CN202823952U - On-line sulfuric-acid peroxide mixture (SPM) preparation system - Google Patents
On-line sulfuric-acid peroxide mixture (SPM) preparation system Download PDFInfo
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- CN202823952U CN202823952U CN 201220343351 CN201220343351U CN202823952U CN 202823952 U CN202823952 U CN 202823952U CN 201220343351 CN201220343351 CN 201220343351 CN 201220343351 U CN201220343351 U CN 201220343351U CN 202823952 U CN202823952 U CN 202823952U
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Abstract
The utility model discloses an on-line sulfuric-acid peroxide mixture (SPM) preparation system, relates to special methods or devices for manufacturing or processing semiconductors or solid state devices or components of the semiconductors or the solid state devices, and is especially suitable for processing of release agents of photo-induced corrosion-resistant materials in the integrated circuit technology. The on-line SPM preparation system comprises a sulfuric-acid supply unit, a hydrogen-peroxide supply unit, an SPM spray unit and a control unit, wherein the SPM spray unit comprises an SPM mixing component and at least one SPM spray head, the SPM mixing component comprises at least two input ends and an SPM output end, a sulfuric-acid flow control component is connected to a first input end of the SPM mixing component through a sulfuric-acid conveying pipeline, a hydrogen-peroxide flow control component is connected to a second input end of the SPM mixing component through a hydrogen-peroxide conveying pipeline, and the SPM output end of the SPM mixing component is connected to the SPM spray head. According to the on-line SPM preparation system, flow of sulfuric acid and flow of hydrogen peroxide can be controlled through the feedback of flow detection, control precision is high, flow value is stable, the mixing ratio of prepared SPM is accurate, the adjustable range is wide, and therefore the effect that the activity range of the SPM is wide is guaranteed, and the on-line SPM preparation system can meet various cleaning process requirements.
Description
Technical field
The utility model relates to method or the equipment that is specially adapted for making or processing semiconductor or solid state device or its parts, is particularly useful for the processing of the remover of photo-induced corrosion resistant material in the integrated circuit technology.
Background technology
In the electronic product manufacture processes such as semiconductor, integrated circuit, photovoltaic product, need to carry out photoetching treatment to the various substrates take semiconductor wafer and optical mask plate as representative, these substrates comprise that also liquid crystal display, plasma scope with glass substrate, optical disc master, disk, photomagneto disk mother matrix etc., below are referred to as substrate.Need to use photo-induced corrosion resistant material (photoresist) to form layout patterns or other circuit pattern and the data pattern of integrated circuit and semiconductor devices at substrate.Substrate is finished after the processing technologys such as exposure, development, etching, needs to remove the residual photoresist of substrate surface.The mixture of sulfuric acid and hydrogen peroxide is the cleaning liquid that microelectronic industry generally uses.The main application of SPM is the organic residue on the cleaning base plate.The groundwork principle that SPM cleans organic residue be utilize SPM strong oxidizing property with organics dehydration and be oxidized to carbon dioxide and water.Traditional SPM generation system is to place by a certain percentage a container to mix in sulfuric acid and hydrogen peroxide, and mixture is heated to certain temperature, the object that is cleaned is immersed in this mixed liquor and cleans, and the SPM of this kind generation system reuses, and needs periodic replacement.Because hydrogen peroxide decomposes under heating and acid condition easily, so the activity of class SPM generation system has unstability, and because reusing of SPM can cause the cross pollution to cleaning object.In addition, because chemical liquid in the use procedure can dilute gradually, can cause critical dimension loss (critical dimension loss) and increase the substrate immersion time, to be the chemical agent that uses in the cleaning process cause attenuating of lines to the corrosion of (crome metal) lines on the substrate to the reason that causes critical dimension loss.
Another technique is by the photoresist on the rotary spray method removal optical mask plate, this method of removing photoresist can effectively be saved acid consumption with respect to traditional deep slot type immersion type, because liquid is active strong, the rear liquid that removes photoresist is directly drained and is no longer recycled, can not cause cross pollution, the effect of removing photoresist is relatively stable.Chinese invention patent " substrate board treatment and substrate processing method using same " (Chinese invention patent number: ZL200410098053.8 publication number: CN1624871) disclose a kind of substrate board treatment, contained at least two kinds of unit, at least two kinds of unit are carried out the substrate transferring mechanism that substrate is moved into/taken out of.At least two kinds of unit can be selected from following unit: the liquid processing unit; Clean cleaning unit, polymer is removed the unit, all end face processings unit, gas phase treatment unit etc.Liquid processing unit wherein, by sulfuric acid and hydrogenperoxide steam generator are mixed in mixing valve, generation comprises the sulfuric acid hydrogenperoxide steam generator (SPM) of the H2S05 with strong oxidizing force, and as anticorrosive additive stripping liquid controlling, processing substrate is carried out on the surface that is discharged to substrate from moving nozzle.Chinese invention patent application " method of removing photoresist and the device thereof of electron beam adhesive optical mask plate " (application number: 201010156909.8 publication numbers: CN101794089) disclose a kind of device that removes photoresist of electron beam adhesive optical mask plate, around the cell wall of the outer cell body of this device top nozzle has been installed, base plate has the discharge opeing runner; Interior cell body is installed in the outer cell body by bearing support, and the pallet of carriage is arranged in the interior cell body, and pallet is provided with outlet and liquid side outlet and lower nozzle under the liquid that communicates with the liquid runner; The liquid hybrid chamber of bearing communicates with liquid runner on the carriage, and bearing is provided with check valve with two its outlets of independent medicine feeding hole that the liquid hybrid chamber communicates, import is connected with liquor piping.This device lies in optical mask plate on the supporting base of pallet, the concentrated sulfuric acid that is heated to 50～120 ℃ is mixed in the liquid hybrid chamber of bearing with 2～12:1 by volume with hydrogen peroxide, and be injected in the interior cell body, after liquid floods optical mask plate, stopping liquid injecting, optical mask plate was soaked 1～10 minute, remove the photoresist on optical mask plate surface.
