CN202793736U - Automatic test system for electric heating type micromirror - Google Patents
Automatic test system for electric heating type micromirror Download PDFInfo
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- CN202793736U CN202793736U CN 201220301964 CN201220301964U CN202793736U CN 202793736 U CN202793736 U CN 202793736U CN 201220301964 CN201220301964 CN 201220301964 CN 201220301964 U CN201220301964 U CN 201220301964U CN 202793736 U CN202793736 U CN 202793736U
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Abstract
The utility model discloses an automatic test system for an electric heating type micromirror, comprising an electric displacement platform, an electric heating type micromirror test needle head, a data acquisition system, and an electric heating type micromirror automatic test control system optical path. An automatic test method for the electric heating type micromirror comprises a yield test for the electric heating type micromirror, an aging test and an optical scanning test for the electric heating type micromirror, and an attribute test for the electric heating type micromirror. Through the test system and the test method of the utility model, the yield and own attributes of the micromirror can be automatically tested.
Description
Technical field
The utility model relates to a kind of Auto-Test System of electrothermal micro mirror.
Background technology
MEMS (micro electro mechanical system) (Micro-electro-mechanical systems is called for short MEMS) is to utilize the produced three-dimensional devices of micro-processing technology, comprises that at least a movable structure satisfies certain mechanical effect.Therefore the MEMS device is applied to a lot of different fields owing to used for reference the technique of integrated circuit.This century, increasing sensor and actuator all tended to adopt the MEMS technology, and wherein the MEMS (micro electro mechanical system) micro mirror is exactly one of them excellent illustration.The power that the MEMS (micro electro mechanical system) drives structure produces is very little, but be enough to drive minute surface it is deflected.The electrothermal micro mirror is the MEMS (micro electro mechanical system) that a dependence thermal deformation makes mirror deflection in numerous MEMS micro mirrors.The electrothermal micromirror systems mainly comprises minute surface, sway brace and three parts of actuating arm, and wherein actuating arm relies on exactly electrocaloric effect to produce deformation and drives mirror deflection.
Electrothermal micro mirror automatic test control system utilizes external circuit system and electricity driving displacement platform to measure the performance condition of disk naked core, is shown on the computer software by the overall condition of system drive with chip, carries out simultaneously corresponding stored record.Electrothermal micro mirror automatic test control system is simple to operation, has greatly reduced engineering time on the step of batch testing naked core.Especially the stage before chip uses tests the chip overall performance, and next step use provides sound assurance to chip.
Although some comparatively ripe automatic test control programs have been arranged in MEMS (micro electro mechanical system) micro mirror field, the scheme of automatic test control system is not yet arranged in electrothermal micro mirror field, especially for little chip, low cost, the scheme that reliability is higher.
The utility model content
It is a kind of for little chip that the utility model purpose is to provide, low cost, Auto-Test System and the method for the higher electrothermal micro mirror of reliability.
The utility model adopts following technical scheme for achieving the above object:
A kind of Auto-Test System of electrothermal micro mirror is characterized in that: the syringe needle, data acquisition system (DAS), the electrothermal micro mirror automatic test control system light path that comprise electricity driving displacement platform, the test of electrothermal micro mirror;
Described electricity driving displacement platform is used for placing electrothermal micro mirror naked core disk, and it is mobile in X, Y, Z-direction to drive disk;
The syringe needle of described electrothermal micro mirror test is used for the pad of contact electrothermal micro mirror, the resistance of test electrothermal micro mirror actuating arm;
Described data acquisition system (DAS) is used for gathering the figure signal of electrothermal micro mirror actuating arm resistance signal, position sensitive detector output, and the control electricity driving displacement platform moves, and drives the scanning of electrothermal micro mirror;
Described electrothermal micro mirror automatic test control system light path is used for reflexing to screen on and position sensitive detector through the electrothermal micro mirror incident laser, and its light path design is such as our company's patent " a kind of micro-mirror graph scanning mechanism " application number: shown in the of 201110377691.3.
