CN202994328U - Fiber grating sensor - Google Patents
Fiber grating sensor Download PDFInfo
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- CN202994328U CN202994328U CN201220661628.2U CN201220661628U CN202994328U CN 202994328 U CN202994328 U CN 202994328U CN 201220661628 U CN201220661628 U CN 201220661628U CN 202994328 U CN202994328 U CN 202994328U
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- steel tube
- fiber
- fiber grating
- optical fiber
- sensing head
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- 239000000835 fiber Substances 0.000 title claims abstract description 40
- 229910001220 stainless steel Inorganic materials 0.000 claims abstract description 41
- 239000010935 stainless steel Substances 0.000 claims abstract description 41
- 230000005540 biological transmission Effects 0.000 claims abstract description 23
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims abstract description 16
- 230000003287 optical effect Effects 0.000 claims abstract description 13
- 239000003292 glue Substances 0.000 claims abstract description 11
- 229910052759 nickel Inorganic materials 0.000 claims abstract description 8
- 239000013307 optical fiber Substances 0.000 claims description 49
- 238000012360 testing method Methods 0.000 claims description 17
- 239000007789 gas Substances 0.000 claims description 15
- 239000000463 material Substances 0.000 claims description 9
- 238000007747 plating Methods 0.000 claims description 7
- 238000005538 encapsulation Methods 0.000 claims description 5
- 229920001973 fluoroelastomer Polymers 0.000 claims description 4
- 229910052731 fluorine Inorganic materials 0.000 claims description 3
- 239000011737 fluorine Substances 0.000 claims description 3
- 239000002341 toxic gas Substances 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
- 230000015572 biosynthetic process Effects 0.000 claims description 2
- 239000000741 silica gel Substances 0.000 claims description 2
- 229910002027 silica gel Inorganic materials 0.000 claims description 2
- 238000003466 welding Methods 0.000 claims description 2
- 238000009529 body temperature measurement Methods 0.000 abstract description 4
- 238000007789 sealing Methods 0.000 abstract description 2
- 238000012544 monitoring process Methods 0.000 description 8
- 230000008859 change Effects 0.000 description 6
- 238000005259 measurement Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
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- 238000004519 manufacturing process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
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- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 230000035882 stress Effects 0.000 description 2
- 230000032683 aging Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
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- 230000017525 heat dissipation Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000009347 mechanical transmission Effects 0.000 description 1
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- 229910052751 metal Inorganic materials 0.000 description 1
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- 230000001953 sensory effect Effects 0.000 description 1
- 230000002463 transducing effect Effects 0.000 description 1
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- Measuring Temperature Or Quantity Of Heat (AREA)
- Light Guides In General And Applications Therefor (AREA)
Abstract
The utility model discloses a fiber grating sensor which accurately measures a temperature in an ArF excimer laser cavity. The fiber grating sensor comprises a stainless steel tube (5), a coated fiber grating sensing head (1) and a heat-conducting glue (3). The fiber grating sensor is characterized in that a transmission fiber (2) is connected to one end of the fiber grating sensing head (1) and a fiber bragg grating sensing element is formed by the heat-conducting glue (3), wherein the stainless steel tube (5) is filled with the heat-conducting glue (3); The stainless steel tube (5) can be inserted into the cavity to be measured and packages the fiber bragg grating sensing element, wherein the surface of the stainless steel tube (5) is plated with nickel; fixed loop arms (6) are arranged around the stainless steel tube (5), fixed screw holes (7) are in the fixed loop arms (6) and sealing rings (10) are arranged on inner sides of the fixed loop arms (6); an opening top of the stainless steel tube (5) is provided with an optical cable connecting pipe (4), a line outlet pipe (9) whose opening top is protruded and the optical cable (8) output by the line outlet pipe. The sensor of the utility model can be used in temperature measurement under high pressure and highly corrosive environments. Reliability is high and a service life is long.
Description
Technical field
The utility model relates to a kind of ArF excimer laser, relates in particular to a kind of fiber-optic grating sensor of Real-Time Monitoring ArF excimer laser cavity temperature, belongs to sensory field of optic fibre.
