CN105043210A - Object surface coating thickness detection device and process management and control method - Google Patents

Object surface coating thickness detection device and process management and control method Download PDF

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Publication number
CN105043210A
CN105043210A CN201510228609.9A CN201510228609A CN105043210A CN 105043210 A CN105043210 A CN 105043210A CN 201510228609 A CN201510228609 A CN 201510228609A CN 105043210 A CN105043210 A CN 105043210A
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CN
China
Prior art keywords
coating
lateral shaft
testee
dial gauge
thickness
Prior art date
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Pending
Application number
CN201510228609.9A
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Chinese (zh)
Inventor
姚钧
戴志展
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STARPOWER SEMICONDUCTOR LTD.
Original Assignee
JIAXING STARPOWER MICROELECTRONICS CO Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Priority to CN201510228609.9A priority Critical patent/CN105043210A/en
Publication of CN105043210A publication Critical patent/CN105043210A/en
Pending legal-status Critical Current

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  • A Measuring Device Byusing Mechanical Method (AREA)

Abstract

The invention provides an object surface coating thickness detection device and a process management and control method. The detection device mainly comprises a detection bracket provided with an upper end surface. The detection bracket is provided with a lateral shaft capable of moving on the detection bracket. The lateral shaft is provided with an electronic dial gauge capable of conducting the fore-and-aft movement on the lateral shaft. The electronic dial gauge is connected with a computer capable of detecting automatically input data via a data line. The process management and control method comprises the steps of a) before the coat-plating process of a to-be-detected object, placing the to-be-detected object on a fixation place of a marble by a corresponding fixture; b) selecting an origin of coordinates on the surface of the to-be-detected object; c) using the electronic dial gauge to measuring the height of the to-be-detected object at a constant spacing of 1 mm from the inside out and from left to right, and automatically recording the measuring result in the computer; d) taking out the to-be-detected object, conducting the coat-plating process and repeating the above operation once; e) finally, simulating the thickness distribution of a coating on the surface of the to-be-detected object by means of a computer software, and judging whether the detecting result is within the process control range or not.

