CN202793517U - Self-fed type device for detecting molten crystal solid-liquid interface location - Google Patents
Self-fed type device for detecting molten crystal solid-liquid interface location Download PDFInfo
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- CN202793517U CN202793517U CN 201220505930 CN201220505930U CN202793517U CN 202793517 U CN202793517 U CN 202793517U CN 201220505930 CN201220505930 CN 201220505930 CN 201220505930 U CN201220505930 U CN 201220505930U CN 202793517 U CN202793517 U CN 202793517U
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Abstract
The utility model discloses a self-fed type device for detecting a molten crystal solid-liquid interface location. A present rod insertion method extremely depends on the skill of an operator and is closely related with the perception degree of the operator in accuracy control. The self-fed type device for detecting the molten crystal solid-liquid interface location is characterized in that a drive rod is installed on a base seat and is provided with a slide block conducting up-down vertical movements with the drive rod. One side of the slide block is connected with a support seat which is in linkage with the slide block. A measuring stick is installed on the support seat, wherein the upper portion of the measuring stick is hung on the support seat. A through hole used for the lower portion of the measuring stick to penetrate through is formed in the bottom of the base seat. A displacement sensor is in linkage with the support seat. When location status between the upper portion of the measuring stick and the support seat changes, the displacement sensor collects data and produces corresponding signals to feed back to a controller used for controlling the motion of the drive rod. The self-fed type device for detecting the molten crystal solid-liquid interface location can automatically detect the molten crystal solid-liquid interface location, and is accurate in measurement and convenient to operate.
Description
Technical field
The utility model relates to crystal and makes the field, and specifically a kind of self-feeding type is surveyed device and the detection method thereof of melting crystal the position of solid-liquid interface.
Background technology
Various crystal and corresponding preparation method thereof produce for the demand that satisfies different industries.Although kind of crystalline is various, and manufacture method is different, and the basic growing principle of its crystal that relates to exists very large general character.
At present, the method for preparing the crystal such as crystal silicon, sapphire is broadly divided into kyropoulos (KY), czochralski method (CZ), heat-exchanging method (HEM) and improving one's methods of deriving thus.When the above-mentioned high quality crystal of preparation, all wish to control accurately the preparation process of crystal, comprise burn-off rate, temperature, pressure and melt flows in the rate of crystalline growth, stove, the important parameters such as the position of solid-liquid interface and shape; And burn-off rate wherein, rate of crystalline growth, melt flows, the position of solid-liquid interface and shape can't be measured acquisition with conventional sensors, so how to obtain the important subject that the instantaneous value of these parameters just becomes research and development institution, equipment manufacturers and production firm.And upper from using, if can be the accurately real-time solid-liquid interface height that records just can obtain corresponding burn-off rate and rate of crystalline growth.
Generally by measuring boule diameter as the important indicator of control rate of crystalline growth, the position of solid-liquid interface is constant under the liquid level czochralski method (CZ), and shape is relatively fixing; Kyropoulos (KY) utilizes the parameter of weighing to obtain rate of crystalline growth of seed crystal lifting end, substantially need not consider crystal the position of solid-liquid interface and shape.
In the solid-liquid interface measurement scheme of heat-exchanging method, be divided into contactless and contact two large classes, contactless less to crystal growth interference, two kinds of methods of laser and ultrasound wave are typically arranged.Laser can detect the molten surface position, the height change reckoning the position of solid-liquid interface that can produce by calculating solid-liquid phase change in theory, but in fact the living measuring error of liquid surface wave movable property can reach 5-8mm, and the speed of crystal growth is approximately 10-12mm/h, burn-off rate is then larger, the order of magnitude of error is consistent with measured value, so that the credible result degree is zero substantially.The visible light wave range that simultaneously object itself sends under the high temperature covers this hot chamber, makes the signal processing after the laser pick-off very difficult.Ultrasound wave is another kind of non-contact measurement method, because liquid can not bear shearing, ultrasound wave can penetrate melt to solid-liquid interface, and reflects, and can learn the duration of actual propagation by the separation of waveform, thereby calculates the position of solid-liquid interface.But ultrasound wave has 3 uses difficult point: the first, and it is very big to propagate temperature influence, and the Temperature Distribution of thermal field inside is extremely inhomogeneous, and change in time, need many experiments to demarcate, and the furnace chamber production capacity is larger, precision is lower; The second, under the open space, the ultrasound wave diversity is very strong, if use the method, must utilize waveguide, and the selection of waveguide and serviceable life will be limited the application of the method; The 3rd, some crystal need to be grown under vacuum condition, can't use ultrasound wave.These methods are analyzed all no doubt effective from principle, but the Practical Project realization is very difficult, and cost is very high in other words.
