CN203002725U - Exhaust device - Google Patents
Exhaust device Download PDFInfo
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- CN203002725U CN203002725U CN 201220633584 CN201220633584U CN203002725U CN 203002725 U CN203002725 U CN 203002725U CN 201220633584 CN201220633584 CN 201220633584 CN 201220633584 U CN201220633584 U CN 201220633584U CN 203002725 U CN203002725 U CN 203002725U
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- air
- interlayer
- exhaust
- cavity
- air draft
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Abstract
The utility model relates to the field of silicon chip wet process cleaning and particularly relates to an exhaust device. The exhaust device comprises a bottom cavity, a megasonic device liquid containing tank, a megasonic device liquid containing tank fixing support, a sandwich layer and an exhaust adjusting unit, wherein the bottom cavity is fixed at the top of the sandwich layer, the megasonic device liquid containing tank is fixed on the sandwich layer through the megasonic device liquid containing tank fixing support, the entire process cavity is divided into a process region and an electric region by the sandwich layer, and the exhaust adjusting unit is connected with the sandwich layer and used for adjusting the exhausting flow inside the process cavity, the exhausting flow outside the process cavity and the exhausting flow of the electric region. The exhaust adjusting unit can ensure the uniformity of a fluid field inside the process cavity by effectively adjusting the exhaust air rate; the process region can be completely separated away from the electric region of the process cavity by the sandwich layer, so as to prevent volatile fog of the chemical liquid of the process region from being volatilized to the electric region to cause damages to electric components.
Description
Technical field
The utility model relates to silicon chip wet-cleaning field, relates in particular to a kind of air exhausting device.
Background technology
The application of monolithic cleaning equipment is more and more extensive in wet clean process at present, processing chamber is the core component of monolithic cleaning equipment, the cleaning of whole silicon chip is all to complete in the process island of processing chamber inside, also to use multiple alkalescence or acidic chemical liquid and mega sonic wave device etc. in technical process, the chamber roof of wet processing apparatus is provided with blowing and filtration system, and chamber interior is provided with exhaust system.
At present, ubiquitous two problems of chamber exhaust system, the one, the uniformity in chamber interior flow field is difficult to guarantee; The 2nd, what chamber processes district and electric district can not be strict separates.Like this, if unstable at cleaning process middle chamber interior flow field, there are local flow-disturbing, turbulent flow etc., can drive some small particles, pollutant to silicon chip surface when silicon wafer cleaning process, reduce the efficient of cleaning, the requirement that does not even reach cleaning.In addition; application due to chemical liquids; make the processing chamber process island have the volatilization fog of a large amount of chemical liquids; if process island and electric district can not separate fully; will make the part chemistry fog of process island enter into the electric district of processing chamber in the middle of the cleaning process, thereby electric vigour part is caused chemical attack, long term even can damage electrical equipment; cause the shutdown of whole board, affect the production efficiency of equipment.
Therefore, for above deficiency, the utility model provides a kind of air exhausting device.
Summary of the invention
The technical problem that (one) will solve
The purpose of this utility model is to solve exhaust air rate can not adjust, and the uniformity of processing chamber interior flow field is difficult to guarantee, and the fog of the chemical liquids of process island volatilization evaporates into electric district to the hurtful problem of electric component.
(2) technical scheme
in order to solve the problems of the technologies described above, the utility model provides a kind of air exhausting device, this air exhausting device comprises chamber, the end, mega sonic wave device liquid holding groove, mega sonic wave device liquid holding groove fixed support, interlayer and air draft adjustment unit, described interlayer top is fixed in chamber, the described end, described mega sonic wave device liquid holding groove is fixed on described interlayer by mega sonic wave device liquid holding groove fixed support, described interlayer separates process island and the electric differentiation of whole processing chamber, described air draft adjustment unit is connected with described interlayer, be used for adjusting process inside cavity air draft flow, the air draft flow in the outside air draft flow of process cavity and electric district.