It is further characterized in that: the pad of described electrothermal micro mirror is divided into up and down two row, totally five pads; Described test syringe needle mainly adopts stationary fixture, spring needle and extraneous electrical lead to form, the stationary fixture of whole test syringe needle adopts laser boring, putting in order of hole arranged identical with pad, spring needle is passed the anchor clamps hole to drip after glue fixes, to fixture inner cavity casting solidification colloid, its sealing is filled up, and the terminal welding lead of the spring needle that exposes connects out.
Further: data acquisition system (DAS) comprises central processing unit, analog-to-digital conversion module, D/A converter module, signal shaping module, electricity driving displacement platform control module, electrical resistance collection module, usb communication module and security protection module;
Described central processing unit mainly is responsible for the bulk treatment of data, carries out the algorithm operation of whole control system;
Described analog-to-digital conversion module is used for the simulating signal of dislocation sensitive sensor output, is used for the motion conditions of monitoring scanning micro mirror when circular;
Described D/A converter module is used for the scanning of outputting analog signal control micro mirror;
The signal that described signal shaping module is used for the output of logarithmic mode modular converter carries out Shape correction, and the signal after the processing meets the attribute that drives the micro mirror signal;
Described electricity driving displacement platform control module is mainly used to control platform stepping amount and the syringe needle residence time;
Described electrical resistance collection module is used for detecting the resistance of four resistance of micro mirror, whether demarcates micro mirror as non-defective unit take this; The usb communication module is used for communicating by letter between control center and the computer, and system controlling software sends the work that whole hardware module is controlled in instruction by the usb communication mode;
Described security protection module is to prevent from powering on and the impact of power down moment surging signal to micro mirror.
A kind of automatic test approach of electrothermal micro mirror comprises the burn-in test of test, electrothermal micro mirror of electrothermal micro mirror yields and photoscanning test, the attribute test of electrothermal micro mirror;
1) testing procedure of described electrothermal micro mirror yields is:
The electrothermal micro mirror naked core disk of whole plate is placed on the clamp of electricity driving displacement platform, and the angle according to the platform mark has been corrected disk covers disk with the hollow out cover plate, and disk is fixed well; The electric platforms of mobile X-axis and Y-axis, the test syringe needle is moved on to the below of default micro mirror, mobile syringe needle is downward along Z-direction, aim at the position of needle point and pad by camera software, read the actuating arm resistance of this electrothermal micro mirror, when four actuating arm resistances of electrothermal micro mirror all exist, record X, the Y of this moment, the coordinate figure of Z, and this is worth as initial point; Size according to the electrothermal micro mirror arranges the stepping amount of X-axis, Y-axis platform and the raising height of Z axis platform at computer control software interface, start electricity driving displacement platform, record successively coordinate corresponding to each micro mirror and resistance, the electrothermal micro mirror that occurs record when unusual this moment when the resistance value of micro mirror is substandard products, record current substandard products coordinate, on the software for display domain with red-label; With the chip resistance storage that collects each time, all surveyed until will set the electrothermal micro mirror of quantity, calculate the yields of micro mirror on the disk of surveying according to the storage data on the software;
2) burn-in test of described electrothermal micro mirror and photoscanning testing procedure are:
Electricity driving displacement platform turned over turn 90 degrees, be installed in the optical system for testing, fix initial point according to step 1), set the stepping amount, it is digestion time that the residence time that Z axis clicks on the micro mirror is set, after getting to laser on the micro mirror, upper computer software output burn-in test signal, whether the figure on the view screen has the circle output of standard, position sensitive detector (PSD) collects the circle of scanning simultaneously, it is disassembled be the two-way sine wave signal, sine wave is collected in the software of computer by analog to digital conversion circuit, computer software is monitored the phase differential of this two paths of signals constantly, and the value storage of phase differential is shown as a curve in real time, when 90 ° of the phase differential that records and within the test duration phase differential curve not fluctuation show that this micro mirror is quality product, can be used as engineering and use;