The method of at present the most general measurement solid-liquid interface is by artificial directly plunger method, the concrete implementation method of this contact is the difference according to the preparation crystal, select infusibility, do not make rod with crystal liquation reaction and mutual nonwettable material or as the coating of other base material, be equipped with simple device, when needed, hand-held measuring stick or manual actuation pluging device, directly rod is inserted in the liquid, when rod touches solid, make marks rapidly, pull up the position difference of measurement markers point and initial markers point, the position of acquisition solid-liquid interface.Directly the plunger method is no doubt effectively simple, but the method depends on operator's technical ability very much, and closely related with operator's perception degree in precision control, and there is a very large potential safety hazard, because the preparation of most crystal all is to finish, furnace gas, pressure, temperature there is strict requirement, the introducing of extraneous rod in airtight container, in addition artificial operation is very easy to cause the inefficacy that seals and casts great accident.
Summary of the invention
Technical problem to be solved in the utility model is to overcome the defective that above-mentioned prior art exists, the device that provides a kind of self-feeding type to survey melting crystal the position of solid-liquid interface, but automatic detection melting crystal the position of solid-liquid interface and measure accurate, easy to operate.
For this reason, the utility model adopts following technical scheme: a kind of self-feeding type is surveyed the device of melting crystal the position of solid-liquid interface, comprise pedestal, it is characterized in that, one driving stem is housed on the described pedestal, and this driving stem is provided with a slide block with vertical movement about the driving stem driving work, the side connection one of slide block and the bearing of its interlock, the measurement of one upper suspension on bearing is installed with rod on the described bearing, has the through hole that runs through with excellent bottom for measuring on the bottom of described pedestal; One displacement transducer links with bearing, and when measurement changed with the location status between excellent top and the bearing, the displacement transducer image data also produced corresponding signal feedback and is used for the controller that the control driving stem moves to one.
Measure with rod because Action of Gravity Field is followed bearing and moved downward together, measure when running into solid-liquid interface with the rod stop motion, produce with bearing and separate, the location status that detects between the two by displacement transducer changes, obtain detection signal, signal feedback is realized automatically control.
Further, for avoiding outside air to enter in the airtight stove, further improve the security when measuring, can adopt following two kinds of schemes: 1) seal between the madial wall of the measurement in through hole with excellent lateral wall and through hole, described displacement transducer is fixed on the bearing; As preferably, be provided with one in the described through hole and be used for measuring with the O-ring seals that seals between excellent lateral wall and the through hole madial wall, this O-ring seals is fixed on the pedestal.2) be provided with the draw-tube that a sealing completely cuts off usefulness between described bearing and the pedestal, two end faces of draw-tube seal respectively and between the surface of the bottom surface of bearing and pedestal, and described measurement runs through draw-tube with rod; The case of one side of being located thereon is housed on the described bearing, and described displacement transducer is installed on the case, seals between the bottom surface of case and the surface of bearing.Draw-tube plays sealing function in motion process, when elongating or shortening, guarantee space in the pipe be in always with pipe outside the state that completely cuts off.
Further, a fluoroscopic observation window is housed on the described case, the convenient observation measured with the disengaging situation of rod with bearing, makes measuring process visual.
Further, described measurement is comprised of separable rod member and detector bar with rod, and it is "T"-shaped that rod member is, and upper suspension is on bearing, and the bottom is connected with the top of detector bar.Measurement is made on the structure with rod and is spliced by separable two parts, makes things convenient for the loss of detector bar to change.Certainly, rod member and detector bar also can be made of one.According to the difference of surveying the melting crystalline material, the detector bar material can be selected high temperature resistant refractory metal or its alloy materials such as tungsten, molybdenum, lanthanum, also can select the high temperature resistant nonmetallic materials such as graphite, glass, silicon nitride, silit class pottery, also resistant to elevated temperatures material can be attached to the detector bar top layer by coating way.Selecting of detector bar Material selection or surface coating can according to the difference of the melting crystal of surveying, follow not being melted, not undertaken by the principle of invading profit, not reacting to each other.
Further, the bottom of described driving stem is connected with a drive unit, and described controller is connected with drive unit, controls forward and reverse motion of driving stem by drive unit.Described drive unit can be the equipment such as motor, cylinder or oil cylinder.
