CN108195339B - Uncertainty determination method for plate flatness measurement result in field environment - Google Patents

Uncertainty determination method for plate flatness measurement result in field environment Download PDF

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CN108195339B
CN108195339B CN201711211668.0A CN201711211668A CN108195339B CN 108195339 B CN108195339 B CN 108195339B CN 201711211668 A CN201711211668 A CN 201711211668A CN 108195339 B CN108195339 B CN 108195339B
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uncertainty
flat plate
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CN108195339A (en
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项阳
周宇涛
李琳
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AECC Aero Engine Xian Power Control Technology Co Ltd
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AECC Aero Engine Xian Power Control Technology Co Ltd
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/30—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring roughness or irregularity of surfaces

Abstract

The invention relates to a method for determining uncertainty of a plate flatness measurement result in a field environment, which comprises the following steps: determining uncertainty sources, determining the size of a flat plate to be measured, determining the uncertainty of detection equipment, determining the horizontal condition during flat plate detection and calculating the uncertainty caused by the flat plate, determining the uncertainty caused by a measurement method, determining the uncertainty caused by environmental vibration, determining measurement repeatability uncertainty, performing uncertainty synthesis by using an uncertainty basic principle, and obtaining an uncertainty result of flatness detection in the current environment. The invention has the advantage of solving the problem that the flatness detection result accuracy of the flat plate which is large in size, cannot move and the like in a working site is difficult to provide a good detection environment is evaluated. By using the method, the working efficiency of field flat plate detection can be obviously improved, some flat plates which cannot be detected originally can be detected, and the reliability data of a quantized result can be given.

Description

Uncertainty determination method for plate flatness measurement result in field environment
Technical Field
The invention belongs to the technical field of detection, relates to a method for determining uncertainty of a measurement result, and particularly relates to a method for determining uncertainty of a plate flatness measurement result in a field environment.
Background
At present, the flatness detection result of the flat plate is required to be evaluated for the measurement uncertainty in the verification regulation of the flat plate in China, and the value of the uncertainty is used as a part of the measurement result to be reported to a transmitting and detecting party. The uncertainty determination method is provided in the verification procedure and is mainly applied to flat plate detection in a laboratory environment, but in actual work, a part of flat plates with large sizes or difficult to level fully are difficult to obtain reliable uncertainty data by using the uncertainty evaluation method in the verification procedure.
Disclosure of Invention
In order to solve the technical problems in the background art, the invention provides an uncertainty determination method for a plate flatness measurement result in a field environment, which can solve the uncertainty determination problem in the field environment and improve the reliability of the test result.
In order to achieve the purpose, the invention adopts the following technical scheme:
a method for determining uncertainty of a plate flatness measurement result in a field environment is characterized by comprising the following steps: the method comprises the following steps:
1) determining total uncertainty mu for a flat panel flatness measurement in a field environmentC(ii) a source of (a); total uncertainty mu of the flatness measurement of the plate in the field environmentCIncluding the B-type uncertainty component mu of the flatness measurement result of the panel to be measured in the field environmentBAnd the A-type uncertainty component mu of the flatness measurement result of the panel to be measured in the field environmentAIs that; the component mu of the B-type uncertainty of the flatness measurement result of the panel to be measured in the field environmentBThe method comprises the following steps of (1) including an uncertainty component introduced by environmental vibration, an uncertainty component introduced by a horizontal condition, an uncertainty component introduced by a measuring device and an uncertainty component introduced by a measuring method; the A-type uncertainty component mu of the flatness measurement result of the panel to be measured in the field environmentAIs to measure the repeatability uncertainty component;
2) calculating to obtain a B-type uncertainty component mu of a flatness measurement result of the to-be-measured flat plate under the field environment according to an uncertainty component introduced by environmental vibration, an uncertainty component introduced by the horizontal condition, an uncertainty component introduced by the measuring equipment and an uncertainty component introduced by the measuring methodB(ii) a Calculating according to the measurement repeatability uncertainty component to obtain the A-type uncertainty component mu of the flatness measurement result of the panel to be measured in the field environmentA；
3) According to the A-type uncertainty component mu of the flatness measurement result of the panel to be measured in the field environmentAAnd the B-type uncertainty component mu of the flatness measurement result of the panel to be measured in the field environmentBCalculating the total uncertainty mu of the measurement result of the flatness of the flat plate in the synthetic field environmentC。
The specific manner of acquiring the B-type uncertainty component in step 2) is as follows:
Figure BDA0001484710260000021
wherein:
μzis an uncertainty component introduced by environmental vibrations;
μSpis the uncertainty component introduced by the horizontal case;
μSbis the uncertainty component introduced by the measurement device;
μFis an uncertainty component introduced by the measurement method;
μBthe component of the uncertainty of the type B of the flatness measurement result of the flat plate to be measured in the field environment.