Background technology
In the ArF excimer laser, there is optimum temperature range in gas as the laser work gain media, in this temperature range, laser instrument has higher energy conversion efficiency and output energy stability, so the performance of Output of laser is somewhat dependent upon the working temperature of discharge cavity.And when excimer laser is worked, high-pressure discharge and blower fan running etc. can be introduced a large amount of used heat, cause cavity temperature to raise, if can not take effective cooling measure, can cause the Laser output Quality Down, energy of lasers conversion efficiency and stability also can be greatly affected.Therefore need to carry out Real-Time Monitoring in order to take corresponding measure to carry out temperature control (as: determining riding position and the heat dissipation capacity of heating radiator) to cavity temperature.But, due to working gas F
2Have severe corrosive, conventional temp measuring method is all no longer applicable.
Measure at present the excimer laser cavity temperature and mostly rely on the platinum resistance thermometer sensor, of plating nickel on surface to realize, measure sensitivity lower, affected by extraneous factor larger, and during multi-point temperature measurement, each point all will be laid induction installation, control device etc., equipment is complicated, and system is huge.Fiber grating is selected reverberator as a kind of wavelength, it is mobile that thereby the reflected light wavelength can be produced by the impact of environmental change, utilize this characteristic physical quantitys such as detecting temperature, stress, displacement accurately, and essential safety, lightweight, volume is little, anti-electromagnetic interference (EMI), high temperature resistance, anti-high pressure, highly sensitive, has been successfully applied to the numerous areas of the productive lifes such as building, tunnel, terraced dam, electrical network, oil tank.
Utilize fiber grating to carry out ArF excimer laser cavity temperature when measuring, owing to having strong corrosive material in the chamber, and pressure is higher in the chamber in, and fiber grating can not direct exposed contact, so need fiber grating is carried out certain encapsulation process before testing.
Application number is to have mentioned a kind of fiber-optical grating temperature sensor and manufacture method thereof in 200410018765.4 Chinese invention patent, but the two ends in this sensor metal chamber all directly with the sealing of the hardening agent such as epoxy resin, can't be used for high pressure, highly corrosive environments.
The utility model content
The technical matters that (one) will solve
Technical problem to be solved in the utility model is the problem that fiber-optical grating temperature sensor of the prior art can't be used for sealed high pressure, severe corrosive environment.
(2) technical scheme
The utility model provides a kind of encapsulation simple, long-life fiber-optic grating sensor for accurate measurement ArF excimer laser cavity temperature of machinery-free motion.
The fiber-optic grating sensor that the utility model provides is used for accurately measuring the laser cavity temperature and implementing corresponding heat management.Heat management described in the utility model namely carries out Real Time Monitoring to the laser instrument cavity temperature, thereby takes corresponding temperature control cooling scheme, to avoid the decline of various thermic Laser output quality, energy conversion efficiency and stability etc. as far as possible.
The fiber-optical grating temperature sensor that the utility model provides can shield other physical quantitys such as pressure, and only independent this physical quantity of monitor temperature is to reach the purpose of accurate measurement ArF excimer laser cavity temperature.
The fiber-optical grating temperature sensor volume small volume and less weight that the utility model provides can not exert an influence to airflow field of survey environment etc. substantially.
The utility model provides a kind of fiber-optic grating sensor of accurate measurement ArF excimer laser cavity temperature, comprise: the stainless-steel tube of plating nickel on surface, again the optical fiber grating sensing head after applying, be full of the heat-conducting glue of described stainless-steel tube inside, an end of described optical fiber grating sensing head connects Transmission Fibers; By described optical fiber grating sensing head, the Transmission Fibers that is connected with described optical fiber grating sensing head one end and be full of the optical fiber grating sensing unit that the heat-conducting glue of stainless-steel tube inside forms; The described optical fiber grating sensing of described stainless-steel tube encapsulation unit;
Described stainless-steel tube one end is opening not, and an other end opening is derived for fiber-optic signal, and stainless-steel tube one end that wherein will insert the testing laser cavity shell is opening not, with opposing laser cavity inner high voltage, and isolation deep-etching gas.