Wherein, the material of described interlayer is the plastics with acid-alkali-corrosive-resisting, it comprises top board, side plate, interior side ring, base plate and main exhaust outlet, described interior side ring is between top board and base plate, described main exhaust outlet is positioned on described base plate, and the overhead height of described main exhaust outlet is higher than the top of base plate.
Wherein, described top board is groove shape structure, and which is provided with vent.
Wherein, also be provided with the first connecting pore, the second connecting pore, the 3rd connecting pore, the 4th connecting pore and the 5th connecting pore on described top board, by described the first connecting pore, interlayer and process island housing are connect, by described the second connecting pore, interlayer is connected with electric district fixed mount, by described the 3rd connecting pore, interlayer and chamber, the described end are fixedly connected, by described the 4th connecting pore, the mega sonic wave device is fixed on the interlayer top board, by described the 5th connecting pore, the service hatch shielding cover is fixed on the interlayer top board.
Wherein, the top of described base plate is gradient, and an end is high-order, and the other end is low level, and the place is provided with leakage fluid dram at low level, and the liquid bottom being used for flowing to is drained.
Wherein, described top board is provided with the first through hole and the second through hole, and described base plate is provided with the hole corresponding with described the first through hole and the second through hole.
Wherein, comprise that also spray arm, spray arm block ring and Screw joint, described spray arm passes corresponding hole on described the first through hole and base plate, and block the ring sealing with described spray arm, the feed pipe of mega sonic wave device liquid holding groove and discharging tube pass corresponding hole on described the second through hole and base plate, seal with described Screw joint at through part.
Wherein, described air draft adjustment unit comprises: interlayer exhaust outlet tube connector, the connecting tube of process cavity exhaust outlet, exhaust duct Fastener, interlayer exhaust air rate guiding mechanism, process cavity exhaust air rate guiding mechanism, total air draft cavity and electric district's air inlet air draft air quantity are adjusted plate; One end of described interlayer exhaust outlet tube connector connects with total air draft cavity by the connecting tube of described process cavity exhaust outlet, the other end is by described exhaust duct Fastener and described interlayer tight joint, described interlayer exhaust air rate guiding mechanism and process cavity exhaust air rate guiding mechanism are located at the connecting tube of described process cavity exhaust outlet and are entered on the passage of total air draft cavity, and described electric district's air inlet air draft air quantity is adjusted the side that plate is positioned at total air draft cavity.
Wherein, described interlayer exhaust air rate guiding mechanism, process cavity exhaust air rate guiding mechanism and electric district's air inlet air draft air quantity are adjusted plate and all can automatically be adjusted or manually adjust exhaust air rate, and adjusting range is from the standard-sized sheet to the full cut-off.
Wherein, chamber, the described end is provided with liquid holding groove and cushion chamber, described liquid holding groove is divided into a high position and low level, described cushion chamber is provided with air inlet, described air inlet is annular, and around the uniform setting in the center in chamber, the end, and described air inlet is higher than the low level of described liquid holding groove, described cushion chamber bottom is provided with for the exhaust outlet of cavity air draft with for the leakage fluid dram that discharges condensed fluid, and described exhaust outlet overhead height is higher than the top of base plate.
(3) beneficial effect
Technique scheme of the present utility model has following advantage: because process island and the electric differentiation of interlayer with whole processing chamber separates, described air draft adjustment unit is connected with interlayer, and the air draft flow in the inner air draft flow of capable of regulating process cavity, the outside air draft flow of process cavity and electric district.The air draft adjustment unit can be by effectively adjusting exhaust air rate to guarantee the uniformity of processing chamber interior flow field like this; Process island and the electric district of processing chamber can be kept apart fully by interlayer, evaporate into electric district with the fog of the chemical liquids volatilization that prevents process island electric component is caused damage.
