CN202988700U - Liquid feeding device for liquid storage tank - Google Patents
Liquid feeding device for liquid storage tank Download PDFInfo
- Publication number
- CN202988700U CN202988700U CN 201220589447 CN201220589447U CN202988700U CN 202988700 U CN202988700 U CN 202988700U CN 201220589447 CN201220589447 CN 201220589447 CN 201220589447 U CN201220589447 U CN 201220589447U CN 202988700 U CN202988700 U CN 202988700U
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- liquid
- fluid reservoir
- level sensor
- adding device
- controller
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Abstract
The utility model relates to a liquid feeding device for a liquid storage tank in the production field of semiconductors. The liquid feeding device comprises the liquid storage tank, a liquid level sensor, a controller and involved pipelines. An auxiliary pipeline is arranged at the top end of the liquid storage tank, an exhaust pipeline is arranged on the upper portion of one side of the wall of the liquid storage tank, a liquid delivery pipeline and a liquid feed pipeline are arranged at the bottom end of the liquid storage tank and respectively provided with a diaphragm valve close to the liquid storage tank, and the diaphragm valves are connected with a controller arranged outside the liquid storage tank. The liquid level sensor is arranged in the middle of the top end of the liquid storage tank and connected with the controller. The liquid feeding device is capable of stably and reliably accurately replenish liquid to rinsing tanks, cleaning liquid in the rinsing tanks is guaranteed to be accurately replenished, and rinsing effect is effectively guaranteed.
Description
[technical field]
The utility model relates to the semiconductor production field, especially relates to the liquid-adding device of the fluid reservoir of using in a kind of matting in semiconductor production process.
[background technology]
Known, in semi-conductive production process, not only need to use cleaning apparatus that the aobvious glass substrate of liquid is cleaned, and also all need to be applied to cleaning apparatus in the making herbs into wool of silicon chip, etching process, thereby matting is one of operation very important in semiconductor production; But, due in cleaning process, between silicon chip and cleaning liquid, chemical reaction can occur, and then cause the relevant chemical analysis in the cleaning vat cleaning liquid inside inevitably to be consumed, therefore, if in time additional clean liquid just will certainly directly have influence on the cleaning performance of silicon chip;
at present, in order to ensure cleaning performance, substantially be to keep the content of relevant chemical analysis in cleaning liquid when matting proceeds to certain hour by the mode of adding appropriate cleaning liquid, and existing liquid feeding mode is to utilize constant-pressure liquid supply principle liquid feeding, namely utilize the mode of constant-pressure tank constant flow to control liquid volume added by the opening time of by-pass valve control, but the liquid-adding device of implementing this mode is subjected to pipe resistance in application, the impact of the factors such as valve opening and the fluctuation of tank internal pressure is larger, its except needs regularly to pipeline, outside valve checks, also need frequently flow to be proofreaied and correct, therefore the stability of this liquid-adding device is all relative relatively poor with reliability,
In order to overcome the deficiency that exists in above-mentioned liquid feeding mode, thereby some producers' employings reach by the height that the sensor corresponding with buoy detects liquid level decline the liquid-adding device of controlling liquid volume added, also have some producers to adopt by weighting manner and reach the liquid-adding device of controlling liquid volume added, although these liquid-adding devices can realize the liquid feeding of degree of precision and control, the problem such as but all have complex structure, parts are more and price is more expensive.
[summary of the invention]
In order to overcome the deficiency in background technology, the utility model discloses a kind of fluid reservoir liquid-adding device, described device can be reliable and stable cleaning vat carried out fluid infusion accurately, thereby guaranteed that the cleaning liquid in cleaning vat is replenished accurately, and then actv. has ensured the effect of cleaning.
For achieving the above object, the utility model adopts following technical scheme:
A kind of fluid reservoir liquid-adding device, described device comprises fluid reservoir, level sensor, controller and associated pipe; The top of described fluid reservoir is provided with for the auxiliary line that injects assist gas, and a upper lateral part of fluid reservoir tank skin is provided with the bleeder line for the toilet-cleaning jar internal pressure, and the bottom of fluid reservoir is provided with for the liquid feeding pipeline and the liquid feeding pipeline that inject cleaning liquid; Described liquid feeding pipeline and liquid feeding pipeline are equipped with diaphragm valve near an end end of fluid reservoir separately, and diaphragm valve all is connected with the controller that is located at the fluid reservoir outside; Described level sensor is arranged on the top middle portion of fluid reservoir, and is connected with controller; Described auxiliary line is provided with the electromagnetic valve that is connected with controller.