The spray mode of the mixed proportion of SPM mixed liquor, activity, temperature and SPM and spray flow etc. have vital impact for quality and the efficient of processing substrate, deal with improperly and can reduce because the corrosion of liquid cause the reflecting rate of critical dimension loss and skin-material ruthenium (Ru), this may be fatal harm for 32nm and above high-end semiconductor technology.Yet above-mentioned patent and patent application do not provide effective technical scheme to the spray mode of mixed proportion, activity, temperature and the SPM of SPM and the control of spray flow.
The utility model content
The purpose of this utility model provides a kind of online SPM generation system that is applicable to the cleaning fluid of semiconductor or solid state device or its parts, solve the SPM mixed liquor that mixed proportion, flow and temperature stabilization can control in real time and adjust and supply with, and realize the technical problem that the mixed proportion of SPM mixed liquor can wide region be regulated.
The utility model solves the problems of the technologies described above the technical scheme that adopts:
A kind of online SPM generation system comprises the H2SO4 feed unit, the H2O2 feed unit, and SPM mixes spray unit and control module, it is characterized in that:
Described H2SO4 feed unit comprises the H2SO4 flow control element, and described H2SO4 flow control element is connected to described SPM by the H2SO4 transfer pipeline and mixes the spray unit;
Described H2O2 feed unit comprises the H2O2 flow control element, and described H2O2 flow control element is connected to described SPM by the H2O2 transfer pipeline and mixes the spray unit;
Described SPM mixes the spray unit and comprises a SPM hybrid element and at least one SPM spray head; Described SPM hybrid element comprises at least two inputs and a SPM output, described H2SO4 flow control element is connected to the first input end of SPM hybrid element by the H2SO4 transfer pipeline, described H2O2 flow control element is connected to the second input of SPM hybrid element by the H2O2 transfer pipeline, and the SPM output of described SPM hybrid element is connected to described SPM spray head;
Described control module comprises the first flow meter, the second flowmeter, A/D converting unit, technological parameter input block, control algorithm unit and isolation drive unit; Described first flow meter is connected in series in the H2SO4 transfer pipeline, and described the second flowmeter is connected in series in the H2O2 transfer pipeline; The flow detection output of described first flow meter and the second flowmeter is connected respectively to an analog input end of A/D converting unit; The digital output end of described A/D converting unit is connected to the input of described control algorithm unit; Computer network is controlled by the outside HMI terminal of the connection of described technological parameter input block or higher level in described control algorithm unit; Described control algorithm unit is by the H2SO4 flow-control output of isolation drive unit, be connected to the input of described H2SO4 flow control element, by the H2O2 flow-control output of isolation drive unit, be connected to the input of described H2O2 flow control element.
A kind of better technical scheme of online SPM generation system of the present utility model is characterized in that described H2SO4 feed unit comprises the first perfluor pump; Described H2SO4 flow control element is connected to form by the first electric pressure-regulating valve and the first air vent valve; The automatically controlled signal input of described the first air vent valve consists of the input of H2SO4 flow control element, is connected to the H2SO4 flow-control output of described isolation drive unit; The air pressure output loop of described the first electric pressure-regulating valve is connected to the pneumatic input circuit of CDA of the first air vent valve; The pressurization output of described the first perfluor pump is connected to the pressure regulation input of the first air vent valve; The pressure regulation output of described the first air vent valve is connected to the H2SO4 transfer pipeline.
A kind of better technical scheme of online SPM generation system of the present utility model is characterized in that described H2SO4 feed unit also comprises H2SO4 reflux cycle subsystem; Described H2SO4 reflux cycle subsystem comprises the H2SO4 tank, the first filter, the first liquid feed valve group and the first liquid valve group; Outside H2SO4 supply line is connected to the normally close valve arrival end of the first liquid feed valve group via the first filter, the export pipeline of H2SO4 tank is connected to the normally open valve arrival end of the first liquid feed valve group, and the port of export of the first liquid feed valve group is connected to the suction side of described the first perfluor pump; The port of export of described the first air vent valve, be connected to the arrival end of the first liquid valve group, the normally open valve port of export of the first liquid valve group, be connected to the entrance pipe of H2SO4 tank, the normally close valve port of export of the first liquid valve group is connected to the first input end of SPM hybrid element by the H2SO4 transfer pipeline.
