CN202823788U - Coating equipment and coating control system - Google Patents
Coating equipment and coating control system Download PDFInfo
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- CN202823788U CN202823788U CN 201220530159 CN201220530159U CN202823788U CN 202823788 U CN202823788 U CN 202823788U CN 201220530159 CN201220530159 CN 201220530159 CN 201220530159 U CN201220530159 U CN 201220530159U CN 202823788 U CN202823788 U CN 202823788U
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Abstract
The embodiment of the utility model provides coating equipment and a coating control system, and relates to the technical field of liquid crystal display. The thickness uniformity of a coating film is higher as a coating gap can be guaranteed to be relatively uniform in the coating process. The coating equipment comprises a spraying nozzle, a spraying nozzle base for supporting the spraying nozzle, first and second motors connected with the two ends of the spraying nozzle base respectively, and at least two laser sensors arranged at the front end of the spraying nozzle to enable PLCs (Programmable Logic Controllers) connected with the motors to control a first lifting adjustment value for one end of the spraying nozzle base connected with the first motor and a second lifting adjustment value for the other end of the spraying nozzle base connected with the second motor, wherein the first adjustment value is obtained by calculating simulated electric signals measured by one part of the at least two laser sensors and the second adjustment value is obtained by calculating the simulated electric signals measured by another part of the at least two laser sensors.
Description
Technical field
The utility model relates to technical field of liquid crystal display, relates in particular to a kind of coating apparatus and coating control system.
Background technology
In the coating process of liquid crystal display processing procedure, coating clearance (being that nozzle is to the vertical range of substrate) is controlled by servo motor (Servo Motor), namely controls coating clearance by servo motor in nozzle (is called Z axis herein) on the vertical direction of substrate position.At present, servo motor immobilizes in the position of Z axis in coating process.
Before coating, control the height of servo motor by programmable logic controller (PLC) (Programmable LogicController, PLC), take the control coating clearance as default coating clearance; In coating process, by a laser sensor (Laser Sensor), the amplifier controller that links to each other with this laser sensor, magnetic valve type controllable reactor (the Magnetic Control Reactor that links to each other with this amplifier controller, MCR), and monitoring computer obtain actual coating clearance, and send to monitoring computer and show.
Because the nozzle of servo motor control immobilizes in the position of Z axis in the coating process, and in this process, tend to exist the substrate surface out-of-flatness, or the substrate that other reasons causes is placed uneven, or owing to the reasons such as servo motor heating cause from the error of Z axis position etc., cause actual coating clearance to have deviation, and then causing coating film thickness inhomogeneous, impact shows.
The utility model content
Embodiment of the present utility model provides a kind of coating apparatus and coating control system, can guarantee that in coating process coating clearance is more even, thereby make the coating film thickness homogeneity higher.
For achieving the above object, embodiment of the present utility model adopts following technical scheme:
On the one hand, provide a kind of coating apparatus, this coating apparatus comprises: nozzle, carry the nozzle base of described nozzle; Also comprise: the first motor and the second motor; Described the first motor links to each other with the two ends of described nozzle base respectively with described the second motor; At least two laser sensors; Described at least two laser sensors are arranged on described spray nozzle front end, so that an end lifting first adjusted value of the nozzle base that the PLC that links to each other with motor control links to each other with described the first motor, and other end lifting second adjusted value of the nozzle base that links to each other with described the second motor of control; Wherein, described the first adjusted value is calculated by the measured analog electrical signal of a part in described two laser sensors at least, and described the second adjusted value is calculated by the measured analog electrical signal of another part in described two laser sensors at least.
Optionally, described at least two laser sensors are arranged according to certain intervals at described spray nozzle front end.
Optionally, the number of described laser sensor is two; Described two laser sensors lay respectively at the both sides of described nozzle.
Further, the position of described two laser sensors is symmetrical about the middle vertical plane of described nozzle.
Further alternative, described two laser sensors are adjustable with the both sides of the edge distance of described nozzle respectively.
Further, to arrive the edge of the positional distance of the substrate described substrate parallel with being coated with direction be 3mm to the laser detection hot spot of described two laser sensors.
Optionally, be provided with protective cover in described laser sensor outside.
Optionally, described the first motor and described the second motor are servo motor.
