CN202849241U - Quartz tube and quartz bar continuous melting furnace - Google Patents
Quartz tube and quartz bar continuous melting furnace Download PDFInfo
- Publication number
- CN202849241U CN202849241U CN201220478673.4U CN201220478673U CN202849241U CN 202849241 U CN202849241 U CN 202849241U CN 201220478673 U CN201220478673 U CN 201220478673U CN 202849241 U CN202849241 U CN 202849241U
- Authority
- CN
- China
- Prior art keywords
- crucible
- silica tube
- melting furnace
- heater
- quartz pushrod
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model discloses a quartz tube and quartz bar continuous melting furnace. The furnace comprises a furnace body and a crucible arranged in the furnace body, wherein an insulating layer is arranged between the crucible and the furnace body; a heating device is arranged between the crucible and the insulating layer; and at least one auxiliary heating device is arranged under the heating device around the crucible. According to the continuous melting furnace, the heating device is additionally arranged outside the crucible, and the auxiliary heating device is added under the heating device, so that the temperature in the crucible (heating area) is uniform, quartz sands can be sufficiently melted, air lines and bubbles on the surface can be reduced, and the surface quality can be improved. Furthermore, different powers of the heating device and the auxiliary heating device can be controlled, and the viscosity of the quartz sands at the bottom of the crucible can be regulated, so that the uniformity, quality and surface effect of a quartz tube can be guaranteed.
Description
Technical field
The utility model relates to a kind of silica tube, quartz pushrod continuous induction melting furnace.
Background technology
The factor that determines silica tube, quartz pushrod quality mainly contains: surperficial gas line, bubble quality, and the homogeneity of silica tube, quartz pushrod.
Tungsten crucible (heating zone) in existing silica tube, the quartz pushrod continuous induction melting furnace is by one group of heater heats.Reality is produced in silica tube, the quartz pushrod process continuously can produce following problem: pass through heat fused in the quartz sand adding crucible, and because the restriction of heating power, well heater can't cover whole crucible heating, and only coat the heating of crucible top, cause the crucible internal upper part very high near the temperature of well heater, but the crucible bottom is lower, make the quartz sand heating of crucible bottom insufficient, fusing is just bad, thereby causes silica tube rod open bubble gas line, and quality is unstable; In order to make the full and uniform fusing of quartz sand in the crucible, can improve the design temperature (passing through power ratio control) of well heater, fused quartz sand viscosity reduces in the crucible but the temperature raising can make, thereby the crucible bottom discharging is too fast, the silica tube, the footpath of rod and the controllability of wall thickness that cause fire door to be pulled out reduce lack of homogeneity.
The utility model content
In order to solve the problems of the technologies described above, the utility model discloses a kind of silica tube, quartz pushrod continuous induction melting furnace, comprise body of heater and be located at the interior crucible of body of heater, be provided with thermal insulation layer between crucible and the body of heater, be provided with heating unit between crucible and the thermal insulation layer, described heating unit below, be provided with at least one assisted heating device around crucible.
As optimal technical scheme, above-mentioned silica tube, quartz pushrod continuous induction melting furnace comprise body of heater and the bell that covers the body of heater top, are provided with crucible in the body of heater, are provided with thermal insulation layer between crucible and the body of heater, and crucible bottom is provided with discharge port;
Core bar is hollow tubular, is located in the crucible, and the upper end passes bell, and the lower end is connected with shaped device; Shaped device and discharge port be running fit ringwise; The hollow hole of core bar is connected with the control device of air; Feeding device is communicated with crucible;
Be provided with heating unit between crucible and the thermal insulation layer, described heating unit below, be provided with at least one assisted heating device around crucible.
As optimal technical scheme, described heating unit is the heating net that is electrically connected with main electrode, and it is located between crucible and the thermal insulation layer.
As optimal technical scheme, described assisted heating device is the boosting circle that is electrically connected with supporting electrode, and it is in described heating unit below, around the crucible setting.
As optimal technical scheme, bottom of furnace body be provided with the fire door of pulling out silica tube or quartz pushrod, in the body of heater, be provided with the high temperature brick around fire door.
As optimal technical scheme, outside the body of heater, be provided with the chilled water unit of cooling silica tube or quartz pushrod around fire door.
As optimal technical scheme, described chilled water unit below is provided with dust exhaust.
As optimal technical scheme, described dust exhaust is high temperature draught fan.
As optimal technical scheme, described bell is provided with for the deviation correcting device of adjusting the core bar position, deviation correcting device clamping core bar.
As optimal technical scheme, described shaped device is the round platform tubular, and its thin mouthful of end is connected with described core bar, and thick mouthful of end stretches out discharge port.
Silica tube of the present utility model, quartz pushrod continuous induction melting furnace have following effect.