Described fluid reservoir liquid-adding device, the outside side of described fluid reservoir tank body is provided with bypass pipe.
Described fluid reservoir liquid-adding device, described bypass pipe are glass tube or the PFA pipe that possesses diaphaneity.
Described fluid reservoir liquid-adding device, described fluid reservoir tank body is square column type or cylindrical.
Described fluid reservoir liquid-adding device, described auxiliary line are provided with low venturi tube and high flow rate pipe, and low venturi tube is provided with flow regulating valve, and the high flow rate pipe is provided with electromagnetic valve.
Described fluid reservoir liquid-adding device, described electromagnetic valve is connected with controller.
Described fluid reservoir liquid-adding device, described bleeder line is provided with the leakage sensor that is connected with controller.
Described fluid reservoir liquid-adding device, described liquid feeding pipeline is provided with low speed liquid-feeding tube and high speed liquid-feeding tube, and low speed liquid-feeding tube and high speed liquid-feeding tube are equipped with near an end end of fluid reservoir the diaphragm valve that is connected with controller separately.
Described fluid reservoir liquid-adding device, described level sensor are continuous gauging formula level sensor.
Described fluid reservoir liquid-adding device, described level sensor are ultrasonic liquid level sensor, guided wave radar level sensor, electric potential type level sensor, continuous float ball liquid level sensor or magnetostrictive liquid level sensor.
Owing to adopting technical scheme as above, the utlity model has following beneficial effect:
Fluid reservoir liquid-adding device described in the utility model adopts the constant volume principle, mode with the constant volume fluid infusion has improved the precision of automatic liquid-feeding and the reliability of device, when effectively reducing maintenance times and flux modification number of times, the cleaning liquid in cleaning vat is replenished accurately, thereby reached the purpose of effective guarantee cleaning performance by the liquid measure of controlling cleaning liquid; In addition, described device is also by adopting noncontacting proximity sensor to reach the purpose of the quantitative interpolation of liquid such as being applicable to severe corrosive, concentrated acid or concentrated base.
[description of drawings]
Fig. 1 is schematic diagram of the present utility model;
Fig. 2 is another structural representation of the present utility model.
In figure: 1, fluid reservoir; 2, level sensor; 3, controller; 4, auxiliary line; 5, bleeder line; 6, liquid feeding pipeline; 7, liquid feeding pipeline; 8, diaphragm valve; 9, bypass pipe; 10, low venturi tube; 11, high flow rate pipe; 12, flow regulating valve; 13, electromagnetic valve; 14, leakage sensor; 15, low speed liquid-feeding tube; 16, high speed liquid-feeding tube.
