CN202914656U - Actuator - Google Patents

Actuator Download PDF

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Publication number
CN202914656U
CN202914656U CN 201220549009 CN201220549009U CN202914656U CN 202914656 U CN202914656 U CN 202914656U CN 201220549009 CN201220549009 CN 201220549009 CN 201220549009 U CN201220549009 U CN 201220549009U CN 202914656 U CN202914656 U CN 202914656U
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CN
China
Prior art keywords
bearing
bearing part
guide rail
connecting member
endless belt
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Expired - Fee Related
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CN 201220549009
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Chinese (zh)
Inventor
佐藤俊德
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NSK Ltd
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NSK Ltd
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Publication of CN202914656U publication Critical patent/CN202914656U/en
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Abstract

Disclosed is an actuator. Micro-vibration is not easy to be delivered to a carrying material carried on a bearing even under the condition that the bearing moves at a high speed and accelerates or decelerates rapidly. The actuator comprises a driving belt wheel (1), a driven belt wheel (2), an annular belt (3) erected between the two belt wheels (1, 2), a guiding rail (4) and a bearing (5). The bearing is connected with the annular belt and moves along the guiding rail in a straight line mode. The bearing is composed of four bearing parts (5A, 5B, 5C, 5D) arranged in the axial direction. Bearing parts (5B, 5C) used for belt connecting are connected with the annular belt by using a first connecting part (7). The carrying materials are carried by bearing parts (5A, 5D) used for carrying materials. The bearing part (5A), the bearing part (5B), the bearing part (5C) and the bearing part (5D) are connected by using a third connecting part (9). On the other hand, the bearing part (5A) and the bearing part (5D) connected with each other by using a second connecting part (8) are not directly connected with the annular belt.

