CN202988744U - Equipment for treating silicon tetrachloride-hydrogenating by-product - Google Patents
Equipment for treating silicon tetrachloride-hydrogenating by-product Download PDFInfo
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- CN202988744U CN202988744U CN201220173575XU CN201220173575U CN202988744U CN 202988744 U CN202988744 U CN 202988744U CN 201220173575X U CN201220173575X U CN 201220173575XU CN 201220173575 U CN201220173575 U CN 201220173575U CN 202988744 U CN202988744 U CN 202988744U
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Abstract
The utility model provides equipment for treating silicon tetrachloride-hydrogenating by-products. The equipment comprises: a gas-solid separating device, wherein the gas-solid separating device is used for gas-solid separating the silicon tetrachloride-hydrogenating by-products to obtain a first gas mixture containing trichlorosilane, silicon tetrachloride, dichlorosilane and hydrogen, and particles; and a heat exchange device, wherein the heat exchange device is connected to the gas-solid separating device and receives the first gas mixture, a second gas mixture exchanges heat with the first gas mixture to raise temperature, and the second gas mixture contains silicon tetrachloride and hydrogen. The equipment for treating silicon tetrachloride-hydrogenating by-products of the utility model has advantages of simple structure, convenient operation, low energy consumption and high heat recovery rate, and can also avoid the solid particles blocking the pipes and raise the utilization rate of solid material, thereby making sure normal operation of the pipes and the equipment.
Description
Technical field
The utility model relates to field of polysilicon production, more specifically, relates to the equipment for the treatment of the hydrogenation of silicon tetrachloride by product.
Background technology
In polysilicon production process, produce a large amount of silicon tetrachloride as by-product.For example, when adopting trichlorosilane Process of Hydrogen Reduction (improvement Siemens process) to produce polysilicon, 1 ton of polysilicon of every production can produce 10～20 tons of silicon tetrachlorides.Silicon tetrachloride is a kind of poisonous chemical substance, and very easily hydrolysis generates silicic acid and hydrogenchloride, serious environment pollution.Therefore, how the safe handling silicon tetrachloride becomes the focus of present research.At present, the effective means of processing silicon chloride is to make silicon tetrachloride be converted under certain conditions the raw material trichlorosilane of producing polysilicon by the hydrogenation of silicon tetrachloride technology.
Yet, contain the solid particulates such as a small amount of silica flour and catalyzer due to the by product that contains silicon tetrachloride, e-quipment and pipe is stopped up, and its heat can't reclaim, caused energy consumption higher, cost is higher, fluctuation of service.
The utility model content
The utility model is intended to one of solve the problems of the technologies described above at least.For this reason, a purpose of the present utility model is to propose equipment and the method for processing silicon chloride hydrogenated by-product effectively.
According to an aspect of the present utility model, the utility model provides a kind of equipment for the treatment of the hydrogenation of silicon tetrachloride by product.According to embodiment of the present utility model, this equipment comprises: gas-solid separating device, described gas-solid separating device are used for the hydrogenation of silicon tetrachloride by product is carried out gas solid separation to obtain containing the first gaseous mixture and the solid particulate of trichlorosilane, silicon tetrachloride, dichloro-dihydro silicon, hydrogen; And heat exchanger, described heat exchanger is connected with described gas-solid separating device, receive described the first gaseous mixture from described gas-solid separating device, and described the first gaseous mixture and the second gaseous mixture are carried out heat exchange, in order to make the temperature of described the second gaseous mixture be enhanced, wherein, described the second gaseous mixture mixture that is silicon tetrachloride and hydrogen.According to the equipment for the treatment of the hydrogenation of silicon tetrachloride by product of the utility model embodiment, heat that can efficient recovery hydrogenation of silicon tetrachloride by product is realized energy-saving and cost-reducing.
According to embodiment of the present utility model, described equipment for the treatment of the hydrogenation of silicon tetrachloride by product can also have following additional technical feature:
According to an embodiment of the present utility model, further comprise: hydrogenation apparatus, described hydrogenation apparatus are used for silicon tetrachloride is carried out hydrogen treatment; And the solid particulate return pipeline, the described gas-solid separating device of described solid particulate return pipeline is connected, and is used for described solid particulate is back to hydrogenation apparatus.Thus, can recycle silica flour and catalyzer, improve utilization of materials.