The uncertainty component mu introduced by the above-mentioned horizontal caseSpThe specific acquisition mode is as follows:
respectively measuring once in the transverse and longitudinal directions of the reference side by using an electronic level meter in a geometric central area of the flat plate to be measured and four square areas with the four corners of 15cm multiplied by 15cm, respectively carrying out arithmetic averaging on the measurement results according to directions, and taking the value in one direction with a larger numerical value as a placing level influence quantity sz(ii) a The reference edge is the edge of the flat plate to be detected closest to the detector;
the uncertainty component μ introduced by the horizontal case is calculated using the following formulaSp：
Figure BDA0001484710260000031
Wherein:
t is the larger value of the number of sampling points needed along the longitudinal and transverse directions of measurement;
l is the length of the flat plate in the direction;
l is the span of the electronic level meter when testing a single point;
szis the amount of horizontal influence of placement.
The above-mentioned uncertainty component mu introduced by environmental vibrationszThe specific acquisition mode is as follows:
placing an electronic level meter for detecting a flat plate on the flat plate to be detected, selecting one side of the flat plate to be detected, which is closest to a detector, as a reference side, and leveling along the flat plate at the geometric center of the flat plate to be detectedThe horizontal lines are respectively placed for 10 seconds in the direction of the reference edge, and the variation z of the reading of the level meter in the process is readxRepeating the above measurement at the same position in a direction perpendicular to the reference edge to obtain zyTaking zx、zyThe one with the larger median value is taken as the vibration influence quantity zzCalculating the uncertainty component mu introduced by the environmental vibration according to the following formulaz：
Figure BDA0001484710260000032
Wherein:
Zzis the amount of shock impact;
n is the number of measurement points needed to be carried out when the flat plate to be detected is detected;
m is the number of measurement axes, which is determined according to the measurement method; the measuring method is a grazing method or an intercept method; when the measuring method is a grid method, the number of the measuring axes is only calculated for the number of all the transverse and longitudinal axes; when the measuring method is an intercept method, the number of the measuring axes comprises the number of all transverse and longitudinal axes and the number of diagonal axes.
The above-mentioned uncertainty component mu introduced by environmental vibrationszAnd the uncertainty component mu introduced by the horizontal caseSpThe introduction conditions of (a) are:
when the vibration influence quantity 3 & a < zz< 15. a, satisfies the requirement of introducing the vibration influence vector muzConditions;
amount of influence when placed horizontally
Figure BDA0001484710260000033
Satisfies the influence quantity mu of the introduction levelSpConditions;
wherein:
a is the minimum resolution of the electronic level used for monitoring;
b is the measurement range of the electronic level meter used for monitoring;
zzis the amount of shock impact;
szis the amount of influence of the horizontal placement；
The uncertainty component mu introduced by the environmental vibrationzAnd the uncertainty component mu introduced by the horizontal caseSpEither simultaneously or with at least one uncertainty component.
The uncertainty component mu introduced by the above-mentioned measuring methodFThe specific acquisition mode is as follows:
determining uncertainty component mu introduced by the measuring method according to the relation between the selection mode of the measuring point and the edge of the plate to be measuredF：
When the adopted measuring point selection method is used for selecting the measuring point under the condition that the edge of the flat plate to be measured is not parallel, the uncertainty component mu introduced by the measuring methodFThe specific acquisition mode is as follows:
Figure BDA0001484710260000041
when the adopted measuring point selection method selects the measuring point under the condition that the measuring point is parallel to or vertical to the edge of the plate to be measured, the uncertainty component mu introduced by the measuring methodFThe specific acquisition mode is as follows:
Figure BDA0001484710260000042
wherein:
MPLpthe MPL is the allowable value of the flatness of the plate to be detected in the gauge reaching 0 levelpThe unit of (d) is μm; the MPLpThe specific acquisition mode is as follows:
Figure BDA0001484710260000043
wherein:
Figure BDA0001484710260000044
the unit is the length of the diagonal line of the flat plate to be measured and is mm.