3) described electrothermal micro mirror attribute test:
The attribute test of micro mirror is divided into three parts, native system arrives the Test integration of three attributes together, at first the test of the deflection angle of micro mirror and voltage relationship is to be started by software control, and is adjustable by Circuits System output stepped voltage, the plateau voltage that output frequency is adjustable; This moment, the output terminal at position sensitive detector had one group of corresponding Voltage-output, represented the actual coordinate point that shows behind the laser reflection on the screen, and related data stored in record successively, and automatic Fitting goes out the relation curve of institute's on-load voltage and deflection angle; The test of time-delay characteristics and resonance frequency band test can be carried out simultaneously, after the frequecy characteristic value of output waveform is set by software, the sine voltage of Circuits System output frequency stepping, the signal of position sensitive detector feedback carries out the phase bit comparison with the institute plus signal, software automatically records phase differential and standard and changes and be calculated to be delay time, simulates simultaneously the time-delay characteristics curve under the different frequency; Resonance frequency band is that the frequency of the signal of position sensitive detector output when becoming lopsided waveform by sine wave begins to count, until normal frequency when sinusoidal wave is returned in distorted wave deformation, the frequency band between cutoff frequency and the initial frequency is resonance frequency band.
Said system software comprises that the domain of disk imports and Presentation Function, the electricity driving displacement platform parameter function is set, micro mirror test quantity arranges function, data storage function, calculation of parameter function, cancellation mark function, photoscanning control function, micro mirror attribute test function;
The domain importing of disk and Presentation Function show the position of current test micro mirror in whole disc when being used for testing, automatic record position when testing out substandard products, and mark color;
The electricity driving displacement platform parameter setting function is mainly used in arranging X-axis, the Y-axis of electricity driving displacement platform, coordinate, Z axis platform dead time and the electric platforms side-play amount of Z axis;
Test quantity is provided for testing the segment chip on whole former or uses when being used for taking a sample test;
Data storage function is mainly used in storing information and the calculative data that need record;
The calculation of parameter function mainly realizes the calculating of yields and the calculating of position sensitive detector two paths of signals phase differential, and the cancellation mark function can be recorded the substandard products position on the disk at the software domain;
Photoscanning control function is used for screening good micro mirror, judges the quality of micro mirror by the circular shape of monitoring scanning; Micro mirror attribute test software automatically testing micro mirror driving voltage and the relation of deflection angle, the time-delay characteristics of micro mirror and the resonance frequency band of micro mirror are used in basis in previous step.
The utlity model has following advantage:
1, batch testing electrothermal micro mirror, efficient are high, accuracy rate is high, be convenient to statistics.
2, software arranges freedom, and the stepping amount is adjustable, can carry out sample testing for micro mirror.
3, cost is low, realizes easily.
4, light path element is less, realizes simply, and is practical, integrability.
5, can to wear out and optical tests before the chip use, improve next step and use front stability.
6, the peripheral control circuit is simple, repeats easily to realize.
7, by the communicating by letter of computer software and Circuits System, data upload to upper computer software is calculated intuitive and convenient.
8, use phase place monitoring and data statistics function, the monitoring of good situation when realizing micro mirror scanning.
9, flexible software design, but Real Time Monitoring, data are stored and are called conveniently.
10, syringe needle simplicity of design, good reproducibility, the electricity consumption condition is loose, can disassemble replacing, is convenient to the test of different editions micro mirror.
11, electricity driving displacement platform flexible design, turning use, syringe needle is replaceable to be disassembled, and degree of freedom is large, can take a sample test for whole disc.
12, can be used as the attribute test of bulk quantity of chips, comprise the relation of voltage and deflection angle, the test of time-delay characteristics and resonance frequency band, the more robotization of whole process.