[specific embodiment]
Can explain in more detail the utility model by the following examples, open the purpose of this utility model is intended to protect all changes and improvements in the utility model scope, and the utility model is not limited to the following examples;
1～2 described fluid reservoir liquid-adding device by reference to the accompanying drawings, it is square column type or columniform fluid reservoir 1, level sensor 2, controller 3 and associated pipe that described device comprises tank body; The top of described fluid reservoir 1 is provided with for inject assist gas in fluid reservoir 1 tank, and as the auxiliary line 4 of pressurized air or nitrogen, this auxiliary line 4 is provided with the electromagnetic valve 13 that is connected with controller 3; In the operation of being more convenient for, low venturi tube 10 and high flow rate pipe 11 can be set in auxiliary line 4, and adjustable flow regulating valve 12 is set in low venturi tube 10, electromagnetic valve 13 is set in high flow rate pipe 11, namely set out the pipeline of two different airsheds in auxiliary line 4, wherein, constantly inject corresponding gas with low discharge in fluid reservoir 1 tank by low venturi tube 10, make the pressure in tank remain malleation, thereby avoid extraneous air to enter fluid reservoir 1 tank internal contamination to the interior cleaning liquid of tank; On the other hand, by high flow rate pipe 11 when needing Rapid Freon-feeding with the gas inject of large flow to fluid reservoir 1 tank, the tank internal pressure is increased, thereby realizes the purpose of Rapid Freon-feeding;
Be provided with for the bleeder line 5 that discharges fluid reservoir 1 tank internal pressure at a upper lateral part of fluid reservoir 1 tank skin, namely come unnecessary gas in drain tank by bleeder line 5; In addition, described bleeder line 5 can also corresponding leakage sensor 14 is rear to be used as the safety dumping pipeline arranging, and plays the effect of overflow discharge when namely the liquid level in fluid reservoir 1 tank is too high; Be provided with the liquid feeding pipeline 7 that adds cleaning liquid for the liquid feeding pipeline 6 that injects cleaning liquid in fluid reservoir 1 tank with in the cleaning vat in the bottom of fluid reservoir 1, for ease of the controller 3 centralized controles operations by being located at fluid reservoir 1 outside, liquid feeding pipeline 6 and liquid feeding pipeline 7 an end end of close fluid reservoir 1 separately are equipped with the diaphragm valve 8 that is connected with controller 3; For further optimizing the liquid feeding effect, can comprise low speed liquid-feeding tube 15 and a high speed liquid-feeding tube 16 that is used for Rapid Freon-feeding that is used for accurate liquid feeding in described liquid feeding pipeline 7, and low speed liquid-feeding tube 15 and high speed liquid-feeding tube 16 all are equipped with the diaphragm valve 8 that is connected with controller 3 in an end end of close fluid reservoir 1 separately;
Change for ease of the liquid level in continuous gauging fluid reservoir 1 tank, corresponding information is fed back to controller 3, make relevant action to control corresponding valve by controller 3, described device is equipped with in the top middle portion of fluid reservoir 1 the continuous gauging formula level sensors 2 such as ultrasonic liquid level sensor, guided wave radar level sensor, electric potential type level sensor, continuous float ball liquid level sensor or magnetostrictive liquid level sensor that are connected with controller 3; For ease of the electrolyte level in observation fluid reservoir 1 tank promptly and accurately, can arrange in a side of fluid reservoir 1 tank body outside one and possess the glass tube of diaphaneity or PFA pipe and observe electrolyte level in tank as bypass pipe 9.
Implement described fluid reservoir liquid-adding device and carry out liquid feeding when operation, described device need only be fixed on corresponding position, then according to demand liquid volume added calculates the height that liquid level descends, and then carry out liquid feeding by liquid feeding pipeline 7, utilize simultaneously level sensor 2 with the liquid level communication in fluid reservoir 1 tank to controller 3, control corresponding valves by controller 3 at last and make relevant action until complete the liquid feeding operation; As when adopting the liquid feeding pipeline 7 that low speed liquid-feeding tube 15 and high speed liquid-feeding tube 16 consist of, first utilize high speed liquid-feeding tube 16 to reach the effect of Rapid Freon-feeding, and change again when being about to finish liquid feeding to low speed liquid-feeding tube 15 and carry out slowly and accurately adding, thereby realize in the liquid feeding operation fast and be combined accurately.
The utility model does not describe part in detail for prior art, therefore the utility model is not described in detail.
Claims (10)
1. fluid reservoir liquid-adding device, it is characterized in that: described device comprises fluid reservoir (1), level sensor (2), controller (3) and associated pipe; The top of described fluid reservoir (1) is provided with for the auxiliary line (4) that injects assist gas, one upper lateral part of fluid reservoir (1) tank skin is provided with the bleeder line (5) for the toilet-cleaning jar internal pressure, and the bottom of fluid reservoir (1) is provided with for the liquid feeding pipeline (6) and the liquid feeding pipeline (7) that inject cleaning liquid; Described liquid feeding pipeline (6) and liquid feeding pipeline (7) are equipped with diaphragm valve (8) near an end end of fluid reservoir (1) separately, and diaphragm valve (8) all is connected with the controller (3) that is located at fluid reservoir (1) outside; Described level sensor (2) is arranged on the top middle portion of fluid reservoir (1), and is connected with controller (3); Described auxiliary line (4) is provided with the electromagnetic valve (13) that is connected with controller (3).