Measuring the flatness of the flat plate to be measured in the field environment in the step 2)Class A uncertainty component μ of fruitAThe specific acquisition mode is as follows:
measuring flatness not less than three times, and calculating A-type uncertainty components of flatness measurement results of the to-be-measured flat plate under the field environment by adopting a range method according to the following formula;
Figure BDA0001484710260000051
Figure BDA0001484710260000052
Figure BDA0001484710260000053
wherein:
μAis a class A uncertainty component;
Qmax，Qminrespectively, a maximum measurement value and a minimum measurement value in the multiple flatness measurements;
Figure BDA0001484710260000054
is the arithmetic mean of multiple flatness measurements;
n is the total number of measurements;
i is the ith measurement;
Qithe measured result is the ith measurement, namely the flatness value obtained by the ith measurement;
dnis the look-up table value of the polar difference coefficient table.
The total uncertainty mu of the measurement result of the flatness of the flat plate in the field environment in the step 3)CThe acquisition mode is as follows:
Figure BDA0001484710260000055
wherein:
μCis to measure the flatness of a flat plate in an on-site environmentTotal uncertainty of the quantitative result;
μAis the A-type uncertainty component of the measurement result of the flatness of the flat plate under the field environment;
μBis the B-type uncertainty component of the measurement result of the flatness of the flat plate in the field environment.
The above method further comprises, after step 3):
4) total uncertainty mu from flatness measurement of a flat panel in a field environmentCDetermining an expansion uncertainty U; the extended uncertainty U is obtained in the following manner:
U＝k·μC
wherein:
μCis the total uncertainty of the measurement result of the flatness of the flat plate under the field environment;
k is an inclusion factor; the inclusion factor k is 2 or 3, and the confidence probability is 95% when the inclusion factor k is 2; the confidence probability is 99% when the inclusion factor k is 3.
The size range of the plate to be measured is not more than 1800mm multiplied by 1800 mm.
The invention has the advantages that:
the invention provides an uncertainty determination method for a result of measuring the flatness of a flat plate in a working site with vibration and incomplete leveling, and aims to evaluate whether the flatness measurement result meets the test requirement in a specific detection environment. The method has the advantage of solving the problem that the flatness detection result accuracy of the flat plate which is large in size, cannot move and the like in a working site is difficult to provide a good detection environment is evaluated. By using the method, the working efficiency of field flat plate detection can be obviously improved, some flat plates which cannot be detected originally can be detected, and the reliability data of a quantized result can be given. The method comprises the following steps: determining uncertainty sources, determining the size of a flat plate to be measured, determining the uncertainty of detection equipment, determining the horizontal condition during flat plate detection and calculating the uncertainty caused by the flat plate, determining the uncertainty caused by a measurement method, determining the uncertainty caused by environmental vibration, determining measurement repeatability uncertainty, performing uncertainty synthesis by using an uncertainty basic principle, and obtaining an uncertainty result of flatness detection in the current environment.
Detailed Description
The invention provides a method for determining the uncertainty of a plate flatness measurement result in a field environment, which comprises the following steps:
1) determining the horizontal condition of the flat plate placed in the X and Y directions, determining the jumping condition of the detection equipment value caused by the peripheral environment vibration, and determining whether the composite uncertainty contains uncertainty components caused by the horizontal and peripheral vibration of the flat plate or not according to the measurement result.
2) Determining uncertainty component calculation formula caused by system effect to calculate B-type uncertainty component of flatness measurement result of to-be-measured flat plate under field environment
Figure BDA0001484710260000071
In the formula ofzThe component of uncertainty, mu, introduced for environmental vibrationsSpThe component of uncertainty introduced for the horizontal case, μSbComponent of uncertainty, mu, introduced for measuring apparatusFAn uncertainty component introduced for the measurement method.
3)μSpAnd muzThe component is an uncertain component introduced by field environment interference and needs to be determined according to a field environment test result. Mu.sSpThis component is introduced when the plate is placed in the X, Y direction with poor horizontal direction readings less than the detection instrument measurement range 1/4 and greater than 20 times the detection instrument minimum resolution. Mu.szWhen the detection equipment detects a single measuring point, the numerical jump is not more than 15 times of the minimum resolution and more than 3 times of the resolution within 10 seconds. Mu.sSpAnd muzWhen at least one of the components satisfies the lead-in condition, the uncertainty determination method is applicable to the plate detection with the plate size within 1800mm x 1800 mm.