A kind of better technical scheme of online SPM generation system of the present utility model is characterized in that described H2O2 feed unit comprises the second perfluor pump, and described H2O2 flow control element is connected to form by the second electric pressure-regulating valve and the second air vent valve; The automatically controlled signal input of described the second electric pressure-regulating valve consists of the input of H2O2 flow control element, is connected to the H2O2 flow-control output of described isolation drive unit; The air pressure output loop of described the second electric pressure-regulating valve is connected to the pneumatic input circuit of CDA of the second air vent valve; The pressurization output of described the second perfluor pump is connected to the pressure regulation input of the second air vent valve; The pressure regulation output of described the second air vent valve is connected to the H2O2 transfer pipeline.
A kind of better technical scheme of online SPM generation system of the present utility model is characterized in that described H2O2 feed unit also comprises H2O2 reflux cycle subsystem; Described H2O2 reflux cycle subsystem comprises the H2O2 tank, the second filter, the second liquid feed valve group and the second liquid valve group; Outside H2O2 supply line is connected to the normally close valve arrival end of the second liquid feed valve group, and the export pipeline of H2O2 tank is connected to the normally open valve arrival end of the second liquid feed valve group, and the port of export of the second liquid feed valve group is connected to the suction side of described the second perfluor pump; The port of export of described the second air vent valve, be connected to the arrival end of the second liquid valve group via the second filter, the normally open valve port of export of the second liquid valve group, be connected to the entrance pipe of H2O2 tank, the normally close valve port of export of the second liquid valve group is connected to the second input of SPM hybrid element by the H2O2 transfer pipeline.
A kind of improved technical scheme of online SPM generation system of the present utility model, it is characterized in that described SPM mixes the spray unit and comprises the first switch valve group and second switch valve group, the isolation drive unit of described control module is provided with one group of SPM cock output corresponding with described valve group; Described the first switch valve group and second switch valve group comprise respectively one group of pressurize magnetic valve, release of pressure magnetic valve and pneumatic normally close valve; The pneumatic normally close valve of the first switch valve group is connected in series in the H2SO4 transfer pipeline, and the pneumatic normally close valve of second switch valve group is connected in series in the H2O2 transfer pipeline; The automatically controlled signal input of described pressurize magnetic valve and release of pressure magnetic valve is connected respectively described SPM cock output; The air pressure input of described pressurize magnetic valve is connected to the CDA source of the gas, and the air pressure input of described release of pressure magnetic valve is connected to atmospheric pressure; The pressurize magnetic valve of same valve group and the air pressure output of release of pressure magnetic valve are parallel-connected to the pneumatic control input of the pneumatic normally close valve of corresponding valve group.
A kind of improved technical scheme of online SPM generation system of the present utility model, it is characterized in that the pressurization output of described the first perfluor pump and the second perfluor pump, be connected to the first air vent valve and the second air vent valve by a current stabilization element respectively; Described SPM hybrid element is arranged on the contiguous position that is cleaned object, the SPM output of SPM hybrid element is by short as far as possible pipeline, perhaps not by extra pipeline, closely be connected to described SPM spray head, in order to make the stable SPM mixed liquor of mixing ratio that generates in the described SPM hybrid element, can instantaneously be applied to continuously by described SPM spray head and be cleaned on the object.
A kind of further improved technical scheme of online SPM generation system of the present utility model, it is characterized in that described SPM mixes the spray unit and also comprises the temperature control subsystem, described temperature control subsystem mixes heater and the temperature sensor that sprays in the unit by being arranged on SPM, and the temperature control modules that is equipped with in described control algorithm unit forms jointly; Described heater is connected in the H2SO4 transfer pipeline between the first input end of first flow meter and SPM hybrid element, and described temperature sensor places the export pipeline of SPM hybrid element inside; The thermometric output of described temperature sensor is connected to an analog input end of described A/D converting unit, and described temperature control modules is connected to described heater by the temperature control output of isolation drive unit.
The beneficial effects of the utility model are:
1. the online generation system of SPM of the present utility model is that as required flow and mixed proportion generates the SPM mixed liquor immediately before using, and SPM is instantaneous disposable use, have activity stabilized, without the advantage of cross pollution.
2. the online generation system of SPM of the present utility model is by the flow of flow detection FEEDBACK CONTROL sulfuric acid and hydrogen peroxide, control accuracy is high, flow value is stable, the SPM mixed liquor mixed proportion that generates is accurate, adjustable extent is wide, thereby the field of activity that guarantees the SPM mixed liquor is wide, applicable to various cleaning requirement.
