CN202986337U

CN202986337U - Mask cleaning device and screen printing machine

Info

Publication number: CN202986337U
Application number: CN 201220608831
Authority: CN
Inventors: 小林广纪; 村上俊行
Original assignee: Matsushita Electric Industrial Co Ltd
Current assignee: Panasonic Holdings Corp
Priority date: 2011-12-16
Filing date: 2012-11-16
Publication date: 2013-06-12
Anticipated expiration: 2022-11-16
Also published as: JP2013123892A

Abstract

The utility model aims at providing a mask cleaning device and a screen printing machine. Replacement of a mouth portion is not necessary when a mask is replaced in each time, cost is low and working performance can be improved. A mask cleaning device (18) utilizes a vacuum absorption opening (31a) of the upper end of a mouth portion (31) to enable a paper portion (32) to be pressed and lean against the lower side of a mask (15), and vacuum absorption is performed. Meanwhile, the mask cleaning device (18) which correspondingly moves relative to the mask (15) wipes and removes paste (Pt) attached to the lower side of the mask (15), one or a plurality of current rectifying plates (34) which can be detached and installed freely are arranged in the mouth portion (31), and the current rectifying plates (34) are provided with a plurality current rectifying holes (34a) which enable air flowing in the mouth portion (31) to go through and rectify flow of the air.

Description

Mask cleaning device and screen process press

Technical field

The utility model relate to with contact above substrate mask that the serigraphy used uses below the mask cleaning device removed of the cream wiping of adhering to and the screen process press that possesses this mask cleaning device.

Background technology

Screen process press is the device of the cream such as print solder on the electrode on substrate, after making the mask that is formed with the pattern hole corresponding with the configuration of the electrode of substrate with electrode and the consistent mode and substrate contacts of pattern hole, scraper plate is slided on the mask of having supplied with cream, cream is scraped together, via the pattern hole of mask, cream is transferred on the electrode of substrate.

In this screen process press, when the serigraphy operation of carrying out for substrate, printing state is occured bad, therefore, be provided with the mask cleaning device that the cream wiping that is attached to below mask is removed in screen process press.Constituting of this mask cleaning device, the vacuum attraction mouth that utilizes the mouth upper end the paper parts are pressed against mask below state under carry out relatively moving with respect to mask in vacuum attraction, wiping is attached to the following cream of mask.

In addition, in such mask cleaning device, known have be fixed with tabular rectification part in mouth, this rectification part have make when vacuum attraction the air that circulates in mouth by and with a plurality of rectification hole (for example, patent documentation 1) of the mobile rectification of air.Big or small and adjacent rectification hole intervals each other etc. with the flowing of air in the mouth of this rectification part (flow velocity etc.) and rectification hole of being located at rectification part is corresponding.

Patent documentation 1:(Japan) Unexamined Patent 10-193577 communique

But, clean in the situation that use as mentioned above the mouth with rectification part to carry out mask, for the mobile of the air in mouth formed corresponding to optimal flow corresponding to the kind of mask, on the basis of the different multiple mouth of the big or small and adjacent rectification hole intervals each other of the rectification hole of having prepared rectification part in advance, need to change mouth when each change mask, therefore, running cost improves and also poor problem of workability.

The utility model content

Therefore, the purpose of this utility model is to provide needn't be at each mouth of changing when replacing mask, and cost is low and can improve mask cleaning device and the screen process press of workability.

the utility model first aspect provides a kind of mask cleaning device, its be located at make scraper plate with the mask that contacts above substrate on slide and in cream being transferred to screen process press on substrate, utilize under the state of vacuum attraction mouth below the paper parts being pressed against mask of mouth upper end and carry out vacuum attraction, relatively move with respect to mask simultaneously, the cream wiping that is attached to below mask is removed, wherein, dismounting is provided with one or more cowling panels freely in mouth, this cowling panel have make when vacuum attraction the air that circulates in mouth by and with a plurality of rectification hole of the mobile rectification of air.