Description of drawings
Fig. 1 is the stereogram of the utility model embodiment single silicon-chip wet processing apparatus processing chamber;
Fig. 2 is the schematic perspective view of the utility model embodiment air exhausting device;
Fig. 3 is the schematic perspective view of the interlayer of the utility model embodiment air exhausting device;
Fig. 4 is the C-C cutaway view of the utility model embodiment Fig. 3;
Fig. 5 is the schematic perspective view at the utility model embodiment Fig. 3 back side;
Fig. 6 is the schematic perspective view in the chamber, the end of the utility model embodiment air exhausting device;
Fig. 7 is the three-dimensional cutaway view of the D-D of the utility model embodiment Fig. 6;
Fig. 8 is the schematic perspective view of the air draft adjustment unit of the utility model embodiment air exhausting device.
In figure: 1: interlayer; 2: spray arm blocks ring; 3: chamber, the end; 4: mega sonic wave device liquid holding groove; 5: mega sonic wave device liquid holding groove fixed support; 6: the service hatch shielding cover; 7: the air draft adjustment unit; 8: Screw joint; 9: interlayer exhaust outlet tube connector; 10: the connecting tube of process cavity exhaust outlet; 11: the exhaust duct Fastener; 12: interlayer exhaust air rate guiding mechanism; 13: process cavity exhaust air rate guiding mechanism; 14: total air draft cavity; 15: electric district's air inlet air draft air quantity is adjusted plate; 16: the first liquid spray arms; 17: the second liquid spray arms; 18: mega sonic wave device spray arm; 19: the process island housing; 20: electric district fixed mount; 21: air exhausting device; 101: top board; 102: side plate; 103: interior side ring; 104: base plate; 105: main exhaust outlet; 106: exhaust outlet; 107: the first connecting pores; 108: the second connecting pores; 109: the three connecting pores; 110: the four connecting pores; 111: the first through holes; 112: the second through holes; 113: the five connecting pores; 114: a high position; 115: low level; 116: leakage fluid dram; 301: liquid holding groove; 302: cushion chamber; 303: the cushion chamber air inlet; 304: the cushion chamber exhaust outlet; 305: the cushion chamber leakage fluid dram; A: process island; B: electric district.
The specific embodiment
Below in conjunction with drawings and Examples, the specific embodiment of the present utility model is described in further detail.Following examples are used for explanation the utility model, but are not used for limiting scope of the present utility model.
in description of the present utility model, need to prove, term " " center ", " vertically ", " laterally ", " on ", D score, " front ", " afterwards ", " left side ", " right side ", " vertically ", " level ", " top ", " end ", " interior ", orientation or the position relationship of indications such as " outward " are based on orientation shown in the drawings or position relationship, only the utility model and simplified characterization for convenience of description, rather than device or the element of indication or hint indication must have specific orientation, with specific orientation structure and operation, therefore can not be interpreted as restriction of the present utility model.In addition, term " first ", " second ", " the 3rd " only are used for describing purpose, and can not be interpreted as indication or hint relative importance.
As shown in Figure 1, a kind of air exhausting device 21 that the utility model embodiment provides, this air exhausting device 21 is arranged in single silicon-chip wet processing apparatus processing chamber, and whole processing chamber also comprises process island and electric district, and whole air exhausting device is between process island and electric district.This processing chamber also is provided with the first liquid spray arm 16, the second liquid spray arm 17, mega sonic wave device spray arm 18, process island housing 19 and electric district fixed mount 20.Air exhausting device 21 separates process island and electric differentiation like this, has prevented that the fog of the chemical liquids volatilization of process island from evaporating into the infringement that electric district causes electric component.
As shown in Figure 2, air exhausting device 21 comprises: interlayer 1, spray arm block ring 2, chamber, the end 3, mega sonic wave device liquid holding groove 4, mega sonic wave device liquid holding groove fixed support 5, service hatch shielding cover 6, air draft adjustment unit 7 and Screw joint 8.This air exhausting device 21 is separated process island and the electric district of whole processing chamber by interlayer 1, guarantee that the fog of processing chamber process island chemical liquid can not evaporate into the electric district of processing chamber, thereby reduce the impaired risk of processing chamber electric district electrical equipment, improve the reliability of equipment.This device can by the air draft flow in air draft adjusting device 7 difference adjusting process inside cavity air draft flows, the outside air draft flow of process cavity and electric district, make three's exhaust air rate be in certain proportion, thereby realize the uniformity of whole processing chamber interior flow field.