3. online SPM generation system of the present utility model, can adjust in real time according to the technological parameter that the technological parameter input block is set flow, mixing ratio and the temperature of SPM mixed liquor, can be with the activity of the different time sections dynamic adjustments SPM mixed liquor of cleaning, when guaranteeing cleaning speed, reduce the liquid corrosion as far as possible and cause the reflecting rate that flies critical dimension loss and skin-material ruthenium (Ru) to reduce, thereby realize the optimum process condition.
Description of drawings
Fig. 1 is the structural representation of online SPM generation system of the present utility model;
Fig. 2 is the H2SO4 feed unit of online SPM generation system and the structural representation of H2O2 feed unit;
Fig. 3 is the theory diagram of the control module of online SPM generation system.
The label of each parts among the above figure: 100-H2SO4 feed unit, the 200-H2O2 feed unit, 300-SPM mixes the spray unit, the 400-control module, 110-the first perfluor pump, 111-current stabilization element, the 120-H2SO4 flow control element, 121-the first electric pressure-regulating valve, 122-the first air vent valve, 130-H2SO4 tank, 140-the first filter, 150-the first liquid feed valve group, 160-the first liquid valve group, 210-the second perfluor pump, 211-current stabilization element, the 220-H2O2 flow control element, 221-the second electric pressure-regulating valve, 222-the second air vent valve, the 230-H2O2 tank, 240-the second filter, 250-the second feed liquor transfer valve group, 260-the second fluid transfer valve group, the 310-SPM hybrid element, the 311-first input end, 312-the second input, 313-SPM output, the 314-export pipeline, the 320-SPM spray head, 330-the first switch valve group, 331-pressurize magnetic valve, 332-release of pressure magnetic valve, the pneumatic normally close valve of 333-, 340-second switch valve group, 341-pressurize magnetic valve, 342-release of pressure magnetic valve, the pneumatic normally close valve of 343-, 401-first flow meter, 402-the second flowmeter, the 403-temperature sensor, the 410-A/D converting unit, 420-technological parameter input block, 421-HMI terminal or higher level control computer network, 430-control algorithm unit, 440-isolation drive unit, 441-H2SO4 flow-control output, 442-H2O2 flow-control output, 443-temperature control output, 450-temperature control subsystem, 451-temperature control modules, 452-heater.
The specific embodiment
In order to understand better technique scheme of the present utility model, describe in detail further below in conjunction with drawings and Examples.
Online SPM generation system of the present utility model comprises H2SO4 feed unit 100 as depicted in figs. 1 and 2, H2O2 feed unit 200, and SPM mixes spray unit 300 and control module 400, and the theory diagram of control module is referring to Fig. 3.
SPM mixes spray unit 300 and comprises a SPM hybrid element 310 and at least one SPM spray head 320; SPM hybrid element 310 comprises at least two inputs 311,312 and SPM outputs 313, H2SO4 flow control element 120 is connected to the first input end 311 of SPM hybrid element 310 by the H2SO4 transfer pipeline, H2O2 flow control element 220 is connected to the second input 312 of SPM hybrid element 310 by the H2O2 transfer pipeline, and the SPM output 313 of SPM hybrid element 310 is connected to SPM spray head 320;
In the structural representation of the H2SO4 of online SPM generation system shown in Figure 2 feed unit and H2O2 feed unit, H2SO4 feed unit 100 also comprises the first perfluor pump 110; H2SO4 flow control element 120 is connected to form by the first electric pressure-regulating valve 121 and the first air vent valve 122; The automatically controlled signal input of the first electric pressure-regulating valve 121 consists of the input of H2SO4 flow control element 120, is connected to the H2SO4 flow-control output 441 of isolation drive unit 440; The air pressure output loop of the first electric pressure-regulating valve 121 is connected to the pneumatic input circuit of CDA of the first air vent valve 122; The pressurization output of the first perfluor pump 110 is connected to the pressure regulation input of the first air vent valve 122; The pressure regulation output of the first air vent valve 122 is connected to the H2SO4 transfer pipeline.The utility model is by flow and the process set value of the relatively real-time detection of first flow meter, after control module 400 calculates, change automatically controlled signal into pneumatic control signal by H2SO4 flow control element 120, by regulating the pressure of pneumatic compression air (CDA), control the aperture of the first air vent valve 122, thereby regulate the flow of H2SO4.
In the embodiment shown in Figure 2, H2SO4 feed unit 100 also comprises H2SO4 reflux cycle subsystem; Described H2SO4 reflux cycle subsystem comprises H2SO4 tank 130, the first filters, 140, the first liquid feed valve groups 150 and the first liquid valve group 160; Outside H2SO4 supply line is connected to the normally close valve arrival end of the first liquid feed valve group 150 via the first filter 140, the export pipeline of H2SO4 tank 130 is connected to the normally open valve arrival end of the first liquid feed valve group 150, and the port of export of the first liquid feed valve group 150 is connected to the suction side of described the first perfluor pump 110; The port of export of the first air vent valve 122, be connected to the arrival end of the first liquid valve group 160, the normally open valve port of export of the first liquid valve group 160, be connected to the entrance pipe of H2SO4 tank 130, the normally close valve port of export of the first liquid valve group 160 is connected to the first input end 311 of SPM hybrid element 310 by the H2SO4 transfer pipeline.