Second aspect provides a kind of screen process press, and it possesses: mask, and it contacts with the top of substrate; Scraper plate, its with the mask that contacts above substrate on slide, cream is needed on substrate; The mask cleaning device, it utilizes under the state of vacuum attraction mouth below the paper parts being pressed against mask of upper end of mouth and carries out vacuum attraction, relatively moves with respect to mask simultaneously, and the cream wiping that is attached to below mask is removed; One or more cowling panels, its dismounting is located in mouth freely, have make when vacuum attraction the air that circulates in mouth by and with a plurality of rectification hole of the mobile rectification of air.

In the utility model, dismounting is provided with the one or more cowling panels with a plurality of rectification hole freely in mouth, described rectification hole make when vacuum attraction the air that circulates in mouth by and with the mobile rectification of air, only make the cowling panel of the rectification hole of the size corresponding with the kind of this mask and intervals carry out dismounting (replacing) with respect to mouth owing to needing only when changing the kind of mask, therefore, needn't carry out to each mask the replacing of mouth, cost is low and can realize the raising of workability.

Description of drawings

Fig. 1 is the stereogram of major part of the screen process press of the utility model one embodiment;

Fig. 2 is the side view of major part of the screen process press of the utility model one embodiment;

Fig. 3 is the plane of the mask that keeps of the mask holder that possesses of the screen process press of the utility model one embodiment and masked support;

Fig. 4 (a) is the stereogram of the mask washer that possesses of the screen process press of the utility model one embodiment, (b) is sectional side view;

Fig. 5 (a) is the amplification stereogram of the standby mouth of the mask cleaning apparatus of the utility model one embodiment, (b) is plane;

Fig. 6 (a) is the stereogram of the mask washer of the utility model one embodiment, (b) is sectional side view;

Fig. 7 means the flow chart of execution sequence of serigraphy operation of the screen process press of the utility model one embodiment;

Fig. 8 (a) and (b) are key diagrams of execution sequence of serigraphy operation of the screen process press of the utility model one embodiment;

Fig. 9 (a) and (b) are key diagrams of execution sequence of serigraphy operation of the screen process press of the utility model one embodiment;

Figure 10 (a) and (b) are key diagrams of execution sequence of serigraphy operation of the screen process press of the utility model one embodiment;

Figure 11 means the figure of execution sequence of mask washing and cleaning operation of the screen process press of the utility model one embodiment.

Description of symbols

1: screen process press

2: substrate

15: mask

18: mask washer (mask cleaning device)

31: mouth

31a: vacuum attraction mouth

32: the paper parts

34: cowling panel

34a: rectification hole

44: scraper plate

Pt: cream

The specific embodiment

Below, with reference to accompanying drawing, embodiment of the present utility model is described.in Fig. 1 and Fig. 2, screen process press 1 is for carrying out to the device of the serigraphy operation of being located at the cream Pt such as a plurality of electrodes 3 difference serigraphy scolding tin on substrate 2, it possesses: the substrate of being located on base station 10 is moved into conveyer 11, substrate holding unit 12 and substrate are taken out of conveyer 13, be located at the mask holder 14 of the top of substrate holding unit 12, remain the mask 15 of flat-hand position by mask holder 14, be located at the scraper head 16 of the top of mask 15, the camera unit 17 of being located at the below of mask 15 reaches the control device 19 of being located at side by side in base station 10 with mask washer 18 and carrying out the action control of each one.

Substrate is moved into conveyer 11 and is moved into the arrow mark R1 shown in the substrate 2(Fig. 1 that drops into from the outside of screen process press 1), to 12 handing-over of substrate holding unit.Substrate is taken out of conveyer 13 will take out of (the arrow mark R2 shown in Fig. 1) from the substrate 2 that substrate holding unit 12 is accepted to the outside of screen process press 1.That is, substrate 2 is moved into conveyer 11, substrate holding unit 12, substrate with substrate and is taken out of the order of conveyer 13 and carry out conveyance, and the moving direction of this substrate 2 is made as X-direction (left and right directions of seeing from operator OP).In addition, will be made as Y direction (fore-and-aft direction of seeing from operator OP) with direction in the horizontal plane of this X-direction quadrature, above-below direction will be made as Z-direction.