1, crucible peripheral hardware one heating unit, the heating unit below increases at least one assisted heating device, makes the temperature of (heating zone) in the crucible even, and the quartz sand fusing fully will make the gas line on surface, bubble reduce like this, improves surface quality.And, the power that controlled refrigerating/heating apparatus is different with assisted heating device, with the viscosity of adjustment crucible bottom quartz sand, thus homogeneity, quality and the surface effect of assurance silica tube.
2, shaped device and discharge port running fit ringwise, shaped device is the cylinder platform, thereby adjusts the silica tube that its upper-lower position makes the outlet of circular clearance size variation control continuous induction melting furnace, footpath and the wall thickness of quartz pushrod, makes to have good uniformity.
3, deviation correcting device can be mobile arbitrarily in X, Y-direction, the inclined to one side wall of adjustable quartz pipe.
4, dust exhaust (high temperature draught fan) is discharged the impurity in silica tube, the quartz pushrod preparation process (mainly being oxide compound steam, particle etc.).
Description of drawings
Fig. 1 is the structural representation of the preferred embodiment of silica tube of the present utility model, quartz pushrod continuous induction melting furnace.
1, body of heater; 2, bell; 3, crucible; 31, discharge port; 4, thermal insulation layer; 5, core bar; 6, shaped device; 7, control device of air; 8, feeding device; 9, heating unit; 91, main electrode; 92, heating net; 10, assisted heating device; 101, supporting electrode is electrical; 102, boosting circle; 111, fire door; 11, high temperature turns; 12, chilled water unit; 13, dust exhaust; 14, deviation correcting device; 112, furnace body support.
Embodiment
The utility model is described in further detail below in conjunction with the drawings and specific embodiments, so that those skilled in the art can better understand the utility model and being implemented, but illustrated embodiment is not as to restriction of the present utility model.
In conjunction with Fig. 1, be the structural representation of silica tube of the present utility model, the preferred embodiment of quartz pushrod continuous induction melting furnace,
Silica tube of the present utility model, quartz pushrod continuous induction melting furnace comprise body of heater 1 and the bell 2 that covers body of heater 1 top, are provided with crucible 3 in the body of heater 1, are provided with thermal insulation layer 4 between crucible 3 and the body of heater 1, and crucible 3 bottoms are provided with discharge port 31;
Core bar 5 is hollow tubular, is located in the crucible 3, and the upper end passes bell 2, and the lower end is connected with shaped device 6; Shaped device 6 is positioned at discharge port 31 central authorities of crucible 3 bottoms, with discharge port 31 running fit ringwise; The hollow hole of core bar 5 is connected with control device of air 7; Feeding device 8 is communicated with crucible 3;
Crucible 3(top) and between the thermal insulation layer 4 be provided with heating unit 9, heating unit 9 belows, around between crucible 3(crucible 3 bottoms and the thermal insulation layer 4) be provided with at least one assisted heating device 10(and can be a plurality of according to needs of production assisted heating device 10).
Crucible 3 is tungsten crucible in the utility model.
In the present embodiment, heating unit 9 is the heating net 92 that is electrically connected with main electrode 91, and it is located between crucible 3 tops and the thermal insulation layer 4, so that crucible 3 is heated; Assisted heating device 10 is the boosting circle 102 that is connected with supporting electrode electrical 101, and it is located between crucible 3 bottoms and the thermal insulation layer 4, so that boosting is carried out in crucible 3 bottoms.
Body of heater 1 bottom be provided with the fire door 111 of pulling out silica tube or quartz pushrod, in the body of heater 1, be provided with high temperature brick 11 around fire door 111.
Outside the body of heater 1, the chilled water unit 12(that is provided with cooling silica tube or quartz pushrod around fire door as: water jacket).Chilled water unit 12 belows are provided with dust exhaust 13.In the present embodiment, dust exhaust 13 is high temperature draught fan.
Bell 2 is provided with for deviation correcting device 14(Manual deflection regulator or the automatically deviation-adjusting device of adjusting core bar 5 positions), deviation correcting device 14 clamping core bars 5.
In the present embodiment, shaped device 6 is preferably the round platform tubular, and its thin mouth end is connected with described core bar 5, and thick mouthful of end stretches out discharge port 31, and shaped device 6 and discharge port 31 be running fit ringwise.
Body of heater 1 outside is provided with furnace body support 112, with fixing continuous induction melting furnace.