In the structural representation of the H2SO4 of online SPM generation system shown in Figure 2 feed unit and H2O2 feed unit, H2O2 feed unit 200 also comprises the second perfluor pump 210; H2O2 flow control element 220 is connected to form by the second electric pressure-regulating valve 221 and the second air vent valve 222; The automatically controlled signal input of the second electric pressure-regulating valve 221 consists of the input of H2O2 flow control element 220, is connected to the H2O2 flow-control output 442 of described isolation drive unit 440; The air pressure output loop of the second electric pressure-regulating valve 221 is connected to the pneumatic input circuit of CDA of the second air vent valve 222; The pressurization output of the second perfluor pump 210 is connected to the pressure regulation input of the second air vent valve 222; The pressure regulation output of the second air vent valve 22 is connected to the H2O2 transfer pipeline.The utility model is by flow and the process set value of the relatively real-time detection of the second flowmeter, after control module 400 calculates, change automatically controlled signal into pneumatic control signal by H2O2 flow control element 220, by regulating the pressure of pneumatic compression air (CDA), control the aperture of the second air vent valve 222, thereby regulate the flow of H2O2.
In the embodiment shown in Figure 2, H2O2 feed unit 200 also comprises H2O2 reflux cycle subsystem; Described H2O2 reflux cycle subsystem comprises H2O2 tank 230, the second filters, 240, the second liquid feed valve groups 250 and the second liquid valve group 260; Outside H2O2 supply line is connected to the normally close valve arrival end of the second liquid feed valve group 250, the export pipeline of H2O2 tank 230 is connected to the normally open valve arrival end of the second liquid feed valve group 250, and the port of export of the second liquid feed valve group 250 is connected to the suction side of described the second perfluor pump 210; The port of export of the second air vent valve 222, be connected to the arrival end of the second liquid valve group 260 via the second filter 240, the normally open valve port of export of the second liquid valve group 260, be connected to the entrance pipe of H2O2 tank 230, the normally close valve port of export of the second liquid valve group 260 is connected to the second input 312 of SPM hybrid element 310 by the H2O2 transfer pipeline.
In the embodiment shown in Figure 2, SPM mixes spray unit 300 and comprises the first switch valve group 330 and second switch valve group 340; The isolation drive unit 440 of control module 400 is provided with one group of SPM cock output 443 corresponding with valve group 330 and 340; The first switch valve group 330 is comprised of pressurize magnetic valve 331, release of pressure magnetic valve 332 and pneumatic normally close valve 333; Second switch valve group 340 is comprised of pressurize magnetic valve 341, release of pressure magnetic valve 342 and pneumatic normally close valve 343 respectively; The pneumatic normally close valve 333 of the first switch valve group 330 is connected in series in the H2SO4 transfer pipeline, and the pneumatic normally close valve 343 of second switch valve group 340 is connected in series in the H2O2 transfer pipeline; Described pressurize magnetic valve 331,341 and release of pressure magnetic valve 332,342 automatically controlled signal input is connected respectively SPM cock output 443; Pressurize magnetic valve 331,341 air pressure input are connected to the CDA source of the gas, and release of pressure magnetic valve 332,342 air pressure input are connected to atmospheric pressure; The pressurize magnetic valve 331 of same valve group, 341 and release of pressure magnetic valve 332,342 air pressure output is parallel-connected to the pneumatic normally close valve 333 of corresponding valve group, 343 pneumatic control input.
In described pressurize magnetic valve 331,341 whens energising,, pneumatic normally close valve 333,343 CDA pneumatic circuit are connected the CDA source of the gas, and the pneumatic normally close valve 333,343 that is connected in H2SO4 transfer pipeline and the H2O2 transfer pipeline is opened; After pressurize magnetic valve 331,341 outages, pneumatic normally close valve 333,343 CDA pneumatic circuit disconnect, the gas pressure that is enclosed in pneumatic normally close valve 333,343 the CDA pneumatic circuit remains unchanged, pneumatic normally close valve 333,343 stays open state, thereby keeps flowing into the H2SO4 of described SPM hybrid element 313 and the stability of flow of H2O2; When described release of pressure magnetic valve 332,342 energising, pneumatic normally close valve 333,343 CDA pneumatic circuit are switched to atmospheric pressure, be enclosed in the air release pressure in pneumatic normally close valve 333,343 the CDA pneumatic circuit, pneumatic normally close valve 333,343 cuts out, and cuts off the supply of H2SO4 and H2O2.Overturning or changing the substrate that is cleaned, need the pneumatic normally close valve 333 of Temporarily Closed, 343 to stop the supply of SPM mixed liquor.In this case, by means of described H2SO4 reflux cycle subsystem and H2O2 reflux cycle subsystem, H2SO4 is back to H2SO4 tank 130 by the normally open valve port of export of the first liquid valve group 160, and H2O2 is back to H2O2 tank 230 by the normally open valve port of export of the second liquid valve group 260.In this course, the liquid feed flow of H2SO4 flow control element 120 and H2O2 flow control element 220 remains unchanged, thereby has guaranteed better the flow of SPM mixed liquor and the stability of mixing ratio.