Substrate holding unit 12 possesses: make by the cell moving 12A of mechanism that is made of the XYZ manipulator and move (also comprising rotation) and move freely cell substrates 21 to Z-direction in the XY plane; Be installed on cell substrates 21 and carry out to the conveyance of the X-direction of substrate 2 and to a pair of conveyer 22 of the location of the job position (position shown in Figure 1) of regulation; Be located at the lower support section lift cylinders 23 of cell substrates 21; Carry out lifting by lower support section lift cylinders 23, the mode of leaving upward from conveyer 22 with the two ends of the substrate 2 that is positioned at job position by conveyer 22 is from the lower support section 24 of below jack-up supporting substrates 2; Open and close and to be located at freely Y direction, clip from Y direction a pair of hold assembly 25 that (clamping) both sides by the substrate 2 of lower support section 24 jack-up supportings keep.

In Fig. 3, mask 15 comprises: have with substrate 2 on the mask main body 15a that is consisted of by rectangular metal plate of a plurality of figures hole 15h of the corresponding setting of configuration of electrode 3; Be located at the cancellous membrane element 15b of resin (for example polyester) system on every side of mask main body 15a; The rectangular box-like mask frame 15w of the peripheral part of support membrane parts 15b.

In Fig. 3, mask holder 14 is made of the L shaped pair of right and left track component 14a in the cross section of extending on Y direction above base station 10, and mask 15 is bearing in the relative the right and left of X-direction by pair of right and left track component 14a from the below.

In Fig. 1 and Fig. 2, scraper head 16 possesses: the upper area of the mask 15 that keeps at masked support 14 moves the tabular substrate parts 41 that arranges freely along Y direction; Be installed on substrate parts 41 and make two outstanding scraping plate lifting cylinders 42 of below of the basad parts 41 of piston rod 42a; Be installed on the lower end of piston rod 42a of each scraping plate lifting cylinder 42 and the scraper plate keeper 43 that extends along X-direction; The upper end is held in each scraper plate keeper 43, two scraper plates 44 that are made of thin-plate member that extend to oblique below.

In Fig. 1 and Fig. 2, camera unit 17 possesses to make to take the visual field towards the below of below shooting camera 17a and make to be taken the visual field towards the top of top shooting camera 17b and consists of.Camera unit 17 moves along direction in horizontal plane at the lower zone of mask 15 by the camera unit 17A of travel mechanism that is made of not shown actuator etc.

In Fig. 4 (a) and (b), mask washer 18 has paper parts 32 and consists of, these paper parts 32 from the top with extend along X-direction and have the mouth 31 of vacuum attraction mouth 31a of rectangle in the upper end and the vacuum attraction mouth 31a of mouth 31 joins, width with the peristome that comprises vacuum attraction mouth 31a, the cross-section and extension along Y direction.With join above the vacuum attraction mouth 31a of the mouth 31 of paper parts 32 and become the cleaning surface 18a of mask washer 18 along the part that Y direction is extended, this cleaning surface 18a by based on clip mouth 31 on Y direction relatively the pair of rolls parts 33(of configuration also with reference to Fig. 2) the paper parts 32 realized of rotation upgrade to the feed motion of Y direction.

Mouth 31 together moves setting freely along Y direction and Z-direction with pair of rolls parts 33, the vacuum attraction mouth 31a that mask washer 18 utilizes mouth 31 upper ends is with paper parts 32(cleaning surface 18a) be pressed against under the state below mask 15 and carry out vacuum attraction, relatively move along Y direction with respect to mask 15 simultaneously, the following cream Pt wiping that will be attached to thus mask 15 is removed.