According to an embodiment of the present utility model, described gas-solid separating device is cyclonic separator.Thus, can improve gas solid separation efficient, avoid solid particulate occluding device and pipeline, thereby guarantee the normal operation of pipeline and equipment.
According to an embodiment of the present utility model, described equipment for the treatment of the hydrogenation of silicon tetrachloride by product further comprises porcelain filter, described porcelain filter is connected with heat exchanger with described gas-solid separating device respectively, so that before the first gaseous mixture enters described heat exchanger, described the first gaseous mixture is carried out dust removal by filtration process.Thus, the first gaseous mixture can be further purified, and solid particulate occluding device and pipeline can be further avoided, thus the normal operation of assurance e-quipment and pipe.
According to an embodiment of the present utility model, the aperture of described porcelain filter is the 600-1500 order.Thus, can effectively remove the fine solid particle in the first gaseous mixture, be further purified trichlorosilane.
According to an embodiment of the present utility model, the molar ratio of silicon tetrachloride and hydrogen is 1: 1～1: 10 in described the second gaseous mixture.Thus, the raw material that the second gaseous mixture that heats through heat exchange can directly react as hydrogenation of silicon tetrachloride.
According to an embodiment of the present utility model, further comprise condensing works, described condensing works is connected with described heat exchanger, be used for receiving through overcooled the first gaseous mixture from described heat exchanger, and described the first gaseous mixture is carried out condensation process, make trichlorosilane, silicon tetrachloride, dichloro-dihydro silicon and Hydrogen Separation in described the first gaseous mixture.Thus, can further effectively separate trichlorosilane, silicon tetrachloride, dichloro-dihydro silicon and hydrogen.
According to an embodiment of the present utility model, described equipment for the treatment of the hydrogenation of silicon tetrachloride by product further comprises heating unit, described heating unit is connected with described hydrogenation apparatus, be used for after the further heat temperature raising of the mixed gas of hydrogen and silicon tetrachloride, described mixed gas is supplied to described hydrogenation apparatus.Thus, can improve the temperature of the mixed gas of hydrogen and silicon tetrachloride, be conducive to the carrying out of hydrogenation of silicon tetrachloride reaction.
According to an embodiment of the present utility model, described equipment for the treatment of the hydrogenation of silicon tetrachloride by product further comprises the second gaseous mixture transport pipe, described the second gaseous mixture transport pipe is connected with electric heater unit with described heat exchanger respectively, is used for inputing to described hydrogenation apparatus through the described mixed gas that contains silicon tetrachloride and hydrogen of heat exchange.Thus, the second gaseous mixture through heating can be used for hydrogenation.
According on the other hand of the present utility model, the utility model also provides a kind of method of processing silicon chloride hydrogenated by-product.According to embodiment of the present utility model, the method comprises the following steps: the hydrogenation of silicon tetrachloride by product is supplied to gas-solid separating device, in order to carry out gas solid separation to obtain containing the first gaseous mixture and the solid particulate of trichlorosilane, silicon tetrachloride, dichloro-dihydro silicon, hydrogen; And described the first gaseous mixture and the second gaseous mixture are carried out heat exchange in heat exchanger, wherein, described the second gaseous mixture is the mixture of silicon tetrachloride and hydrogen.Utilize the method, heat that can efficient recovery hydrogenation of silicon tetrachloride by product is realized energy-saving and cost-reducing.
According to embodiment of the present utility model, aforesaid method can also have following additional technical feature:
According to an embodiment of the present utility model, the method for described processing silicon chloride hydrogenated by-product further comprises described solid particulate is delivered to hydrogenation apparatus, is used for carrying out the hydrogenation of silicon tetrachloride.Thus, can recycle silica flour and catalyzer, improve the utilization ratio of material.
According to an embodiment of the present utility model, described gas-solid separating device is cyclonic separator.Thus, can improve gas solid separation efficient, avoid solid particulate occluding device and pipeline, thereby guarantee the normal operation of e-quipment and pipe.
According to an embodiment of the present utility model, before the first gaseous mixture is carried out heat exchange, comprise that further utilizing porcelain filter to carry out dust removal by filtration to the first gaseous mixture processes.Thus, the first gaseous mixture can be further purified, and the solid particulate blocking pipe can be further avoided, thus the normal operation of assurance pipeline and equipment.