Embodiment according to of the present utility model online SPM generation system illustrated in figures 1 and 2, the pressurization output of the first perfluor pump 110 and the second perfluor pump 210 is connected to the first air vent valve 122 and the second air vent valve 222 by a current stabilization element 111 and 211 respectively; Described SPM hybrid element 310 is arranged on the contiguous position that is cleaned object, the SPM output 313 of SPM hybrid element 310 is by short as far as possible pipeline, perhaps not by extra pipeline, closely be connected to described SPM spray head 320, in order to make the stable SPM mixed liquor of mixing ratio that generates in the described SPM hybrid element, can instantaneously be applied to continuously by SPM spray head 320 and be cleaned on the object.
In the base-plate cleaning field, traditional SPM is that the pump of employing stepper motor driving is realized the mixed proportion to sulfuric acid and hydrogen peroxide, and different actuating speeds can realize different fluid floies, thereby realizes different mixed proportions.Because stepper motor needs pumpback liquid, the SPM that therefore forms in this way is discontinuity.The SPM spray of discontinuity can bring the inhomogeneities that substrate surface SPM distributes when cleaning, thereby has affected the inhomogeneities of the change of properties of substrate surface material.The utility model has been realized stable continuous spray by current stabilization element and switch valve group are set, and can significantly reduce the inhomogeneities that prior art causes.
In the embodiment shown in fig. 1, SPM mixes spray unit 300 and also comprises the temperature control subsystem, described temperature control subsystem mixes heater 425 and the temperature sensor 403 that sprays in the unit 300 by being arranged on SPM, and the temperature control modules 451 that is equipped with in control algorithm unit 430 forms jointly; Heater 452 is connected in the H2SO4 transfer pipeline between the first input end 311 of first flow meter 401 and SPM hybrid element 310, and temperature sensor 403 places the export pipeline 314 of SPM hybrid element 310 inside; The thermometric output of temperature sensor 403 is connected to an analog input end of A/D converting unit 410, and temperature control modules 451 is connected to described heater 452 by the temperature control output 444 of isolation drive unit 440, referring to Fig. 1 and Fig. 3.
The running of online SPM generation system of the present utility model may further comprise the steps:
S11) in H2SO4 transfer pipeline and H2O2 transfer pipeline, flowmeter is set respectively, detects in real time the flow of H2SO4 and H2O2;
S12) by the A/D converting unit H2SO4 and the H2O2 flow of real-time detection are sampled;
S13) read the technological parameter that the technological parameter input block is set;
S14) technological parameter of the H2SO4 that detects in real time and H2O2 flow and setting is compared;
S15) according to comparative result output control signal, adjust the pressure regulator valve aperture of H2SO4 flow control element and H2O2 flow control element, the flow of control H2SO4 and H2O2, the mixed proportion of control SPM mixed liquor.
The running that comprises the online SPM generation system of temperature control subsystem of the present utility model also comprises following steps:
S21) set temperature sensor in described SPM hybrid element detects the temperature of the SPM mixed liquor that the SPM hybrid element generates in real time;
S22) read the SPM desired temperature that the technological parameter input block is set;
S23) by the A/D converting unit SPM mixeding liquid temperature of real-time detection is sampled;
S24) the SPM mixeding liquid temperature that detects in real time and SPM desired temperature are compared;
S25) according to comparative result output control signal, the duty of control heater is adjusted the H2SO4 temperature that enters the SPM hybrid element, thus the temperature of the SPM mixed liquor of control SPM output.
The online SPM generation system of this patent can generate the sulfuric acid of a certain constant flow rate and the hydrogen peroxide of a certain constant flow rate, two kinds of medicaments are in a SPM hybrid element 310 interior mixing near the cleaning object position, and by a SPM shower nozzle spray the rotation in cleaning object on clean, the SPM that this SPM generation system generates is instantaneous disposable use, have activity stabilized, without the advantage of cross pollution.Flowmeter in the liquid transfer pipeline detects in real time and the FEEDBACK CONTROL of control algorithm unit by means of being arranged on, guaranteed the precision of flow-control, thereby make the range of flow of constant current sulfuric acid that native system generates and hydrogen peroxide wide, flow value is stable, the SPM that generates is activity stabilized and field of activity is wide, goes for different cleanings.According to the technical solution of the utility model, the I of the flow of H2O2 reaches 0.2ml/ second, and the H2SO4 adjustable extent is second 0.2ml/ second～10ml/, therefore, the ratio adjustable extent of sulfuric acid and hydrogen peroxide can reach 50:1～1:1, far is wider than existing system 10:1～1:1 commonly used on the market.