In Fig. 4 (a) and (b) and Fig. 5 (a) and (b), be provided with the cowling panel 34 that the strip plate parts consist of in the mouth 31 of mask washer 18, this cowling panel 34 has when vacuum attraction by at the air of mouth 31 interior circulations and with a plurality of rectification hole 34a of the mobile rectification of air.This cowling panel 34 inserts in mouth 31 from the cowling panel insert port 31b that the wall opening in an end side of the length direction (X-direction) of mouth 31 forms, utilization is extended the dual-side of the cowling panel insertion groove 31c bearing length direction that arranges at the internal face of mouth 31 along direction in horizontal plane, dismounting is installed in mouth 31 freely.Pinch hand when the bending part 34b that forms in a side end right angle bending of the length direction (X-direction) of cowling panel 34 is used as cowling panel 34 is pulled out from cowling panel insertion groove 31c and utilizing.

As shown in Fig. 5 (b), in the present embodiment, each rectification hole 34a that is formed at cowling panel 34 with the central shaft S of its length direction with respect to the horizontal plane of the central shaft J quadrature of the length direction of cowling panel 34 in the line S0 configuration of tilting arrange, but the set-up mode of the rectification hole 34a of cowling panel 34 is not particularly limited.in addition, as present embodiment, with the central shaft S of the length direction of each rectification hole 34a along with respect to the horizontal plane of the central shaft J quadrature of the length direction of cowling panel 34 in the direction that tilts of line S0 extend when arranging, compare with the central shaft S of the length direction of each rectification hole 34a with and the horizontal plane of the central shaft J quadrature of the length direction of cowling panel 34 in line S0 extend abreast the situation of setting, when mask washer 18 is relatively moved with respect to mask 15 mask that (arrow mark P in Fig. 5 (b)) carry out cleans, rectification hole 34a is by the following zone of more mask 15, therefore, can carry out efficient mask cleans.

In Fig. 4 (b) and Fig. 5 (a), cowling panel insertion groove 31c is provided with a plurality of in mouth 31 along the vertical direction side by side, one or more cowling panels 34 can be installed mouth 31 is interior.Fig. 4 (a) and (b) are to be provided with side by side along the vertical direction four cowling panel insertion groove 131c in the inside of mouth 31, and two cowling panel insertion groove 31c therein are equipped with the example of two cowling panels 34, but the quantity of cowling panel insertion groove 31c of being located at the inside of mouth 31 is arbitrarily, and the quantity of the cowling panel 34 of installing is also arbitrarily.

In addition, as shown in Fig. 6 (a) and (b), mouth 31 also can have the shape that central portion in mouth 31 is provided with the partition wall 31d that extends along the length direction of mouth 31, in this situation, by also form the part of cowling panel insertion groove 31c in the two sides of partition wall 31d, can cowling panel 34 be installed at the two positions that clips partition wall 31d.As Fig. 6 (a) and (b), in the situation that the central portion in mouth 31 is provided with partition wall 31d, based on carry out paper parts 32 are pressed below mask 15 of mouth 31 press area increase partition wall 31d above amount, therefore, can improve the wiping efficient of the following cream Pt of mask 15.

The conveyance of the substrate 2 that carries out based on conveyer 22 of substrate holding unit 12 and to the location action of job position, the holding action that carries out with respect to the lower support action of carrying out based on lower support section 24 of the substrate 2 that is positioned at job position and based on a pair of hold assembly 25, by control device 19, carry out the substrate holding mechanism 12B(Fig. 2 that is formed by the actuator that contains lower support section lift cylinders 23 etc.) action control carry out, maintain the shift action of direction and above-below direction in the horizontal plane of substrate holding unit 12 of substrate 2 and undertaken by the action control that control device 19 carries out the above-mentioned 12A of cell moving mechanism.In addition, move into moving into action and also being undertaken by control device 19 based on the action of taking out of that substrate is taken out of the substrate 2 that conveyer 13 carries out of substrate 2 that conveyer 11 carries out based on substrate.

In Fig. 2, scraper head 16(substrate parts 41) move back and forth action scraper head 16M(Fig. 2 of travel mechanism by being undertaken by control device 19 being consisted of by not shown actuator etc. to Y direction) action control carry out, each scraper plate 44 makes to get off on scraper plate keeper 43 by the action control that is carried out the scraping plate lifting cylinder 42 corresponding with this scraper plate 44 by control device 19 with respect to the lifting action of substrate parts 41 and carries out.

