CN205861280U - Wide-range Intelligent Composite vacuometer - Google Patents

Wide-range Intelligent Composite vacuometer Download PDF

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Publication number
CN205861280U
CN205861280U CN201620722184.7U CN201620722184U CN205861280U CN 205861280 U CN205861280 U CN 205861280U CN 201620722184 U CN201620722184 U CN 201620722184U CN 205861280 U CN205861280 U CN 205861280U
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CN
China
Prior art keywords
chip microcomputer
vacuometer
sensor
wide
ionization gauge
Prior art date
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Active
Application number
CN201620722184.7U
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Chinese (zh)
Inventor
宋永宾
王勇安
邱月
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Qingdao Ubu Vacuum Equipment Corp Ltd
Original Assignee
Qingdao Ubu Vacuum Equipment Corp Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
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Priority to CN201620722184.7U priority Critical patent/CN205861280U/en
Application granted granted Critical
Publication of CN205861280U publication Critical patent/CN205861280U/en
Active legal-status Critical Current
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Abstract

The utility model discloses a kind of wide-range Intelligent Composite vacuometer, it includes measurement part, signal selecting switch, A/D converter and the single-chip microcomputer being linked in sequence, described single-chip microcomputer connects display, keyboard and relay output end, also includes the power-supply system powered for whole system;Described measurement part includes that the thermocouple being connected advises ionization gauge sensor and the ion-current amplifier that sensor with thermoelectrical potential amplifier, is connected, and thermoelectrical potential amplifier and ion-current amplifier are all connected with signal selecting switch.Use thermocouple rule sensor and ionization gauge sensor detection vacuum, under different pressure, used the pressure values measuring vacuum chamber by the collocation of thermocouple rule and ionization gauge, measure broad quantum, and range can automatically switch.

Description

Wide-range Intelligent Composite vacuometer
Technical field
This utility model belongs to vacuometer field, is specifically related to a kind of wide-range Intelligent Composite vacuometer.
Background technology
At present, the vacuum measuring instrument kind on domestic market is more, but due to the limitation of various vacuum measurement method, Every kind of vacuum instrumentation is all measured upper and lower bound by it and is limited, and measurable vacuum range is narrow.The most also occur in that more first The Intelligent Composite vacuometer entered, will two or more measuring method combine extend measurement scope and realize two Plant the automatic switchover of measuring method, but use 8 chip microcontroller be automatically adjusted and control more, use serial port and external equipment Communication.Along with single-chip microcomputer and the development of network technology, 16, the application in embedded systems of 32 single-chip microcomputers is in increasing rapidly Trend, but the overall performance of vacuometer needs to be improved further.
Summary of the invention
For the drawbacks described above overcoming prior art to exist, the purpose of this utility model is, it is provided that a kind of wide amount Journey Intelligent Composite vacuometer, improves the overall performance of compound vacuum gauge.
The wide-range Intelligent Composite vacuometer that this utility model provides, it includes measurement part, the signal choosing being linked in sequence Selecting switch, A/D converter and single-chip microcomputer, described single-chip microcomputer connects display, keyboard and relay output end, also includes for whole The power-supply system of individual system power supply;The thermocouple rule sensor that described measurement part includes being connected and thermoelectrical potential amplifier, it is connected The ionization gauge sensor connect and ion-current amplifier, thermoelectrical potential amplifier and ion-current amplifier are all with signal selecting switch even Connect;Pressure in vacuum chamber is measured by thermocouple rule sensor and ionization gauge sensor, and gas pressure intensity is converted into voltage letter Number or current signal, sampled value again through analogue signal amplify and conditioning, through A/D change after send into single-chip microcomputer, at data Reason obtains corresponding pressure values and directly displays out by display.
Further, it also includes amplification converting unit and for being controlled ionization gauge transducer sensitivity Radiating circuit, described amplification converting unit is connected with ion-current amplifier and radiating circuit.
Further, described single-chip microcomputer is STM32.
The wide-range Intelligent Composite vacuometer that this utility model provides, it has the beneficial effects that, uses thermocouple rule sensor Detect vacuum with ionization gauge sensor, under different pressure, used by the collocation of thermocouple rule and ionization gauge and measure vacuum The pressure values of room, measures broad quantum, and range can automatically switch.
Accompanying drawing explanation
Fig. 1 is the functional-block diagram of one embodiment of this utility model.
Detailed description of the invention
With reference to the accompanying drawings, in conjunction with an embodiment, the wide-range Intelligent Composite vacuometer providing this utility model enters Row detailed description.
Embodiment
With reference to Fig. 1, the wide-range Intelligent Composite vacuometer of the present embodiment, it includes measurement part, the signal being linked in sequence Selecting switch, A/D converter and single-chip microcomputer, described single-chip microcomputer connects display, keyboard and relay output end, also include for Power-supply system, amplification converting unit and the radiating circuit that whole system is powered;Described measurement part includes the heat being connected Ionization gauge sensor that even rule sensor with thermoelectrical potential amplifier, is connected and ion-current amplifier, thermoelectrical potential amplifier and from Subflow amplifier is all connected with signal selecting switch;Described amplification converting unit connects with ion-current amplifier and radiating circuit Connect.Pressure in vacuum chamber is measured by thermocouple rule sensor and ionization gauge sensor, and gas pressure intensity is converted into voltage letter Number or current signal, sampled value again through analogue signal amplify and conditioning, through A/D change after send into single-chip microcomputer, at data Reason obtains corresponding pressure values and directly displays out by display, and described single-chip microcomputer is STM32.
Last it is noted that above example is only in order to illustrate the technical solution of the utility model, it is not intended to limit; Although being described in detail this utility model with reference to previous embodiment, those skilled in the art is it is understood that it depends on So the technical scheme described in foregoing embodiments can be modified, or wherein portion of techniques feature is carried out equivalent replace Change;And these amendments or replacement, do not make the essence of appropriate technical solution depart from this utility model embodiment technical scheme Spirit and scope.