On the other hand, provide a kind of coating control system, this coating control system comprises: above-mentioned coating apparatus; The PLC that links to each other with motor in the described coating apparatus; The amplifier controller that links to each other with at least two laser sensors in the described coating apparatus; The MCR that links to each other with described amplifier controller; And the monitoring module that links to each other with described MCR;
Wherein, described amplifier controller is used for receiving the analog electrical signal that described at least two laser sensors send, and after amplifying, is converted to data signal, and is sent to described MCR;
Described MCR is used for the described laser instrument of revisal optical signal is converted into described analog electrical signal, and described amplifier controller is converted into deviation in the digital signal processes with described analog electrical signal; And the data signal of revisal sent to described monitoring module;
Described monitoring module is used for calculating the first adjusted value according to the data signal that is converted to by the measured analog electrical signal of the part of described at least two laser sensors, and calculates the second adjusted value according to the data signal that is converted to by the measured analog electrical signal of another part in described at least two laser sensors;
Described PLC is used for described first adjusted value of an end lifting of the nozzle base that control links to each other with described the first motor, and described second adjusted value of other end lifting of the nozzle base that links to each other with described the second motor of control.
Preferably, described PLC links to each other with described amplifier controller.
The utility model embodiment provides a kind of coating apparatus and coating control system, measure coating clearance by at least two laser sensors of spray nozzle front end setting at described coating apparatus, can be obtained by the value that the part at least two laser sensors is fed back the first adjusted value like this, the value of being fed back by another part obtains the second adjusted value, and control respectively two motors by PLC, so that the two ends of the nozzle base that links to each other with motor difference lifting the first adjusted value and the second adjusted value.Because the adjusted value at the two ends of nozzle base is resulting by the laser sensor that is arranged on the diverse location place, and the two ends of nozzle base can be adjusted according to the first adjusted value, the second adjusted value respectively, so, can make the nozzle after the adjustment more parallel with substrate, thereby make in the coating process coating clearance more even, the coating film thickness homogeneity is higher.
Description of drawings
In order to be illustrated more clearly in the utility model embodiment or technical scheme of the prior art, the below will do to introduce simply to the accompanying drawing of required use in embodiment or the description of the Prior Art, apparently, accompanying drawing in the following describes only is embodiment more of the present utility model, for those of ordinary skills, under the prerequisite of not paying creative work, can also obtain according to these accompanying drawings other accompanying drawing.
The schematic diagram of the coating apparatus with two laser sensors that Fig. 1 provides for the utility model embodiment;
The top view of the coating apparatus with two laser sensors that Fig. 2 provides for the utility model embodiment;
The side view of the coating apparatus with two laser sensors that Fig. 3 provides for the utility model embodiment;
The top view of the coating apparatus with four laser sensors that Fig. 4 provides for the utility model embodiment;
The position view of two laser sensors in the coating apparatus with two laser sensors that Fig. 5 provides for the utility model embodiment;
The parameter schematic diagram that calculating the first (the second) adjusted value that Fig. 6 provides for the utility model embodiment relates to.
Reference numeral:
The 101-nozzle; The 102-nozzle base; 103a-the first motor, 103b-the second motor; The 104-laser sensor, 104a-the first laser sensor, 104b-the second laser sensor, 104c-the 3rd laser sensor, 104d-the 4th laser sensor; 105-PLC; The 106-substrate; The 107-amplifier controller; 108-MCR; The 109-monitoring module; 110-stone price fixing; The 210-protective cover.
The specific embodiment
Below in conjunction with the accompanying drawing among the utility model embodiment, the technical scheme among the utility model embodiment is clearly and completely described, obviously, described embodiment only is the utility model part embodiment, rather than whole embodiment.Based on the embodiment in the utility model, those of ordinary skills are not making the every other embodiment that obtains under the creative work prerequisite, all belong to the scope of the utility model protection.
The utility model embodiment provides a kind of coating apparatus, and with reference to Fig. 1-Fig. 4, this coating apparatus comprises: nozzle 101, carry the nozzle base 102 of described nozzle.
The above-mentioned coating apparatus that provides also comprises: the first motor 103a and the second motor 103b; Described the first motor 103a links to each other with the two ends of described nozzle base 102 respectively with described the second motor 103b.Like this, can adjust respectively by two motors the height at the two ends of nozzle base 102.
In addition, the above-mentioned coating apparatus that provides also comprises: at least two laser sensors 104; Described at least two laser sensors 104 are arranged on described nozzle 101 front ends, so that an end lifting first adjusted value of the nozzle base 102 that the PLC105 that links to each other with motor control links to each other with described the first motor 103a, and other end lifting second adjusted value of the nozzle base 102 that links to each other with described the second motor 103b of control; Wherein, described the first adjusted value is calculated by the measured analog electrical signal of a part in described two laser sensors 104 at least, and described the second adjusted value is calculated by the measured analog electrical signal of another part in described two laser sensors at least.