as shown in Fig. 3-5, the interlayer 1 of air exhausting device 21 is a complete housing, the material of described interlayer 1 is the plastics with acid-alkali-corrosive-resisting, it comprises top board 101, side plate 102, interior side ring 103, base plate 104 and main exhaust outlet 105, described interior side ring 103 is between top board 101 and base plate 104, described main exhaust outlet 105 is positioned on described base plate 104, and the overhead height of described main exhaust outlet 105 is higher than the top of base plate 104, preferably, exceed size and should be not less than 5mm, winner's exhaust outlet 105 and miscellaneous part are not interfered, and the size 〉=50mm of described main exhaust outlet 105, can guarantee that like this air quantity of air draft is to adapt to the work requirements in whole zone.
Described top board 101 is groove shape structure, and which is provided with vent 106, and is preferred, and the full-size of described vent 106 can guarantee that so enough air quantity are to guarantee normally carrying out of working region between 1mm-100mm.also be provided with the first connecting pore 107 on described top board 101, the second connecting pore 108, the 3rd connecting pore 109, the 4th connecting pore 110 and the 5th connecting pore 113, by described the first connecting pore 107, interlayer 1 and process island housing 19 are connect, by described the second connecting pore 108, interlayer 1 is connected with electric district fixed mount 20, by described the 3rd connecting pore 109, interlayer 1 and chamber, the described end 3 are fixedly connected, by described the 4th connecting pore 110, the mega sonic wave device is fixed on interlayer top board 101, by described the 5th connecting pore 113, service hatch shielding cover 6 is fixed on interlayer top board 101.
The top of described base plate 104 is gradient, one end is high-order 114, the other end is low level 115,115 places are provided with leakage fluid dram 116 at low level, bottom being used for flowing to, 104 liquid is drained, be provided with gradient and can guarantee liquid from the high-order 114 straight low levels 115 of stream, thereby the liquid that will flow to smoothly bottom 104 is drained.Also be provided with the first through hole 111 and the second through hole 112 on described top board 101, described base plate 104 is provided with the hole corresponding with described the first through hole 111 and the second through hole 112.Described the first liquid spray arm 16, the second liquid spray arm 17, mega sonic wave device spray arm 18 pass corresponding hole on described the first through hole 111 and base plate 104, and block ring 2 sealings with described spray arm, the feed pipe of mega sonic wave device liquid holding groove 4 and discharging tube pass corresponding hole on described the second through hole 112 and base plate 104, seal with described Screw joint 8 at through part.
As shown in Figure 8, described air draft adjustment unit 7 comprises: interlayer exhaust outlet tube connector 9, process cavity exhaust outlet connecting tube 10, exhaust duct Fastener 11, interlayer exhaust air rate guiding mechanism 12, process cavity exhaust air rate guiding mechanism 13, total air draft cavity 14 and electric district's air inlet air draft air quantity are adjusted plate 15; One end of described interlayer exhaust outlet tube connector 9 connects with total air draft cavity 14 by described process cavity exhaust outlet connecting tube 10, the other end is by described exhaust duct Fastener 11 and described interlayer 1 tight joint, described interlayer exhaust air rate guiding mechanism 12 and process cavity exhaust air rate guiding mechanism 13 are located at described process cavity exhaust outlet connecting tube 10 and are entered on the passage of total air draft cavity 14, and described electric district's air inlet air draft air quantity is adjusted the side that plate 15 is positioned at total air draft cavity 14.Described interlayer exhaust air rate guiding mechanism 12, process cavity exhaust air rate guiding mechanism 13 and electric district's air inlet air draft air quantity are adjusted plate 15 and all can automatically be adjusted or manually adjust exhaust air rate, and adjusting range is from the standard-sized sheet to the full cut-off.