4)μSbThe uncertainty component introduced for the measurement of uncertainty by the flat panel test device itself can be read directly from the certificate of authenticity of the test device itself.
5) Determining the field environment according to the multiple measurement results and the related formulaClass A uncertainty component mu of flatness measurement result of to-be-measured flat plateA。
6) According to the formula
Figure BDA0001484710260000072
Calculating the synthetic uncertainty muc；
7) Determining the expansion uncertainty U as required, where U is k.mucThe confidence probability 95%, k 2, and the confidence probability 99%, k 3.
The invention discloses an uncertainty determination method for a result of measuring the flatness of a flat plate in a working site with vibration and incomplete leveling, which comprises the following specific steps:
1) the method for evaluating the field vibration environment comprises the following steps: placing an electronic level meter for detecting a flat plate on the flat plate to be detected, selecting one side of the flat plate closest to a detector as a reference side, placing the side of the flat plate at the geometric center of the flat plate for 10 seconds along the direction parallel to the reference side, and reading the variation z of the reading of the level meter in the processxRepeating the above measurement at the same position in a direction perpendicular to the reference edge to obtain zyTaking zx、zyThe one with the larger median value is taken as the vibration influence quantity zz. Calculating μ according to equation 1z。
Figure BDA0001484710260000073
In the formula ZzFor the vibration influence quantity, N is the number of measuring points needed when detecting the flat plate, m is the number of measuring axes, when using the 'square method', only the number of all transverse and longitudinal axes is calculated, and when using the 'intercept method', the number of measuring axes is also counted in the diagonal direction.
2) The inclination condition of the flat plate is evaluated, and the leveling operation is carried out when the flat plate can be leveled, then the evaluation of the project is carried out, then the electronic level meter is respectively used for measuring once in the transverse and longitudinal directions of the reference edge in the geometric central area of the flat plate to be measured and four square areas with four corners of 15cm multiplied by 15cm, and the measuring results are measured according to the standardThe directions are respectively subjected to arithmetic mean, and the value of the direction with larger value is taken as the placing level influence quantity sz. Calculating μ using equation 2Sp。
Figure BDA0001484710260000081
In the formula, t is the larger value of the number of sampling points needed in the longitudinal and transverse directions of measurement, L is the length of the flat plate in the direction, and L is the span of the electronic level meter when testing a single point.
3) According to the technical parameters of the electronic level meter used for monitoring, determining whether the method is applied to the flatness detection for evaluating the measurement uncertainty, wherein the minimum resolution of the electronic level meter is a, the measurement range is b, and when the vibration influence quantity is 3 & a & lt zz< 15. a, satisfies the requirement of introducing the vibration influence vector muzAnd (4) conditions. Amount of influence when placed horizontally
Figure BDA0001484710260000082
Satisfies the influence quantity mu of the introduction levelSpThe uncertainty determination method is applied when at least one component satisfies the lead-in condition.
4) The measuring point selecting method is determined according to the measuring habit and the setting condition of measuring software, the common method is a pitch method or a grid method, when the adopted measuring point selecting method has the condition that the diagonal direction and the like are not parallel to the edge of the flat plate,
Figure BDA0001484710260000083
when using "checkering" or other methods of selecting measurement points only in a direction parallel to the edge of the plate or perpendicular to the edge of the plate,
Figure BDA0001484710260000084
MPL in the formulapFor the tolerance value of the flatness of the plate to be detected in the gauge reaching 0 level, the calculation formula is
Figure BDA0001484710260000085
In the formula
Figure BDA0001484710260000086
For the diagonal length of the plate to be measured, in units of (mm) MPLpThe unit is μm.
5) And (4) carrying out multiple flatness measurements (not less than three times), and calculating the A-type uncertainty of the flatness result obtained by the measurement by adopting a range method according to a formula 3 and a table 1.
Figure BDA0001484710260000091
Figure BDA0001484710260000092
Figure BDA0001484710260000093
In the formula ofAIs the A-type uncertainty component, Q, of the flatness measurement result of the flat plate to be measured in the field environmentmax，QminThe maximum value and the minimum value in a plurality of measurements;
Figure BDA0001484710260000094
is the arithmetic mean of a plurality of measurements, n is the number of measurements, dnThe table values are looked up for the range coefficient table, which is shown in table 1.