In the present embodiment, at first, laser sensor 104 is at least two, wherein, Fig. 1-Fig. 3 is to include two laser sensors 104, and namely the first laser sensor 104a and the second laser sensor 104b are example, Fig. 4 is to include four laser sensors 104, namely the first laser sensor 104a, the second laser sensor 104b, the 3rd laser sensor 104c and the 4th laser sensor 104d are example, but the utility model embodiment is not limited to this, can be at least two a plurality of arbitrarily.For Fig. 1-Fig. 4, this coating apparatus is the part except the dotted line frame among the figure.
Secondly, the spray nozzle front end of indication is along relatively being coated with direction of advance and sees that end over against nozzle in the past herein.
Again, described laser sensor is as the criterion with actual placement with respect to the vertical range at the tip of described nozzle, but can not be lower than nozzle tip take substrate as the surface with reference to its Emission Lasers.
In addition, calculated by the measured analog signal of a part in described at least two laser sensors 104 for above-mentioned indication the first adjusted value, herein can be according to the number of the laser sensor of reality, and the set position of laser sensor, calculate the first adjusted value by a part of measured analog electrical signal wherein and the coating clearance that finally obtains, thereby control an end lifting first adjusted value of the nozzle base 102 that links to each other with one of them motor by described PLC105; The coating clearance that is also finally obtained by the measured analog electrical signal of an other part calculates the second adjusted value, thereby controls an end lifting second adjusted value of the nozzle base 102 that links to each other with another motor by described PLC105.
For example: with reference to Fig. 4, if 4 laser sensors (the first laser sensor 104a is arranged, the second laser sensor 104b, the 3rd laser sensor 104c, the 4th laser sensor 104d), these 4 laser sensors are positioned at the both sides of nozzle in twos, namely, the first laser sensor 104a and the 3rd laser sensor 104c are positioned at a side, and the second laser sensor 104b and the 4th laser sensor 104d are positioned at opposite side; For the first adjusted value, the analog electrical signal that can record respectively according to the first laser sensor 104a and the 3rd laser sensor 104c also finally obtains respectively actual coating clearance and obtains, for example these two coating clearance values can be done average method and obtain the first adjusted value, thus an end lifting first adjusted value of the nozzle base 102 that links to each other with the first motor 103a by described PLC105 control.In like manner, for the second adjusted value, the analog electrical signal that can record respectively according to the second laser sensor 104b and the 4th laser sensor 104d also finally obtains the second adjusted value, thereby controls an end lifting second adjusted value of the nozzle base 102 that links to each other with the second motor 103b by described PLC105.
Need to prove herein, owing to two motors link to each other with an end of nozzle base respectively, also namely can be regarded as respectively to link to each other with an end of nozzle; And the coating clearance reality that laser sensor is surveyed is deducted the difference in height of nozzle tip and laser transmitter projects laser surface to the vertical range of upper surface of base plate by the laser transmitter projects laser surface, also namely can be regarded as, the coating clearance that laser sensor records is the vertical range of the nozzle tip place corresponding with laser sensor to upper surface of base plate; The adjusted value that therefore, can obtain with the laser sensor close to an end of nozzle is adjusted this end nozzle.
For example: when a plurality of laser sensor is arranged, can take with the perpendicular bisector of coating direction consistent substrate as the boundary (dotted line among Fig. 4 on the substrate), the first adjusted value can be obtained to the laser sensor in the substrate edges scope by this perpendicular bisector, and controls an end lifting first adjusted value of the nozzle base 102 that links to each other with the motor (for example the first motor 103a) of close this substrate edges; In like manner, the second adjusted value can be obtained to the laser sensor in another edge extent of substrate by this perpendicular bisector one side, and controls other end lifting second adjusted value of the nozzle base 102 that links to each other with the motor (for example the second motor 103b) at close this another edge of substrate.