Description

A kind of pick-up unit of body surface thickness of coating and process management and control method
Technical field
What the present invention relates to is a kind of pick-up unit and process management and control method of body surface thickness of coating, belongs to body surface coating technology field.
Background technology
At present, check coating, plating, thickness of coating that electroless plating is formed and coating uniformity method be mainly divided into two kinds: metallographic method and XRF thickness method.
Metallographic method: metallographic method utilizes metaloscope principle, amplifies coating, to observe accurately and to measure, detects transversal section with metaloscope, to measure the method for local thickness of metal cladding, oxidation film layer.Although the thickness of coating at metallographic method energy Measurement accuracy transversal section place, it is destructive test, cannot reach larger sampling, simultaneously in the ductility of constrained material, except cannot being applicable to various coating material, also has very high requirement to sample preparation.
XRF thickness method: it is based on a branch of strong and narrow heterogeneous X-ray and matrix and tectal interaction that X ray spectrographic technique measures cover thickness.This interacts and produces the secondary radiation of discrete wavelength and energy, and these secondary radiations have formation overlayer and matrix element feature.Certain relation is there is between overlayer mass area ratio and secondary radiation intensity.First this relation is determined by the overlayer calibration standard block correction of known unit area quality.If the density of covering layer material is known, provide again actual density, then film thickness gauge just the basic data of establishing criteria block can provide the cover thickness being measured thing simultaneously.
Although XRF thickness method is easy to operate, can repeat, and can measure multiple thickness of coating, be applicable to measure the thickness of metal compared with flash plating, high precision apparatus needs great number cost.
Summary of the invention
The object of the invention is to the deficiency overcoming prior art existence, and provide a kind of rational in infrastructure, use easy to operate, the pick-up unit of the simple body surface thickness of coating of investigating method and process management and control method, it is except avoiding the input of the equipment cost of great number, also possess certain precision and repetitive operation simultaneously, applied widely, also can not be confined to the characteristic of the coat of metal.
The technical solution adopted in the present invention is: a kind of pick-up unit of body surface thickness of coating, it mainly comprises one with the Bracket for Inspection of upper surface, described Bracket for Inspection is provided with a lateral shaft that can move left and right in Bracket for Inspection upper surface, and be provided with on this lateral shaft one on lateral shaft movable, that accurate coordinate point height in whole plane can be measured electronic dial gauge, described electronic dial gauge is connected with the computer that can detect data and automatically input by data line.
Described Bracket for Inspection is primarily of four plumb posts and two longitudinal carrier compositions, and lateral shaft can move forward and backward on described longitudinal carrier; Described four plumb posts are fixed on marble, and can carry out height control by the testee on marble staggered relatively.
With scale on described lateral shaft, and be loaded with the electronic dial gauge that can move forward and backward on lateral shaft; Described two longitudinal carriers are with scale and be fixed on plumb post, and keep horizontality,
Utilize described pick-up unit to carry out a process management and control method for body surface thickness of coating, this process management and control method comprises the steps:
A) by testee (5) before non-coating, be positioned over the upper fixing position of marble (8) with corresponding fixture;
B) select true origin on testee surface, regulate plumb post (2) highly, lateral shaft (4) is clock gauge (1) position on the upper position of longitudinal carrier (6) and lateral shaft;
C) electronic dial gauge is according to from inside to outside, order from left to right, measures and record testee surface elevation with constant spacing 1mm, and by computer (7) record automatically;
D) take out testee, after completing coating, carry out same operation once; In the same position of testee, after coating survey height and plating before the difference surveyed highly of institute be this position thickness of coating;
E) simulate the distribution of testee overlay coating thickness eventually through computer software, thus judge whether within the scope of process control.
The present invention has rational in infrastructure, uses easy to operate, and investigating method is simple, except avoiding the input of the equipment cost of great number, also possesses certain precision and repetitive operation simultaneously, applied widely, also can not be confined to the features such as the characteristic of the coat of metal.
Accompanying drawing explanation
Fig. 1 is the structure of the detecting device side view of body surface thickness of coating of the present invention.
Fig. 2 is the structure of the detecting device vertical view of body surface thickness of coating of the present invention.
Embodiment
Below in conjunction with accompanying drawing, the present invention is further described.Shown in Fig. 1,2, the pick-up unit of a kind of body surface thickness of coating of the present invention, it mainly comprises one with the Bracket for Inspection of upper surface, described Bracket for Inspection is provided with a lateral shaft 4 that can move left and right in Bracket for Inspection upper surface, and be provided with on this lateral shaft 4 one on lateral shaft 4 movable, that accurate coordinate point height in whole plane can be measured electronic dial gauge 1, described electronic dial gauge 1 is connected with the computer 7 that can detect data and automatically input by data line 3.
Shown in figure, described Bracket for Inspection forms primarily of four plumb posts 2 and two longitudinal carriers 6, and lateral shaft can move forward and backward on described longitudinal carrier; Described four plumb posts 2 are fixed on marble 8, and can carry out height control by the testee 5 on marble 8 staggered relatively.
With scale on lateral shaft 4 of the present invention, and be loaded with the electronic dial gauge that can move forward and backward on lateral shaft; Described two longitudinal carriers 6 are with scale and be fixed on plumb post, and keep horizontality,
Utilize described pick-up unit to carry out a process management and control method for body surface thickness of coating, this process management and control method comprises the steps:
A) by testee 5 before non-coating, to be positioned on marble 8 fixing position with corresponding fixture;
B) select true origin on testee surface, regulate plumb post 2 height, lateral shaft 4 clock gauge 1 position on position and lateral shaft on longitudinal carrier 6;
C) electronic dial gauge is according to from inside to outside, order from left to right, measures and record testee surface elevation with constant spacing 1mm, and by computer 7 record automatically;
D) take out testee, after completing coating, carry out same operation once; In the same position of testee, after coating survey height and plating before the difference surveyed highly of institute be this position thickness of coating;
E) simulate the distribution of testee overlay coating thickness eventually through computer software, thus judge whether within the scope of process control.
Below by reference to the accompanying drawings the specific embodiment of the present invention is described; but these explanations can not be understood to limit scope of the present invention; protection scope of the present invention is limited by the claims of enclosing, and anyly goes the change on claim basis to be all protection scope of the present invention in the present invention.

Claims (4)