Description

Actuator
Technical field
The utility model relates to actuator.
Background technique
In the past, manufacturing installation possessed straight line pilot bearing device, in order to make workpiece movable, disclosed the actuator that is suitable for such straight line pilot bearing device in the patent documentation 1,2.
Disclosed actuating device is standby in the patent documentation 1,2: by the driving pulley of drive unit rotary actuation; The driven pulley that rotation is supported freely; Be erected at the endless belt between driving pulley and the driven pulley; Carry the carrying object such as workpiece and make the bearing of the carrying object traveling priority such as this workpiece; The guide rail that the traveling priority of bearing is guided; As the balancer weight of bearing and bring into play the equalizer bearing of function; And the balance guide rail that the traveling priority of equalizer bearing is guided.Bearing is connected with the endless belt with equalizer bearing, but equalizer bearing is connected to opposition side with the side that bearing is installed across described two belt wheels.
In such actuator, make bearing and equalizer bearing mobile round about, thereby be suppressed at when accelerating, the reaction force of the bearing that produces when slowing down etc., thereby, can suppress thus vibration.
The prior art document
Patent documentation
Patent documentation 1: TOHKEMY 2008-101642 communique
Patent documentation 2: TOHKEMY 2001-248703 communique
But, namely allow to suppress vibration as described above, in the situation that bearing is with high-speed mobile and acceleration or deceleration sharp, actuator in the past as described above also might produce little vibration.Therefore, the kinematic accuracy of the bearing of traveling priority can slight reduction sometimes.
If common purposes, even so in most cases the kinematic accuracy slight reduction can not produce large harmful effect yet, but in the situation of the actuator of highi degree of accuracy purposes, the little vibration that is delivered to bearing via the endless belt might cause harmful effect to carrying object.Therefore, require further to suppress vibration.
The model utility content
Therefore, the utility model is conceived to just above-mentioned problem and finishes, and its purpose is to provide a kind of actuator, even in the situation that bearing with high-speed mobile and acceleration or deceleration sharp, little vibration also is difficult for being delivered to the carrying object that is equipped on bearing.
Be used for solving the technological scheme of problem
The model utility first aspect that is used for solving above-mentioned problem is a kind of actuator, and this actuating device is standby: driving pulley, and it is by the drive unit rotary actuation; Driven pulley, its rotation is supported freely; The endless belt, it is erected between described driving pulley and the described driven pulley, rotates along with the rotation of described driving pulley; Guide rail, it extends vertically; And bearing, its be connected with described endless belt and along with the rotation of described endless belt along described guide rail at described axial traveling priority, described actuator makes carrying object be equipped on described bearing and traveling priority, it is characterized in that, described bearing has the bearing part more than three in described axially-aligned, this bearing part has: more than one band connects uses bearing part, and this band connection utilizes the first connecting member with bearing part and links with described endless belt; And carrying object bearing part, this carrying object axially clips this band connection and disposes more than two with bearing part described with bearing part, and utilize the second connecting member and mutually link, only utilize the 3rd connecting member that can resiliently deformable in described direction beyond axially and is connected with the bearing part link with described band, described carrying object is equipped on described the second connecting member.
If such structure then is delivered to band from little vibration of endless belt and connects and use bearing part, but can not be directly delivered to the carrying object bearing part.Be delivered to and be with the little vibration that connects with bearing part to be delivered to the carrying object bearing part via connecting member, but by the distortion of the connecting member that can be out of shape as described above little vibration is cushioned, therefore can suppress significantly to be delivered to carrying object with little vibration of bearing part.Therefore, even in the situation that bearing with high-speed mobile and acceleration or deceleration sharp, the little vibration that is delivered to carrying object from the endless belt also is small, does not worry almost that therefore little vibration produces harmful effect to the carrying object that is equipped on bearing.
In addition, the model utility second aspect is characterised in that, according to the described actuator of first aspect, at least either party in the first connecting member and the second connecting member only can resiliently deformable in described direction beyond axially.
In addition, the model utility third aspect is characterised in that, according to first or the described actuator of second aspect, the first connecting member is that flat board is carried out bending and the leaf spring that forms.
In addition, the model utility fourth aspect is characterised in that, according to the first described actuator of either side to the third aspect, at least either party in the second connecting member and the 3rd connecting member forms planar.
In addition, model utility the 5th aspect is characterised in that, according to the described actuator of the either side in first to fourth aspect, described band connects with bearing part and described carrying object and links with the position of centre of gravity place of bearing part at described bearing.