The openend of described stainless-steel tube arranges the outlet-pipe of optical cable connection tube and top protrusion.
Be provided with on set collar arm, set collar arm in the border of described stainless-steel tube and be provided with fixing threaded hole, set collar arm inboard is provided with O-ring seal.
The light-sensitive optical fibre of described formation optical fiber grating sensing head is again coated structure; its manufacturing process is: at first inscribe fiber grating on the naked light-sensitive optical fibre of removing coat; then utilize coating liquid that it is applied again, to strengthen its mechanical property and to protect grating directly not contact with the external world.
One end and the Transmission Fibers of described optical fiber grating sensing head are to be connected by welding.
Described stainless-steel tube is the material of anti-fluorine of plating nickel on surface, and thickness is more than 2mm, and the pipe external diameter is slightly less than the measured hole diameter that the laser cavity housing is reserved, and the bore size is enough placed fiber grating and heat conductive silica gel.
Described stainless-steel tube is not after opening one end inserts in the shell of testing laser chamber, and described set collar arm, fixing threaded hole are used for sensor and laser cavity housing are fixed, and wherein on the laser cavity housing, the retaining thread corresponding with fixing threaded hole are arranged.
Described O-ring seal is the material of anti-the fluororubber, is wound in set collar arm inboard and is placed between set collar arm and laser cavity housing, so that the sealed laser cavity shell prevents chamber inner high voltage toxic gas leakage.
In the sensor of the utility model design, stainless-steel tube has been isolated strong corrosive material, and has shielded the impact of ambient pressure etc., and measured result be only Temperature Quantity, increased the accuracy of measurement; The volume small volume and less weight can not exert an influence to airflow field of survey environment etc. substantially; And fiber grating is in free state, makes like this optical fiber grating sensing head not contain complicated mechanical transmission mechanism, makes sensor reliability of the present utility model high, and the life-span is long.
As required, can place the fiber-optic grating sensor that a plurality of the utility model provide in the cavity many places, with the monitoring multi-point temp;
The utility model also can be used for monitoring all the other various cavity temperatures with gas laser of corrosive gas.
(3) beneficial effect
1. the utility model is for the deficiency of current lasers discharge cavity thermometric, traditional platinum resistance thermometer sensor, thermometric is improved to utilizes optic fiber grating wavelength drift precise monitoring cavity temperature, and utilize other variable quantities such as special package opposing F2 burn into shielding stress to improve temperature measurement accuracy in the chamber, can utilize same set of monitoring equipment test all wavelengths to change during multi-point temperature measurement.
2. the utility model is due to the wavelength variations of FBG monitoring temperature based on its transducing signal, and the impact of the factor such as can avoid light source to rise and fall, detector is aging guarantees Measurement sensibility and reliability.
3. the utility model can be by optical wavelength-division multiplex (WDM) technology, and utilization has the optical fiber grating sensing head of different centre wavelengths, the optical fibre wavelength division multiplexer of respective wavelength (with the different wave length signal combination) and optical fiber demodulation multiplexer (light signal of combined wave length is separated) the laser cavity temperature is carried out the Distributed Multi thermometric.
4. the utility model also is applicable to utilize optical fiber grating sensing head to have temperature survey in the laser cavity of corrosive gas to other.
Description of drawings
Fig. 1 is the one-piece construction stereographic map of fiber-optic grating sensor of the present utility model;
Fig. 2 is the one-piece construction side view of fiber-optic grating sensor of the present utility model;
Fig. 3 is the schematic diagram of the optical fiber sensor head of fiber-optic grating sensor of the present utility model;
Fig. 4 is the temperature changing curve diagram of fiber-optic grating sensor.
Wherein:
1: optical fiber grating sensing head 2: Transmission Fibers
3: heat-conducting glue 4: the optical cable connection tube
5: stainless-steel tube 6: the set collar arm
7: fixing threaded hole 8: optical cable
9: outlet-pipe 10: O-ring seal
Embodiment
For making the purpose of this utility model, technical scheme and advantage clearer, below in conjunction with specific embodiment, and with reference to accompanying drawing, the utility model is described in further detail.