According to an embodiment of the present utility model, the aperture of described porcelain filter is the 600-1500 order.Thus, can effectively remove the fine solid particle in the first gaseous mixture, be further purified the first mixed gas.
According to an embodiment of the present utility model, the molar ratio of silicon tetrachloride and hydrogen is 1: 1～1: 10 in described the second gaseous mixture.Thus, the raw material that the second gaseous mixture that heats through interchanger can directly react as hydrogenation of silicon tetrachloride.
According to an embodiment of the present utility model, further comprise described the first gaseous mixture through heat exchange is carried out condensation process, make trichlorosilane, silicon tetrachloride, dichloro-dihydro silicon and Hydrogen Separation in described the first gaseous mixture.Thus, can further effectively separate trichlorosilane and hydrogen.
According to an embodiment of the present utility model, further comprise the second gaseous mixture through heating is inputed to and carry out hydrogenation in hydrogenation apparatus.Thus, the second gaseous mixture through heating can be used for hydrogenation.
According to an embodiment of the present utility model, before described the second gaseous mixture is input to described hydrogenation apparatus, further comprises described the second gaseous mixture is heated.Thus, can improve the temperature of the mixed gas of hydrogen and silicon tetrachloride, be conducive to the carrying out of hydrogenation of silicon tetrachloride reaction.
Additional aspect of the present utility model and advantage part in the following description provide, and part will become obviously from the following description, or recognize by practice of the present utility model.
Description of drawings
Above-mentioned and/or additional aspect of the present utility model and advantage are from obviously and easily understanding becoming the description of embodiment in conjunction with following accompanying drawing, wherein:
Fig. 1 is the schematic diagram for the treatment of the equipment of hydrogenation of silicon tetrachloride by product according to the utility model embodiment; And
Fig. 2 is the schematic flow sheet according to the method for the processing silicon chloride hydrogenated by-product of an embodiment of the utility model.
Embodiment
The below describes embodiment of the present utility model in detail, and the example of described embodiment is shown in the drawings, and wherein same or similar label represents same or similar element or the element with identical or similar functions from start to finish.Be exemplary below by the embodiment that is described with reference to the drawings, only be used for explaining the utility model, and can not be interpreted as restriction of the present utility model.
Below with reference to Fig. 1, equipment for the treatment of the hydrogenation of silicon tetrachloride by product is described:
According to an aspect of the present utility model, the utility model provides a kind of equipment for the treatment of the hydrogenation of silicon tetrachloride by product.According to an embodiment of the present utility model, described system be used to carrying out the hydrogenation of silicon tetrachloride reaction comprises the equipment of hydrogenation apparatus and processing silicon chloride hydrogenated by-product.The equipment of processing silicon chloride hydrogenated by-product comprises: gas-solid separating device and heat exchanger.According to embodiment more of the present utility model, gas-solid separating device is used for the hydrogenation of silicon tetrachloride by product is carried out gas solid separation to obtain containing the first gaseous mixture and the solid particulate of trichlorosilane, silicon tetrachloride, dichloro-dihydro silicon, hydrogen, heat exchanger is connected with gas-solid separating device, receive the first gaseous mixture from gas-solid separating device, and the first gaseous mixture and the second gaseous mixture are carried out heat exchange, in order to make the temperature of described the second gaseous mixture be enhanced, wherein, the second gaseous mixture is the mixture of silicon tetrachloride and hydrogen.The equipment for the treatment of the hydrogenation of silicon tetrachloride by product according to the utility model embodiment, simple in structure, easy to operate, can effectively the energy of hydrogenation of silicon tetrachloride by product will be reclaimed, energy consumption is low, cost is low, and can avoid solid particulate occluding device and pipeline, thereby guarantees the normal operation of pipeline and equipment.