Claims (3)

1. a wide-range Intelligent Composite vacuometer, it is characterised in that: include that the measurement part being linked in sequence, signal behavior are opened Pass, A/D converter and single-chip microcomputer, described single-chip microcomputer connects display, keyboard and relay output end, also includes for whole system The power-supply system of system power supply;The thermocouple rule sensor that described measurement part includes being connected and thermoelectrical potential amplifier, it is connected Ionization gauge sensor and ion-current amplifier, thermoelectrical potential amplifier and ion-current amplifier are all connected with signal selecting switch;Heat Pressure in vacuum chamber is measured by even rule sensor and ionization gauge sensor, and gas pressure intensity is converted into voltage signal or electricity Stream signal, sampled value is amplified and conditioning through analogue signal again, sends into single-chip microcomputer after A/D changes, and processes through data and obtains Corresponding pressure values also directly displays out by display.
Wide-range Intelligent Composite vacuometer the most according to claim 1, it is characterised in that: also include that amplification conversion is single Unit and for the radiating circuit that is controlled ionization gauge transducer sensitivity, described amplification converting unit is banished with ion Big device and radiating circuit connect.
Wide-range Intelligent Composite vacuometer the most according to claim 1, it is characterised in that: described single-chip microcomputer is STM32.
CN201620722184.7U 2016-07-10 2016-07-10 Wide-range Intelligent Composite vacuometer Active CN205861280U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201620722184.7U CN205861280U (en) 2016-07-10 2016-07-10 Wide-range Intelligent Composite vacuometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201620722184.7U CN205861280U (en) 2016-07-10 2016-07-10 Wide-range Intelligent Composite vacuometer

Publications (1)

Publication Number Publication Date
CN205861280U true CN205861280U (en) 2017-01-04

Family

ID=57647581

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201620722184.7U Active CN205861280U (en) 2016-07-10 2016-07-10 Wide-range Intelligent Composite vacuometer

Country Status (1)

Country Link
CN (1) CN205861280U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110940456A (en) * 2018-12-12 2020-03-31 株式会社爱发科 Pressure measuring system

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110940456A (en) * 2018-12-12 2020-03-31 株式会社爱发科 Pressure measuring system
CN110940456B (en) * 2018-12-12 2021-09-28 株式会社爱发科 Pressure measuring system

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Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
PE01 Entry into force of the registration of the contract for pledge of patent right

Denomination of utility model: Wide -range intelligence complex vacuum meter

Effective date of registration: 20170524

Granted publication date: 20170104

Pledgee: Qingdao high technology financing Company limited by guarantee

Pledgor: QINGDAO UBU VACUUM EQUIPMENT CORP., LTD.

Registration number: 2017370010018

PC01 Cancellation of the registration of the contract for pledge of patent right

Date of cancellation: 20180625

Granted publication date: 20170104

Pledgee: Qingdao high technology financing Company limited by guarantee

Pledgor: QINGDAO UBU VACUUM EQUIPMENT CORP., LTD.

Registration number: 2017370010018

PC01 Cancellation of the registration of the contract for pledge of patent right
PE01 Entry into force of the registration of the contract for pledge of patent right

Denomination of utility model: Wide -range intelligence complex vacuum meter

Effective date of registration: 20181211

Granted publication date: 20170104

Pledgee: Qingdao high technology financing Company limited by guarantee

Pledgor: QINGDAO UBU VACUUM EQUIPMENT CORP., LTD.

Registration number: 2018370010134

PE01 Entry into force of the registration of the contract for pledge of patent right
PC01 Cancellation of the registration of the contract for pledge of patent right

Date of cancellation: 20200206

Granted publication date: 20170104

Pledgee: Qingdao high technology financing Company limited by guarantee

Pledgor: QINGDAO UBU VACUUM EQUIPMENT CORP., LTD.

Registration number: 2018370010134

PC01 Cancellation of the registration of the contract for pledge of patent right