CN202836870U - Compound vacuum gauge - Google Patents
Compound vacuum gauge Download PDFInfo
- Publication number
- CN202836870U CN202836870U CN 201220558987 CN201220558987U CN202836870U CN 202836870 U CN202836870 U CN 202836870U CN 201220558987 CN201220558987 CN 201220558987 CN 201220558987 U CN201220558987 U CN 201220558987U CN 202836870 U CN202836870 U CN 202836870U
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- Prior art keywords
- gauge
- vacuum
- chip microcomputer
- amplifier
- ionization
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Abstract
The utility model relates to the field of vacuum degree detection and provides a compound vacuum gauge used for detecting vacuum containers and directly displaying vacuum values by taking (Pa) as a unit. The vacuum gauge comprises a measuring portion, a multi-way gating switch, an A/D (analog to digital) converter and a single chip microcomputer which are sequentially connected, the single chip microcomputer is connected with a display and keyboard communication interfaces, and the vacuum gauge further comprises a power system supplying power to a whole system. The measuring portion comprises a thermocouple gauge, an electric potential amplifier, an ionization gauge and an ion current amplifier, wherein the thermocouple gauge is connected with the electric potential amplifier, the ionization gauge is connected with the ion current amplifier, and the thermoelectric potential amplifier and the ion current amplifier are both connected with the multi-way gating switch. The thermocouple gauge and the ionization gauge are used for measuring pressure in a vacuum chamber and converting the gas pressure to a voltage signal or a current signal, a sampling value is subjected to analog signal amplification and conditioning and then is sent to the single chip microcomputer after A/D conversion, and a corresponding pressure value is obtained via data processing and is directly displayed through a display portion.
Description
Composite evacuated heat meter
Technical field
The utility model relates to the vacuum tightness detection field, and a kind of vacuum tightness for detection of vacuum tank is provided, and directly shows the digital vacuum meter of the vacuum values take (Pa) as unit.
Background technology
At present, the vacuum measuring instrument kind on the home market is more, but because the limitation of various vacuum measurement methods, every kind of vacuum instrumentation all is subjected to it to measure the restriction of upper and lower bound, and measurable vacuum range is narrow.
Summary of the invention
The purpose of this utility model is to provide a kind of compound vacuum gauge.
The utility model is to achieve these goals by the following technical solutions:
A kind of compound vacuum gauge is characterized in that: comprise the measure portion, multi-channel gating switch, A/D converter and the single-chip microcomputer that are linked in sequence, described single-chip microcomputer is connected with display, keyboard communication interface, also is included as the power-supply system of whole system power supply;
Described measure portion comprises the thermocouples gauge tube and potentiometric amplifier, be connected ionization gauge and ion-current amplifier that is connected, and thermoelectrical potential amplifier and ion-current amplifier all are connected with multi-channel gating switch;
Thermocouples gauge tube and ionization gauge are measured the pressure in the vacuum chamber, convert gas pressure intensity to voltage signal (thermocouple rule are measured) or current signal (ionization gauge measurement), sampled value is amplified and conditioning through simulating signal again, send into single-chip microcomputer after the A/D conversion, processing obtains corresponding pressure values and directly shows by the display part through data.
In the such scheme, also comprise the range converting unit, and be used for the steady radiating circuit that sensitivity is controlled to ionization gauge, described range converting unit is connected with single-chip microcomputer, ion-current amplifier and the radiating circuit of being connected.
In the such scheme, described communication interface is the CAN bus interface.
The utlity model has following beneficial effect:
One, the utility model adopts thermocouple rule and ionization gauge dual sensor to detect vacuum tightness, under different pressure, uses the pressure values of measuring vacuum chamber by the collocation of thermocouple rule and ionization gauge, and measurement range can reach
Wherein the measurement range of thermocouple rule is
, and the measurement range of ionization gauge is
Two, the utlity model has automatic range switching.When the pressure in vacuum tank value exists
Measure the linearity that can obtain satisfaction with thermocouple rule in the time of in the scope, and at this moment because ionization gauge reduces at this scope internal linear degree, can not use, instrument can automatically be controlled thermocouple rule and measure; When the pressure in vacuum tank value exists
The linearity of thermocouple rule reduces during scope, can not use, and the ionization gauge measurement could obtain high linearity, and instrument automatically undisturbed ground is advised the ionization gauge that switches to survey sensor by thermocouple; When pressure in vacuum tank by
Change to
The time, instrument again automatically undisturbed ground survey sensor is switched to thermocouple rule by ionization gauge.
Three, the utility model can show with Dual-window respectively the measurement result of thermocouple rule and ionization gauge.
Description of drawings
Fig. 1 is system block diagram of the present utility model.