Fundamental purpose of the present utility model is to provide a kind of sensor that can accurately measure ArF excimer laser cavity temperature.Its implementation mainly is the fiber grating after special package is placed in the testing laser chamber, and draws accurate temperature in the chamber according to the variation of centre wavelength.
As shown in Figure 1 and Figure 2, the utility model provides a kind of fiber-optic grating sensor of accurate measurement ArF excimer laser cavity temperature, comprise: the stainless-steel tube 5 of plating nickel on surface, again the optical fiber grating sensing head 1 after applying, be full of the heat-conducting glue 3 of described stainless-steel tube 5 inside, an end of described optical fiber grating sensing head 1 connects Transmission Fibers 2; Form optical fiber grating sensing unit by described optical fiber grating sensing head 1, the Transmission Fibers 2 that is connected with described optical fiber grating sensing head 1 one ends and the heat-conducting glue 3 that is full of stainless-steel tube 5 inside; The described stainless-steel tube 5 described optical fiber grating sensings of encapsulation are first; Described stainless-steel tube 5 one ends are opening not, and an other end opening is derived for fiber-optic signal, and stainless-steel tube one end that wherein will insert the testing laser cavity shell is opening not, with opposing laser cavity inner high voltage, and isolation deep-etching gas.
The openend of described stainless-steel tube 5 arranges the outlet-pipe 9 of optical cable connection tube 4 and top protrusion.Be provided with set collar arm 6 in the border of described stainless-steel tube 5, be provided with fixing threaded hole 7 on set collar arm 6, set collar arm 6 inboards are provided with O-ring seal 10.
Stainless-steel tube 5 is the material of anti-fluorine of plating nickel on surface, and thickness is more than 2mm, and is indeformable in order to can bear the laser cavity inner high voltage; The external diameter of stainless-steel tube 5 is got 5mm, is slightly less than the measured hole diameter 5.5mm that the laser cavity housing is reserved, and the bore size is got 1mm, places vertically optical fiber grating sensing head 1 and heat-conducting glue 3 in pipe; Stainless-steel tube 5 will insert not opening of the interior end (optical fiber grating sensing head 1 one sides) of testing laser cavity shell, with opposing laser cavity inner high voltage, and isolation deep-etching gas, an other end opening is derived for fiber-optic signal.
The retaining thread corresponding with fixing threaded hole 7 arranged on the testing laser cavity shell, and described fiber-optic grating sensor and testing laser cavity shell are namely fixed by retaining thread corresponding on fixing threaded hole 7 and laser cavity housing.O-ring seal 10 is the material of anti-the fluororubber, is placed between set collar arm 6 and testing laser cavity shell, so that the sealed laser cavity shell prevents chamber inner high voltage toxic gas leakage.
Optical cable connection tube 4 is clamped in stainless-steel tube 5 just, is used for constant transmissions optical fiber 2 one ends, and is connected outlet-pipe 9, and outlet-pipe 9 quality are soft, for the protection of the optical fiber of stainless-steel tube 5 ports, make it avoid pullling damage.
Above-mentioned fiber-optic grating sensor when mounted, need a side that is placed with optical fiber grating sensing head 1 of stainless-steel tube 5 is all submerged in the testing laser chamber, and the O-ring seal 10 that utilizes set collar arm 6, fixing threaded hole 7, set collar arm 6 inboards is with whole described fiber-optic grating sensor and laser cavity housing fixing seal.Wherein said fiber-optic grating sensor and laser cavity housing are fixed by retaining thread corresponding on fixing threaded hole 7 and laser cavity housing; O-ring seal 10 is the material of anti-the fluororubber, is wound in set collar arm 6 inboards, and is placed between set collar arm 6 and testing laser cavity shell, so that the sealed laser cavity shell, prevents that intracavity gas from revealing.
Fig. 3 is the schematic diagram of optical fiber grating sensing head 1.As shown in Figure 3, an end of optical fiber grating sensing head 1 connects Transmission Fibers 2.Described optical fiber grating sensing head 1 is used for measuring testing laser intracavity gas temperature.