Herein, broad understanding should be made in term " hydrogenation of silicon tetrachloride by product ", it refers to that silicon tetrachloride and hydrogen carry out hydrogenation in polysilicon production process, the mixture of discharging from reaction unit wherein contains trichlorosilicane, silicon tetrachloride, dichloro-dihydro silicon, hydrogen and solid particulate etc.According to embodiment of the present utility model, the type of hydrogenation apparatus is not particularly limited, as long as can make the hydrogenation of silicon tetrachloride reaction smoothly.In examples more of the present utility model, can adopt fixed-bed reactor or fluidized-bed reactor.In a concrete example of the present utility model, can adopt fluidized-bed reactor.In fluidized-bed reactor, utilize gas to make solid particulate be in the suspended motion state by the particulate solid layer, the promoting the circulation of qi solid state reaction of going forward side by side.In described hydrogenation apparatus, following reaction occurs in silicon tetrachloride and hydrogen:
3SiCl
4+2H
2+Si＝4SiHCl
3
At first, the catalyst powder powder is evenly mixed with the mass ratio of silica flour by 1%-5%, be warming up to 400 ℃ by 28 ℃ and activate drying treatment under hydrogen atmosphere.Then, with mol ratio be the mixed gas of the silicon tetrachloride of 1: 1～1: 10 and hydrogen with certain flow velocity by catalyzer and the silica flour bed of material after activation treatment, temperature is 400～600 ℃, pressure is 1.5～3.5MPa, carries out hydrogenation of silicon tetrachloride and reacts.Under above reaction conditions, silicon tetrachloride can be converted into trichlorosilane effectively, and transformation efficiency can reach 20～30%.Therefore, reaction can be carried out under lower temperature and pressure, thereby can reduce energy consumption, saves cost.
According to embodiment of the present utility model, heat exchanger can be realized the heat exchange between the first gaseous mixture and the second gaseous mixture, thereby in the temperature that reduces byproduct gas, improved the temperature of the second gaseous mixture that contains silicon tetrachloride and hydrogen, thereby the raw material that makes the second gaseous mixture through heating can be used as hydrogenation inputs in hydrogenation apparatus.According to embodiment of the present utility model, the type of heat exchanger is not particularly limited.In a concrete example of the present utility model, described heat exchanger is shell and tube heat exchanger.Thereby effectively utilize the heat of gas in hydrogenated by-product, improve heat utilization rate, reduce costs.According to embodiment of the present utility model, described equipment for the treatment of the hydrogenation of silicon tetrachloride by product further comprises the mixed gas delivery pipeline, described mixed gas delivery pipeline is connected with described hydrogenation apparatus with described heat exchanger respectively, be used for and input to described hydrogenation apparatus through the described mixed gas that contains silicon tetrachloride and hydrogen of heat exchange, thereby be convenient to the carrying out of subsequent disposal operation.According to concrete example of the present utility model, the molar ratio of silicon tetrachloride and hydrogen is 1: 1～1: 10 in described the second gaseous mixture.Thus, the raw material that the second gaseous mixture that heats through heat exchange can directly react as hydrogenation of silicon tetrachloride.
According to embodiment of the present utility model, described equipment for the treatment of the hydrogenation of silicon tetrachloride by product further comprises heating unit, described heating unit is connected with described hydrogenation apparatus, after heating for the mixed gas with hydrogen and silicon tetrachloride, described mixed gas is supplied to described hydrogenation apparatus.According to embodiment of the present utility model, the type of heating unit is not particularly limited, as long as the mixed gas of described hydrogen and silicon tetrachloride can be heated to temperature required (as 400～600 ℃).In a concrete example of the present utility model, described heating unit is resistance heater.Through after heat treated, can improve the temperature of the mixed gas of described hydrogen and silicon tetrachloride, be conducive to the carrying out of hydrogenation of silicon tetrachloride reaction.
According to embodiment of the present utility model, the type of gas-solid separating device is not particularly limited, as long as can isolate the first gaseous mixture from the hydrogenation of silicon tetrachloride by product, namely trichlorosilane, silicon tetrachloride, dichloro-dihydro silicon and hydrogen get final product.In a concrete example of the present utility model, described gas-solid separating device is cyclonic separator.Cyclonic separator adopts the vertical conical structure, and inwall is coated with high-abrasive material.Equipment adopts the ear seat supports, and end socket adopts high pressure resistant ellipse end socket.Described the first gaseous mixture that contains trichlorosilane, silicon tetrachloride, dichloro-dihydro silicon and hydrogen enters cyclonic separator, after impure gas radially enters cyclone tube, air-flow is subjected to guide functions and produces strong rotation, air-flow enters Whirlwind barrel downwards twist along cylindrical shell, the large grit of density is thrown toward wall under centrifugal action, and under action of gravity, fall to flowing out the tornadotron dust-exhausting port along barrel.The air-flow of rotation shrinks to center flow in cylindrical shell, upwards forms secondary vortex flow and flow to downstream unit through airway.After separating through gas-solid separating device, particle diameter in the described mixture that contains trichlorosilane, silicon tetrachloride, dichloro-dihydro silicon and hydrogen can be removed greater than the solid particulate (as catalyzer or silica flour etc.) of 10 microns, thereby be obtained the gaseous mixture of purer trichlorosilane, silicon tetrachloride, dichloro-dihydro silicon and hydrogen.Therefore, can avoid solid particulate occluding device and pipeline, thereby guarantee the normal operation of pipeline and equipment.
