the reflection sample, and image on the safe platinum picture screen 7 of reflection, because the safe platinum of the reflection of Gaussian plane ripple illumination similarly is equidistant adjacent picture, its image-forming range r2 is:
r2 = rm= mβ
β = (2 d2)/λ
D in the formula is grating constant, and λ is the radiation source wavelength, and m is positive integer;
Can realize calibration to the image-forming range that reflects safe platinum picture according to the calculating of above-mentioned formula; To calibrate light path again and switch to the amplification light path, make the high bass wave of laser through behind the plus lens 2, amplify light beam through extender lens 4 earlier, again through lens 5 tailored waveforms, obtain Gaussian Spherical Beam, Gaussian Spherical Beam is radiated on the reflection sample, and image on the safe platinum picture screen 7 of reflection, thereby realize utilizing the safe platinum effect of reflection that microstructure is amplified and microscopic analysis, the microstructure of reflection sample as shown in Figure 3; The safe platinum of the reflection of Gaussian Spherical Beam illumination similarly is the adjacent picture of non-equidistance, its image-forming range r
2For:
r
m = mβ/ [1- (mβ)/ R
1]
β = (2 d
2)/λ
R in the formula
1Be the radius-of-curvature of lighting ball ground roll at the sample place.The magnification of the reflection Talbot picture of spherical wave illumination is:
M
m = 1＋r
m/ R
1
Can learn according to above-mentioned formula, amplify light path by regulation and control and can repair the wave front of Gaussian Spherical Beam, thereby obtain the magnification of the safe platinum picture of required reflection.
In vacuum cavity, semi-conductor silicon chip is carried out in pulse laser plasma etching (PLE) process, utilize the safe platinum imaging method of reflection that processed sample is carried out online amplification and microscopic analysis, realize the real-time monitoring of pulse laser plasma process.
Utilize the safe platinum effect of reflection to realize that microstructure is amplified and the method for microscopic analysis, the good 632.8nm(ruddiness of employing coherence) laser of wavelength is as imaging source 1, make the high bass wave of laser through behind the plus lens 2, enter telescopical eyepiece 3-1 earlier along the backlight road, again from telescopical object lens 3-2 bright dipping, finally by lens 5 tailored waveforms, obtain the Gaussian plane ripple of laser, make on the Gaussian plane ripple irradiation reflection sample, and image on the safe platinum picture screen 7 of reflection, because the safe platinum of the reflection of Gaussian plane ripple illumination similarly is equidistant adjacent picture, its image-forming range r2 is:
r2 = rm= mβ
β = (2 d2)/λ
D in the formula is grating constant, and λ is the radiation source wavelength, and m is positive integer;
Can realize calibration to the image-forming range that reflects safe platinum picture according to the calculating of above-mentioned formula; To calibrate light path again and switch to the amplification light path, make the high bass wave of laser through behind the plus lens 2, amplify light beam through extender lens 4 earlier, again through lens 5 tailored waveforms, obtain Gaussian Spherical Beam, Gaussian Spherical Beam is radiated at places the silica-based 2 D photon crystal reflection sample of vacuum chamber 8, and image on the safe platinum picture screen 7 of reflection, thereby realize utilizing the safe platinum effect of reflection that microstructure is amplified and microscopic analysis, the microstructure of reflection sample as shown in Figure 6; The safe platinum of the reflection of Gaussian Spherical Beam illumination similarly is the adjacent picture of non-equidistance, its image-forming range r
2For:
r
m = mβ/ [1- (mβ)/ R
1]
β = (2 d
2)/λ
R in the formula
1Be the radius-of-curvature of lighting ball ground roll at the sample place.The magnification of the safe platinum picture of the reflection of spherical wave illumination is:
M
m = 1＋r
m/ R
1
Amplify light path by regulation and control and can repair the wave front of spherical wave, thereby obtain the magnification of the safe platinum picture of required reflection.
Utilize the safe platinum formation method of reflection that machine silicon based two-dimensional photonic crystal reflection sample is carried out online amplification and monitoring in real time, photon crudy and precision have been improved, realized the controlled processing of pulse laser plasma on silica-based, Fig. 6 shows the silica-based two-dimensional photon crystal structure sample of the band H1 defective that this method is prepared.
Claims (4)
1. one kind is utilized the microstructure multiplying arrangement that reflects the imaging of safe platinum effect, comprise light source (1), it is characterized in that: the ejaculation light path at light source (1) is provided with plus lens (2), ejaculation light path at plus lens (2) is provided with the calibration light path that can switch mutually and amplifies light path, ejaculation light path in light path finishing structure is provided with sample mounting table (6), is provided with the safe platinum picture screen of reflection (7) at reflected light path.
2. the microstructure multiplying arrangement of safe platinum effect imaging is reflected in utilization according to claim 1, it is characterized in that: sample mounting table (6) is in the vacuum chamber (8).
3. the microstructure multiplying arrangement of safe platinum effect imaging is reflected in utilization according to claim 1, it is characterized in that: the calibration light path is followed successively by eyepiece (3-1), object lens (3-2) and lens (5) along the exposure pathways of laser.
4. the microstructure multiplying arrangement of safe platinum effect imaging is reflected in utilization according to claim 1, it is characterized in that: amplify light path along the exposure pathways of laser, be followed successively by extender lens (4) and lens (5).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220424419 CN203037932U (en) | 2012-08-26 | 2012-08-26 | Microstructure amplifying device using reflection Talbot effect for imaging |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220424419 CN203037932U (en) | 2012-08-26 | 2012-08-26 | Microstructure amplifying device using reflection Talbot effect for imaging |
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|---|---|
| CN203037932U true CN203037932U (en) | 2013-07-03 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 201220424419 Expired - Fee Related CN203037932U (en) | 2012-08-26 | 2012-08-26 | Microstructure amplifying device using reflection Talbot effect for imaging |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102890060A (en) * | 2012-08-26 | 2013-01-23 | 贵州大学 | Imaging method based on reflection Talbot effect, application of imaging method and device |
| CN115128788A (en) * | 2022-05-30 | 2022-09-30 | 中国人民解放军国防科技大学 | Horizontally arranged microscope parallel to observation object |
-
2012
- 2012-08-26 CN CN 201220424419 patent/CN203037932U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102890060A (en) * | 2012-08-26 | 2013-01-23 | 贵州大学 | Imaging method based on reflection Talbot effect, application of imaging method and device |
| CN102890060B (en) * | 2012-08-26 | 2016-04-27 | 贵州大学 | Utilize the method and application thereof and device that reflect the imaging of safe platinum effect |
| CN115128788A (en) * | 2022-05-30 | 2022-09-30 | 中国人民解放军国防科技大学 | Horizontally arranged microscope parallel to observation object |
| CN115128788B (en) * | 2022-05-30 | 2023-11-28 | 中国人民解放军国防科技大学 | Horizontally placed microscopic device parallel to observed object |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130703 Termination date: 20150826 |
|
| EXPY | Termination of patent right or utility model |