Description of drawings
Fig. 1 is this electricity driving displacement platform structure diagram;
Fig. 2 is electric platforms vertical view and micro mirror unit synoptic diagram;
Fig. 3 is the needle head structure synoptic diagram;
Fig. 4 is the system architecture synoptic diagram;
Fig. 5 is micro mirror actuating arm resistance measurement method synoptic diagram;
Fig. 6 is photoscanning test philosophy figure;
Fig. 7 is micro mirror attribute test synoptic diagram;
Fig. 8 is that deflection angle and driving voltage concern synoptic diagram.
1.Z axle electric platforms among the figure; 2. minisize pick-up head; 3. syringe needle; 4. hollow out cover plate; 5. dianegative; 6.X axial translation platform; 7.Y axial translation platform; 8. pedestal; 13. pad; 14. micro mirror minute surface; 15. spring needle; 16. stationary fixture; 17. syringe needle holder; 18. electrical lead; 19. security protection module; 20. D/A converter module; 21. power module; 22. central processing unit; 23. communication module; 24. signals collecting analog-to-digital conversion module; 25. LASER Light Source; 26. position sensitive detector; 27. the first spectroscope; 28. the second spectroscope; 29. coordinate screen; 30. electricity driving displacement platform; 31. signal shaping module; 32. micro mirror disk unit.
Embodiment
A kind of Auto-Test System of electrothermal micro mirror comprises syringe needle, data acquisition system (DAS), electrothermal micro mirror automatic test control system light path that electricity driving displacement platform, electrothermal micro mirror are tested.
Electricity driving displacement platform is used for placing electrothermal micro mirror naked core disk as described in Figure 1, and it is mobile in X, Y, Z-direction to drive disk.Platform comprises pedestal 8, X-axis displacement platform 6, Y-axis displacement platform 7, Z axis displacement platform 1, is provided with minisize pick-up head 2 and syringe needle 3 on the Z axis displacement platform 1.Be placed on the dianegative 5 on the electrothermal micro mirror naked core disk X-axis displacement platform 6, the above is being stamped hollow out cover plate 4.Described electricity driving displacement platform is arranged on the pedestal 8.
The syringe needle of described electrothermal micro mirror test is used for the pad of contact electrothermal micro mirror as shown in Figure 3, the resistance of test electrothermal micro mirror actuating arm; Described electrothermal micro mirror comprises micro mirror minute surface 14 and pad 13 as shown in Figure 2, and pad 13 is divided into up and down two row, totally five; Described test syringe needle mainly adopts stationary fixture 16, spring needle 15 and extraneous electrical lead 18 to form, the stationary fixture 16 of whole test syringe needle adopts laser boring, putting in order of hole arranged identical with pad, spring needle 15 is passed the anchor clamps hole to drip after glue is fixed on, to fixture inner cavity casting solidification colloid, its sealing is filled up, and the terminal welding lead of the spring needle 15 that exposes connects out.Stationary fixture is installed on the syringe needle holder 17.
Described data acquisition system (DAS) is used for gathering the figure signal of electrothermal micro mirror actuating arm resistance signal, position sensitive detector output, and the control electricity driving displacement platform moves, and drives the scanning of electrothermal micro mirror; Data acquisition system (DAS) comprises central processing unit 22, signals collecting analog-to-digital conversion module 24, D/A converter module 20, signal shaping module 31, electricity driving displacement platform control module, electrical resistance collection module, usb communication module and security protection module 19 as shown in Figure 4; The described central processing unit 22 main bulk treatment of being responsible for data are carried out the algorithm operation of whole control system; Described signals collecting analog-to-digital conversion module 24 is used for the simulating signal of dislocation sensitive sensor 26 output, is used for the motion conditions of monitoring scanning micro mirror when circular; Described D/A converter module 20 is used for the scanning of outputting analog signal control micro mirror; The signal that described signal shaping module 31 is used for 20 outputs of logarithmic mode modular converter carries out Shape correction, and the signal after the processing meets the attribute that drives the micro mirror signal; Described electricity driving displacement platform control module is mainly used to control residence time of electricity driving displacement platform 30 stepping amounts and syringe needle 3; Described electrical resistance collection module is used for detecting the resistance of four resistance of micro mirror, whether demarcates micro mirror as non-defective unit take this; The usb communication module is used for communicating by letter between control center and the computer, and system controlling software sends the work that whole hardware module is controlled in instruction by the usb communication mode; Described security protection module 19 is to prevent from powering on and the impact of power down moment surging signal to micro mirror.Described data acquisition system (DAS) is powered by power module 21, and communication module 23 communicates with system software.