Embodiment
Below in conjunction with accompanying drawing the utility model is described further:
As shown in Figure 1, the vacuum meter that the utility model provides comprises power unit, measure portion, multi-channel gating switch, A/D converter, single-chip microcomputer, is connected light-emitting diode display and keyboard with single-chip microcomputer.Single-chip microcomputer is selected.Select the MC9S12DGl28 in the MC9S12 series of Freescale company.Measure portion comprises the measurement of thermocouple rule, amplification and ionization gauge is measured, amplification.During work, measure portion is measured the pressure in the vacuum chamber by sensor (thermocouples gauge tube and ionization gauge), convert gas pressure intensity to voltage signal (thermocouple rule are measured) or current signal (ionization gauge measurement), sampled value is amplified and conditioning through simulating signal again, send into single-chip microcomputer after the A/D conversion, processing obtains corresponding pressure values and directly shows by the display part through data.In addition, intelligent vacuum meter has the CAN bus interface, and he can carry out communication by CAN bus and other smart machines.
The utility model adopts thermocouple rule and ionization gauge dual sensor to detect vacuum tightness, under different pressure, uses the pressure values of measuring vacuum chamber by the collocation of thermocouple rule and ionization gauge, and measurement range can reach
Wherein the measurement range of thermocouple rule is
, and the measurement range of ionization gauge is
The utlity model has automatic range switching.When the pressure in vacuum tank value exists
Measure the linearity that can obtain satisfaction with thermocouple rule in the time of in the scope, and at this moment because ionization gauge reduces at this scope internal linear degree, can not use, instrument can automatically be controlled thermocouple rule and measure; When the pressure in vacuum tank value exists
The linearity of thermocouple rule reduces during scope, can not use, and the ionization gauge measurement could obtain high linearity, and instrument automatically undisturbed ground is advised the ionization gauge that switches to survey sensor by thermocouple; When pressure in vacuum tank by
Change to
The time, instrument again automatically undisturbed ground survey sensor is switched to thermocouple rule by ionization gauge.The utility model can show with Dual-window respectively the measurement result of thermocouple rule and ionization gauge.
Claims (3)
1. compound vacuum gauge, it is characterized in that: comprise the measure portion, multi-channel gating switch, A/D converter and the single-chip microcomputer that are linked in sequence, described single-chip microcomputer is connected with display, keyboard communication interface, also is included as the power-supply system of whole system power supply;
Described measure portion comprises the thermocouples gauge tube and potentiometric amplifier, be connected ionization gauge and ion-current amplifier that is connected, and thermoelectrical potential amplifier and ion-current amplifier all are connected with multi-channel gating switch;
Thermocouples gauge tube and ionization gauge are measured the pressure in the vacuum chamber, convert gas pressure intensity to voltage signal or current signal, sampled value is amplified and conditioning through simulating signal again, send into single-chip microcomputer after the A/D conversion, processing obtains corresponding pressure values and directly shows by the display part through data.
2. a kind of compound vacuum gauge according to claim 1, it is characterized in that: also comprise the range converting unit, with be used for the steady radiating circuit that sensitivity is controlled to ionization gauge, described range converting unit is connected with single-chip microcomputer, ion-current amplifier and the radiating circuit of being connected.
3. a kind of compound vacuum gauge according to claim 1, it is characterized in that: described communication interface is the CAN bus interface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220558987 CN202836870U (en) | 2012-10-29 | 2012-10-29 | Compound vacuum gauge |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220558987 CN202836870U (en) | 2012-10-29 | 2012-10-29 | Compound vacuum gauge |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202836870U true CN202836870U (en) | 2013-03-27 |
Family
ID=47948552
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220558987 Expired - Fee Related CN202836870U (en) | 2012-10-29 | 2012-10-29 | Compound vacuum gauge |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202836870U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104614123A (en) * | 2015-03-02 | 2015-05-13 | 镇江博昊科技有限公司 | Dual-display vacuum display meter |
| CN105699007A (en) * | 2016-03-08 | 2016-06-22 | 成都国光电气股份有限公司 | Resistance vacuum transmitter |
| CN108561746A (en) * | 2018-04-24 | 2018-09-21 | 中车长江车辆有限公司 | Vacuum measuring device and cryogenic liquid storing and transporting system |
| CN109425462A (en) * | 2017-08-31 | 2019-03-05 | 苏州润桐专利运营有限公司 | A kind of vacuum sensor system based on remote transmission device |
-
2012
- 2012-10-29 CN CN 201220558987 patent/CN202836870U/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104614123A (en) * | 2015-03-02 | 2015-05-13 | 镇江博昊科技有限公司 | Dual-display vacuum display meter |
| CN104614123B (en) * | 2015-03-02 | 2017-06-16 | 镇江博昊科技有限公司 | A kind of vacuum display table of dual display |
| CN105699007A (en) * | 2016-03-08 | 2016-06-22 | 成都国光电气股份有限公司 | Resistance vacuum transmitter |
| CN105699007B (en) * | 2016-03-08 | 2019-02-12 | 成都国光电气股份有限公司 | A kind of resistance vacuum transmitter |
| CN109425462A (en) * | 2017-08-31 | 2019-03-05 | 苏州润桐专利运营有限公司 | A kind of vacuum sensor system based on remote transmission device |
| CN108561746A (en) * | 2018-04-24 | 2018-09-21 | 中车长江车辆有限公司 | Vacuum measuring device and cryogenic liquid storing and transporting system |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130327 Termination date: 20131029 |