In Fig. 2, the shift action of camera unit 17 in horizontal plane undertaken by the action control that is carried out the above-mentioned camera unit 17A of travel mechanism by control device 19.The control of the shooting action of below shooting camera 17a and the control of the shooting action that camera 17b is taken in the top are undertaken by control device 19 separately, take view data that the shooting action of camera 17a obtains and takes view data that the shooting action of camera 17b obtains respectively to control device 19 transmissions by the top by the below, carry out image recognition processing at the image recognition 19a of section of control device 19.

Movement and the lifting moving action control by the washer travel mechanism 18A that by control device 19 undertaken not shown actuator etc. be made of of mask washer 18 in horizontal plane carries out.In addition, the feed motion of the paper parts 32 that possess of mask washer 18 is by being made above-mentioned pair of rolls parts 33 actions carry out by control device 19.

Washer actuating mechanism 18B(Fig. 2 of being made of not shown actuator etc. is carried out in the action of vacuum attraction that the mouth 31 of mask washer 18 carries out by control device 19) action control carry out.When mouth 31 carries out the vacuum attraction action, the air that sucks from the vacuum attraction mouth 31a of mouth 31 flow downwards in mouth 31 by the rectification hole 34a that is located at cowling panel 34 (the arrow mark Q shown in Fig. 4 (b) and Fig. 6 (b)), at this moment, flow (flow velocity etc.) of air are corresponding with the size of rectification hole 34a and adjacent rectification hole 34a intervals each other etc.Therefore, prepare size and the adjacent different multiple cowling panel 34 of rectification hole 34a intervals each other of rectification hole 34a in advance, if change cowling panel 34 when changing mask 15 at every turn, can with the mobile state that forms the best corresponding with the kind of mask 15 of the air in mouth 31, can carry out efficient mask and clean.

In the serigraphy operation that the screen process press 1 of this formation carries out, at first control device 19 detects from other device of upstream process side and sends substrate 2 here, make substrate move into conveyer 22 actions of conveyer 11 and substrate holding unit 12, (step ST1 shown in Figure 7 move into substrate 2 in screen process press 1 after.Fig. 8 (a)), carry out the action control of substrate holding mechanism 12B, keep substrate 2(step ST2 shown in Figure 7.Fig. 8 (b)).The maintenance of substrate 2 particularly, by boost lower support section 24 with lower support section lift cylinders 23 with the state of substrate 2 jack-up for floating from conveyer 22, (the arrow mark A1 shown in Fig. 8 (b)) on the other hand, carry out at the two ends (the arrow mark B1 shown in Fig. 8 (b)) that a pair of hold assembly 25 sandwiched substrate 2 to the closing direction driving.

The words that keep substrate 2 at control device 19, carry out the action control of the camera unit 17A of travel mechanism, make the below take camera 17a and be positioned at the substrate-side mark 2m(Fig. 1 that is located at substrate 2) directly over, below take the shooting of carrying out substrate-side mark 2m on camera 17a, on the other hand, make the top take camera 17b and be positioned at mask side mark 15m(Fig. 1 and the Fig. 3 that is located at mask 15) under, take up the shooting of carrying out mask side mark 15m on camera 17b.And, hold the position of substrate 2 according to the view data of resulting substrate-side mark 2m, and, hold the position of mask 15 according to the view data of resulting mask side mark 15m, substrate holding unit 12 direction in horizontal plane is moved, with substrate-side mark 2m and mask side mark 15m up and down relative mode carry out substrate 2 with respect to the contraposition (step ST3 shown in Figure 7) of direction in the horizontal plane of mask 15.

Control device 19 is after finishing the contraposition of substrate with respect to mask 15, carry out the action control of the cell moving 12A of mechanism, make substrate holding unit 12 with respect to base station 10 risings (the arrow mark C1 shown in Fig. 9 (a)), with a pair of hold assembly 25 that keeps substrate 2 from the below relatively be pressed against mask 15 below, thus, make following contact the (the step ST4 shown in Figure 7 of a pair of hold assembly 25 and substrate 2 top and mask 15 separately.Fig. 9 (a)).Thus, the figure hole 15h of the electrode 3 on substrate 2 and mask 15 becomes consistent state.

