CN202837350U - Probe frame device - Google Patents

Probe frame device Download PDF

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Publication number
CN202837350U
CN202837350U CN 201220446351 CN201220446351U CN202837350U CN 202837350 U CN202837350 U CN 202837350U CN 201220446351 CN201220446351 CN 201220446351 CN 201220446351 U CN201220446351 U CN 201220446351U CN 202837350 U CN202837350 U CN 202837350U
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CN
China
Prior art keywords
probe
frame device
module
prober frame
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN 201220446351
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Chinese (zh)
Inventor
邓朝阳
林子锦
裴晓光
赵海生
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BOE Technology Group Co Ltd
Original Assignee
Beijing BOE Optoelectronics Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
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Priority to CN 201220446351 priority Critical patent/CN202837350U/en
Application granted granted Critical
Publication of CN202837350U publication Critical patent/CN202837350U/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

The utility model discloses a probe frame device including a probe support and at least one probe modules capable of moving along all edges of the probe support. According to the utility model, the probe support and the probe modules are separated. Another product can be tested only by adjusting the position of the probe module or replacing the probe module with low cost. And the probe support with high cost can be used repeatedly, so that waste caused by the upgrade of the probe frame device is avoided, the probe frame device utilization rate is improved and the production and maintenance cost is reduced.