When this coating apparatus is used for coating process, usually require the coating clearance (being that the tip of nozzle is to the vertical range of applied upper surface of base plate) in coating process identical, but because a variety of causes can cause in coating process coating clearance inconsistent, thereby, just need by constantly adjusting this coating clearance, so that this coating clearance is consistent in coating process.In the present embodiment, measure coating clearance by at least two laser sensors of spray nozzle front end setting at described coating apparatus, can be obtained by the value that the part at least two laser sensors is fed back the first adjusted value like this, the value of being fed back by another part obtains the second adjusted value, and control respectively two motors by PLC, so that the two ends of the nozzle base that links to each other with motor difference lifting the first adjusted value and the second adjusted value.Because the adjusted value at the two ends of nozzle base is resulting by the laser sensor that is arranged on the diverse location place, and the two ends of nozzle base can be adjusted according to the first adjusted value, the second adjusted value respectively, so, can make the nozzle after the adjustment more parallel with substrate, thereby make in the coating process coating clearance more even, make the coating film thickness homogeneity higher.
Optionally, described at least two laser sensors 104 are arranged according to certain intervals at described nozzle 101 front ends.Example, can spaced set, also can arrange according to actual requirement, coating clearance evenly is as the criterion in the coating process making.
Optionally, shown in Figure 3 with reference to figure 2, the number of described laser sensor is two; Described two laser sensors lay respectively at the both sides of described nozzle.
Further, described two laser sensors, namely the position of first sensor 104a and the second sensor 104b is symmetrical about the middle vertical plane of described nozzle 101.
Like this can be so that more parallel consistent at coating process nozzle 101 and substrate 106, thus make coating clearance more even, and then make the coating film thickness homogeneity higher.
Optionally, described two laser sensors, namely first sensor 104a and the second sensor 104b are adjustable with the both sides of the edge distance of described nozzle 101 respectively.
In the utility model embodiment, be arranged at the position that first sensor 104a on the nozzle 101 and the second sensor 104b can adjust its place according to the actual needs.Like this, can be according to different needs with sensor setting at actual needs, and can test local accurately.
Further, to arrive the edge of the positional distance of the substrate described substrate parallel with being coated with direction be 3mm to the laser detection hot spot of described two laser sensors.
When this coating apparatus is used for the color membrane substrates manufacturing process, because the characteristic of laser sensor, can be subject to for example deceiving on the substrate matrix, the impacts such as photoresistance, make the coating clearance that records inaccurate, therefore, with reference to shown in Figure 5, the first laser sensor 104a can be arranged on the position near the nozzle 101 at substrate 106 edges, and make the laser detection hot spot of the first sensor 104a that is positioned at this position arrive the edge 3mm of the positional distance substrate of substrate 106; Also can according to said method arrange for the second laser sensor 104b.Wherein, the edge of the substrate 106 of indication is the border with the parallel described substrate 106 of coating direction.
In addition, in use avoid the pollution of the glue that nozzle spues for fear of laser sensor, with reference to figure 5, also be provided with protective cover 210 in described laser sensor outside.Has the opening (not marking among Fig. 5) that does not affect the laser ejaculation and receive at protective cover 210.
This protective cover can be SUS 304 materials.
Further, described the first motor 103a and described the first motor 103a are servo motor.
When being the first motor, when the second motor was servo motor, by the control of PLC 105, this servo motor can be adjusted accordingly, thereby the two ends that drive the nozzle base that links to each other with servo motor are adjusted respectively.
The utility model embodiment provides a kind of coating control system, and this system comprises: above-mentioned coating apparatus; The PLC105 that links to each other with motor in the described coating apparatus; The amplifier controller 107 that links to each other with at least two laser sensors 104 in the described coating apparatus; The MCR108 that links to each other with described amplifier controller 107; And the monitoring module 109 that links to each other with described MCR108.
Wherein, described amplifier controller 107 is used for receiving the analog electrical signal that described at least two laser sensors 104 send, and after amplifying, is converted to data signal, and is sent to described MCR.
Described MCR108 is used for the revisal laser instrument optical signal is converted into described analog electrical signal, and described amplifier controller is converted into deviation in the digital signal processes with described analog electrical signal; And the data signal of revisal sent to described monitoring module 109.
Described monitoring module 109 is used for calculating the first adjusted value according to the data signal after being changed by the measured analog electrical signal of the part of described at least two laser sensors 104; And calculate the second adjusted value according to the data signal after being changed by the measured analog electrical signal of another part in described at least two laser sensors 104.
Described PLC105 is used for described first adjusted value of an end lifting of the nozzle base 102 that control links to each other with described the first motor 103a, and described second adjusted value of other end lifting of the nozzle base 102 that links to each other with described the second motor 103b of control.