Use above-mentioned self-feeding type to survey the detection method of the device of melting crystal the position of solid-liquid interface, it makes first slide block keep relative consistent speed to enter in the melting crystalloid fluid with measuring with rod, in case measure with the rod bottom and touch solid-liquid interface, then measure with producing relative position between rod and the slide block and change, the displacement transducer image data also produces corresponding signal feedback to controller, the counter motion of controller control driving stem, controller is determined the position of solid-liquid interface according to the data that gather.
Further, during detection the movement velocity of slide block is done segmentation control, namely control detector bar fast near crystal melting liquid level, then under low-speed conditions, come in contact with solid-liquid interface, safety in crystal growth quality and the stove is accomplished effective guarantee.
Further, described controller and crystal prepare the control system integration of stove, reading numerical values is controlled and recorded to the man machine operation interface of starting outfit, measuring process whole-course automation operation, and detection speed can control adjustable joint, can also arrange voluntarily and detect the interval time of carrying out, easy and simple to handle reliable, the measurement result accuracy is high, and data read conveniently, use with more friendly mode handled easily person.
The related using method of the utility model is generally used for in heat-exchanging method (HEM) and the deriving method take it as prototype.
But sniffer automatic detection melting crystal the position of solid-liquid interface described in the utility model, accuracy of measurement is high, and is easy to operate, safe during measurement, prepares crystal oven at present heat-exchanging method and obtained very good result of use.Any stage that the automatic detection device that the utility model relates to and using method thereof are made at crystal is all applicable, and the position height by the crystal detection solid-liquid interface realizes the control of production technology and adjusts and optimize, can improve the crystal product quality.
Description of drawings
Fig. 1 is that the utility model detection rod does not touch solid-liquid interface, the synoptic diagram when rod member and bearing are fitted.
Fig. 2 is that the utility model detection rod touches solid-liquid interface, the synoptic diagram when rod member separates with bearing.
Fig. 3 is the structural representation that the fluoroscopic observation window is installed at the utility model case.
Fig. 4 measures structural representation direct with rod and the pedestal sealing for the hermetically-sealed construction with draw-tube changes into.
Fig. 5 is for measuring the enforcement synoptic diagram of the silicon crystal speed of growth.
Fig. 6 is for realizing the enforcement synoptic diagram of sapphire crystal seed crystal fusing protection.
Among the figure: 1-slide block, 2-pedestal, 3-driving stem, 4-bearing, the 5-draw-tube, 6-case, 7-through hole, 8-displacement transducer, the 9-rod member, 10-detector bar, space in the 11-pipe, the 12-liquid crystal, 13-solid crystals, 14-controller, the measurement rod that 15-is combined into by detector bar 10 and rod member 9, the slide block device that 16-is combined into by bearing 4 and slide block 1,17-fluoroscopic observation window, the 18-crucible, 19-motor, the solid-state seed crystal of 21-sapphire.
Embodiment
Sniffer shown in Fig. 1-2 is equipped with rotating driving stem 3 on the pedestal 2, this driving stem 3 is provided with a slide block 1 with vertical movement about the driving stem rotation work, and a side of slide block 1 connects the bearing 4 with its interlock.The measurement of one upper suspension on bearing rod 15 is installed on the described bearing 4, and measurement is comprised of separable rod member 9 and detector bar 10 with excellent 15, and rod member 9 is "T"-shaped, and upper suspension is on bearing, and the bottom is connected with the top of detector bar.
Have the through hole 7 that runs through with excellent bottom for measuring on the bottom of described pedestal 2; Displacement transducer 8 is provided with the draw-tube 5 of the isolated usefulness of a sealing with bearing 4 interlocks between described bearing and the pedestal, two end faces of draw-tube 5 seal respectively and between the surface of the bottom surface of bearing 4 and pedestal 2, and described measurement runs through draw-tube with rod.The case 6 of the side of being located thereon is housed on the described bearing 4, and described displacement transducer 8 is installed on the case, seals between the bottom surface of case and the surface of bearing.When measurement changed with the location status between excellent top and the bearing, displacement transducer 8 image data also produced corresponding signal feedback and are used for the controller 14 that the control driving stem moves to one.
As shown in Figure 3, on the described case 6 fluoroscopic observation window 17 is housed.
As shown in Figure 4, change the hermetically-sealed construction of draw-tube among Fig. 1-2 into measurement is direct with rod and pedestal seals structure, be provided with one in the described through hole 7 and be used for measuring with the O-ring seals that seals between excellent lateral wall and the through hole madial wall, this O-ring seals is fixed on the pedestal.Described displacement transducer 8 is fixed on the bearing 4.