TABLE 1
The measurement times are as follows: n is 2 3 4 5 6 7
dn 1.13 1.69 2.06 2.33 2.53 2.70
Substituting the actual measurement times into formula 3 to calculate the A-type uncertainty component mu of the flatness measurement result of the flat plate to be measured in the field environmentA
6) The synthetic uncertainty μ is calculated according to equation 4C。
Figure BDA0001484710260000095
7) Calculating the extension uncertainty U according to equation 5
U＝k·μCEquation 5
Wherein k is an inclusion factor, and k is a confidence probability of 95% when k is 2 and a confidence probability of 99% when k is 3.

Claims (7)

1. A method for determining uncertainty of a plate flatness measurement result in a field environment is characterized by comprising the following steps: the method comprises the following steps:
1) determining total uncertainty mu of flatness measurement result of to-be-measured flat plate under field environmentC(ii) a source of (a); the total uncertainty mu of the flatness measurement result of the flat plate to be measured in the field environmentCIncluding the B-type uncertainty component mu of the flatness measurement result of the panel to be measured in the field environmentBAnd measuring the flatness of the flat panel to be measured in the field environmentClass A uncertainty component μA(ii) a The component mu of the B-type uncertainty of the flatness measurement result of the panel to be measured in the field environmentBThe method comprises the following steps of (1) including an uncertainty component introduced by environmental vibration, an uncertainty component introduced by a horizontal condition, an uncertainty component introduced by a measuring device and an uncertainty component introduced by a measuring method; the A-type uncertainty component mu of the flatness measurement result of the panel to be measured in the field environmentAIs to measure the repeatability uncertainty component;
2) calculating to obtain a B-type uncertainty component mu of a flatness measurement result of the to-be-measured flat plate under the field environment according to an uncertainty component introduced by environmental vibration, an uncertainty component introduced by the horizontal condition, an uncertainty component introduced by the measuring equipment and an uncertainty component introduced by the measuring methodB(ii) a Calculating according to the measurement repeatability uncertainty component to obtain the A-type uncertainty component mu of the flatness measurement result of the panel to be measured in the field environmentA；
3) According to the A-type uncertainty component mu of the flatness measurement result of the panel to be measured in the field environmentAAnd the B-type uncertainty component mu of the flatness measurement result of the panel to be measured in the field environmentBCalculating the total uncertainty mu of the measurement result of the flatness of the flat plate in the synthetic field environmentC；
The uncertainty component μ introduced by the horizontal caseSpThe specific acquisition mode is as follows:
respectively measuring once in the transverse and longitudinal directions of the reference side by using an electronic level meter in a geometric central area of the flat plate to be measured and four square areas with the four corners of 15cm multiplied by 15cm, respectively carrying out arithmetic averaging on the measurement results according to directions, and taking the value in one direction with a larger numerical value as the placing level influence quantity Sz(ii) a The reference edge is the edge of the flat plate to be detected closest to the detector;
the uncertainty component μ introduced by the horizontal case is calculated using the following formulaSp：
Figure FDA0002372679240000021
Wherein:
t is the larger value of the number of sampling points needed along the longitudinal and transverse directions of measurement;
l is the length of the flat plate in the direction with larger length in the longitudinal and transverse directions;
l is the span of the electronic level meter when testing a single point;
Szis the amount of horizontal influence of placement;
the uncertainty component mu introduced by the environmental vibrationzThe specific acquisition mode is as follows:
placing an electronic level meter for detecting a flat plate on the flat plate to be detected, selecting one side of the flat plate to be detected, which is closest to a detector, as a reference side, placing the side at the geometric center of the flat plate to be detected for 10 seconds along a direction parallel to the reference side, and reading the variation z of the reading of the level meter in the processxRepeating the above measurement at the same position in a direction perpendicular to the reference edge to obtain zyTaking zx、zyThe one with the larger median value is taken as the vibration influence quantity ZzCalculating the uncertainty component mu introduced by the environmental vibration according to the following formulaz：
Figure FDA0002372679240000022
Wherein:
Zzis the amount of shock impact;
n is the number of measurement points needed to be carried out when the flat plate to be detected is detected;
m is the number of measurement axes, which is determined according to the measurement method; the measuring method is a grazing method or an intercept method; when the measuring method is a grid method, the number of the measuring axes is only calculated for the number of all the transverse and longitudinal axes; when the measuring method is an intercept method, the number of the measuring axes comprises the number of all transverse and longitudinal axes and the number of diagonal axes;
the uncertainty component mu introduced by the measurement methodFThe specific acquisition mode is as follows:
determining a measuring method according to the relation between the selection mode of the measuring points and the edge of the flat plate to be measuredComponent of uncertainty introduced by method muF：
When the adopted measuring point selection method is used for selecting the measuring point under the condition that the edge of the flat plate to be measured is not parallel, the uncertainty component mu introduced by the measuring methodFThe specific acquisition mode is as follows:
Figure FDA0002372679240000031
when the adopted measuring point selection method selects the measuring point under the condition that the measuring point is parallel to or vertical to the edge of the plate to be measured, the uncertainty component mu introduced by the measuring methodFThe specific acquisition mode is as follows:
Figure FDA0002372679240000032
wherein:
MPLpthe MPL is the allowable value of the flatness of the plate to be detected in the gauge reaching 0 levelpThe unit of (d) is μm; the MPLpThe specific acquisition mode is as follows:
Figure FDA0002372679240000033
wherein:
and lambda is the length of the diagonal line of the plate to be measured, and the unit is mm.
