CN202809000U - Automatic switching device for cameras of single crystal furnace - Google Patents
Automatic switching device for cameras of single crystal furnace Download PDFInfo
- Publication number
- CN202809000U CN202809000U CN 201220413192 CN201220413192U CN202809000U CN 202809000 U CN202809000 U CN 202809000U CN 201220413192 CN201220413192 CN 201220413192 CN 201220413192 U CN201220413192 U CN 201220413192U CN 202809000 U CN202809000 U CN 202809000U
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- slide block
- support
- guide rail
- single crystal
- camera
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Abstract
The utility model discloses an automatic switching device for cameras of a single crystal furnace, comprising a guide rail arranged on the extending part of a bracket of an observation window, and at least two cameras which are provided with lenses with different focal distances and are parallel to the observation window, wherein the guide rail is provided with a slide block capable of performing reciprocating motion; the slide block is connected with the cameras by a fixing bracket; the guide rail is further provided with a transmission mechanism for driving the slide block to perform reciprocating motion; and the transmission mechanism is connected with a controller. The at least two cameras comprising lenses with different optical distances are arranged parallel to the observation window, thus the imaging needs of different technical phases are satisfied; the controller controls the action of the transmission mechanism, and further controls the reciprocating motion of the slide block on the guide rail; and the slide block is connected with the cameras by the fixing bracket, thus, the reciprocating motion of the slide block drives the cameras to selectively perform reciprocating motion, and the cameras with different optical distances can automatically switch and work as needed.
Description
Technical field
The utility model relates to the monocrystal stove technical field, relates in particular to a kind of monocrystal stove camera automatic switching control equipment.
Background technology
Single crystal growing furnace is a kind of in inert gas environment, with the fusing of the polycrystalline materials such as polysilicon, uses the equipment of Grown by CZ Method dislocation-free monocrystalline with graphite heater.Monocrystal stove claims again the silicon single-crystal pullup stove, mainly formed by lifting head, concubine, bell, main chamber, hot spots, speed part, temperature section, the silicon single-crystal pullup stove generally adopts formation method to obtain the diameter feedback signal, offer viewing window at bell, see through viewing window and obtain the crystal bar image by camera, adopt two imaging devices that lens focus is different in order to improve precision, corresponding silicon single-crystal pullup stove need be opened two viewing windows.From technological angle, two cameras are not worked simultaneously, but at different process sections, two cameras switch use.For example, Chinese patent literature CN 202054931U discloses a kind of " camera mounting bracket of silicon single crystal furnace ", it comprises the riser that is arranged on the viewing window, described viewing window is parallel to monocrystal stove cylinder radial slit, on the described riser horizontal plane with the monocrystal stove barrel dliameter to line parallel, and be set side by side with the first camera and second camera on the described riser, the first camera and second camera are placed on the stove cylinder radial slit at horizontal plane, stagger in the position on vertical surface, and can adjust the depression angle separately, during practical set, on the horizontal plane with riser and stove barrel dliameter to line parallel, the first camera and second camera overlap with radial slit, then at the vertical surface modulation camera angle of depression.Technique scheme has effectively solved camera in the actual use procedure and has adjusted the problem that the angle of depression is subject to the viewing window limitation of size.But common monocrystal stove cavity only has a viewing window, and the viewing window diameter is less than normal, can only be for a camera, in order to satisfy the requirement of two kinds of imaging precisions, present existing solution is to use single camera to add Varifocal zoom lens, but has the higher shortcoming of cost; Another kind method is that dual camera adds spectroscope, and it exists, and the technology implementation difficulty is large, difficult to be grasped and unhandy defective.
The utility model content
The purpose of this utility model is to solve the problems of the technologies described above, a kind of single crystal growing furnace camera automatic switching control equipment is provided, it can adapt to the single crystal growing furnace of single viewing window, make the camera of two kinds of different focal in different operation stage automatic switchover work, have simple in structure, be easy to realize and lower-cost advantage.
For reaching this purpose, the utility model by the following technical solutions:
A kind of single crystal growing furnace camera automatic switching control equipment, comprise the guide rail of being located at viewing window support extending part, and at least two with the different focal camera lens and be parallel to the camera that viewing window arranges, reciprocating slide block is set on the described guide rail, described slide block is connected with described camera by fixed support, also be provided on the described guide rail driving the reciprocating transmission rig of slide block, described transmission rig is connected with controller.
Further, described camera has two, and is arranged side by side on the retaining plate parallel with viewing window, and described retaining plate connects described support bracket fastened first end, and described support bracket fastened the second end is connected with described slide block.
Preferably, one side of described guide rail arranges drive-motor, the output shaft connection wire rod of described drive-motor, described support bracket fastened the second end is connected with described screw rod transmission, so that described screw mandrel and described fixed support form the lead screw transmission pair, the control end of described drive-motor is connected with described controller.