Sniffer of the present utility model can be used for the occasion that various needs are surveyed solid-liquid interface, for convenience of description, below in conjunction with the measurement of crystal silicon rate of crystalline growth, the technical solution of the utility model is set forth.
As shown in Figure 5, be provided with the crucible 18 that holds the crystal silicon raw material in the crystal silicon ingot furnace, the crucible upper strata is the liquid crystal 12 of molten state, and lower floor is the solid crystals 13 of long crystal solidification, and this moment, technique was in the long brilliant stage after the fusing.The device of self-feeding type detection melting crystal the position of solid-liquid interface is installed on the body of heater top shown in Fig. 1-2.
Parts that just begun slide block device 16 and be attached thereto and measure the null position that all is in the top with excellent 15 etc.When proceeding to certain phase, long crystalline substance begins to detect the solid-liquid interface height, directly by operation interface start detection program, 19 runnings of programmed control drive motor, under the drive of motor, slide block 1 on the driving stem 3 begins to move downward with bearing 4, hang on the bearing 4 rod member 9 and with it fixing detector bar 10 under Action of Gravity Field, can follow bearing 4 and move downward together and probe in the stove.When liquid crystal 12 is passed in detector bar 10 lower ends, when touching solid crystals 13, because drag effect namely can stop to move downward, and this moment, motor 19 still drove, fixing displacement transducer 8 devices such as grade still can continue downward operation on bearing 4 and its top case 6, and rod member 9 upper ends will break away from bearing 4 like this, and displacement transducer 8 changes with rod member 9 head position states, produce signal, illustrate to have arrived the solid-liquid interface position of required detection this moment.Signal is processed through controller 14, order about motor 19 antiports, drive the slide block 1 on the driving stem 3 and be fixedly connected on the slide block 1 device all up motion get back to zero-bit, with Time Controller 14 records and on screen the mode with chart or numeral show the solid-liquid interface height number that just now detected.
From beginning to detect and get back to zero-bit, finished the detection of a crystal growth interface height, by shirtsleeve operation, can record the position of the crystal solid-liquid interface that is in different times, grow up to the height of crystal by the detection of certain hour interval, thereby can extrapolate the speed of growth of crystal, just can distribute to regulate rate of crystalline growth by adjusting temperature of thermal field, perhaps extrapolate actual thermal field distribution situation by rate of crystalline growth, work out the technology controlling and process mode of the advantage of having more.
The below is example in conjunction with sapphire crystal seed crystal fusing protection again, and the technical solution of the utility model is further described.
As shown in Figure 6, sapphire crystal is made in the stove and is provided with the crucible 18 that holds crystal raw material, and the crucible upper strata is the liquid crystal 12 of melting state, and the middle layer is the solid crystals 13 of not yet melting, bottom is solid-state sapphire seed crystal 21, and this moment, technique was in the melting stage.The device of self-feeding type detection melting crystal the position of solid-liquid interface is installed on the body of heater top shown in Fig. 1-2.
Parts that just begun slide block device 16 and be attached thereto and measure the null position that all is in the top with excellent 15 etc.When proceeding to certain phase, fusing begins to detect the solid-liquid interface height, directly by operation interface start detection program, 19 runnings of programmed control drive motor, under the drive of motor, slide block 1 on the linear motion unit 20 begins to move downward with bearing 4, hang on the bearing 4 rod member 9 and with it fixing detector bar 10 under Action of Gravity Field, can follow bearing 4 and move downward together and probe in the stove.When liquid crystal 12 is passed in detector bar 10 lower ends, when touching solid crystals 13, because drag effect namely can stop to move downward, and this moment, motor 19 still drove, fixing displacement transducer 8 devices such as grade still can continue downward operation on bearing 4 and its top case 6, and rod member 9 upper ends will break away from bearing 4 like this, and displacement transducer 8 changes with rod member 9 head position states, produce signal, illustrate to have touched the solid-liquid interface position this moment.Signal is processed through controller 14, orders about motor 19 antiports, drive the slide block 1 on the driving stem 3 and be fixedly connected on the slide block 1 device all up motion get back to zero-bit, record the solid-liquid interface height number that just now detected with Time Controller 14.
Detect the crystal height of once not melting every a period of time, all melt to solid crystals 13, what detector bar 10 lower ends touched is exactly the solid-state interface of sapphire seed crystal 21, when survey interfacial level numerical value during a little less than the thickness of placement sapphire seed crystal 21, can reduce heater power and increase simultaneously bottom heat exchange amount, be the long brilliant stage with technique by melting transition.