Described electrothermal micro mirror automatic test control system light path is used for reflexing to screen on and position sensitive detector through the electrothermal micro mirror incident laser.The method that system light path is built and the design of size as shown in Figure 4, the light beam that the first spectroscope 27 is launched LASER Light Source 25 is got on the micro mirror, the most important thing is that the minute surface of laser and micro mirror will keep strict vertical relation.Because micro mirror is activated the driving minute surface generation angular deflection of voltage, light beam can reach on the second spectroscope 28 by the first spectroscope 27, the second spectroscope 28 is divided into two bundles with light beam, a branch of beating on position sensitive detector 26, a branch of beating on coordinate screen 29.The first spectroscope 27 will keep minimum distance apart from the distance of micro mirror, can be strictly when the second spectroscope 28 positions will guarantee that light that the first spectroscope 27 penetrates is beaten on the second spectroscope 28 vertical beating on position sensitive detector 26, guarantee that again light can not depart from the light splitting minute surface.The distance of coordinate screen 29 and position sensitive detector distance the second spectroscope 28 will be tried one's best far, uses the scope measurement data of full scale as far as possible, the high resolving power when setting up with assurance micro mirror deflection angle and driving voltage relation.Micro mirror disk unit 32 is arranged on the electricity driving displacement platform 30, by its drive, detects each micro mirror disk unit 32.
With the naked core disk after the whole plate processing, be put on the electricity driving displacement platform as shown in Figure 1, according to the direction that the mark on the platform has been corrected disk, cover hollow out cover plate 4.Mobile Z axis displacement platform 1 will be tested syringe needle 3 and depress to default test starting point, observe four resistance values that show on the software, if four resistance values all exist, illustrate that contact is abundant, record and store the coordinate figure of X-axis at this moment, Y-axis, Z axis, it is set to true origin.Side-play amount and chip that displacement platform is set are measured number, click the software startup item, start displacement platform and carry out the test of yields.Be completed rear software autoshutdown platform, with recorded data storage statistics, finally calculate the value of yields.Electricity driving displacement platform turned over turn 90 degrees, platform is placed light path shown in Figure 4, digestion time is set, laser is beaten on the chip of starting point, load the circular scan signal by the test syringe needle to chip, sweep signal is provided by Circuits System, by frequency and the amplitude of software control output waveform.Whether the figure on the view screen 29 is the circle of standard, and whether the curve of observing simultaneously phase place monitoring on the software is straight line, is standard circular if straight line shows the circle of output, and this chip scanning situation is better.The chip of test setting quantity is until complete successively, and statistics and memory scanning situation be number of chips preferably.Micro mirror attribute test, the waveform that output at first is set are the adjustable stepped voltage steer step waveform of frequency, and behind the value autostore that position sensitive detector records, software simulates the relation curve of institute's making alive and deflection angle.The test of time-delay characteristics and resonance frequency band needs software that the sine wave signal of output frequency stepping is set, and software reads the signal frequency of position sensitive detector output, the frequency band when automatically conversing delay time and waveform deformity.
Electrothermal MEMS micro mirror mainly is that actuating arm passes through different materials electrocaloric effect generation deformation generation stress zone index glass deflecting facet.Each micro mirror has 4 identical actuating arms, and when the on-load voltage value was the voltage of U, the heat that produces at actuating arm can produce thermal expansion, and deformation causes actuating arm to produce the stress drive deflection mirror surface.Auto-Test System is to design for the test of batch electrothermal micro mirror.
Whole system is divided into hardware and software two large modules, and the main function that realizes is the test of micro mirror yields, photoscanning test, attribute test three parts.