If such structure produces the situation of useless moment at bearing owing to the driving force of endless belt in the time of then can being suppressed at acceleration and deceleration, so can further suppress the vibration of bearing.Moreover, in the situation that carrying object is equipped on bearing, the position of centre of gravity (that is, combination bearing and carrying object and the position of centre of gravity of the composition that forms) that is equipped with the bearing of carrying object is called " position of centre of gravity of bearing ".
In addition, model utility the 6th aspect is characterised in that, according to the described actuator of either side in the first to the 5th aspect, the shape of described guide rail is that section is roughly U word shape, and at least a portion of described endless belt is configured in the recess of described guide rail.
If such structure then makes the recess of guide rail and carrying object not opposed, thereby the dust that can suppress to produce from the endless belt is attached to carrying object.
The model utility effect
According to the utility model, a kind of actuator can be provided, even in the situation that bearing with high-speed mobile and acceleration or deceleration sharp, little vibration also is difficult for being delivered to the carrying object that is equipped on bearing.
Description of drawings
Fig. 1 is the plan view of structure that a mode of execution of actuator of the present utility model is shown.
Fig. 2 is the side view of structure that a mode of execution of actuator of the present utility model is shown.
Fig. 3 is the plan view of structure of bearing that a mode of execution of actuator of the present utility model is shown.
Fig. 4 be illustrate actuator of the present utility model a mode of execution bearing structure along axial sectional view.
Fig. 5 is the plan view from end on observation Fig. 3.
Label declaration
1: driving pulley;
2: driven pulley;
3: the endless belt;
4: guide rail;
5: bearing;
5B, 5C: band connects with bearing part (bearing part);
5A, 5D: carrying object bearing part (bearing part);
7: the first connecting members (band link leaf spring);
8: the second connecting members (bearing link leaf spring);
9: the three connecting members (web);
10: motor.
Embodiment
Below, with reference to accompanying drawing mode of execution of the present utility model is described.
Fig. 1 is the plan view of structure that a mode of execution of actuator of the present utility model is shown.In addition, Fig. 2 is the side view of structure that a mode of execution of actuator of the present utility model is shown.In addition, Fig. 3 is the plan view of structure of bearing that a mode of execution of actuator of the present utility model is shown.In addition, Fig. 4 be illustrate actuator of the present utility model a mode of execution bearing structure along axial sectional view.In addition, Fig. 5 is the plan view from end on observation Fig. 3.
(structure of actuator)
As depicted in figs. 1 and 2, the actuating device of present embodiment is standby: driving pulley 1, and it is by motor 10 rotary actuations; Driven pulley 2, its rotation is supported freely; The endless belt 3 of ring-type, it is erected between driving pulley 1 and the driven pulley 2; Guide rail 4, it extends vertically; And bearing 5, its along with the rotation of endless belt 3 along guide rail 4 at axial traveling priority.
At this, motor 10 is installed on an end of guide rail 4.The running shaft 10a of this motor 10 extends along level and with the direction of axis (axially) quadrature of guide rail 4, at the end of this running shaft 10a driving pulley 1 is installed.And, be another end that rotation band hub cap (pulley housing) 11 freely is installed on guide rail 4 with driven pulley 2 supportings.
And, between driving pulley 1 and driven pulley 2, along the added endless belt 3 that is provided with of the direction (axially) of guide rail 4.3 surface (inner side surface) is formed with a plurality of teeth (not shown) along circumferential array in the endless belt, they and tooth (not shown) engagement of the outer circumferential face that is formed on driving pulley 1 and driven pulley 2.Therefore, endless belt 3 is driven in rotation by the rotation of driving pulley 1.
In addition, the part of bearing 5 is connected with endless belt 3, and bearing 5 engages with guide rail 4, and therefore, along with the rotation of endless belt 3, bearing 5 is guided by guide rail 4 and traveling priority vertically.
<guide rail 〉
The shape of guide rail 4 does not limit especially, but as shown in Figure 5, is preferably roughly U word shape.That is, guide rail 4 is made of the diapire 4a of band shape and the pair of sidewalls 4b, the 4b that vertically erect setting from the both sides of this diapire 4a, and the section that cuts off at the face with axial quadrature is roughly U word shape.
<bearing 〉
Bearing 5 is made of bearing part 5A, 5B, 5C, the 5D of (being four in the present embodiment) more than three that arranges in the axial direction.And each bearing part 5A, 5B, 5C, 5D are roughly identical shaped.The shape that engages with guide rail 4 that is shaped as of bearing part 5A, 5B, 5C, 5D gets final product, and does not limit especially, but is roughly U word shape in the situation that guide rail 4 is sections as described above, is the parts that guide rail 4 can be wrapped in inner such rectangular drum like.
Namely, each bearing part 5A, 5B, 5C, 5D are by linking the parts of the rectangular drum like that base plate 5a, side plate 5b, 5b and top board 5c form, the diapire 4a of described base plate 5a and guide rail 4 is opposed, described side plate 5b, 5b are opposed with the side of sidewall 4b, the 4b of guide rail 4 respectively, and described top board 5c is opposed with the plane of sidewall 4b, the 4b of guide rail 4 respectively.Like this, bearing 5 engages with guide rail 4 guide rail 4 is wrapped in inner mode.
[bearing part]
Bearing part 5B, the 5C of the axial central authorities among four bearing part 5A, 5B, 5C, the 5D is that the band that utilizes the first connecting member 7 and endless belt 3 to link is connected and uses bearing part.That is, carrying object is not equipped on bearing part 5B, 5C.Moreover it is to get final product more than one that band connects with bearing part, in the present embodiment, adopts two bearing part 5B, 5C to connect as band and uses bearing part, but they are become one.