According to embodiment of the present utility model, described equipment for the treatment of the hydrogenation of silicon tetrachloride by product further comprises the solid particulate return pipeline, described solid particulate return pipeline is connected with gas-solid separating device with hydrogenation apparatus respectively, is used for described solid particulate is back to described hydrogenation apparatus.Thus, the catalyzer in described solid particulate and silica flour can be used as catalyzer and the silica flour of hydrogenation of silicon tetrachloride reaction again, thus recycle catalyzer and silica flour.
According to embodiment of the present utility model, described equipment for the treatment of the hydrogenation of silicon tetrachloride by product further comprises porcelain filter, described porcelain filter is connected with described gas-solid separating device, in order to receive through hydrogen and silicon tetrachloride from described gas-solid separating device, and described hydrogen and the silicon tetrachloride that purifies through gas solid separation carried out the dust removal by filtration processing.According to embodiment of the present utility model, the type of porcelain filter is not particularly limited, and removes as long as can remove the fine solid particle that the trichlorosilane mixed gas body carries.According to embodiment of the present utility model, the aperture of described porcelain filter is the 600-1500 order.Through after filtration treatment, can be from described gaseous mixture through the trichlorosilane, silicon tetrachloride, dichloro-dihydro silicon and the hydrogen that purify, be that the fine solid particle of 1～10 micron is removed with particle diameter, be further purified trichlorosilane, silicon tetrachloride, dichloro-dihydro silicon and hydrogen, and can avoid solid particulate occluding device and pipeline, thereby guarantee the normal operation of pipeline and equipment.
According to embodiment of the present utility model, described equipment for the treatment of the hydrogenation of silicon tetrachloride by product further comprises condensing works, described condensing works is connected with described heat exchanger, be used for receiving through overcooled the first gaseous mixture from described heat exchanger, and described the first gaseous mixture is carried out condensation process, make trichlorosilane, silicon tetrachloride, dichloro-dihydro silicon be condensed, thereby realize separating with hydrogen.According to embodiment of the present utility model, the type of condensing works is not particularly limited, as long as can change liquid into through overcooled trichlorosilane, silicon tetrachloride, dichloro-dihydro silicon gas with described.In a concrete example of the present utility model, described condensing works is the multi-stage condensing device.Through after condensation process, can further reduce the temperature of trichlorosilane, silicon tetrachloride, dichloro-dihydro silicon, realize and Hydrogen Separation, and hydrogen can recycle.
The method of processing silicon chloride hydrogenated by-product is described below with reference to Fig. 2:
According to another aspect of the present utility model, the utility model also provides a kind of method of processing silicon chloride hydrogenated by-product.According to embodiment of the present utility model, the method for described processing silicon chloride hydrogenated by-product comprises the following steps.