Micro mirror yields test job principle is to judge according to the resistance characteristic of micro mirror, and whether a micro mirror is non-defective unit, whether resistance is arranged all with four actuating arms of micro mirror, and the maximal value of resistance and minimum value differ and be no more than 100 ohm and judge.The system hardware circuit adopts the current source device output current of four road sign standards to be the signal loading of I to the syringe needle of micro mirror, after 5 stitch on the syringe needle touch pad, have Voltage-output in the micro mirror resistance terminal, by the mode of serial communication data are passed to computer through Circuits System after amplification, the analog-to-digital conversion process, computer software carries out the data storage, as shown in Figure 5.The measuring microscope resistance R m=U/A/I of institute.A is the enlargement factor of micro mirror resistance both end voltage in the formula.
Detection aging for micro mirror and the scanning situation is tested in photoscanning, the principle of institute's basis is micro mirror scanning circular pattern, circular more standard, the homogeneity that represents four actuating arms of micro mirror is better, and the better representative micro mirror performance of circular scan was more stable after micro mirror was aging through long-time mechanical motion.Detecting circular scanning situation principle is according to after the circular pattern opto-electronic conversion that scans on the position sensitive detector, disassembles to be the two-way sinusoidal signal, and the phase differential of this two paths of signals is 90 °, and when scanning circular nonstandard, phase differential is not equal to 90 degree.Specifically principle is as shown in Figure 6:
The attribute test Method And Principle of micro mirror, as shown in Figure 7.The relation test of micro mirror on-load voltage and deflection angle is selected steer step waveform, and the stepping amount of waveform voltage and stepping time can be by the software settings, and scope is between 0 ~ 4V.When the every stepping of signal once, reflection light point will saltus step once, the coordinate figure of the output XY of position sensitive detector will and then change once, also storage is once for the data acquisition system (DAS) record.When magnitude of voltage reaches 4V, the value of the coordinate points of all position sensitive detectors of system log (SYSLOG) output, and fit to curve relation figure with corresponding on-load voltage value and be presented on the software.Concrete computation process as shown in Figure 8, the micro mirror angle of deflection=arctan(f/l), f=Ux * f0/Up, wherein f represents the side-play amount of luminous point on the position sensitive detector imaging plane of micro mirror emission, l represent micro mirror and between the distance of position sensitive detector, Ux represents the voltage of position sensitive detector output, and f0 represents the length of side of position sensitive detector photoelectric conversion module, and Up is position sensitive detector full scale voltage.
The test philosophy of time-delay characteristics and resonance frequency band is according to phase place monitoring and waveform monitoring.Phase place monitoring to as if be loaded into driving voltage on the micro mirror and the phase place between the position sensitive detector actual output voltage, as shown in Figure 7, when the frequency of sinusoidal drive voltage from low to high in the change procedure frequency of output signal can follow simultaneously and change, the phase differential that calculates this two paths of signals as can be known under the different frequency response time of micro mirror different, namely draw the relation between delay time and the driving signal frequency.Time corresponding to phase differential of software between can the automatic acquisition two paths of signals is Δ t, simulates the relation curve between frequency and the phase differential after record and the storage.The test of resonance frequency band realizes by the waveform monitoring, principle is that micro mirror is in resonant process, can carry out erratic scanning, the waveform that position sensitive detector is read also is irregular waveform, software with signals collecting after the amplitude of automatic monitoring output voltage, if the voltage of output surpasses the monitoring voltage that software arranges, resonance appears in explanation when micro mirror scans under the driving of this frequency drives signal, the explanation micro mirror does not have resonance herein in waveforms amplitude returns to the guarded region of software setting, record is also stored this constantly frequency of respective signal, calculate the frequency span of resonance, specifically as shown in figure 13, to be between the height point of monitoring voltage and the low spot be that normal operation is without resonant condition to signal amplitude.When the amplitude of signal surpasses the height point of monitoring voltage even occurs disappearing and push up or when being lower than the pilot signal low spot, micro mirror is and is operated under the resonant condition, when the amplitude of signal is lower than the monitoring voltage of working frequency limit point, micro mirror can't respond, and the frequency of signal is the limiting frequency of micro mirror work at this moment.