The technique that silica tube, quartz pushrod continuous induction melting furnace are produced silica tube is:
In body of heater 1, pass into protection gas (reducing gas and protection gas etc.) first, prevent that high-temperature heating process is to Oxidative demages such as body of heater 1, tungsten crucibles.Quartz sand is added to tungsten crucible continuously through feeding device 8, output control device with three-phase alternating-current supply through silicon controlled rectifier, transformer is added to main electrode, main electrode 91 is linked heating net 92, by power ratio control (be generally total power 80% ~ 90%), make heating net 92 heatings, tungsten crucible obtains corresponding high temperature (2000 ~ 2350 ℃), make quartz sand thawing in the crucible, because heating net 92 is shorter than tungsten crucible, very high with the temperature in the close position crucible of net, but the crucible bottom is lower, the quartz sand solution of abundant thawing is lowered the temperature again, then regulate the power of pot bottom by supporting electrode and boosting circle, to reach the best mass effect in silica tube surface, the heating power of boosting circle is controlled at total power 5%--20%, can regulate as requested.The quartz sand of melting flows out from shaped device 6 and the circular clearance that discharge port 31 forms; pass into protection gas by control device of air 7 to the core bar hollow hole simultaneously; can pull out silica tube from fire door; gas flow rate that can be by adjusting pulling rate, control device of air 7 in this process and the adjusting of shaped device 6 upper-lower positions are (because shaped device 6 is the cylinder platform; thereby adjusting its upper-lower position makes the circular clearance size variation affect the factors such as wall thickness), come the interior external diameter of production certain limit and the silica tube of wall thickness.Chilled water unit 12 is that protection fire door 111 is not oxidized.High temperature draught fan is discharged the impurity in the silica tube preparation process (mainly being oxide compound steam, particle etc.).Deviation correcting device 14 can be mobile arbitrarily in X, Y-direction, mainly is the inclined to one side wall of regulating silica tube, that is to say and will be transferred to the central position to shaped device 6, because in process of production owing to a variety of causes, its meeting fine motion just needs to regulate when finding the inclined to one side wall of silica tube.
Production technique and the silica tube of quartz pushrod are basic identical, and difference is: will control device of air 7 and not close and ventilate in the hollow hole of core bar 5.
The above embodiment is the preferred embodiment that proves absolutely that the utility model is lifted, and protection domain of the present utility model is not limited to this.Being equal to that those skilled in the art do on the utility model basis substitutes or conversion, all within protection domain of the present utility model.Protection domain of the present utility model is as the criterion with claims.
Claims (10)
1. a silica tube, quartz pushrod continuous induction melting furnace, it is characterized in that, comprise body of heater and be located at the interior crucible of body of heater, be provided with thermal insulation layer between crucible and the body of heater, be provided with heating unit between crucible and the thermal insulation layer, described heating unit below, be provided with at least one assisted heating device around crucible.
2. silica tube according to claim 1, quartz pushrod continuous induction melting furnace is characterized in that, comprise body of heater and the bell that covers the body of heater top, are provided with crucible in the body of heater, are provided with thermal insulation layer between crucible and the body of heater, and crucible bottom is provided with discharge port;
Core bar is hollow tubular, is located in the crucible, and the upper end passes bell, and the lower end is connected with shaped device; Shaped device and discharge port be running fit ringwise; The hollow hole of core bar is connected with the control device of air; Feeding device is communicated with crucible;
Be provided with heating unit between crucible and the thermal insulation layer, described heating unit below, be provided with at least one assisted heating device around crucible.
3. silica tube according to claim 1 and 2, quartz pushrod continuous induction melting furnace is characterized in that, described heating unit is the heating net that is electrically connected with main electrode, and it is located between crucible and the thermal insulation layer.
4. silica tube according to claim 3, quartz pushrod continuous induction melting furnace is characterized in that, described assisted heating device is the boosting circle that is electrically connected with supporting electrode, and it is in described heating unit below, around the crucible setting.
5. silica tube according to claim 2, quartz pushrod continuous induction melting furnace is characterized in that, described bottom of furnace body be provided with the fire door of pulling out silica tube or quartz pushrod, in the body of heater, be provided with the high temperature brick around fire door.
6. silica tube according to claim 5, quartz pushrod continuous induction melting furnace is characterized in that, outside the described body of heater, are provided with the chilled water unit of cooling silica tube or quartz pushrod around fire door.
7. silica tube according to claim 6, quartz pushrod continuous induction melting furnace is characterized in that, described chilled water unit below is provided with dust exhaust.
8. silica tube according to claim 7, quartz pushrod continuous induction melting furnace is characterized in that, described dust exhaust is high temperature draught fan.
9. silica tube according to claim 2, quartz pushrod continuous induction melting furnace is characterized in that, described bell is provided with for the deviation correcting device of adjusting the core bar position, described deviation correcting device clamping core bar.