Be adjusting process chamber interior flow field, can be by independently interlayer exhaust air rate guiding mechanism 12, process cavity exhaust air rate guiding mechanism 13 and electric district's air inlet air draft air quantity are adjusted plate 15 respectively, make and be in different ratios between their threes and come the uniformity in test technology chamber interior flow field repeatedly, until after obtaining optimal flow field, determine the final position of each adjusting device.
As shown in Figure 6 and Figure 7, chamber, the described end 3 is provided with liquid holding groove 301 and cushion chamber 302, and described liquid holding groove 301 is used for waste liquid after access has been cleaned also with its discharging, and described cushion chamber 302 is for the air draft of process cavity inside and to its buffering;
described liquid holding groove 301 is divided into a high position and low level, described cushion chamber 302 is provided with air inlet 303, described air inlet 303 is annular, and around the uniform setting in the center in chamber, the end 3, and described air inlet 303 is higher than the low level of described liquid holding groove 301, described cushion chamber 302 bottoms are provided with for the exhaust outlet 304 of cavity air draft with for the leakage fluid dram 305 that discharges condensed fluid, described exhaust outlet 304 overhead heights are higher than the top of base plate 104, exceed size and be not less than 5mm, can guarantee that like this interfering can not appear in exhaust outlet 304 and miscellaneous part, and exhaust outlet 304 sizes 〉=50mm, having guaranteed like this has enough exhaust air rates.
In sum, because process island and the electric differentiation of interlayer 1 with whole processing chamber separates, and described air draft adjustment unit 7 is connected with interlayer 1, and the exhaust air rate in the inner air draft flow of capable of regulating process cavity, the outside air draft flow of process cavity and electric district.Air draft adjustment unit 7 can be by effectively adjusting exhaust air rate to guarantee the uniformity of processing chamber interior flow field like this; Process island and the electric district of processing chamber can be kept apart fully by interlayer 1, evaporate into electric district with the fog of the chemical liquids volatilization that prevents process island electric component is caused damage.
The above is only a kind of preferred embodiment of the present utility model; should be understood that; for those skilled in the art; under the prerequisite that does not break away from the utility model know-why; can also make some improvement and modification, these improve and modification also should be considered as protection domain of the present utility model.
Claims (10)
1. air exhausting device, it is characterized in that: comprise chamber, the end (3), mega sonic wave device liquid holding groove (4), mega sonic wave device liquid holding groove fixed support (5), interlayer (1) and air draft adjustment unit (7), described interlayer (1) top is fixed in chamber, the described end (3), described mega sonic wave device liquid holding groove (4) is fixed on described interlayer (1) by mega sonic wave device liquid holding groove fixed support (5), described interlayer (1) separates process island and the electric differentiation of whole processing chamber, described air draft adjustment unit (7) is connected with described interlayer (1), be used for adjusting process inside cavity air draft flow, the air draft flow in the outside air draft flow of process cavity and electric district.
2. air exhausting device according to claim 1, it is characterized in that: the material of described interlayer (1) is the plastics with acid-alkali-corrosive-resisting, it comprises top board (101), side plate (102), interior side ring (103), base plate (104) and main exhaust outlet (105), described interior side ring (103) is positioned between top board (101) and base plate (104), described main exhaust outlet (105) is positioned on described base plate (104), and the overhead height of described main exhaust outlet (105) is higher than the top of base plate (104).
3. air exhausting device according to claim 2 is characterized in that: described top board (101) is groove shape structure, and which is provided with vent (106).
4. air exhausting device according to claim 2, it is characterized in that: also be provided with the first connecting pore (107) on described top board (101), the second connecting pore (108), the 3rd connecting pore (109), the 4th connecting pore (110) and the 5th connecting pore (113), by described the first connecting pore (107), interlayer (1) and process island housing (19) are connect, by described the second connecting pore (108), interlayer (1) is connected with electric district fixed mount (20), by described the 3rd connecting pore (109), interlayer (1) and chamber, the described end (3) are fixedly connected, by described the 4th connecting pore (110), the mega sonic wave device is fixed on interlayer top board (101), by described the 5th connecting pore (113), service hatch shielding cover (6) is fixed on interlayer top board (101).