Preferably, one side of described guide rail arranges cylinder or hydro-cylinder, and the input terminus of described cylinder or hydro-cylinder is connected with source of the gas or hydraulic power source respectively, the output terminal of described cylinder or hydro-cylinder is connected with described slide block, to drive the to-and-fro movement on guide rail of described slide block, the control end of described cylinder or hydro-cylinder is connected with described controller.
Preferably, described guide rail adopts trench structure, and described slide block bottom slidably embeds in the guide rail of trench structure, and described slide block one side is movably hinged linkage assembly, described connection mechanism connects the output shaft of drive-motor, and the control end of described drive-motor is connected with described controller.
Preferably, described fixed support comprises the first support and the second support that mutually is vertical setting, described fixed support integral body is L-type, described the first support is parallel to described retaining plate, and described the first support is parallel to viewing window radially, described two cameras are fixed in side by side on the described retaining plate, also be provided with linker on the described retaining plate, described the first support is connected with described linker, described the second support is fixedly connected with described slide block, and described the second support is parallel to the axial of viewing window.
Further, described drive-motor adopts stepper-motor or servomotor.
Further, described linkage assembly comprises first connecting rod and the second connecting rod that is hinged, and described first connecting rod and described slide block are hinged, and described second connecting rod is connected with described drive-motor output shaft.
Preferably, described controller adopts programmable logic controller PLC.
Preferably, adopt integral structure or split-type structural between described fixed support and the described slide block.
With respect to prior art, the beneficial effects of the utility model: by being parallel at least two cameras with the different focal camera lens of viewing window setting, satisfied the imaging demand in different process stage; By the action of controller control transmission rig, further control slide block to-and-fro movement on guide rail, by adopting fixed support that slide block is connected with camera, and then the to-and-fro movement of slide block ordered about camera and selectively moved back and forth, and realized the work of automaticallying switch as required of different focal camera.
Description of drawings
Fig. 1 is the structural representation of embodiment one described single crystal growing furnace camera automatic switching control equipment;
Fig. 2 is the scheme of installation of the single crystal growing furnace camera automatic switching control equipment shown in Fig. 1.
Among the figure:
1, viewing window; 2, viewing window support; 21, extending part; 3, guide rail; 4, slide block; 5, motor; 6, screw mandrel; 7, the second support; 71, the second end; 8, the first support; 81, first end; 9, the first camera; 10, second camera; 11, linker.
Embodiment
Further specify the technical solution of the utility model below in conjunction with accompanying drawing and by embodiment.
Embodiment one:
Such as Fig. 1, shown in Figure 2, a kind of single crystal growing furnace camera automatic switching control equipment, comprise the guide rail 3 on the extending part 21 of being located at viewing window support 2, and with the first camera 9 and the second camera 10 of different focal camera lens, slide block 4 is set on the guide rail 3, slide block 4 tops are connected and fixed an end of support, one side of guide rail 3 arranges motor 5, the output shaft of motor 5 is connected with screw mandrel 6, screw mandrel 6 is in transmission connection with support bracket fastened the second end 71, thereby it is secondary to make screw mandrel 6 and fixed support form lead screw transmission, support bracket fastened first end 81 connects a linker 11, linker 11 is fixed on one and is parallel on viewing window 1 retaining plate radially, and the first camera 9 is located on the retaining plate side by side with second camera 10.
The control end of motor 5 is not shown with programmable logic controller PLC() be connected, can realize by the PLC system the automatic control of motor start and stop and rotating; In the present embodiment, motor 5 adopts stepper-motor, the accurate location that can realize camera.
In the present embodiment, fixed support and slide block adopt split-type structural, and both are bolted fastening.More specifically, fixed support comprises the first support 8 and the second support 7 that mutually is vertical setting, fixed support integral body is L-type, the first support 8 is parallel to viewing window 1 radially, the end of the first support 8 (being first end 81) connects linker 11, and extending into position between two cameras, the second support 7 is fixedly connected with slide block 4, and the second support 7 is parallel to the axial of viewing window 1.
Divide the different stepss such as seeding, shouldering, isometrical and ending in the silicon single-crystal pullup production technique.Need use the first camera with long-focus in the seeding stage, when entering shouldering and follow-up phase, need to use the second camera of the short focal length of band.