By the coating control system of foregoing description, this coating control system realize principle that coating adjusts can for: described at least two laser sensors 104 that are arranged on described nozzle 101 front ends are used for recording analog electrical signal; And described amplifier controller 107 links to each other with described two laser sensors 104 at least, so that this amplifier controller 107 can be used for receiving the analog signal that described at least two laser sensors 104 send, through amplifying, be converted to data signal, and be sent to the described MCR108 that links to each other with described amplifier controller 107; Described MCR108 is used for the revisal laser instrument optical signal is converted into described analog electrical signal, and described amplifier controller 107 is converted into deviation in the digital signal processes with described analog electrical signal; And the data signal of revisal sent to described monitoring module 109.
Described monitoring module 109, can be used for the data signal that converts to according to the analog electrical signal that recorded by the part in described at least two laser sensors 104, and after described MCR revisal, calculate the first adjusted value, and the data signal that converts to according to the analog electrical signal that is recorded by the another part in described at least two laser sensors 104, and after described MCR revisal, calculate the second adjusted value.
Described PLC105 is used for described first adjusted value of an end lifting of the nozzle base 102 that control links to each other with described the first motor 103a, and described second adjusted value of other end lifting of the nozzle base 102 that links to each other with described the second motor 103b of control.
Further, described monitoring module 109 also can have Presentation Function, and at this moment, this monitoring module 109 can show the first adjusted value and the second adjusted value that calculates.
Example, this monitoring module is monitoring computer, can be by corresponding program, with the value that obtains after the Digital Signal Processing quantizing, i.e. the first above-mentioned adjusted value or the second adjusted value.
Example, with reference to figure 2 or shown in Figure 3, in this coating control system, the number of described laser sensor is two, i.e. the first laser sensor 104a, the second laser sensor 104b.
Described monitoring module 109 calculate the first adjusted value method can for: calculate by formula one, namely formula one is: the first adjusted value=according to the first laser sensor 104a and coating clearance-(the first Z axis coating position-substrate thickness) that finally record; Wherein, with reference to shown in Figure 6, described the first Z axis coating position is: to place stone price fixing (the English name Chuck of substrate 106, its material is marble) 110 upper surfaces are reference, with the tip of the described nozzle 101 of current described the first motor 103a control perpendicular to the height on the upper surface of base plate direction, be designated as 401; Substrate thickness is designated as 402; The described coating clearance that also finally records according to the first laser sensor 104a, be designated as 403, the analog electrical signal of this coating clearance 403 for recording according to described the first laser sensor 104a, amplify and be converted to data signal by amplification controller 107, calculated by monitoring module 109 by the MCR108 revisal afterwards.
In addition, this monitoring module 109 has Presentation Function,, a threshold value thresholding (for example 10 μ m) can be set that is, when the first adjusted value during less than this threshold value thresholding, the end rising of the nozzle base 102 that can link to each other with described the first motor 103a by PLC105 control or reduce the first adjusted value.When the first adjusted value during greater than this threshold value thresholding, but display alarm, and control described the first motor 103a by PLC105 and quit work.Can reduce fraction defective like this, and then reduce cost.
For example: if current the first Z axis coating position is 850 μ m, substrate thickness is 700 μ m, the coating clearance that also finally records according to the first laser sensor 104a is 150 μ m, the result who then calculates through above-mentioned formula one is 150-(850-700)=0, then, the first adjusted value is 0, and an end of the nozzle base 102 that be connected with described the first motor 103a this moment is not adjusted.
If current the first Z axis coating position is 850 μ m, substrate thickness is 700 μ m, the coating clearance that also finally records according to the first laser sensor 104a is 155 μ m, the result who then calculates through above-mentioned formula one is 155-(850-700)=5＜10, then, the first adjusted value is 5 μ m, and the nozzle base 102 that this moment, described PLC105 control was connected with described the first motor 103a reduces by the height of 5 μ m, thereby makes the nozzle tip at this end place apart from the height of substrate 106 reductions by 5 μ m; In like manner, if the coating clearance that the first laser sensor 104a records is 145 μ m, then, the first adjusted value is-5 μ m, this moment the nozzle base 102 that described PLC105 control is connected with described the first motor 103a the raise height of 5 μ m of an end.
If current the first Z axis coating position is 850 μ m, substrate thickness is 700 μ m, the coating clearance that also finally records according to the first laser sensor 104a is 162 μ m, the result who then calculates through above-mentioned formula one is 162-(850-700)=12＞10, then, this moment, the described monitoring module 109 with Presentation Function can be shown as alarm, thereby so that PLC105 controls described the first motor 103a, the second motor 103b quits work.