Description

A kind of prober frame device
Technical field
The utility model relates to the substrate detection field, relates in particular to a kind of prober frame device.
Background technology
Press the basic structure of TFT-LCD (Thin Film Transistor-Liquid Crystal Display, Thin Film Transistor (TFT)-liquid crystal display), the preparation process of TFT-LCD mainly comprises following technological process:
1, colored filter preparation technology mainly is to form red, green, blue three primary colours figure by modes such as spatter film forming, photoetching, inkjet printing, printings on glass substrate, and the black Matrix Pattern of an interception etc.
2, array base palte manufacturing process, claim again array or Array technique, mainly be to form thin film transistor (TFT) (Thin Film Transistor at glass substrate by semiconductor process techniques such as film technique, photoetching technique, lithographic techniques, TFT) array pattern, can form lead-in wire and test point in the neighboring area simultaneously, be convenient to the tft array figure is carried out electrical testing.
3, liquid crystal cell preparation technology, claim again molding process or Cell technique, mainly be after a colored filter for preparing and array base palte are accurately aimed at take unit pixel as unit, utilize the sealed plastic box sealing, and at centre perfusion liquid crystal material, cut into simultaneously the process of final needed screen size.
4, module assembled technique claims again Module technique, for LCDs backlight, polaroid and peripheral circuit is installed, and forms complete TFT-LCD display module.
Wherein, in Array technique, generally need the tft array figure of pair array substrate to carry out electrical testing, array base palte test (Array Test) technology commonly used is by the test point on the probe contact array substrate of prober frame signal loading to be realized detecting in array pattern at present.
Fig. 1 is the structural representation of prior art middle probe frame mounting, as shown in Figure 1, in the prober frame device of prior art, probe and support are integrated, and namely the position of probe, spacing, quantity are fixed, can not change, but, owing to test point position, the spacing of different array pattern designs can be different, so, a product of every increase all needs to increase accordingly a prober frame and comes the array base palte of described product is tested.When a product was no longer produced, corresponding prober frame also just discarded thereupon, causes very large waste.
The utility model content
In view of this, fundamental purpose of the present utility model is to provide a kind of prober frame device, can improve the prober frame utilization ratio of device, saves cost.
For achieving the above object, the technical solution of the utility model is achieved in that
A kind of prober frame device comprises: probe support and at least one probe module that can move along each limit of described probe support.
Described prober frame device also comprises the driver module that the driving probe module is moved along each limit of probe support.
Described driver module is realized by the mode of servo driving.
After described prober frame device also is included in probe module and moves to predeterminated position, described probe module is fixed on stuck-module on the probe support.
Described stuck-module is set screw.
Described prober frame device also comprises for the lead-in wire that each probe module is connected to signal source.
Described prober frame device also comprises for the lead-in wire that each probe module is connected to signal source.
Ring and/or outer shroud are groove structure in the described probe support.
Prober frame device described in the utility model, the prober frame device comprises: probe support and at least one probe module that can move along each limit of described probe support.The utility model separates probe support with probe module, when needs are tested other a product, only need to adjust the position of probe module or change cheap probe module, and expensive probe support can be reused, thereby avoid prober frame because the waste that updates and cause, improved the prober frame utilization ratio of device, and production and maintenance cost are lower.
Description of drawings
Fig. 1 is the structural representation of prior art middle probe frame mounting;
Fig. 2 is a kind of prober frame apparatus structure of the utility model embodiment schematic diagram;
Fig. 3 is a kind of servo driving principle schematic of the utility model embodiment;
Fig. 4 is the partial enlarged drawing of structure shown in the Reference numeral 2 among Fig. 2.
Embodiment
The prober frame device of the utility model embodiment comprises: probe support and at least one probe module that can move along each limit of described probe support.
First technical scheme of the present utility model, a kind of prober frame device, described prober frame device comprises: probe support and at least one probe module that can move along each limit of described probe support.
Second technical scheme of the present utility model, on the basis of first technical scheme, described prober frame device also comprises the driver module that the driving probe module is moved along each limit of probe support.
The 3rd technical scheme of the present utility model, on the basis of second technical scheme, described driver module is realized by the mode of servo driving.
The 4th technical scheme of the present utility model on the basis of above-mentioned arbitrary technical scheme, after described prober frame device also is included in probe module and moves to predeterminated position, is fixed on stuck-module on the probe support with described probe module.
The 5th technical scheme of the present utility model, on the basis of the 4th technical scheme, described stuck-module is set screw.
The 6th technical scheme of the present utility model, on the basis of above-mentioned arbitrary technical scheme, described prober frame device also comprises for the lead-in wire that each probe module is connected to signal source.
The 7th technical scheme of the present utility model, on the basis of above-mentioned arbitrary technical scheme, ring and/or outer shroud are groove structure in the described probe support.
Followingly by reference to the accompanying drawings embodiment of the present utility model is described:
Fig. 2 is a kind of prober frame apparatus structure of the utility model embodiment schematic diagram, and as shown in Figure 2, described prober frame device comprises: probe support 1 and at least one probe module 2 that can move along each limit of described probe support.Probe support 1 described in the present embodiment is a rectangle support, and namely probe module 2 can be moved along the X shown in the figure and Y both direction.
In addition, need to prove, in order to control the integral thickness of prober frame device, interior ring and/or the outer shroud of probe support 1 can be designed as groove structure, probe module 2 moves based on described groove structure, and shown in Figure 2 namely is the situation that designs groove structure at the interior ring of probe support 1.
In another embodiment of the utility model, described prober frame device also comprises driver module, and described driver module drives probe module and is moved along each limit of probe support.
Optionally, driver module is realized by the mode of servo driving, Fig. 3 is a kind of servo driving principle schematic of the utility model embodiment, be specially: the frequency of the pulse by outside (control device) input is determined the size of servomotor velocity of rotation, determine the angle of rotation by the number of pulse, servomotor drives gear train and realizes the purpose of control position.The rotor of servomotor inside is permanent magnet, the U/V/W three-phase electricity of driver control forms electromagnetic field, rotor rotates under the effect in this magnetic field, the encoder feedback signal that the while motor carries is to driver, driver compares according to value of feedback and desired value, adjust the angle that rotor rotates, finally reach the accurate purpose in control probe module position.
Need to prove, when the prober frame device does not arrange driver module, generally moved along each limit of probe support by the manual control probe module.
In another embodiment of the utility model, after described prober frame device also is included in probe module and moves to predeterminated position, described probe module is fixed on stuck-module on the probe support.For example, stuck-module can adopt set screw.
In another embodiment of the utility model, described prober frame device also comprises for the lead-in wire that each probe module is connected to signal source.
Figure 4 shows that the structural representation of Fig. 2 middle probe module 2, as shown in Figure 4, described probe module 2 comprises at least: probe 3, set screw 4 and go between 5.
The probe that the utility model will need to change separates with holder part, and probe is carried out modularization form probe module, when needs test different product, only need to adjust the position of probe module or change cheap probe module part, and expensive holder part can be reused.Thereby solve prober frame and damage the great number maintenance cost that causes, and test products is when updating, because the not general problem that abandons waste that causes of prober frame, thereby cost greatly reduced.
The above is preferred embodiment of the present utility model only, is not be used to limiting protection domain of the present utility model.