When silicon single-crystal pullup begins, at first start by PLC control motor 5, driving screw mandrel 6 rotates, and rotation is converted to the traveling priority of fixed support and slide block 4, slide block 4 slides at guide rail 3, by slide block is fixedly connected with fixed support, can make support bracket fastened motion more steady, the fixed support motion drives the camera action, the first camera 9 is adjusted to aims at viewing window 1 central authorities, and then crystal pulling production enters the seeding operation stage; When the seeding operation stage is finished, by 5 counter-rotatings of PLC control motor, the first camera 9 is shifted out viewing window 1 central authorities, second camera 10 is adjusted to aims at viewing window central authorities, crystal pulling enters shouldering and subsequent technique stage.
Embodiment two:
A kind of single crystal growing furnace camera automatic switching control equipment, comprise the guide rail on the extending part of being located at the viewing window support, and with the first camera and the second camera of different focal camera lens, slide block is set on the guide rail, one side of guide rail arranges cylinder, the output terminal of cylinder is connected with slide block, the cylinder input terminus connects source of the gas, a support bracket fastened end is located at slide block top, the support bracket fastened the other end connects a linker, linker is fixed on one and is parallel on the viewing window retaining plate radially, and the first camera and second camera are located on the retaining plate side by side.
The control end of cylinder is connected with programmable logic controller PLC, can realize by the PLC system the automatic control of cylinder action, the accurate location that can realize camera.
In the present embodiment, fixed support and slide block adopt split-type structural, and both are bolted fastening.More specifically, fixed support comprises the first support and the second support that mutually is vertical setting, fixed support integral body is L-type, the first support is parallel to viewing window radially, the end of the first support links to each other with linker, and extending into position between two cameras, the end of the second support is fixedly connected with slide block, and the second support is parallel to the axial of viewing window.
Divide the different stepss such as seeding, shouldering, isometrical and ending in the silicon single-crystal pullup production technique.Need use the first camera with long-focus in the seeding stage, when entering shouldering and follow-up phase, need to use the second camera of the short focal length of band.
When silicon single-crystal pullup begins, at first start by the PLC control cylinder, its piston rod promotes slide block and slides at guide rail, makes the fixed support motion drive the camera action, the first camera is adjusted to aligning viewing window central authorities, and then crystal pulling production enters the seeding operation stage; When the seeding operation stage is finished, by the action of PLC control cylinder, the first camera is pulled out viewing window central authorities, second camera is adjusted to aims at viewing window central authorities, crystal pulling enters shouldering and subsequent technique stage.
Embodiment three:
A kind of single crystal growing furnace camera automatic switching control equipment, comprise the guide rail on the extending part of being located at the viewing window support, and with the first camera and the second camera of different focal camera lens, slide block is set on the guide rail, guide rail adopts oat tail groove structure, the bottom of slide block slidably embeds in the guide rail, a side articulated linkage mechanism of slide block, and linkage assembly is connected with the output shaft of drive-motor; Slide block top arranges fixed support, fixed support comprises the first support and the second support that mutually is vertical setting, the first support is parallel to viewing window radially, the end of the first support links to each other with linker, and extend into position between two cameras, and linker is fixed on one and is parallel on the viewing window retaining plate radially, and the first camera and second camera are located on the retaining plate side by side, the end of the second support is connected with slide block, and the second support is parallel to the axial of viewing window.
Wherein, linkage assembly comprises first connecting rod and the second connecting rod that is hinged, first connecting rod and slide block are hinged, second connecting rod is connected with the drive-motor output shaft, the control end of drive-motor is connected with programmable logic controller PLC, can realize by the PLC system the automatic control of drive-motor action, the accurate location that can realize camera.
In the present embodiment, fixed support and slide block adopt particular manufacturing craft one-body molded, and integral body is L-type after the moulding.
Divide the different stepss such as seeding, shouldering, isometrical and ending in the silicon single-crystal pullup production technique.Need use the first camera with long-focus in the seeding stage, when entering shouldering and follow-up phase, need to use the second camera of the short focal length of band.
When silicon single-crystal pullup begins, at first start by PLC control drive-motor, it promotes slide block by linkage assembly and slides in guide rail, drives cam movement, thereby the first camera is adjusted to aligning viewing window central authorities, and then crystal pulling production enters the seeding operation stage; When the seeding operation stage is finished, by the counter-rotating of PLC control drive-motor, by linkage assembly pulling slide block reverse slide in guide rail, the first camera is pulled out viewing window central authorities, second camera is adjusted to aligning viewing window central authorities, and crystal pulling enters shouldering and subsequent technique stage.
Know-why of the present utility model has below been described in conjunction with specific embodiments.These are described just in order to explain principle of the present utility model, and can not be interpreted as by any way the restriction to the utility model protection domain.Based on explanation herein, those skilled in the art does not need to pay performing creative labour can associate other embodiment of the present utility model, and these modes all will fall within the protection domain of the present utility model.