On the other hand, axially bearing part 5A, the 5D at two ends are for the carrying object bearing part that carries carrying object.These bearing part 5A, 5D more than two are set, in order to be configured to clip in the axial direction bearing part 5B, 5C.And bearing part 5A, the 5D at these axial two ends directly is not connected with endless belt 3.Carrying object O is equipped on the second connecting member 8, and this second connecting member 8 only links up carrying object with bearing part (being in the present embodiment bearing part 5A, 5D) mutually.In addition, in the situation that make bearing 5 lose mass balance owing to carrying object O being equipped on the second connecting member 8, the counterweight BW that carries the moment that is used for the payment carrying object gets final product.In the example of Fig. 5, carrying object O is equipped on the left surface of bearing 5, therefore counterweight BW is equipped on right flank.
In addition, carrying object only utilizes on the direction beyond axially the 3rd connecting member 9 that can resiliently deformable and is connected respectively the link with bearing part 5B, 5C with band with bearing part 5A, 5D.
<connecting member 〉
Below, above-mentioned each connecting member is described.
[the first connecting member]
The first connecting member 7 is with connecting with bearing part 5B, 5C with endless belt 3 and bearing 5() parts that link up.That is, the part of endless belt 3 is fixed in bearing part 5B, 5C via the first connecting member 7.More specifically, the first connecting member 7 for example is that plate bending is processed into the central part 7a metal leaf spring higher a section than two end part 7b, 7b.And, utilize the so habitual fixed unit of bolt for example 14 that the first connecting member 7 of this leaf spring shape is mounted to and make overbending direction and axial almost parallel, and central part 7a is installed in the internal surface of the top board 5c of bearing part 5B, 5C, and two end part 7b, 7b also utilize bolt, the habitual means of fixation such as bonding and are fixed in endless belt 3.That is, the coupling position of endless belt 3 and the first connecting member 7 is configured in the position lower than the upper end of sidewall 4b, the 4b of guide rail 4, namely be configured in the recess of guide rail 4.Like this, the coupling position by making endless belt 3 and the first connecting member 7 and the position of centre of gravity of bearing 5 are consistent, can be suppressed at the situation that produces useless moment when utilizing endless belt 3 driving bearing 5 at bearing 5.
In addition, only be arranged to can resiliently deformable on the direction beyond axially for preferred the first connecting member 7.
[the second connecting member]
As shown in Figure 3, the second connecting member 8 is parts that carrying object is linked up mutually with bearing part 5A, 5D.
In addition, only be arranged to can resiliently deformable on the direction beyond axially for preferred the second connecting member 8.And as the shape of the second connecting member 8, preference is as forming carrying object with bearing part 5A, 5D side plate 5b, 5b separately metal planar connected to each other.
[the 3rd connecting member]
The 3rd connecting member 9 is such parts: will be with connection to link up with bearing part 5A, 5D with bearing part 5B, 5C and carrying object in the mode that the direction beyond axially only can resiliently deformable.
As the mode of utilizing the 3rd such connecting member 9 to link, for example, the base plate 5a of carrying object with bearing part 5A linked up with the base plate 5a that band is connected with bearing part 5B, and the base plate 5a of carrying object with bearing part 5D linked up with the base plate 5a that band is connected with bearing part 5C.
In addition, the link that the band that utilizes the 3rd connecting member 9 to carry out connects with bearing part 5B, 5C and carrying object bearing part 5A, 5D preferably links at the position of centre of gravity place of described bearing.
And, as the shape of the 3rd connecting member 9, be preferably formed metal planar.
At this, in the situation that the 3rd connecting member 9 is flat parts, the direction of the characteristic deflection of buffering vibration and difference have the direction of easy buffering vibration and are difficult for the direction of buffering vibration.In the situation that reality is used actuator, the vibration of rotating direction is a problem most, and therefore, flat the 3rd connecting member 9 is installed into like this: although be difficult to a little produce distortion on yaw direction, can be out of shape at rotating direction and pitch orientation.Consequently, can suppress fully the vibration of rotating direction and pitch orientation.
Like this, utilize the 3rd connecting member 9 to cushion because the weigh light of endless belt 3 and the bending motion of endless belt 3 etc. and issuable nonlinearity (misalignment), little vibration, play the high-speed mobile that can tolerate bearing and the rapid such effect of acceleration or deceleration.
Like this, in the actuator of present embodiment, the bearing part more than three that consists of bearing 5 utilizes more than one band to connect with bearing part and be connected this band connection to use the plural carrying object of the both sides of bearing part to use bearing part and separation function, and utilizes as described above the first to the 3rd connection unit and be bonded.And at least the three connecting member only can resiliently deformable on axial direction in addition.By such structure, can provide following actuator: even in the situation that bearing with high-speed mobile and acceleration or deceleration sharp, little vibration also is difficult for being delivered to the carrying object that is equipped on bearing.
[ejiction opening]