In like manner, the computational methods of the second adjusted value are consistent with the computational methods of the first adjusted value, repeat no more herein.
Example, with reference to shown in Figure 4, in this coating control system, the number of described laser sensor is four, that is, and the first laser sensor 104a, the second laser sensor 104b, the 3rd laser sensor 104c, the 4th laser sensor 104d; And the first laser sensor 104a, the 3rd laser sensor 104c is positioned at a side of nozzle 101; The second laser sensor 104b, the 4th laser sensor 104d is positioned at the opposite side of described nozzle 101.
In this example, the analog electrical signal that described monitoring module 109 is recorded according to the first laser sensor 104a, and finally obtain coating clearance and be called coating clearance 1; The analog electrical signal that described monitoring module 109 is recorded according to the 3rd laser sensor 104c, and finally obtain coating clearance and be called coating clearance 2; The analog electrical signal that described monitoring module 109 is recorded according to the second laser sensor 104b, and finally obtain coating clearance and be called coating clearance 3; The analog electrical signal that described monitoring module 109 is recorded according to the 4th laser sensor 104d, and finally obtain coating clearance and be called coating clearance 4.
Described monitoring module 109 calculate the first adjusted value method can for: calculate by formula two, namely formula two is: the first adjusted value=(coating clearance 1+ coating clearance 2)/2-(the first Z axis coating position-substrate thickness).
For example: if current the first Z axis coating position is 850 μ m, substrate thickness is 700 μ m, coating clearance 1 is 145 μ m, coating clearance 2 is 155 μ m, the result who then calculates through above-mentioned formula two is (145+155)/2-(850-700)=0, then, the first adjusted value is 0, and this moment, one end of the nozzle base 102 that described PLC 105 controls are connected with described the first motor 103a did not adjust.
If current the first Z axis coating position is 850 μ m, substrate thickness is 700 μ m, coating clearance 1 is 150 μ m, coating clearance 2 is 160 μ m, the result who then calculates through above-mentioned formula two is (150+160)/2-(850-700)=5＜10, and then, the first adjusted value is 5 μ m, this moment, one end of the nozzle base 102 that described PLC 105 controls are connected with described the first motor 103a reduced by the height of 5 μ m, thereby made the nozzle tip at this end place apart from the height of substrate 106 reductions by 5 μ m; In like manner, if coating clearance 1 is 150 μ m, coating clearance 2 is 140 μ m, and then, the first adjusted value is-5 μ m, this moment the nozzle base 102 that described PLC105 control is connected with described the first motor 103a the raise height of 5 μ m of an end.
If current the first Z axis coating position is 850 μ m, substrate thickness is 700 μ m, coating clearance 1 is 160 μ m, coating clearance 2 is 164 μ m, the result who then calculates through above-mentioned formula two is (160+164)/2-(850-700)=12＞10, and then, this moment, the described monitoring module 109 with Presentation Function can be shown as alarm, thereby so that PLC105 controls described the first motor 103a, the second motor 103b quits work.
In like manner, the computational methods of the second adjusted value are consistent with the computational methods of the first adjusted value, repeat no more herein.
In addition, in coating process, take the first laser sensor 104a as example, this monitoring module 109 can be coated with each stage alarm according to formula three simultaneously to be judged, formula three is:
| the coating clearance that the analog electrical signal that records according to the first laser sensor 104a also finally obtains-default coating clearance |＞default thresholding, wherein should preset thresholding in the preset value difference of the different phase of coating process, can set according to actual needs.Because it is different to preset coating clearance in the different phase of coating process, therefore, the coating process different phase can the result of calculation of formula three and different default coating clearance are corresponding predetermined threshold value relatively, be which part of this equipment goes wrong thereby can judge, to carry out positioning problems.Wherein, described default coating clearance is default in described monitoring module 109 in advance.
Example, at the coating position of readiness, for example described nozzle 101 most advanced and sophisticated default coating clearance to substrate 106 upper surfaces are 2300 μ m, the coating clearance of the position of readiness that the actual analog electrical signal that records according to described the first laser sensor 104a also finally obtains is 2351 μ m or 2240 μ m, be that the absolute value of formula three result of calculations is during greater than the default thresholding 50 μ m corresponding with this default coating clearance, but monitoring module 109 display alarms at this moment, can judge that described substrate 106 thickness have problem.