10. silica tube according to claim 2, quartz pushrod continuous induction melting furnace is characterized in that, described shaped device is the round platform tubular, and its thin mouthful of end is connected with described core bar, and thick mouthful of end stretches out discharge port.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201220478673.4U CN202849241U (en) | 2012-09-19 | 2012-09-19 | Quartz tube and quartz bar continuous melting furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201220478673.4U CN202849241U (en) | 2012-09-19 | 2012-09-19 | Quartz tube and quartz bar continuous melting furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202849241U true CN202849241U (en) | 2013-04-03 |
Family
ID=47980461
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201220478673.4U Expired - Lifetime CN202849241U (en) | 2012-09-19 | 2012-09-19 | Quartz tube and quartz bar continuous melting furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202849241U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102897995A (en) * | 2012-09-19 | 2013-01-30 | 江苏太平洋石英股份有限公司 | Quartz tube, quartz rod continuous furnace |
| CN111826628A (en) * | 2020-06-24 | 2020-10-27 | 合肥科晶材料技术有限公司 | Device for controlling quartz crucible by using magnet |
| CN112694240A (en) * | 2020-12-26 | 2021-04-23 | 连云港福东正佑照明电器有限公司 | Continuous melting furnace for producing corrosion-resistant quartz tube and production method thereof |
| CN114195368A (en) * | 2021-12-17 | 2022-03-18 | 上海大学 | Pressure control device for preparing fused quartz product by high-temperature fusion casting method |
-
2012
- 2012-09-19 CN CN201220478673.4U patent/CN202849241U/en not_active Expired - Lifetime
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102897995A (en) * | 2012-09-19 | 2013-01-30 | 江苏太平洋石英股份有限公司 | Quartz tube, quartz rod continuous furnace |
| CN102897995B (en) * | 2012-09-19 | 2015-08-12 | 江苏太平洋石英股份有限公司 | A kind of silica tube, quartz pushrod continuous induction melting furnace |
| CN111826628A (en) * | 2020-06-24 | 2020-10-27 | 合肥科晶材料技术有限公司 | Device for controlling quartz crucible by using magnet |
| CN111826628B (en) * | 2020-06-24 | 2022-07-29 | 合肥科晶材料技术有限公司 | Device for controlling quartz crucible by using magnet |
| CN112694240A (en) * | 2020-12-26 | 2021-04-23 | 连云港福东正佑照明电器有限公司 | Continuous melting furnace for producing corrosion-resistant quartz tube and production method thereof |
| CN112694240B (en) * | 2020-12-26 | 2022-04-08 | 连云港福东正佑照明电器有限公司 | Continuous melting furnace for producing corrosion-resistant quartz tube and production method thereof |
| CN114195368A (en) * | 2021-12-17 | 2022-03-18 | 上海大学 | Pressure control device for preparing fused quartz product by high-temperature fusion casting method |
| CN114195368B (en) * | 2021-12-17 | 2024-03-19 | 上海大学 | Pressure control device for preparing fused quartz product by high-temperature fusion casting method |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102897995B (en) | A kind of silica tube, quartz pushrod continuous induction melting furnace | |
| CN202849241U (en) | Quartz tube and quartz bar continuous melting furnace | |
| CN103047860A (en) | Double-crucible induction heating furnace | |
| CN106868584A (en) | A kind of monocrystalline furnace resistor heater and the method that silicon single crystal is prepared using the resistance heater | |
| CN105531406A (en) | Silicon single crystal puller | |
| CN112877776A (en) | Crystal growth furnace | |
| CN105834382A (en) | Molten steel feeding system used for preparing amorphous strips | |
| CN107010813A (en) | The adjustable crucible lifting formula quartz glass continuous induction melting furnace of molding zone temperatures | |
| CN105154978B (en) | Gallium arsenide polycrystal magnetic field growth furnace and growing method | |
| CN206970453U (en) | The adjustable crucible lifting formula quartz glass continuous induction melting furnace of molding zone temperatures | |
| CN201354344Y (en) | Quartz continuous melting furnace | |
| JP2010070404A (en) | Apparatus for forming silicon melt | |
| CN205528385U (en) | Be used for glass shaping district thickness adjustment wind heating device | |
| CN207313424U (en) | A kind of quartz continuous melting furnace for reducing the inclined wall of tubing | |
| CN206970461U (en) | Multifunction quartz glass continuous induction melting furnace | |
| CN201449142U (en) | Quartz tube continuous smelter provided with secondary heater at lower part | |
| CN106894082A (en) | Monocrystalline silicon growing furnace | |
| CN205676374U (en) | Electricity consumption melting charge fiber drawing furnace prepared by boron nitride fiber | |
| CN215365450U (en) | Basalt fiber vertical heating furnace | |
| CN114875480A (en) | Single crystal furnace, heating and heat-preserving system thereof and method for growing gallium oxide crystals | |
| CN205099782U (en) | Single crystal furnace | |
| CN200992517Y (en) | Continuous melting furnace for drawing colored quartz glass pipe | |
| CN205635856U (en) | Polysilicon ingot furnace | |
| US20180319693A1 (en) | Vitrified material control system and method | |
| CN205907393U (en) | Polycrystalline silicon is heating system for ingot casting based on boosting |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20130403 |