Take the photomask cleaning as example, the mixed proportion wide ranges of sulfuric acid and hydrogen peroxide has following advantage in the SPM technique:
1. in the cleaning of binary photomask, it is critical dimension loss (criticaldimension loss) that individual important quality index is arranged, and to be the chemical agent that uses in the cleaning process cause diminishing of chromium lines to the corrosion of crome metal lines to the reason that causes critical dimension loss.When technology node is low (45nm and more the technology node of low side), critical dimension loss also is not very large problem, but when technology node is higher when higher (32nm and), critical dimension loss just becomes a large hidden danger of cleaning.General SPM cleans and can cause the chromium lines 0.6nm that diminishes after (5:1,5 parts of sulfuric acid and 1 part of hydrogen peroxide) cleans, and uses the SPM of 20:1 to clean, and diminishing of chromium lines only is 0.15nm.
2. at the EUV(extreme ultraviolet) individual Key Quality Indicator to be arranged in the cleaning of photomask be skin-material Ru(ruthenium) reflecting rate descend, the reason that causes the reflecting rate of ruthenium layer to descend be in the cleaning process chemical agent to the corrosion of ruthenium, the SPM of the 5:1 that common photomask cleaning adopts can produce larger corrosion to ruthenium, and 20:1 or more a high proportion of SPM alleviate greatly to the corrosion of ruthenium.
The utility model is by furtheing investigate traditional SPM technique, optimize SPM technique by the spray mode that changes SPM, the mixed proportion of SPM, the means such as temperature of SPM, realization is to high-end semiconductor technology, for example, 32nm reaches the breakthrough of the photomask cleaning of more high-end technology node.
Those of ordinary skill in the art will be appreciated that; above embodiment illustrates the technical solution of the utility model; and be not to be used as restriction of the present utility model; any variation, modification of the above embodiment being done based on connotation of the present utility model all will drop in the protection domain of claim of the present utility model.
Claims (8)
1. an online SPM generation system comprises the H2SO4 feed unit, the H2O2 feed unit, and SPM mixes spray unit and control module, it is characterized in that:
Described H2SO4 feed unit comprises the H2SO4 flow control element, and described H2SO4 flow control element is connected to described SPM by the H2SO4 transfer pipeline and mixes the spray unit;
Described H2O2 feed unit comprises the H2O2 flow control element, and described H2O2 flow control element is connected to described SPM by the H2O2 transfer pipeline and mixes the spray unit;
Described SPM mixes the spray unit and comprises a SPM hybrid element and at least one SPM spray head; Described SPM hybrid element comprises at least two inputs and a SPM output, described H2SO4 flow control element is connected to the first input end of SPM hybrid element by the H2SO4 transfer pipeline, described H2O2 flow control element is connected to the second input of SPM hybrid element by the H2O2 transfer pipeline, and the SPM output of described SPM hybrid element is connected to described SPM spray head;
Described control module comprises the first flow meter, the second flowmeter, A/D converting unit, technological parameter input block, control algorithm unit and isolation drive unit; Described first flow meter is connected in series in the H2SO4 transfer pipeline, and described the second flowmeter is connected in series in the H2O2 transfer pipeline; The flow detection output of described first flow meter and the second flowmeter is connected respectively to an analog input end of A/D converting unit; The digital output end of described A/D converting unit is connected to the input of described control algorithm unit; Described control algorithm unit is connected to outside HMI terminal by described technological parameter input block or the higher level controls computer network; Described control algorithm unit is by the H2SO4 flow-control output of isolation drive unit, be connected to the input of described H2SO4 flow control element, by the H2O2 flow-control output of isolation drive unit, be connected to the input of described H2O2 flow control element.
2. online SPM generation system according to claim 1 is characterized in that described H2SO4 feed unit also comprises the first perfluor pump; Described H2SO4 flow control element is connected to form by the first electric pressure-regulating valve and the first air vent valve; The automatically controlled signal input of described the first air vent valve consists of the input of H2SO4 flow control element, is connected to the H2SO4 flow-control output of described isolation drive unit; The air pressure output loop of described the first electric pressure-regulating valve is connected to the pneumatic input circuit of CDA of the first air vent valve; The pressurization output of described the first perfluor pump is connected to the pressure regulation input of the first air vent valve; The pressure regulation output of described the first air vent valve is connected to the H2SO4 transfer pipeline.
3. online SPM generation system according to claim 2 is characterized in that described H2SO4 feed unit also comprises H2SO4 reflux cycle subsystem; Described H2SO4 reflux cycle subsystem comprises the H2SO4 tank, the first filter, the first liquid feed valve group and the first liquid valve group; Outside H2SO4 supply line is connected to the normally close valve arrival end of the first liquid feed valve group via the first filter, the export pipeline of H2SO4 tank is connected to the normally open valve arrival end of the first liquid feed valve group, and the port of export of the first liquid feed valve group is connected to the suction side of described the first perfluor pump; The port of export of described the first air vent valve, be connected to the arrival end of the first liquid valve group, the normally open valve port of export of the first liquid valve group, be connected to the entrance pipe of H2SO4 tank, the normally close valve port of export of the first liquid valve group is connected to the first input end of SPM hybrid element by the H2SO4 transfer pipeline.
