CN203026485U - Annealing furnace heated and cooled quickly - Google Patents
Annealing furnace heated and cooled quickly Download PDFInfo
- Publication number
- CN203026485U CN203026485U CN 201320007977 CN201320007977U CN203026485U CN 203026485 U CN203026485 U CN 203026485U CN 201320007977 CN201320007977 CN 201320007977 CN 201320007977 U CN201320007977 U CN 201320007977U CN 203026485 U CN203026485 U CN 203026485U
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- supporting block
- annealing furnace
- work supporting
- chamber body
- quartz reaction
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Abstract
The utility model discloses an annealing furnace heated and cooled quickly. The furnace comprises a furnace body, wherein the furnace body comprises a supporting seat, and a heating chamber body moving leftwards and rightwards along slide rails on the supporting seat; the heating chamber body is internally adhered with a poly-light fiber insulating lining and provided with a heater; a work piece bracket is fixed on the supporting seat at one side of the heating chamber body; and a workpiece holding platform extends from the front part of the workpiece bracket. An ultrahigh-temperature coating is coated on the insulating lining adhered to the inner part of the heating chamber body. The supporting seat between the heating chamber body and the workpiece bracket is provided with a quartz reaction chamber body moving leftwards and rightwards along the slide rails on the supporting seat; an air inlet communicated with the internal part of the quartz reaction chamber body and an air outlet communicated with an external vaccumizing device are formed in the rear part of the workpiece bracket. The annealing furnace disclosed by the utility model has the advantages that as the heating chamber body is internally adhered with the overall aluminum oxide poly-light fiber insulating lining, the annealing furnace saves 70% of energy in comparison with the conventional furnace body, the heating rate and the cooling rate can be more than or equal to 500 DEG C/S, a water cooling system is eliminated, the manufacturing cost and the production cost are lowered, and the application range of the equipment is widened.
Description
Technical field
The utility model relates to the fast heat treatment device of semiconductor device, especially relates to a kind of rapid temperature rise and drop annealing furnace.
Background technology
Present research and development and production field at semiconductor device, in selenium deposition and other quick thermal treatment process in ohmic contact rapid alloying, silicide alloy annealing, oxide growth, copper-indium-gallium-selenium photovoltaic are used, rapid temperature rise and drop technique mostly adopt cost and the high infrared lamp of maintenance cost, metal fixedly the heating and cooling heat-treatment furnace of inner chamber, water-cooling structure carry out, because the structure of existing heat-treatment furnace is limit, when not only producing, energy consumption is very large, and temperature rate can only be controlled at≤200 ℃/S; Process design due to existing heat-treatment furnace is comparatively single simultaneously, and the limited a little production research link of some conditions just can not adopt this technique to produce.
Summary of the invention
The purpose of this utility model is to provide that a kind of temperature rate is high, cost and the low rapid temperature rise and drop annealing furnace of maintenance cost.
For achieving the above object, the utility model can be taked following technical proposals:
Rapid temperature rise and drop annealing furnace described in the utility model, comprise body of heater, described body of heater comprises bearing and the heating cavity that moves left and right along the slide rail on described bearing, be pasted with the poly-light fiber thermal insulation liner of integrated oxidation aluminium in described heating cavity and be provided with the infrared middle wave heater of annular, be fixedly installed work supporting block by supporting plate on the bearing of described heating cavity one side, the front portion extension of described work supporting block is provided with workpiece and props up platform.
Be lining with the ultra-high temp coating that is coated with high reflectance in the poly-light fiber thermal insulation of the integrated oxidation aluminium that attaches in described heating cavity.
Be provided with the quartz reaction cavity that sealing coats described work supporting block on bearing between described heating cavity and work supporting block, described quartz reaction cavity moves left and right under the slip blade along the operation of bearing slide rail drives; Described work supporting block rear portion offers the air inlet that is connected with described quartz reaction inside cavity and the gas outlet that is connected with outside vaccum-pumping equipment.
The import department of described quartz reaction cavity is provided with the flexible connection flange, described flexible connection flange be arranged on described work supporting block on to be fixedly connected with flange corresponding, be provided with seal being flexibly connected on flange and the faying face that is fixedly connected with flange.
The workpiece that the contact that is fixedly installed on the thermocouple at described work supporting block rear portion extends to the work supporting block front portion props up the platform place.