At this, base plate 5a, side plate 5b, 5b and the top board 5c of each bearing part 5A, 5B, 5C, 5D, be provided with ejiction opening for ejection gas with guide rail 4 opposed each internal surface.That is, between bearing 5 and guide rail 4, be formed with gas bearing.The kind of gas does not limit especially, but air preferably.In addition, also can with present embodiment on the contrary, be provided for spraying the ejiction opening of gas at the outer surface of guide rail 4.In the present embodiment, as shown in Figure 5, configuration using graphite is formed with the tabular Hydrostatic Cushion SP in a plurality of holes as ejiction opening.
Because never illustrated air-source provides pressurized air to Hydrostatic Cushion SP, so, by towards the pressure of the air of the outer surface ejection of guide rail 4 bearing 5 slightly being isolated from Hydrostatic Cushion SP with respect to guide rail 4.Therefore, bearing 5 can be almost without frictionally moving.Moreover, also can replace gas bearing is set and between bearing 5 and guide rail 4, sliding bearing or rolling bearing are set.
(action of actuator)
Below, the action of the actuator of present embodiment is described.
At first, the pressurized air that utilizes illustrated air-source never to offer each Hydrostatic Cushion SP makes bearing 5 maintain the slightly state of isolation with respect to guide rail 4.
At this, when motor 10 drives driving pulley 1, bearing 5 via endless belt 3 along guide rail 4 almost without frictionally moving.And, by the driving of control driving pulley 1, can make bearing 5 straight line motion reciprocally between the two ends of guide rail 4.
And, in the present embodiment, carry via bearing part 5A, 5D carrying object O the second connecting member 8 and with bearing part 5B, 5C that endless belt 3 links be split, but parts in the past are one, the endless belt is connected in the bearing that carries carrying object O comes transmission of drive force.Therefore, in parts in the past, be delivered to carrying object from the vibration of endless belt, might produce harmful effect to carrying object.But, in the present embodiment, carry via bearing part 5A, 5D carrying object O the second connecting member 8 and with bearing part 5B, 5C that endless belt 3 links be split, utilization is cushioned the vibration from endless belt 3 the 3rd connecting member 9 that they link up, and therefore the vibration from endless belt 3 is difficult for being delivered to carrying object.
Particularly, vibration from endless belt 3 is delivered to bearing part 5B, 5C, but because the 3rd connecting member 9 is flat parts, has the character that in the axial direction resiliently deformable does not occur and can resiliently deformable on the direction beyond axially, therefore, resiliently deformable can not occur owing to transmitting the vibration that comes in the 3rd connecting member 9 in the axial direction, but to axial direction (radially) deflection (resiliently deformable) in addition.Strictly speaking, the 3rd connecting member 9 is slightly flexible in the axial direction, then is the amount of deformation of negligible degree but compare with deflection radially, therefore can say in fact in the axial direction can not deform.
Therefore, although from the axial vibration in the vibration of endless belt 3 via the 3rd connecting member 9 a little bearing part 5A, 5D of being delivered to, but the vibration of the direction axially is delivered to bearing part 5A, 5D hardly owing to the distortion of the 3rd connecting member 9 is cushioned.Consequently, even in the situation that bearing 5 with high-speed mobile and acceleration or deceleration sharp, little vibration of the bearing 5 in mobile also can be suppressed and be obtained high linarity.Therefore in addition, little vibration is difficult for being delivered to the carrying object O that is equipped on bearing 5, hardly can be owing to from the vibration of endless belt 3 carrying object O being produced harmful effect.And the 3rd connecting member 9 is flat parts, therefore, so long as to axial direction in addition, in the situation that all identical to the characteristic of which direction deflection buffering vibration, can not make owing to the direction of deflection the easy resiliency of vibration different.
And the section of guide rail 4 is roughly U word shape, so the outer surface of sidewall 4b, 4b and diapire 4a is made of the plane, has advantages of that therefore to be easy to improve machining accuracy (particularly linear precision) such.
Such actuator can be fit to be used in manufacturing installation, testing fixture and conveying device etc., though be particularly suitable for straight line pilot bearing device bearing with high-speed mobile and sharp under the condition of acceleration or deceleration running also require bearing to carry out the various devices of high-precision traveling priority.
Above mode of execution of the present utility model is illustrated, but the utility model is not limited to this, can carry out various changes, improvement.For example, in the present embodiment, bearing 5 links up four bearing part 5A, 5B, 5C, 5D and consist of, but the number of bearing part is so long as get final product especially restriction more than three.
In addition, among four bearing part 5A, 5B, 5C, the 5D two are that band connects and uses bearing part, two is the carrying object bearing part, but as long as band connect with bearing part be more than one, the carrying object bearing part is to clip in the axial direction the plural bearing part that the band connection configures with the mode of bearing part, their number is especially restriction.And, in four bearing part 5A, 5B, 5C, 5D, bearing part 5B, 5C with axial central authorities use bearing part as being with to connect, use bearing part but also can connect as band with bearing part 5A, 5D beyond the axial central authorities, and with bearing part 5B, the 5C of axial central authorities as the carrying object bearing part.That is, connect with bearing part and carrying object bearing part as long as the bearing part function more than three is separated into band, the axial position of each bearing part does not limit especially.