1. the pick-up unit of a body surface thickness of coating, it mainly comprises one with the Bracket for Inspection of upper surface, it is characterized in that described Bracket for Inspection being provided with a lateral shaft that can move left and right in Bracket for Inspection upper surface, and be provided with on this lateral shaft one on lateral shaft movable, that accurate coordinate point height in whole plane can be measured electronic dial gauge (1), described electronic dial gauge (1) is connected with the computer (7) that can detect data and automatically input by data line (3).
2. the pick-up unit of body surface thickness of coating according to claim 1, it is characterized in that described Bracket for Inspection is primarily of four plumb posts (2) and two longitudinal carrier (6) compositions, lateral shaft can move forward and backward on described longitudinal carrier; Described four plumb posts (2) are fixed on marble (8), and can carry out height control by the testee (5) on marble (8) staggered relatively.
3. the pick-up unit of body surface thickness of coating according to claim 2, is characterized in that with scale on described lateral shaft (4), and is loaded with the electronic dial gauge that can move forward and backward on lateral shaft; Described two longitudinal carriers (6) are with scale and be fixed on plumb post, and keep horizontality.
4. utilize claim 1 or the pick-up unit described in 2 or 3 to carry out a process management and control method for body surface thickness of coating, it is characterized in that this process management and control method comprises the steps:
A) by testee (5) before non-coating, be positioned over the upper fixing position of marble (8) with corresponding fixture;
B) select true origin on testee surface, regulate plumb post (2) highly, lateral shaft (4) is clock gauge (1) position on the upper position of longitudinal carrier (6) and lateral shaft;
C) electronic dial gauge is according to from inside to outside, order from left to right, measures and record testee surface elevation with constant spacing 1mm, and by computer (7) record automatically;
D) take out testee, after completing coating, carry out same operation once; In the same position of testee, after coating survey height and plating before the difference surveyed highly of institute be this position thickness of coating;
E) simulate the distribution of testee overlay coating thickness eventually through computer software, thus judge whether within the scope of process control.
CN201510228609.9A 2015-05-07 2015-05-07 Object surface coating thickness detection device and process management and control method Pending CN105043210A (en)

Priority Applications (1)

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CN201510228609.9A CN105043210A (en) 2015-05-07 2015-05-07 Object surface coating thickness detection device and process management and control method

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Application Number Priority Date Filing Date Title
CN201510228609.9A CN105043210A (en) 2015-05-07 2015-05-07 Object surface coating thickness detection device and process management and control method

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CN105043210A true CN105043210A (en) 2015-11-11

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105509608A (en) * 2015-11-27 2016-04-20 沈阳飞机工业(集团)有限公司 Method for accurately measuring thickness of plated layer under production condition
CN109579760A (en) * 2018-11-22 2019-04-05 北京航天计量测试技术研究所 A kind of measurement method of shaped face heat shield molding thickness

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59131113A (en) * 1983-01-17 1984-07-27 Fuji Electric Co Ltd Device for measuring film thickness of photosensitive layer electrophotographic sensitive body
JPS59180322A (en) * 1983-03-30 1984-10-13 Mitsubishi Electric Corp Distribution display method of film thickness
WO2005090909A1 (en) * 2004-03-19 2005-09-29 Tokyo University Of Agriculture And Technology Tlo Co. Ltd. Film thickness measuring equipment and film thickness measuring method
CN2869766Y (en) * 2006-02-10 2007-02-14 上海华阳检测仪器有限公司 Cladding-material thickness measure instrument calibrating device
CN204831111U (en) * 2015-05-07 2015-12-02 嘉兴斯达微电子有限公司 Detection apparatus for object overlay coating thickness

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59131113A (en) * 1983-01-17 1984-07-27 Fuji Electric Co Ltd Device for measuring film thickness of photosensitive layer electrophotographic sensitive body
JPS59180322A (en) * 1983-03-30 1984-10-13 Mitsubishi Electric Corp Distribution display method of film thickness
WO2005090909A1 (en) * 2004-03-19 2005-09-29 Tokyo University Of Agriculture And Technology Tlo Co. Ltd. Film thickness measuring equipment and film thickness measuring method
CN2869766Y (en) * 2006-02-10 2007-02-14 上海华阳检测仪器有限公司 Cladding-material thickness measure instrument calibrating device
CN204831111U (en) * 2015-05-07 2015-12-02 嘉兴斯达微电子有限公司 Detection apparatus for object overlay coating thickness

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
刘振作: "磁性涂镀层测厚仪技术现状与展望", 《中国涂料》 *
钟荣城 等: "铝氧化膜厚度的简易测定法", 《化学世界》 *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105509608A (en) * 2015-11-27 2016-04-20 沈阳飞机工业(集团)有限公司 Method for accurately measuring thickness of plated layer under production condition
CN109579760A (en) * 2018-11-22 2019-04-05 北京航天计量测试技术研究所 A kind of measurement method of shaped face heat shield molding thickness

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C06 Publication
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Effective date of registration: 20171213

Address after: Jiaxing City, Zhejiang province 314006 Nanhu District Branch Road No. 988

Applicant after: STARPOWER SEMICONDUCTOR LTD.

Address before: Jiaxing City, Zhejiang province 314006 Ring Road No. 18 Sidalu

Applicant before: Jiaxing Starpower Microelectronics Co., Ltd.

RJ01 Rejection of invention patent application after publication
RJ01 Rejection of invention patent application after publication

Application publication date: 20151111