At first, the hydrogenation of silicon tetrachloride by product is supplied to gas-solid separating device, in order to carry out gas solid separation to obtain containing the first gaseous mixture and the solid particulate of trichlorosilane, silicon tetrachloride, dichloro-dihydro silicon, hydrogen.According to embodiment more of the present utility model, gas-solid separating device is used for the hydrogenation of silicon tetrachloride by product is carried out gas solid separation to obtain containing the first gaseous mixture and the solid particulate of trichlorosilane, silicon tetrachloride, dichloro-dihydro silicon, hydrogen.According to embodiment of the present utility model, the type of gas-solid separating device is not particularly limited, as long as can isolate the first gaseous mixture from the hydrogenation of silicon tetrachloride by product, namely trichlorosilane, silicon tetrachloride, dichloro-dihydro silicon and hydrogen get final product.In a concrete example of the present utility model, described gas-solid separating device is cyclonic separator.Cyclonic separator adopts the vertical conical structure, and inwall is coated with high-abrasive material.Equipment adopts the ear seat supports, and end socket adopts high pressure resistant ellipse end socket.Described the first gaseous mixture that contains trichlorosilane, silicon tetrachloride, dichloro-dihydro silicon and hydrogen enters cyclonic separator, when impure gas after radially conduit enters cyclone tube, air-flow is subjected to guide functions and produces strong rotation, air-flow enters the whirlwind cone downwards twist along cylindrical shell, the large grit of density is thrown toward wall under centrifugal action, and under action of gravity, fall to flowing out the tornadotron dust-exhausting port along barrel.The air-flow of rotation shrinks to center flow in cylindrical shell, upwards forms secondary vortex flow and flow to downstream unit through airway.After separating through gas-solid separating device, particle diameter in the described mixture that contains trichlorosilane and hydrogen can be removed greater than the solid particulate (silica flour or catalyzer etc.) of 10 microns, thereby be obtained the gaseous mixture of purer trichlorosilane, silicon tetrachloride, dichloro-dihydro silicon and hydrogen.Therefore, can avoid solid particulate occluding device and pipeline, thereby guarantee the normal operation of pipeline and equipment.According to embodiment of the present utility model, described equipment for the treatment of the hydrogenation of silicon tetrachloride by product further comprises the solid particulate return pipeline, described solid particulate return pipeline is connected with gas-solid separating device with hydrogenation apparatus respectively, is used for described solid particulate is back to described hydrogenation apparatus.Thus, catalyzer and the raw material silica flour that described solid particulate can be reacted as hydrogenation of silicon tetrachloride again, thereby recycle.
Next, described the first gaseous mixture and the second gaseous mixture are carried out heat exchange in heat exchanger, wherein, described the second gaseous mixture is the mixture of silicon tetrachloride and hydrogen.According to embodiment of the present utility model, heat exchanger can be realized the heat exchange between the first gaseous mixture and the second gaseous mixture, thereby in the temperature that reduces byproduct gas, improved the temperature of the second gaseous mixture that contains silicon tetrachloride and hydrogen, thereby the raw material that makes the second gaseous mixture through heating can be used as hydrogenation inputs in hydrogenation apparatus.According to embodiment of the present utility model, the type of heat exchanger is not particularly limited.In a concrete example of the present utility model, described heat exchanger is shell and tube heat exchanger.Thereby effectively utilize the heat of gas in hydrogenated by-product, improve heat utilization rate, reduce costs.According to embodiment of the present utility model, described equipment for the treatment of the hydrogenation of silicon tetrachloride by product further comprises the mixed gas delivery pipeline, described mixed gas delivery pipeline is connected with described hydrogenation apparatus with described heat exchanger respectively, be used for and input to described hydrogenation apparatus through the described mixed gas that contains silicon tetrachloride and hydrogen of heat exchange, thereby be convenient to the carrying out of subsequent disposal operation.According to concrete example of the present utility model, the molar ratio of silicon tetrachloride and hydrogen is 1: 1～1: 10 in described the second gaseous mixture.Thus, the raw material that the second gaseous mixture that heats through heat exchange can directly react as hydrogenation of silicon tetrachloride.According to embodiment of the present utility model, described equipment for the treatment of the hydrogenation of silicon tetrachloride by product further comprises heating unit, described heating unit is connected with described hydrogenation apparatus, after heating for the mixed gas with hydrogen and silicon tetrachloride, described mixed gas is supplied to described hydrogenation apparatus.According to embodiment of the present utility model, the type of heating unit is not particularly limited, as long as the mixed gas of described hydrogen and silicon tetrachloride can be heated to temperature required (as 400～600 ℃).In a concrete example of the present utility model, described heating unit is resistance heater.Through after heat treated, can improve the temperature of the mixed gas of described hydrogen and silicon tetrachloride, be conducive to the carrying out of hydrogenation of silicon tetrachloride reaction.According to an embodiment of the present utility model, further be included in described the first gaseous mixture is carried out heat exchange before, described the first gaseous mixture is carried out dust removal by filtration processes.Thus, the first gaseous mixture can be further purified, and solid particulate occluding device and pipeline can be further avoided, thus the normal operation of assurance pipeline and equipment.According to an embodiment of the present utility model, the aperture of described porcelain filter is the 600-1500 order.Thus, can effectively remove the fine solid particle in the first gaseous mixture, be further purified the trichlorosilane mixed gas body.According to an embodiment of the present utility model, further comprise and carry out condensation process with described through overcooled the first gaseous mixture, make trichlorosilane, silicon tetrachloride, dichloro-dihydro silicon and Hydrogen Separation in described the first gaseous mixture.Thus, can further effectively separate trichlorosilane, silicon tetrachloride, dichloro-dihydro silicon and hydrogen.According to an embodiment of the present utility model, before described the second gaseous mixture is input to described hydrogenation apparatus, further comprises described the second gaseous mixture is heated.Thus, can improve the temperature of the mixed gas of hydrogen and silicon tetrachloride, be conducive to the carrying out of hydrogenation of silicon tetrachloride reaction.