In the coating beginning, described nozzle 101 most advanced and sophisticated default coating clearance to substrate 106 upper surfaces are 60 μ m, the coating clearance that the actual analog electrical signal that records according to described the first laser sensor 104a also finally obtains is 72 μ m or 45 μ m, be that the absolute value of formula three result of calculations is during greater than the default thresholding 10 μ m corresponding with this default coating clearance, but monitoring module 109 display alarms, at this moment, described the first laser sensor 104a may touch upper surface of base plate.
In coating process, described nozzle 101 most advanced and sophisticated default coating clearance to substrate 106 upper surfaces are 150 μ m, the coating clearance that the analog electrical signal that records according to described the first laser sensor 104a of reality also finally obtains recording is 85 μ m or 215 μ m, be that the absolute value of formula three result of calculations is during greater than the default thresholding 60 μ m corresponding with this default coating clearance, but monitoring module 109 display alarms, at this moment, may be excessive for the excessive or surperficial laser sensor detection numerical fluctuations that has stain to cause of substrate surface fluctuation fluctuating, or the laser sensor fault.
By the calculating according to above-mentioned formula three at monitoring computer, orientation problem place that can be very fast according to different alarms, and then enhance productivity.
Further, described PLC105 links to each other with described amplifier controller 107.
In the case, this coating control system realizes that the principle that coating is adjusted further comprises: the first adjusted value that described monitoring module 109 will calculate, the second adjusted value sends to described MCR108, send to amplifier controller 107 by described MCR108, by described amplifier controller 107 with this first adjusted value, the second adjusted value sends to described PLC105, described first adjusted value of one end lifting of the nozzle base 102 that described PLC105 control links to each other with described the first motor 103a, and described first adjusted value of other end lifting of the nozzle base 102 that links to each other with described the second motor 103b of control.
In the utility model embodiment, by two cooperations that are positioned at the laser sensor of spray nozzle front end both sides, the amplifier controller that links to each other with at least two laser sensors, the MCR that links to each other with amplifier controller, reach the monitoring module that links to each other with MCR, the first adjusted value and the second adjusted value can be obtained, thereby two ends difference lifting the first adjusted value and second adjusted value of the nozzle base that links to each other with motor can be controlled respectively by PLC.In addition, when PLC links to each other with amplifier controller, can control respectively automatically two ends difference lifting the first adjusted value and second adjusted value of the nozzle base that links to each other with motor by PLC.Because the adjusted value at the two ends of nozzle base is resulting by the laser sensor that is arranged on the diverse location place, and the two ends of nozzle base can be adjusted according to the first adjusted value, the second adjusted value respectively, so, can make the nozzle after the adjustment more parallel with substrate, thereby make in the coating process coating clearance more even, make the coating film thickness homogeneity higher.
One of ordinary skill in the art will appreciate that: all or part of step that realizes said method embodiment can be finished by the relevant hardware of programmed instruction, aforesaid program can be stored in the computer read/write memory medium, this program is carried out the step that comprises said method embodiment when carrying out; And aforesaid storage medium comprises: the various media that can be program code stored such as ROM, RAM, magnetic disc or CD.
The above; it only is the specific embodiment of the present utility model; but protection domain of the present utility model is not limited to this; anyly be familiar with those skilled in the art in the technical scope that the utility model discloses; can expect easily changing or replacing, all should be encompassed within the protection domain of the present utility model.Therefore, protection domain of the present utility model should be as the criterion with the protection domain of described claim.
Claims (10)
1. coating apparatus comprises: nozzle, carry the nozzle base of described nozzle, and it is characterized in that, also comprise:
The first motor and the second motor; Described the first motor links to each other with the two ends of described nozzle base respectively with described the second motor;
At least two laser sensors; Described at least two laser sensors are arranged on described spray nozzle front end, so that an end lifting first adjusted value of the nozzle base that the programmable logic controller (PLC) PLC that links to each other with motor control links to each other with described the first motor, and other end lifting second adjusted value of the nozzle base that links to each other with described the second motor of control; Wherein, described the first adjusted value is calculated by the measured analog electrical signal of a part in described two laser sensors at least, and described the second adjusted value is calculated by the measured analog electrical signal of another part in described two laser sensors at least.
2. coating apparatus according to claim 1 is characterized in that, described at least two laser sensors are arranged according to certain intervals at described spray nozzle front end.
3. coating apparatus according to claim 1 is characterized in that, the number of described laser sensor is two; Described two laser sensors lay respectively at the both sides of described nozzle.
