CN202793742U - Spectrum measurement device for optical elements - Google Patents
Spectrum measurement device for optical elements Download PDFInfo
- Publication number
- CN202793742U CN202793742U CN 201220423896 CN201220423896U CN202793742U CN 202793742 U CN202793742 U CN 202793742U CN 201220423896 CN201220423896 CN 201220423896 CN 201220423896 U CN201220423896 U CN 201220423896U CN 202793742 U CN202793742 U CN 202793742U
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- substrate
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- angle
- sample wafer
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- Investigating Or Analysing Materials By Optical Means (AREA)
- Spectrometry And Color Measurement (AREA)
Abstract
The utility model discloses a spectrum measurement device for optical elements. The device comprises a base, a light source emitting light is arranged on one side of the base, a grating dispersing the light is arranged along the emitting direction of the light source, an angle frame for holding a substrate to be measured is arranged behind the grating, and a spectrum detector is arranged behind the angle frame which fixes a sample wafer or a substrate to be measured through a fixture. The device calibrates a test baseline of the sample wafer, the substrate to be measured is changed on the basis to be measured, and accordingly, an accurate result can be obtained by multiplying the transmittance of the substrate to be measured with a theoretical value of the sample wafer under the condition that optical paths deflect consistently, wherein the theoretical value is a theoretical transmittance of the sample wafer under angles of angle film layers plated on the substrate to be measured. The fixture of the device is adjustable, and a plurality of kinds of optical elements with angle film layers can be tested.
Description
Technical field
The utility model relates to a kind of optical element spectral measurement device, is specifically related to a kind of optical element spectral measurement device with the angle rete.
Background technology
Along with the fast development of laser technology, laser technology is able to widespread use, and required optical element is also varied, and also more and more higher to the accuracy requirement of optical element spectral transmittance, and this wherein just need to use the optical element with the angle rete.
To the spectral measurement with the optical element of angle rete, traditional method is to behind the baseline of air school, puts into substrate to be measured again and measures, owing to do not consider the deviation problem of light path, causes spectral transmittance inaccurate.
The utility model content
Deficiency for above-mentioned prior art existence, the purpose of this utility model is to provide a kind of optical element spectral measurement device, this device is proofreaied and correct the test baseline by measuring print, measure again substrate to be measured, then the theoretical value that the substrate measurement result be multiply by print namely draws accurate result, and this theoretical value is that print plates the theoretical transmitance under the angle of angle rete at substrate to be measured.
In order to achieve the above object, a kind of optical element spectral measurement device of the utility model, comprise base, described base one side is provided with the light source that emits beam, be provided with the grating of dispersion light along the light source irradiation direction, be provided with the angle frame of placing substrate to be measured at the grating rear, be provided with spectral detector at the angle frame rear, described angle frame is by anchor clamps fixedly print or substrate to be measured.
Further, this device is provided with two described angle frames, and the anchor clamps angle of angle frame is adjustable.
Further, described substrate to be measured is coated with the angle rete by described print and consists of.Substrate to be measured and print condition of equivalent thickness, equal material is preferably the same dish substrate in the same cold working.
A kind of optical element spectral measurement device of the utility model, proofread and correct the test baseline by measuring print, changing on this basis substrate to be measured measures again, can reach the consistent condition of light path deviation, record the theoretical value that multiply by print after the transmitance of substrate and can obtain accurate result, this theoretical value is that print plates the theoretical transmitance under the angle of angle rete at substrate to be measured.The anchor clamps angle of this design factors frame is adjustable, can test multiple optical element with the angle rete.
Description of drawings
Accompanying drawing is topology view of the present utility model;
Among the figure: 1. base, 2. spectral detector, 3. angle frame, 4. print, 5. anchor clamps, 6. grating, 7. light source.
Embodiment
Be to reach technological means and the effect that predetermined goal of the invention is taked for further setting forth the utility model, below in conjunction with accompanying drawing and preferred embodiment, structure of the present utility model, feature and effect be described in detail as follows.
As shown in drawings, the utility model comprises base 1, base 1 one sides are provided with the light source 7 that emits beam, be provided with the grating 6 of dispersion light along light source 7 direction of illuminations, be provided with the angle frame 3 of placing substrate to be measured at grating 6 rears, be provided with spectral detector 2 at angle frame 3 rears, angle frame 3 is by anchor clamps fixedly print 4 or substrate to be measured.
The anchor clamps of angle frame 3 adopt on-deformable sheet metal, and angle is adjustable, adjust according to the angle parameters of film of substrate to be measured.
The material of substrate to be measured and print, consistency of thickness are preferably the same dish substrate in the same cold working, and print is not with the angle rete.
When the utility model uses, at first two angle frames 3 all are fixed with print 4, measure print 4 by spectral detector 2 and proofread and correct the test baseline, secondly wherein outside print 4 takes off, downside print 4 as shown in the drawing, be replaced with substrate to be measured and measure, obtain the substrate transmitance, the theoretical value that multiply by at last print namely draws accurate result.
Computing method are as follows:
This wherein needs to use the transmitance measured value of substrate, print plates the theoretical transmitance under the angle of angle rete at substrate to be measured, need also final calculation result and substrate parameter value are compared to identify whether substrate to be measured is qualified that " parameter value " that the below mentions is the transmitance parameter that this angle rete design will reach.
1) if survey 45 ° of 1064nmT=50%(parameter values of k9 substrate with this device), measurement result is 55%, that actual result should be 55%*0.90568(print theoretical value)=49.8%.
2) if survey 22.5 ° of 1064nmT=20%(parameter values of k9 substrate with this device), measurement result is 21.7%, that actual result should be 21.7%*0.92076(print theoretical value)=19.98%.
3) if survey 30 ° of 1064nmTs=40%(parameter values of k9 substrate with this device), measurement result is 45%, that actual result should be 45%*0.8886(print theoretical value)=39.987%.
Above describedly be construed as the utility model and be not limited to above embodiment just for the utility model is described, meet the various flexible form of the utility model thought all within protection domain of the present utility model.
Claims (3)
1. optical element spectral measurement device, it is characterized in that, comprise base, described base one side is provided with the light source that emits beam, be provided with the grating of dispersion light along the light source irradiation direction, be provided with the angle frame of placing substrate to be measured at the grating rear, be provided with spectral detector at the angle frame rear, described angle frame is by anchor clamps fixedly print or substrate to be measured.
2. measurement mechanism as claimed in claim 1 is characterized in that, this device is provided with two described angle frames, and the anchor clamps angle of angle frame is adjustable.
3. measurement mechanism as claimed in claim 1 is characterized in that, described substrate to be measured is coated with the angle rete by described print and consists of.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220423896 CN202793742U (en) | 2012-08-24 | 2012-08-24 | Spectrum measurement device for optical elements |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220423896 CN202793742U (en) | 2012-08-24 | 2012-08-24 | Spectrum measurement device for optical elements |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202793742U true CN202793742U (en) | 2013-03-13 |
Family
ID=47820986
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220423896 Expired - Fee Related CN202793742U (en) | 2012-08-24 | 2012-08-24 | Spectrum measurement device for optical elements |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202793742U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104111238A (en) * | 2013-04-16 | 2014-10-22 | 烁光特晶科技有限公司 | Optical material transmittance testing system and testing method thereof |
-
2012
- 2012-08-24 CN CN 201220423896 patent/CN202793742U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104111238A (en) * | 2013-04-16 | 2014-10-22 | 烁光特晶科技有限公司 | Optical material transmittance testing system and testing method thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130313 Termination date: 20150824 |
|
| EXPY | Termination of patent right or utility model |