5. air exhausting device according to claim 2, it is characterized in that: the top of described base plate (104) is gradient, and an end is high-order (114), and the other end is low level (115), locate to be provided with leakage fluid dram (116) at low level (115), bottom being used for flowing to, the liquid of (104) is drained.
6. air exhausting device according to claim 2, it is characterized in that: described top board (101) is provided with the first through hole (111) and the second through hole (112), and described base plate (104) is provided with the hole corresponding with described the first through hole (111) and the second through hole (112).
7. air exhausting device according to claim 6, it is characterized in that: also comprise spray arm (16,17,18), spray arm blocks ring (2) and Screw joint (8), described spray arm (16,17,18) pass corresponding hole on described the first through hole (111) and base plate (104), and block ring (2) sealing with described spray arm, the feed pipe of mega sonic wave device liquid holding groove (4) and discharging tube pass corresponding hole on described the second through hole (112) and base plate (104), seal with described Screw joint (8) at through part.
8. air exhausting device according to claim 1, it is characterized in that: described air draft adjustment unit (7) comprising: interlayer exhaust outlet tube connector (9), process cavity exhaust outlet connecting tube (10), exhaust duct Fastener (11), interlayer exhaust air rate guiding mechanism (12), process cavity exhaust air rate guiding mechanism (13), total air draft cavity (14) and electric district's air inlet air draft air quantity are adjusted plate (15); One end of described interlayer exhaust outlet tube connector (9) connects with total air draft cavity (14) by described process cavity exhaust outlet connecting tube (10), the other end is by described exhaust duct Fastener (11) and described interlayer (1) tight joint, described interlayer exhaust air rate guiding mechanism (12) and process cavity exhaust air rate guiding mechanism (13) are located on the passage that described process cavity exhaust outlet connecting tube (10) enters total air draft cavity (14), and described electric district's air inlet air draft air quantity is adjusted the side that plate (15) is positioned at total air draft cavity (14).
9. air exhausting device according to claim 8, it is characterized in that: described interlayer exhaust air rate guiding mechanism (12), process cavity exhaust air rate guiding mechanism (13) and electric district's air inlet air draft air quantity are adjusted plate (15) and all can automatically be adjusted or manually adjust exhaust air rate, and adjusting range is from the standard-sized sheet to the full cut-off.
10. air exhausting device according to claim 2, it is characterized in that: chamber, the described end (3) is provided with liquid holding groove (301) and cushion chamber (302), described liquid holding groove (301) is divided into a high position and low level, described cushion chamber (302) is provided with air inlet (303), described air inlet (303) is annular, and around the uniform setting in center of chamber, the end (3), and described air inlet (303) is higher than the low level of described liquid holding groove (301), described cushion chamber (302) bottom is provided with for the exhaust outlet (304) of cavity air draft with for the leakage fluid dram (305) that discharges condensed fluid, described exhaust outlet (304) overhead height is higher than the top of base plate (104).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220633584 CN203002725U (en) | 2012-11-26 | 2012-11-26 | Exhaust device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220633584 CN203002725U (en) | 2012-11-26 | 2012-11-26 | Exhaust device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203002725U true CN203002725U (en) | 2013-06-19 |
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ID=48594360
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220633584 Withdrawn - After Issue CN203002725U (en) | 2012-11-26 | 2012-11-26 | Exhaust device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203002725U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102989736A (en) * | 2012-11-26 | 2013-03-27 | 北京七星华创电子股份有限公司 | Air exhaust device |
-
2012
- 2012-11-26 CN CN 201220633584 patent/CN203002725U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102989736A (en) * | 2012-11-26 | 2013-03-27 | 北京七星华创电子股份有限公司 | Air exhaust device |
| CN102989736B (en) * | 2012-11-26 | 2015-03-18 | 北京七星华创电子股份有限公司 | Air exhaust device |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20130619 Effective date of abandoning: 20150318 |
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| RGAV | Abandon patent right to avoid regrant |