4. coating apparatus according to claim 3 is characterized in that, the position of described two laser sensors is symmetrical about the middle vertical plane of described nozzle.
5. coating apparatus according to claim 3 is characterized in that, described two laser sensors are adjustable with the both sides of the edge distance of described nozzle respectively.
6. coating apparatus according to claim 5 is characterized in that, the edge of the described substrate that the positional distance of the laser detection hot spot arrival substrate of described two laser sensors is parallel with the coating direction is 3mm.
7. coating apparatus according to claim 1 is characterized in that, is provided with protective cover in described laser sensor outside.
8. according to claim 1 to 7 each described coating apparatus, it is characterized in that, described the first motor and described the second motor are servo motor.
9. a coating control system is characterized in that, comprising: each described coating apparatus of claim 1-8; The programmable logic controller (PLC) PLC that links to each other with motor in the described coating apparatus; The amplifier controller that links to each other with at least two laser sensors in the described coating apparatus; The magnetic valve type controllable reactor MCR that links to each other with described amplifier controller; And the monitoring module that links to each other with described MCR;
Wherein, described amplifier controller is used for receiving the analog electrical signal that described at least two laser sensors send, and after amplifying, is converted to data signal, and is sent to described MCR;
Described MCR is used for the described laser instrument of revisal optical signal is converted into described analog electrical signal, and described amplifier controller is converted into deviation in the digital signal processes with described analog electrical signal; And the data signal of revisal sent to described monitoring module;
Described monitoring module is used for the data signal that basis is converted by the measured analog electrical signal of the part of described two laser sensors at least, and after described MCR revisal, calculate the first adjusted value, and according to the data signal that is converted to by the measured analog electrical signal of another part in described at least two laser sensors, and after described MCR revisal, calculate the second adjusted value;
Described PLC is used for described first adjusted value of an end lifting of the nozzle base that control links to each other with described the first motor, and described second adjusted value of other end lifting of the nozzle base that links to each other with described the second motor of control.
10. coating control system according to claim 9 is characterized in that, described PLC links to each other with described amplifier controller.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220530159 CN202823788U (en) | 2012-10-16 | 2012-10-16 | Coating equipment and coating control system |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220530159 CN202823788U (en) | 2012-10-16 | 2012-10-16 | Coating equipment and coating control system |
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| CN202823788U true CN202823788U (en) | 2013-03-27 |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103706531A (en) * | 2013-12-23 | 2014-04-09 | 京东方科技集团股份有限公司 | Coating equipment |
| WO2016106798A1 (en) * | 2014-12-29 | 2016-07-07 | 深圳市华星光电技术有限公司 | Photoresist coating apparatus and photoresist coating method |
| CN107214023A (en) * | 2017-05-26 | 2017-09-29 | 张家港康得新光电材料有限公司 | Fluid sealant coating system |
| CN113714056A (en) * | 2021-09-27 | 2021-11-30 | 平显智能装备(深圳)有限责任公司 | Coating process |
| CN117006945A (en) * | 2023-10-08 | 2023-11-07 | 钛玛科（北京）工业科技有限公司 | Photoelectric interference suppression method and system based on photoelectric sensor |
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2012
- 2012-10-16 CN CN 201220530159 patent/CN202823788U/en not_active Expired - Lifetime
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103706531A (en) * | 2013-12-23 | 2014-04-09 | 京东方科技集团股份有限公司 | Coating equipment |
| CN103706531B (en) * | 2013-12-23 | 2016-03-30 | 京东方科技集团股份有限公司 | A kind of coating apparatus |
| WO2016106798A1 (en) * | 2014-12-29 | 2016-07-07 | 深圳市华星光电技术有限公司 | Photoresist coating apparatus and photoresist coating method |
| CN107214023A (en) * | 2017-05-26 | 2017-09-29 | 张家港康得新光电材料有限公司 | Fluid sealant coating system |
| CN107214023B (en) * | 2017-05-26 | 2023-07-21 | 张家港康得新光电材料有限公司 | Sealant coating system |
| CN113714056A (en) * | 2021-09-27 | 2021-11-30 | 平显智能装备(深圳)有限责任公司 | Coating process |
| CN117006945A (en) * | 2023-10-08 | 2023-11-07 | 钛玛科（北京）工业科技有限公司 | Photoelectric interference suppression method and system based on photoelectric sensor |
| CN117006945B (en) * | 2023-10-08 | 2023-12-26 | 钛玛科（北京）工业科技有限公司 | Photoelectric interference suppression method and system based on photoelectric sensor |
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