The utility model has the advantage of and attach the poly-light fiber thermal insulation liner of integrated oxidation aluminium in heating cavity, than traditional burner energy-saving 70%, temperature rate is the fastest to be reached≤500 ℃/S, save water-cooling system, reduce device fabrication cost and production cost, enlarged the equipment range of application.
Description of drawings
Fig. 1 is structural representation of the present utility model.
Embodiment
as shown in Figure 1, rapid temperature rise and drop annealing furnace described in the utility model, comprise body of heater, this body of heater comprises bearing 1 and the heating cavity 3 that moves left and right along the slide rail 2 on bearing 1, be pasted with the poly-light fiber thermal insulation liner 4 of integrated oxidation aluminium and be provided with the infrared middle wave heater 5 of annular in heating cavity 3, be coated with the nano oxidized aluminized coating of superhigh temperature of high reflectance on the poly-light fiber thermal insulation liner 4 of integrated oxidation aluminium, can not only keep the lowest loss of energy during work, can also strengthen the stability of high-temperature behavior, effectively reduce power loss, be fixedly installed work supporting block 7 by supporting plate 6 on the bearing of heating cavity 3 one sides, the front portion extension of work supporting block 7 is provided with workpiece and props up platform 8.
for satisfying the different process demand, but the quartz reaction cavity 9 that sealing coats work supporting block 7 is set on the bearing 1 between heating cavity 3 and work supporting block 7, quartz reaction cavity 9 moves left and right under the drive of the slip blade 10 that moves along the bearing slide rail, import department at quartz reaction cavity 9 is provided with flexible connection flange 12, on being flexibly connected flange 12 and being arranged on work supporting block 7 to be fixedly connected with flange 13 corresponding, be provided with seal being flexibly connected on flange 12 and the faying face that is fixedly connected with flange 13, being placed on workpiece during work props up in the quartz reaction cavity 8 that sample on platform 8 or workpiece be in sealing, can not cause the pollution of (burner hearth) in sample (workpiece) and heating cavity, also be convenient to simultaneously cleaning and change, reduced later maintenance cost, work supporting block 7 rear portions offer the air inlet 11 that is connected with quartz reaction cavity 9 inside and the gas outlet that is connected with outside vaccum-pumping equipment, and air inlet 11 and gas outlet can be according to design technologies, to supply gas in quartz reaction cavity 9 atmosphere and vacuum pumping, the workpiece that the contact that is fixedly installed on the thermocouple 14 at work supporting block 7 rear portions extends to work supporting block 7 front portions props up platform 8 places, directly measure sample (workpiece), the surface makes measurement temperature and sample (workpiece) temperature keep in full accord, has avoided measure error fully.
Rapid temperature rise and drop annealing furnace control unit of the present utility model adopts advanced fuzzy pair of closed loop control mode of PID self study, and control panel is 7 cun LED touch-screens, and operation interface is simple and convenient, adopts the intellectual operation of fool, predeterminable ten temperature curves.
during work, heating cavity 3 is pushed into the left end of bearing 1, slip blade 10 drives quartz reaction cavity 9 and slides into the relevant position left, with the inside wiped clean of clean cloth with quartz reaction cavity 9, the workpiece that roasting sample or crucible is placed on work supporting block 7 front portions props up on platform 8, then slip blade 10 drive quartz reaction cavitys 9 move right, after flange 13 contacts, it is tightly connected with being fixedly connected with wait being flexibly connected flange 12, sample or workpiece are in the reaction chamber of sealing, then heating cavity 3 moves right along slide rail 2, make quartz reaction cavity 9 be placed in relevant position in heating cavity 3, pressing production engineering specifications is connected the gas outlet with outside vaccum-pumping equipment, quartz reaction cavity 9 inside are vacuumized, from air inlet 11, reaction atmosphere is sent in quartz reaction cavity 9, (this design can be applied to scientific research system widely, except the material preparation that is applied to rapid temperature rise and drop, also can be applicable to the preparation of Graphene and various CVD, widened the range of application of this heating and cooling annealing furnace),
Treat that the reaction of sample or workpiece is complete, program enters halted state automatically, lower the temperature as the need faster speed, with heating cavity 3 along slide rail 2 slide left (or passing into refrigerating gas), when temperature during lower than 200 ℃, with the flexible connection flange 12 that is sealed connected together be fixedly connected with flange 13 and take apart, quartz reaction cavity 9 moves to left, and can prop up platform 8 from workpiece and take out sample or workpiece.