Claims (10)

1. a prober frame device is characterized in that, described prober frame device comprises: probe support and at least one probe module that can move along each limit of described probe support.
2. prober frame device according to claim 1 is characterized in that, described prober frame device also comprises the driver module that the driving probe module is moved along each limit of probe support.
3. prober frame device according to claim 2 is characterized in that, described driver module is realized by the mode of servo driving.
4. arbitrary described prober frame device is characterized in that according to claim 1-3, after described prober frame device also is included in probe module and moves to predeterminated position, described probe module is fixed on stuck-module on the probe support.
5. prober frame device according to claim 4 is characterized in that, described stuck-module is set screw.
6. arbitrary described prober frame device is characterized in that according to claim 1-3, and described prober frame device also comprises for the lead-in wire that each probe module is connected to signal source.
7. prober frame device according to claim 4 is characterized in that, described prober frame device also comprises for the lead-in wire that each probe module is connected to signal source.
8. arbitrary described prober frame device is characterized in that according to claim 1-3, and ring and/or outer shroud are groove structure in the described probe support.
9. prober frame device according to claim 4 is characterized in that, ring and/or outer shroud are groove structure in the described probe support.
10. prober frame device according to claim 6 is characterized in that, ring and/or outer shroud are groove structure in the described probe support.
CN 201220446351 2012-09-03 2012-09-03 Probe frame device Expired - Fee Related CN202837350U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 201220446351 CN202837350U (en) 2012-09-03 2012-09-03 Probe frame device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 201220446351 CN202837350U (en) 2012-09-03 2012-09-03 Probe frame device

Publications (1)

Publication Number Publication Date
CN202837350U true CN202837350U (en) 2013-03-27

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104297659A (en) * 2014-10-28 2015-01-21 北京思比科微电子技术股份有限公司 Pattern CP device for CMOS image sensor products

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104297659A (en) * 2014-10-28 2015-01-21 北京思比科微电子技术股份有限公司 Pattern CP device for CMOS image sensor products
CN104297659B (en) * 2014-10-28 2017-08-08 北京思比科微电子技术股份有限公司 The band pattern CP test devices of CMOS image sensor product

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C14 Grant of patent or utility model
GR01 Patent grant
ASS Succession or assignment of patent right

Owner name: BEIJING BOE PHOTOELECTRICITY SCIENCE + TECHNOLOGY

Effective date: 20150630

Owner name: JINGDONGFANG SCIENCE AND TECHNOLOGY GROUP CO., LTD

Free format text: FORMER OWNER: BEIJING BOE PHOTOELECTRICITY SCIENCE + TECHNOLOGY CO., LTD.

Effective date: 20150630

C41 Transfer of patent application or patent right or utility model
TR01 Transfer of patent right

Effective date of registration: 20150630

Address after: 100015 Jiuxianqiao Road, Beijing, No. 10, No.

Patentee after: BOE Technology Group Co., Ltd.

Patentee after: Beijing BOE Photoelectricity Science & Technology Co., Ltd.

Address before: 100176 Beijing city in Western Daxing District economic and Technological Development Zone, Road No. 8

Patentee before: Beijing BOE Photoelectricity Science & Technology Co., Ltd.

CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20130327

Termination date: 20200903