4. online SPM generation system according to claim 1 is characterized in that described H2O2 feed unit also comprises the second perfluor pump; Described H2O2 flow control element is connected to form by the second electric pressure-regulating valve and the second air vent valve; The automatically controlled signal input of described the second electric pressure-regulating valve consists of the input of H2O2 flow control element, is connected to the H2O2 flow-control output of described isolation drive unit; The air pressure output loop of described the second electric pressure-regulating valve is connected to the pneumatic input circuit of CDA of the second air vent valve; The pressurization output of described the second perfluor pump is connected to the pressure regulation input of the second air vent valve; The pressure regulation output of described the second air vent valve is connected to the H2O2 transfer pipeline.
5. online SPM generation system according to claim 4 is characterized in that described H2O2 feed unit also comprises H2O2 reflux cycle subsystem; Described H2O2 reflux cycle subsystem comprises the H2O2 tank, the second filter, the second liquid feed valve group and the second liquid valve group; Outside H2O2 supply line is connected to the normally close valve arrival end of the second liquid feed valve group, and the export pipeline of H2O2 tank is connected to the normally open valve arrival end of the second liquid feed valve group, and the port of export of the second liquid feed valve group is connected to the suction side of described the second perfluor pump; The port of export of described the second air vent valve, be connected to the arrival end of the second liquid valve group via the second filter, the normally open valve port of export of the second liquid valve group, be connected to the entrance pipe of H2O2 tank, the normally close valve port of export of the second liquid valve group is connected to the second input of SPM hybrid element by the H2O2 transfer pipeline.
6. online SPM generation system according to claim 1, it is characterized in that described SPM mixes the spray unit and comprises the first switch valve group and second switch valve group, the isolation drive unit of described control module is provided with one group of SPM cock output corresponding with described valve group; Described the first switch valve group and second switch valve group comprise respectively one group of pressurize magnetic valve, release of pressure magnetic valve and pneumatic normally close valve; The pneumatic normally close valve of the first switch valve group is connected in series in the H2SO4 transfer pipeline, and the pneumatic normally close valve of second switch valve group is connected in series in the H2O2 transfer pipeline; The automatically controlled signal input of described pressurize magnetic valve and release of pressure magnetic valve is connected respectively described SPM cock output; The air pressure input of described pressurize magnetic valve is connected to the CDA source of the gas, and the air pressure input of described release of pressure magnetic valve is connected to atmospheric pressure; The pressurize magnetic valve of same valve group and the air pressure output of release of pressure magnetic valve are parallel-connected to the pneumatic control input of the pneumatic normally close valve of corresponding valve group.
7. online SPM generation system according to claim 1 is characterized in that the pressurization output of described the first perfluor pump and the second perfluor pump being connected to the first air vent valve and the second air vent valve by a current stabilization element respectively; Described SPM hybrid element is arranged on the contiguous position that is cleaned object, the SPM output of SPM hybrid element is by short as far as possible pipeline, perhaps not by extra pipeline, closely be connected to described SPM spray head, in order to make the stable SPM mixed liquor of mixing ratio that generates in the described SPM hybrid element, can instantaneously be applied to continuously by described SPM spray head and be cleaned on the object.
8. want described online SPM generation system to arbitrary right of 7 according to claim 1, it is characterized in that described SPM mixes the spray unit and also comprises the temperature control subsystem, described temperature control subsystem mixes heater and the temperature sensor that sprays in the unit by being arranged on SPM, and the temperature control modules that is equipped with in described control algorithm unit forms jointly; Described heater is connected in the H2SO4 transfer pipeline between the first input end of first flow meter and SPM hybrid element, and described temperature sensor places the export pipeline of SPM hybrid element inside; The thermometric output of described temperature sensor is connected to an analog input end of described A/D converting unit, and described temperature control modules is connected to described heater by the temperature control output of isolation drive unit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220343351 CN202823952U (en) | 2012-07-16 | 2012-07-16 | On-line sulfuric-acid peroxide mixture (SPM) preparation system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220343351 CN202823952U (en) | 2012-07-16 | 2012-07-16 | On-line sulfuric-acid peroxide mixture (SPM) preparation system |
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| Publication Number | Publication Date |
|---|---|
| CN202823952U true CN202823952U (en) | 2013-03-27 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 201220343351 Expired - Fee Related CN202823952U (en) | 2012-07-16 | 2012-07-16 | On-line sulfuric-acid peroxide mixture (SPM) preparation system |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102755970A (en) * | 2012-07-16 | 2012-10-31 | 常州瑞择微电子科技有限公司 | On-line SPM generating system and control method thereof |
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2012
- 2012-07-16 CN CN 201220343351 patent/CN202823952U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102755970A (en) * | 2012-07-16 | 2012-10-31 | 常州瑞择微电子科技有限公司 | On-line SPM generating system and control method thereof |
| WO2014012294A1 (en) * | 2012-07-16 | 2014-01-23 | 常州瑞择微电子科技有限公司 | System for online spm generation and control method thereof |
| CN102755970B (en) * | 2012-07-16 | 2014-06-18 | 常州瑞择微电子科技有限公司 | On-line SPM generating system and control method thereof |
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