Experimental results show that, rapid temperature rise and drop annealing furnace of the present utility model can extensively satisfy the short annealing after Implantation, ohmic contact rapid alloying, silicide alloy annealing, the oxide growth, the selenium deposition during copper-indium-gallium-selenium photovoltaic is used and the requirement of other quick thermal treatment process; Due to the standardization of production process, can guarantee the sample of roasting or the consistency of workpiece product quality simultaneously.
Claims (5)
1. rapid temperature rise and drop annealing furnace, comprise body of heater, it is characterized in that: described body of heater comprises bearing (1) and the heating cavity (3) that moves left and right along the slide rail (2) on described bearing (1), be pasted with the poly-light fiber thermal insulation liner (4) of integrated oxidation aluminium in described heating cavity (3) and be provided with annular infrared middle wave heater (5), be fixedly installed work supporting block (7) by supporting plate (6) on the bearing of described heating cavity (3) one sides, the front portion extension of described work supporting block (7) is provided with workpiece and props up platform (8).
2. rapid temperature rise and drop annealing furnace according to claim 1, is characterized in that: the ultra-high temp coating that is coated with high reflectance on the poly-light fiber thermal insulation liner (4) of the integrated oxidation aluminium that attaches in described heating cavity (3).
3. rapid temperature rise and drop annealing furnace according to claim 1 and 2, it is characterized in that: be provided with the quartz reaction cavity (9) that sealing coats described work supporting block (7) on the bearing (1) between described heating cavity (3) and work supporting block (7), described quartz reaction cavity (9) moves left and right under the slip blade (10) along the operation of bearing slide rail drives; Described work supporting block (7) rear portion offers the air inlet (11) that is connected with described quartz reaction cavity (9) inside and the gas outlet that is connected with outside vaccum-pumping equipment.
4. rapid temperature rise and drop annealing furnace according to claim 3, it is characterized in that: the import department of described quartz reaction cavity (9) is provided with and is flexibly connected flange (12), described flexible connection flange (12) be arranged on described work supporting block (7) on to be fixedly connected with flange (13) corresponding, be provided with seal being flexibly connected on flange (12) and the faying face that is fixedly connected with flange (13).
5. rapid temperature rise and drop annealing furnace according to claim 1 and 2 is characterized in that: the contact that is fixedly installed on the thermocouple (14) at described work supporting block (7) rear portion extends to the anterior workpiece of work supporting block (7) and props up platform (8) and locate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320007977 CN203026485U (en) | 2013-01-08 | 2013-01-08 | Annealing furnace heated and cooled quickly |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320007977 CN203026485U (en) | 2013-01-08 | 2013-01-08 | Annealing furnace heated and cooled quickly |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203026485U true CN203026485U (en) | 2013-06-26 |
Family
ID=48650446
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201320007977 Withdrawn - After Issue CN203026485U (en) | 2013-01-08 | 2013-01-08 | Annealing furnace heated and cooled quickly |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203026485U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103000496A (en) * | 2013-01-08 | 2013-03-27 | 河南诺巴迪材料科技有限公司 | Rapid heating and cooling annealing furnace |
| CN109763082A (en) * | 2019-02-18 | 2019-05-17 | 广州量子湾科技有限公司 | A kind of small-sized rapid temperature rise and drop annealing device suitable for quantum chip |
-
2013
- 2013-01-08 CN CN 201320007977 patent/CN203026485U/en not_active Withdrawn - After Issue
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103000496A (en) * | 2013-01-08 | 2013-03-27 | 河南诺巴迪材料科技有限公司 | Rapid heating and cooling annealing furnace |
| CN103000496B (en) * | 2013-01-08 | 2015-04-15 | 河南诺巴迪材料科技有限公司 | Rapid heating and cooling annealing furnace |
| CN109763082A (en) * | 2019-02-18 | 2019-05-17 | 广州量子湾科技有限公司 | A kind of small-sized rapid temperature rise and drop annealing device suitable for quantum chip |
| CN109763082B (en) * | 2019-02-18 | 2020-08-28 | 广州量子湾科技有限公司 | Small-size annealing device that heats fast suitable for quantum chip |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20130626 Effective date of abandoning: 20150415 |
|
| RGAV | Abandon patent right to avoid regrant |