Fiber grating is as follows as the ultimate principle of temperature sensor:
Wherein, L is bragg grating FBG length, and n is refractive index, λ
BBe Prague centre wavelength, Δ T is the temperature change amount, Δ λ
BBe Prague centre wavelength change amount.As seen, FBG is when being subjected to influence of temperature change, and Bragg grating centre wavelength changes.Utilize this formula by the characteristic of FBG reflection kernel wavelength with temperature drift, to test the excimer laser cavity temperature.
What optical fiber grating sensing head 1 of the present utility model used is light-sensitive optical fibre.The light-sensitive optical fibre of described optical fiber grating sensing head 1 is through applying again; its manufacturing process is: at first inscribe fiber grating on the naked light-sensitive optical fibre of removing coat; then utilize coating liquid that it is applied again, to protect grating directly not contact with the external world and to strengthen its mechanical property.
In 1 pair of laser cavity of described optical fiber grating sensing head, gas temperature is measured, and obtains representing the fiber-optic signal of gas temperature, and described fiber-optic signal is wavelength signals.Described wavelength signals is transmitted by described Transmission Fibers 2, and described Transmission Fibers 2 runs through optical cable connection tube 4, and is stretched out by outlet-pipe 9, and described Transmission Fibers 2 is protected in the described wavelength signals of the interior continuation transmission of optical cable 8 afterwards.
Fig. 4 is the fiber-optic grating sensor temperature changing curve diagram.As shown in Figure 4, the reflection wavelength change value of optical fiber grating sensing unit is the function of temperature, can obtain according to the concrete numerical value of reflection wavelength the temperature of test environment thus.The wavelength signals that optical fiber grating sensing head 1 measures is by after Transmission Fibers 2 transmission, those of ordinary skills can utilize multiple technologies means habitual in prior art to obtain the data of this wavelength signals, and data and Fig. 4 of this wavelength signals compared, can know the temperature of testing laser intracavity gas.The described mode that obtains the data of the wavelength signals that Transmission Fibers 2 transmits is the state of the art, those of ordinary skills can be as required or based on the consideration of convenience, take multiple existing technological means, obtain the data of described wavelength signals, do not do at this and give unnecessary details.
Above-described specific embodiment; the purpose of this utility model, technical scheme and beneficial effect are further described; be understood that; the above is only specific embodiment of the utility model; be not limited to the utility model; all within spirit of the present utility model and principle, any modification of making, be equal to replacement, improvement etc., within all should being included in protection domain of the present utility model.
Claims (8)
1. fiber-optic grating sensor comprises: the stainless-steel tube of plating nickel on surface (5), optical fiber grating sensing head (1), be full of the inner heat-conducting glue (3) of described stainless-steel tube (5), it is characterized in that:
One end of described optical fiber grating sensing head (1) connects Transmission Fibers (2);
By described optical fiber grating sensing head (1), the Transmission Fibers (2) that is connected with described optical fiber grating sensing head (1) one end and be full of the inner heat-conducting glue (3) of stainless-steel tube (5) to form optical fiber grating sensing first;
The described optical fiber grating sensing of described stainless-steel tube (5) encapsulation unit;
Described stainless-steel tube (5) one end openings, the other end is opening not;
The openend of described stainless-steel tube (5) is provided with the outlet-pipe (9) of optical cable connection tube (4) and top protrusion.
2. fiber-optic grating sensor as claimed in claim 1, be further characterized in that, described optical fiber grating sensing head (1) is measured gas temperature in laser cavity, obtain representing the fiber-optic signal of gas temperature, described fiber-optic signal is wavelength signals, and described wavelength signals is transmitted by described Transmission Fibers (2).
3. fiber-optic grating sensor as claimed in claim 1; be further characterized in that; described Transmission Fibers (2) runs through optical cable connection tube (4), and is stretched out by outlet-pipe (9), and described Transmission Fibers (2) is protected in and continues the transmission wavelength signal in optical cable (8) afterwards.