Claims (10)
1. single crystal growing furnace camera automatic switching control equipment, it is characterized in that, comprise the guide rail of being located at viewing window support extending part, and at least two with the different focal camera lens and be parallel to the camera that viewing window arranges, reciprocating slide block is set on the described guide rail, described slide block is connected with described camera by fixed support, also is provided for driving the reciprocating transmission rig of slide block on the described guide rail, and described transmission rig is connected with controller.
2. single crystal growing furnace camera automatic switching control equipment according to claim 1, it is characterized in that, described camera has two, and be arranged side by side on the retaining plate parallel with viewing window, described retaining plate connects described support bracket fastened first end, and described support bracket fastened the second end is connected with described slide block.
3. single crystal growing furnace camera automatic switching control equipment according to claim 2, it is characterized in that, one side of described guide rail arranges drive-motor, the output shaft connection wire rod of described drive-motor, described support bracket fastened the second end is connected with described screw rod transmission, so that described screw mandrel and described fixed support form the lead screw transmission pair, the control end of described drive-motor is connected with described controller.
4. single crystal growing furnace camera automatic switching control equipment according to claim 2, it is characterized in that, one side of described guide rail arranges cylinder or hydro-cylinder, and the input terminus of described cylinder or hydro-cylinder is connected with source of the gas or hydraulic power source respectively, the output terminal of described cylinder or hydro-cylinder is connected with described slide block, to drive the to-and-fro movement on guide rail of described slide block, the control end of described cylinder or hydro-cylinder is connected with described controller.
5. single crystal growing furnace camera automatic switching control equipment according to claim 2, it is characterized in that, described guide rail adopts trench structure, described slide block bottom slidably embeds in the guide rail of trench structure, described slide block one side is movably hinged linkage assembly, described connection mechanism connects the output shaft of drive-motor, and the control end of described drive-motor is connected with described controller.
6. single crystal growing furnace camera automatic switching control equipment according to claim 2, it is characterized in that, described fixed support comprises the first support and the second support that mutually is vertical setting, described fixed support integral body is L-type, described the first support is parallel to described retaining plate, and described the first support is parallel to viewing window radially, described two cameras are fixed in side by side on the described retaining plate, also be provided with linker on the described retaining plate, described the first support is connected with described linker, described the second support is fixedly connected with described slide block, and described the second support is parallel to the axial of viewing window.
7. according to claim 3 or 5 arbitrary described single crystal growing furnace camera automatic switching control equipments, it is characterized in that described drive-motor adopts stepper-motor or servomotor.
8. single crystal growing furnace camera automatic switching control equipment according to claim 5, it is characterized in that, described linkage assembly comprises first connecting rod and the second connecting rod that is hinged, and described first connecting rod and described slide block are hinged, and described second connecting rod is connected with described drive-motor output shaft.
9. each described single crystal growing furnace camera automatic switching control equipment is characterized in that according to claim 1～6, and described controller adopts programmable logic controller PLC.
10. each described single crystal growing furnace camera automatic switching control equipment is characterized in that according to claim 1～6, adopts integral structure or split-type structural between described fixed support and the described slide block.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220413192 CN202809000U (en) | 2012-08-20 | 2012-08-20 | Automatic switching device for cameras of single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220413192 CN202809000U (en) | 2012-08-20 | 2012-08-20 | Automatic switching device for cameras of single crystal furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202809000U true CN202809000U (en) | 2013-03-20 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220413192 Expired - Fee Related CN202809000U (en) | 2012-08-20 | 2012-08-20 | Automatic switching device for cameras of single crystal furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202809000U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108781257A (en) * | 2016-03-11 | 2018-11-09 | 富士胶片株式会社 | Photographic device |
| CN110004492A (en) * | 2019-04-25 | 2019-07-12 | 苏州新美光纳米科技有限公司 | Monitoring method and long crystal furnace in long crystal furnace |
| CN110260354A (en) * | 2019-07-08 | 2019-09-20 | 长春工程学院 | Grate firing boiler combustion information extraction observation window based on machine vision |
-
2012
- 2012-08-20 CN CN 201220413192 patent/CN202809000U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108781257A (en) * | 2016-03-11 | 2018-11-09 | 富士胶片株式会社 | Photographic device |
| CN108781257B (en) * | 2016-03-11 | 2020-09-11 | 富士胶片株式会社 | Image pickup apparatus |
| CN110004492A (en) * | 2019-04-25 | 2019-07-12 | 苏州新美光纳米科技有限公司 | Monitoring method and long crystal furnace in long crystal furnace |
| CN110260354A (en) * | 2019-07-08 | 2019-09-20 | 长春工程学院 | Grate firing boiler combustion information extraction observation window based on machine vision |
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Legal Events
| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130320 Termination date: 20140820 |
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| EXPY | Termination of patent right or utility model |