Control device 19 after making substrate 2 and mask 15 contact, the display equipment DP(Fig. 2 that is being connected with control device 19) in show and to impel operator OP to carry out the information (step ST5 shown in Figure 7) of the supply of cream Pt.Show for this, operator OP is at the visual cream Pt that residues on mask 15 of current time, carries out whether should carrying out the judgement of the supply (replenishing) of cream Pt based on the amount of this cream Pt.And, be judged as should carry out the supply of cream Pt the time, supply with by the cream of other preparation the supply that syringe (not shown) carries out cream Pt on the mask 15.And be judged as the supply that finishes cream Pt, or when not needing the supply of cream Pt, operator OP carries out the BT(of Action Button again Fig. 2 of being connected with control device 19) operation.

Control device 19 shows the information of the supply that promotes cream Pt in display equipment DP after, whether carry out at regular intervals the judgement (step ST6 shown in Figure 7) of the operation of Action Button BT again, based on the signal output from Action Button BT again, detect when having carried out the operation of Action Button BT again by operator OP, carry out the blade coating of scraper plate 44, the cream Pt on mask 15 is needed on (step ST7 shown in Figure 7) on substrate 2.

This blade coating is specifically by making the side in two scraper plates 44 descend from scraper head 16, under keeping the state that makes it with butt above mask 15, and (the arrow mark D shown in Fig. 9 (b)) that makes substrate parts 41 move to carry out to Y direction.Thus, scraper plate 44 slides on mask 15, and the cream Pt on mask 15 is scraped to together and push in the figure hole 15h of mask 15 by scraper plate 44, is needed on the electrode 3 of substrate 2.In addition, control device 19 moves and when cleaning at the direction rear scraper head 16 in the past, butt on the scraper plate 44 that makes rear side and mask 15, and when carrying out blade coating scraper head 16 is forwards moved from the rear, butt on the scraper plate 44 that makes the front side and mask 15.

Control device 19 makes carrying out blade coating after cream Pt is needed on substrate 2, make the cell moving 12A of mechanism action, substrate holding unit 12 is descended (the arrow mark C2 shown in Figure 10 (a)), make substrate 2 and a pair of hold assembly 25 leave and carry out the demoulding (step ST8 shown in Figure 7 from mask 15.Figure 10 (a)).Thus, residual cream Pt on the electrode 3 of substrate 2, printing paste Pt on substrate 2.

Control device 19 is removed maintenance (the step ST9 shown in Figure 7 of 12 pairs of substrates 2 of substrate holding unit after finishing the demoulding.Figure 10 (b)).Particularly, the releasing of the maintenance of this substrate 2 is by being made substrate holding mechanism 12B action by control device 19, after opening a pair of hold assembly 25 (the arrow mark B2 shown in Figure 10 (b)), lower support section 24 is descended (the arrow mark A2 shown in Figure 10 (b)), the two ends of substrate 2 are dropped on a pair of conveyer 22 carried out.

Control device 19 is after the maintenance of removing substrate 2, make the cell moving 12A of mechanism action, substrate holding unit 12 is moved in horizontal plane, make conveyer 22 and substrate take out of conveyer 13 actions after the direction of having adjusted conveyer 22, substrate 2 is taken out of to the outside of screen process press 1 (step ST10 shown in Figure 7).

Whether control device 19 has the judgement (step ST11 shown in Figure 7) of the substrate 2 of implementing serigraphy in addition after taking out of substrate 2.Its result in the situation that implement in addition the substrate 2 of serigraphy, is returned to step ST1, carries out moving into of new substrate 2, in addition, in the situation that do not implement the substrate 2 of serigraphy, finishes a series of serigraphy operation.