4. fiber-optic grating sensor as claimed in claim 1, be further characterized in that, is provided with set collar arm (6) in the border of described stainless-steel tube (5), is provided with fixing threaded hole (7) on set collar arm (6); Described stainless-steel tube (5) is not after opening one end inserts in the shell of testing laser chamber, and described set collar arm (6), fixing threaded hole (7) are used for sensor and laser cavity housing are fixed; The retaining thread corresponding with fixing threaded hole (7) arranged on the laser cavity housing.
5. fiber-optic grating sensor as claimed in claim 4, be further characterized in that, set collar arm (6) inboard is provided with O-ring seal (10), described O-ring seal (10) is the material of anti-the fluororubber, be wound in set collar arm (6) inboard and be placed between set collar arm (6) and laser cavity housing, so that the sealed laser cavity shell prevents chamber inner high voltage toxic gas leakage.
6. fiber-optic grating sensor as claimed in claim 1, be further characterized in that, the light-sensitive optical fibre of described formation optical fiber grating sensing head (1) is again coated structure.
7. fiber-optic grating sensor as claimed in claim 1, be further characterized in that, described optical fiber grating sensing head (1) is connected by welding with Transmission Fibers (2).
8. fiber-optic grating sensor as claimed in claim 1, be further characterized in that, described stainless-steel tube (5) is the material of anti-fluorine of plating nickel on surface, thickness is more than 2mm, the pipe external diameter is slightly less than the measured hole diameter that the laser cavity housing is reserved, and the bore size is enough placed fiber grating and heat conductive silica gel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201220661628.2U CN202994328U (en) | 2012-12-04 | 2012-12-04 | Fiber grating sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201220661628.2U CN202994328U (en) | 2012-12-04 | 2012-12-04 | Fiber grating sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202994328U true CN202994328U (en) | 2013-06-12 |
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ID=48565500
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201220661628.2U Expired - Lifetime CN202994328U (en) | 2012-12-04 | 2012-12-04 | Fiber grating sensor |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103512677A (en) * | 2013-10-22 | 2014-01-15 | 华北电力大学 | Single-ended FBG temperature sensor with mounting hole |
| CN104977098A (en) * | 2015-07-16 | 2015-10-14 | 吉林大学 | High-sensitivity fiber grating temperature sensor with fast response speed |
| CN110542492A (en) * | 2019-10-10 | 2019-12-06 | 深圳市基础工程有限公司 | Fiber grating temperature sensor with built-in heat-conducting liquid |
-
2012
- 2012-12-04 CN CN201220661628.2U patent/CN202994328U/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103512677A (en) * | 2013-10-22 | 2014-01-15 | 华北电力大学 | Single-ended FBG temperature sensor with mounting hole |
| CN103512677B (en) * | 2013-10-22 | 2016-05-18 | 华北电力大学 | A kind of single-end optical fiber grating temperature sensor with installing hole |
| CN104977098A (en) * | 2015-07-16 | 2015-10-14 | 吉林大学 | High-sensitivity fiber grating temperature sensor with fast response speed |
| CN110542492A (en) * | 2019-10-10 | 2019-12-06 | 深圳市基础工程有限公司 | Fiber grating temperature sensor with built-in heat-conducting liquid |
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|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20200903 Address after: 100029 Beijing city Chaoyang District Beitucheng West Road No. 3 Patentee after: Institute of Microelectronics of the Chinese Academy of Sciences Address before: 100190, No. 19 West Fourth Ring Road, Beijing, Haidian District Patentee before: Aerospace Information Research Institute,Chinese Academy of Sciences Effective date of registration: 20200903 Address after: 100190, No. 19 West Fourth Ring Road, Beijing, Haidian District Patentee after: Aerospace Information Research Institute,Chinese Academy of Sciences Address before: 9 Dengzhuang South Road, Haidian District, Beijing 100094 Patentee before: Academy of Opto-Electronics, Chinese Academy of Sciences |
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| TR01 | Transfer of patent right | ||
| CX01 | Expiry of patent term |
Granted publication date: 20130612 |
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| CX01 | Expiry of patent term |