Utilization is according to the method for the processing silicon chloride hydrogenated by-product of the utility model embodiment, and heat that can efficient recovery hydrogenation of silicon tetrachloride by product is realized energy-saving and cost-reducing.
In the description of this specification sheets, the description of reference term " embodiment ", " some embodiment ", " example ", " concrete example " or " some examples " etc. means to be contained at least one embodiment of the present utility model or example in conjunction with specific features, structure, material or the characteristics of this embodiment or example description.In this manual, the schematic statement of above-mentioned term not necessarily referred to identical embodiment or example.And the specific features of description, structure, material or characteristics can be with suitable mode combinations in any one or more embodiment or example.
Although illustrated and described embodiment of the present utility model, those having ordinary skill in the art will appreciate that: in the situation that do not break away from principle of the present utility model and aim can be carried out multiple variation, modification, replacement and modification to these embodiment, scope of the present utility model is limited by claim and equivalent thereof.
Claims (8)
1. the equipment for the treatment of the hydrogenation of silicon tetrachloride by product, is characterized in that, comprising:
Gas-solid separating device, described gas-solid separating device are used for the hydrogenation of silicon tetrachloride by product is carried out gas solid separation; And
Heat exchanger, described heat exchanger is connected with described gas-solid separating device.
2. the equipment for the treatment of the hydrogenation of silicon tetrachloride by product according to claim 1, is characterized in that, further comprises:
Hydrogenation apparatus, described hydrogenation apparatus are used for silicon tetrachloride is carried out hydrogen treatment; And
The solid particulate return pipeline, described solid particulate return pipeline is connected with hydrogenation apparatus with described gas-solid separating device respectively.
3. the equipment for the treatment of the hydrogenation of silicon tetrachloride by product according to claim 1, is characterized in that, described gas-solid separating device is cyclonic separator.
4. the equipment for the treatment of the hydrogenation of silicon tetrachloride by product according to claim 1, is characterized in that, further comprises porcelain filter, and described porcelain filter is connected with heat exchanger with described gas-solid separating device respectively.
5. the equipment for the treatment of the hydrogenation of silicon tetrachloride by product according to claim 4, is characterized in that, the aperture of described porcelain filter is the 600-1500 order.
6. the equipment for the treatment of the hydrogenation of silicon tetrachloride by product according to claim 1, is characterized in that, further comprises: condensing works, described condensing works is connected with described heat exchanger.
7. the equipment for the treatment of the hydrogenation of silicon tetrachloride by product according to claim 1, is characterized in that, further comprises heating unit, and described heating unit is connected with described hydrogenation apparatus.
8. the equipment for the treatment of the hydrogenation of silicon tetrachloride by product according to claim 7, is characterized in that, further comprises:
The second gaseous mixture transport pipe, described the second gaseous mixture transport pipe is connected with described heating unit with described heat exchanger respectively.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201220173575XU CN202988744U (en) | 2012-04-20 | 2012-04-20 | Equipment for treating silicon tetrachloride-hydrogenating by-product |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201220173575XU CN202988744U (en) | 2012-04-20 | 2012-04-20 | Equipment for treating silicon tetrachloride-hydrogenating by-product |
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| Publication Number | Publication Date |
|---|---|
| CN202988744U true CN202988744U (en) | 2013-06-12 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201220173575XU Expired - Lifetime CN202988744U (en) | 2012-04-20 | 2012-04-20 | Equipment for treating silicon tetrachloride-hydrogenating by-product |
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| CN (1) | CN202988744U (en) |
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2012
- 2012-04-20 CN CN201220173575XU patent/CN202988744U/en not_active Expired - Lifetime
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