Screen process press 1 carries out the serigraphy operation by said sequence to every substrate 2, but, open at logarithm～when the substrate 2 of more than ten (or tens of) carries out this serigraphy operation, due to the residue of the following cream Pt(cream Pt that is attached to mask 15) and that printing state is occured is bad.Therefore, in the screen process press 1 of present embodiment, carry out termly the washing and cleaning operation of the mask 15 that uses mask washer 18.

In the mask washing and cleaning operation, at first, operator OP selects the cowling panel 34 of the Air Flow the best in mouth 31 according to the kind of the mask 15 that carries out thus the mask cleaning from pre-prepd a plurality of cowling panels 34, this cowling panel of selecting 34 is installed on mouth 31 according to above-mentioned main points.Operator OP carries out the operation of above-mentioned action start button BT after the cowling panel 34 of the best that will be corresponding with the kind of mask 15 is installed on the mouth 31 of mask washer 18.

Control device 19 operator OP detect operated the action begin by BT after, carry out the action control of the washer 18A of travel mechanism, make mask washer 18 be positioned at the below that the mask execution area is mask main body 15a, make mask washer 18 increase thus (the arrow mark W1 shown in Figure 11), make mask washer 18 cleaning surface 18a contact mask 15 below.

Control device 19 is after the cleaning surface 18a that makes mask washer 18 contacts below mask 15, carry out the action control of the washer 18A of travel mechanism, make mouth 31 carry out vacuum attraction on one side, on one side making mask washer 18 along moving towards Y direction under mask 15, by the cleaning surface 18a(paper parts 32 of mask washer 18) wiping is attached to the residue (the arrow mark W2 shown in Figure 11 and arrow mark W3) of the following cream Pt of mask 15.And, arrive the end of mask main body 15a at the cleaning surface 18a that mask washer 18 detected after, mask washer 18 is descended, make cleaning surface 18a leave (the arrow mark W4 shown in Figure 11) below mask 15.Thus, the mask of every a slice of mask 15 cleans and finishes.Control device 19 makes 33 actions of pair of rolls parts after the mask of every a slice of mask 15 cleans end, carry out batching of paper parts 32, upgrades cleaning surface 18a.

as described above, the mask washer 18(mask cleaning device of present embodiment) be provided with freely the one or more cowling panels 34 with a plurality of rectification hole 34a in the interior dismounting of mouth 31, this rectification hole 34a make when carrying out vacuum attraction the air of mouth 31 interior circulations by and with the mobile rectification of air, when changing the kind of mask 15, need only the cowling panel 34 of the rectification hole 34a that only will have the size corresponding with the kind of this mask 15 and intervals with respect to mouth 31 dismounting (replacing), therefore, needn't change mouth 31 to each mask 15, can reduce costs and can improve workability.In addition, the screen process press 1 that possesses this mask washer 18 can shorten mask and clean the required activity duration, therefore, can realize the raising of the production efficiency of substrate 2.

Utilizability on industry

Needn't change mouth when a kind of each replacement mask is provided, cost is low and can improve mask cleaning device and the screen process press of workability.

Claims

1. mask cleaning device, its be located at make scraper plate with the mask that contacts above substrate on slide and in cream being transferred to screen process press on substrate, utilize under the state of vacuum attraction mouth below the paper parts being pressed against mask of mouth upper end and carry out vacuum attraction, relatively move with respect to mask simultaneously, the cream wiping that is attached to below mask is removed, it is characterized in that

Dismounting is provided with one or more cowling panels freely in mouth, this cowling panel have make when vacuum attraction the air that circulates in mouth by and with a plurality of rectification hole of the mobile rectification of air.

2. screen process press is characterized in that possessing:

Mask, it contacts with the top of substrate;

Scraper plate, its with the mask that contacts above substrate on slide, cream is needed on substrate;

The mask cleaning device, it utilizes under the state of vacuum attraction mouth below the paper parts being pressed against mask of upper end of mouth and carries out vacuum attraction, relatively moves with respect to mask simultaneously, and the cream wiping that is attached to below mask is removed;

One or more cowling panels, its dismounting is located in mouth freely, have make when vacuum attraction the air that circulates in mouth by and with a plurality of rectification hole of the mobile rectification of air.