Claims (3)
1. the Auto-Test System of an electrothermal micro mirror is characterized in that: the syringe needle, data acquisition system (DAS), the electrothermal micro mirror automatic test control system light path that comprise electricity driving displacement platform, the test of electrothermal micro mirror;
Described electricity driving displacement platform is used for placing electrothermal micro mirror naked core disk, and it is mobile in X, Y, Z-direction to drive disk;
The syringe needle of described electrothermal micro mirror test is used for the pad of contact electrothermal micro mirror, the resistance of test electrothermal micro mirror actuating arm;
Described data acquisition system (DAS) is used for gathering the figure signal of electrothermal micro mirror actuating arm resistance signal, position sensitive detector output, and the control electricity driving displacement platform moves, and drives the scanning of electrothermal micro mirror;
Described electrothermal micro mirror automatic test control system light path is used for reflexing to screen on and position sensitive detector through the electrothermal micro mirror incident laser.
2. the Auto-Test System of a kind of electrothermal micro mirror according to claim 1 is characterized in that: two row, five pads about the pad of described electrothermal micro mirror is divided into totally; Described test syringe needle mainly adopts stationary fixture, spring needle and extraneous electrical lead to form, the stationary fixture of whole test syringe needle adopts laser boring, putting in order of hole arranged identical with pad, spring needle passes the anchor clamps hole and drips glue and fix, to fixture inner cavity casting solidification colloid, the terminal welding lead of the spring needle that exposes connects out.
3. the Auto-Test System of a kind of electrothermal micro mirror according to claim 1, it is characterized in that: data acquisition system (DAS) comprises central processing unit, analog-to-digital conversion module, D/A converter module, signal shaping module, electricity driving displacement platform control module, electrical resistance collection module, usb communication module and security protection module;
Described central processing unit mainly is responsible for the bulk treatment of data, carries out the algorithm operation of whole control system;
Described analog-to-digital conversion module is used for the simulating signal of dislocation sensitive sensor output, is used for the motion conditions of monitoring scanning micro mirror when circular;
Described D/A converter module is used for the scanning of outputting analog signal control micro mirror;
The signal that described signal shaping module is used for the output of logarithmic mode modular converter carries out Shape correction, and the signal after the processing meets the attribute that drives the micro mirror signal;
Described electricity driving displacement platform control module is mainly used to control platform stepping amount and the syringe needle residence time;
Described electrical resistance collection module is used for detecting the resistance of four resistance of micro mirror, whether demarcates micro mirror as non-defective unit take this; The usb communication module is used for communicating by letter between control center and the computer, and system controlling software sends the work that whole hardware module is controlled in instruction by the usb communication mode;
Described security protection module is to prevent from powering on and the impact of power down moment surging signal to micro mirror.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220301964 CN202793736U (en) | 2012-06-26 | 2012-06-26 | Automatic test system for electric heating type micromirror |
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| Application Number | Priority Date | Filing Date | Title |
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| CN 201220301964 CN202793736U (en) | 2012-06-26 | 2012-06-26 | Automatic test system for electric heating type micromirror |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102914417A (en) * | 2012-09-14 | 2013-02-06 | 无锡微奥科技有限公司 | Automatic test system and method of electric micromirror |
| CN110608870A (en) * | 2019-09-18 | 2019-12-24 | 武汉光迅科技股份有限公司 | Testing device and method for rotating mirror matrix |
-
2012
- 2012-06-26 CN CN 201220301964 patent/CN202793736U/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102914417A (en) * | 2012-09-14 | 2013-02-06 | 无锡微奥科技有限公司 | Automatic test system and method of electric micromirror |
| CN110608870A (en) * | 2019-09-18 | 2019-12-24 | 武汉光迅科技股份有限公司 | Testing device and method for rotating mirror matrix |
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Granted publication date: 20130313 |