2. The method of claim 1, wherein: the specific acquisition mode of the B-type uncertainty component of the flatness measurement result of the flat plate to be measured in the field environment in the step 2) is as follows:
Figure FDA0002372679240000034
wherein:
μzis an uncertainty component introduced by environmental vibrations;
μSpis uncertainty introduced by the horizontal situationA degree component;
μSbis the uncertainty component introduced by the measurement device;
μFis an uncertainty component introduced by the measurement method;
μBthe component of the uncertainty of the type B of the flatness measurement result of the flat plate to be measured in the field environment.
3. The method of claim 2, wherein: the uncertainty component mu introduced by the environmental vibrationzAnd the uncertainty component mu introduced by the horizontal caseSpThe introduction conditions of (a) are:
when the vibration influence quantity 3 & a < Zz< 15. a, satisfies the requirement of introducing the vibration influence vector muzConditions;
amount of influence when placed horizontally
Figure FDA0002372679240000041
Satisfies the influence quantity mu of the introduction levelSpConditions;
wherein:
a is the minimum resolution of the electronic level used for monitoring;
b is the measurement range of the electronic level meter used for monitoring;
Zzis the amount of shock impact;
Szis the amount of horizontal influence of placement;
the uncertainty component mu introduced by the environmental vibrationzAnd the uncertainty component mu introduced by the horizontal caseSpEither simultaneously or with at least one uncertainty component.
4. The method of claim 3, wherein: the A-type uncertainty component mu of the flatness measurement result of the panel to be measured in the field environment in the step 2)AThe specific acquisition mode is as follows:
measuring flatness not less than three times, and calculating A-type uncertainty components of flatness measurement results of the to-be-measured flat plate under the field environment by adopting a range method according to the following formula;
Figure FDA0002372679240000042
Figure FDA0002372679240000043
Figure FDA0002372679240000044
wherein:
μAthe component of A-type uncertainty of the flatness measurement result of the panel to be measured in the field environment;
Qmax，Qminrespectively, a maximum measurement value and a minimum measurement value in the multiple flatness measurements;
Figure FDA0002372679240000045
is the arithmetic mean of multiple flatness measurements;
i is the ith measurement;
Qithe measured result is the ith measurement, namely the flatness value obtained by the ith measurement;
n is the total number of measurements;
dnis the look-up table value of the polar difference coefficient table.
5. The method of claim 4, wherein: the total uncertainty mu of the flatness measurement result of the flat plate to be measured in the field environment in the step 3)CThe acquisition mode is as follows:
Figure FDA0002372679240000051
wherein:
μCthe total uncertainty of the flatness measurement result of the plate to be measured in the field environment;
μAthe component of A-type uncertainty of the flatness measurement result of the panel to be measured in the field environment;
μBthe component of the uncertainty of the type B of the flatness measurement result of the flat plate to be measured in the field environment.
6. The method according to any one of claims 1-5, wherein: the method further comprises, after step 3):
4) according to the total uncertainty mu of the flatness measurement result of the flat plate to be measured in the field environmentCDetermining an expansion uncertainty U; the extended uncertainty U is obtained in the following manner:
U＝k·μC
wherein:
μCthe total uncertainty of the flatness measurement result of the plate to be measured in the field environment;
k is an inclusion factor; the inclusion factor k is 2 or 3, and the confidence probability is 95% when the inclusion factor k is 2; the confidence probability is 99% when the inclusion factor k is 3.
7. The method of claim 6, wherein: the size range of the flat plate to be detected is not more than 1800mm multiplied by 1800 mm.
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