2. fluid reservoir liquid-adding device according to claim 1 is characterized in that: the outside side of described fluid reservoir (1) tank body is provided with bypass pipe (9).
3. fluid reservoir liquid-adding device according to claim 2, is characterized in that: glass tube or the PFA pipe of described bypass pipe (9) for possessing diaphaneity.
4. fluid reservoir liquid-adding device according to claim 1 and 2, it is characterized in that: described fluid reservoir (1) tank body is square column type or cylindrical.
5. fluid reservoir liquid-adding device according to claim 1, it is characterized in that: described auxiliary line (4) is provided with low venturi tube (10) and high flow rate pipe (11), and low venturi tube (10) is provided with flow regulating valve (12), and high flow rate pipe (11) is provided with electromagnetic valve (13).
6. fluid reservoir liquid-adding device according to claim 5, it is characterized in that: described electromagnetic valve (13) is connected with controller (3).
7. fluid reservoir liquid-adding device according to claim 1, it is characterized in that: described bleeder line (5) is provided with the leakage sensor (14) that is connected with controller (3).
8. fluid reservoir liquid-adding device according to claim 1, it is characterized in that: described liquid feeding pipeline (7) is provided with low speed liquid-feeding tube (15) and high speed liquid-feeding tube (16), and low speed liquid-feeding tube (15) and high speed liquid-feeding tube (16) are equipped with near an end end of fluid reservoir (1) diaphragm valve (8) that is connected with controller (3) separately.
9. fluid reservoir liquid-adding device according to claim 1, it is characterized in that: described level sensor (2) is continuous gauging formula level sensor.
10. fluid reservoir liquid-adding device according to claim 1 is characterized in that: described level sensor (2) is ultrasonic liquid level sensor, guided wave radar level sensor, electric potential type level sensor, float ball liquid level sensor or magnetostrictive liquid level sensor continuously.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220589447 CN202988700U (en) | 2012-11-10 | 2012-11-10 | Liquid feeding device for liquid storage tank |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220589447 CN202988700U (en) | 2012-11-10 | 2012-11-10 | Liquid feeding device for liquid storage tank |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202988700U true CN202988700U (en) | 2013-06-12 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220589447 Expired - Fee Related CN202988700U (en) | 2012-11-10 | 2012-11-10 | Liquid feeding device for liquid storage tank |
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| Country | Link |
|---|---|
| CN (1) | CN202988700U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103983529A (en) * | 2014-04-11 | 2014-08-13 | 中国石油化工股份有限公司 | Device for testing corrosion of liquid pesticide to package |
| CN108051044A (en) * | 2017-11-30 | 2018-05-18 | 云顶科技（江苏）有限公司 | A kind of method that dynamic calculates liquefied natural gas fluid reservoir amount infused |
| CN108400406A (en) * | 2018-03-26 | 2018-08-14 | 蔚来汽车有限公司 | Battery temperature control device and electric vehicle electric charging station for electric charging station |
-
2012
- 2012-11-10 CN CN 201220589447 patent/CN202988700U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103983529A (en) * | 2014-04-11 | 2014-08-13 | 中国石油化工股份有限公司 | Device for testing corrosion of liquid pesticide to package |
| CN108051044A (en) * | 2017-11-30 | 2018-05-18 | 云顶科技（江苏）有限公司 | A kind of method that dynamic calculates liquefied natural gas fluid reservoir amount infused |
| CN108051044B (en) * | 2017-11-30 | 2019-07-23 | 云顶科技（江苏）有限公司 | A kind of method that dynamic calculates liquefied natural gas fluid reservoir amount infused |
| CN108400406A (en) * | 2018-03-26 | 2018-08-14 | 蔚来汽车有限公司 | Battery temperature control device and electric vehicle electric charging station for electric charging station |
| EP3780316A4 (en) * | 2018-03-26 | 2021-12-29 | Nio (Anhui) Holding Co., Ltd | Battery temperature control device for battery charging and swapping station and electric-vehicle battery charging and swapping station |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130612 Termination date: 20141110 |
|
| EXPY | Termination of patent right or utility model |