Claims (17)

1. actuator, this actuating device is standby:
Driving pulley, it is by the drive unit rotary actuation;
Driven pulley, its rotation is supported freely;
The endless belt, it is erected between described driving pulley and the described driven pulley, rotates along with the rotation of described driving pulley;
Guide rail, it extends vertically; And
Bearing, its be connected with described endless belt and along with the rotation of described endless belt along described guide rail at described axial traveling priority,
Described actuator makes carrying object be equipped on described bearing and carries out traveling priority,
This actuator is characterised in that,
Described bearing has the bearing part more than three in described axially-aligned,
This bearing part has:
More than one band connects uses bearing part, and this band connection utilizes the first connecting member with bearing part and links with described endless belt; And
The carrying object bearing part, this carrying object with bearing part axially to clip this band connection and dispose more than two with the mode of bearing part described, and utilize the second connecting member and mutually link, only utilize the 3rd connecting member that can resiliently deformable in described direction beyond axially and is connected with the bearing part link with described band, described carrying object is equipped on described the second connecting member.
2. actuator according to claim 1 is characterized in that,
At least either party in the first connecting member and the second connecting member only can resiliently deformable on described axial direction in addition.
3. actuator according to claim 1 and 2 is characterized in that,
The first connecting member is that flat board is carried out bending and the leaf spring that forms.
4. actuator according to claim 1 and 2 is characterized in that,
At least either party in the second connecting member and the 3rd connecting member forms planar.
5. actuator according to claim 3 is characterized in that,
At least either party in the second connecting member and the 3rd connecting member forms planar.
6. actuator according to claim 1 and 2, wherein,
Described band connects with bearing part and described carrying object and links with the position of centre of gravity place of bearing part at described bearing.
7. actuator according to claim 3, wherein,
Described band connects with bearing part and described carrying object and links with the position of centre of gravity place of bearing part at described bearing.
8. actuator according to claim 4, wherein,
Described band connects with bearing part and described carrying object and links with the position of centre of gravity place of bearing part at described bearing.
9. actuator according to claim 5, wherein,
Described band connects with bearing part and described carrying object and links with the position of centre of gravity place of bearing part at described bearing.
10. actuator according to claim 1 and 2, wherein,
The shape of described guide rail is that section is roughly U word shape, and at least a portion of described endless belt is configured in the recess of described guide rail.
11. actuator according to claim 3, wherein,
The shape of described guide rail is that section is roughly U word shape, and at least a portion of described endless belt is configured in the recess of described guide rail.
12. actuator according to claim 4, wherein,
The shape of described guide rail is that section is roughly U word shape, and at least a portion of described endless belt is configured in the recess of described guide rail.
13. actuator according to claim 5, wherein,
The shape of described guide rail is that section is roughly U word shape, and at least a portion of described endless belt is configured in the recess of described guide rail.
14. actuator according to claim 6, wherein,
The shape of described guide rail is that section is roughly U word shape, and at least a portion of described endless belt is configured in the recess of described guide rail.
15. actuator according to claim 7, wherein,
The shape of described guide rail is that section is roughly U word shape, and at least a portion of described endless belt is configured in the recess of described guide rail.
16. actuator according to claim 8, wherein,
The shape of described guide rail is that section is roughly U word shape, and at least a portion of described endless belt is configured in the recess of described guide rail.
17. actuator according to claim 9, wherein,
The shape of described guide rail is that section is roughly U word shape, and at least a portion of described endless belt is configured in the recess of described guide rail.
CN 201220549009 2011-10-26 2012-10-25 Actuator Expired - Fee Related CN202914656U (en)

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JP2011235255A JP5974449B2 (en) 2011-10-26 2011-10-26 Actuator
JP2011-235255 2011-10-26

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JP6030254B1 (en) * 2016-01-25 2016-11-24 上銀科技股▲分▼有限公司 Belt-type linear transmission module

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JPH0332831Y2 (en) * 1985-12-25 1991-07-11
JP2508574Y2 (en) * 1993-04-13 1996-08-28 日本精工株式会社 Linear motion actuator
ITBG20060043A1 (en) * 2006-09-11 2008-03-12 Motus Tech Srl Motion Tecnology LINEAR ACTUATOR WITH JUNCTION ELEMENTS IN MOLTED MONOLITHIC CONSTITUTION.
JP5267470B2 (en) * 2010-01-15 2013-08-21 日本精工株式会社 Actuator
JP2011149514A (en) * 2010-01-22 2011-08-04 Nsk Ltd Feed drive device

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CF01 Termination of patent right due to non-payment of annual fee
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Granted publication date: 20130501

Termination date: 20201025