In the unfused crystal height of fusing late detection; redirect technique is transferred to long brilliant by fusing when the bottom seed crystal has just begun to melt; can protect inculating crystal layer not by too much thawing; make the growth of crystal can follow the arrangement of sapphire seed crystal 21; thereby grow the little required monocrystal of the consistent dislocation desity of direction, measured result also is simultaneously the important parameter as automatic control skip technique.
Claims (7)
1. a self-feeding type is surveyed the device of melting crystal the position of solid-liquid interface, comprise pedestal (2), it is characterized in that, one driving stem (3) is housed on the described pedestal (2), this driving stem (3) is provided with a slide block (1) with vertical movement about the driving stem driving work, the one side connection one of slide block (1) and the bearing (4) of its interlock, described bearing (4) is upper installs the measurement of a upper suspension on bearing with rod (15), has the through hole (7) that runs through with excellent bottom for measuring on the bottom of described pedestal (2); One displacement transducer (8) links with bearing (4), when measurement changed with the location status between excellent top and the bearing, displacement transducer (8) image data also produced corresponding signal feedback and is used for the controller (14) that the control driving stem moves to one.
2. self-feeding type according to claim 1 is surveyed the device of melting crystal the position of solid-liquid interface, it is characterized in that, seal between the madial wall of measurement in through hole with excellent lateral wall and through hole, described displacement transducer (8) is fixed on the bearing (4).
3. self-feeding type according to claim 2 is surveyed the device of melting crystal the position of solid-liquid interface, it is characterized in that, be provided with one in the described through hole (7) and be used for measuring with the O-ring seals that seals between excellent lateral wall and the through hole madial wall, this O-ring seals is fixed on the pedestal.
4. self-feeding type according to claim 1 is surveyed the device of melting crystal the position of solid-liquid interface, it is characterized in that, be provided with the draw-tube (5) of the isolated usefulness of a sealing between described bearing and the pedestal, two end faces of draw-tube (5) seal respectively and between the surface of the bottom surface of bearing (4) and pedestal (2), and described measurement runs through draw-tube with rod; The case (6) of one side of being located thereon is housed on the described bearing (4), and described displacement transducer (8) is installed on the case, seals between the bottom surface of case and the surface of bearing.
5. self-feeding type according to claim 4 is surveyed the device of melting crystal the position of solid-liquid interface, it is characterized in that, a fluoroscopic observation window (17) is housed on the described case (6).
According to claim 2 or 4 described self-feeding types survey the device of melting crystal the position of solid-liquid interfaces, it is characterized in that, described measurement is comprised of separable rod member (9) and detector bar (10) with rod (15), rod member (9) is "T"-shaped, upper suspension is on bearing, and the bottom is connected with the top of detector bar.
According to claim 2 or 4 described self-feeding types survey the device of melting crystal the position of solid-liquid interfaces, it is characterized in that, the bottom of described driving stem is connected with a drive unit (19), described controller (14) is connected with drive unit (19), controls forward and reverse motion of driving stem by drive unit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220505930 CN202793517U (en) | 2012-09-28 | 2012-09-28 | Self-fed type device for detecting molten crystal solid-liquid interface location |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220505930 CN202793517U (en) | 2012-09-28 | 2012-09-28 | Self-fed type device for detecting molten crystal solid-liquid interface location |
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| CN202793517U true CN202793517U (en) | 2013-03-13 |
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| CN 201220505930 Expired - Fee Related CN202793517U (en) | 2012-09-28 | 2012-09-28 | Self-fed type device for detecting molten crystal solid-liquid interface location |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102879052A (en) * | 2012-09-28 | 2013-01-16 | 杭州精功机电研究所有限公司 | Automatic-feed detection device for melt crystal solid and liquid interface position and detection method thereof |
| CN104062447A (en) * | 2014-06-23 | 2014-09-24 | 中国核动力研究设计院 | Automatic device for probe stepping and precision positioning |
-
2012
- 2012-09-28 CN CN 201220505930 patent/CN202793517U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102879052A (en) * | 2012-09-28 | 2013-01-16 | 杭州精功机电研究所有限公司 | Automatic-feed detection device for melt crystal solid and liquid interface position and detection method thereof |
| CN104062447A (en) * | 2014-06-23 | 2014-09-24 | 中国核动力研究设计院 | Automatic device for probe stepping and precision positioning |
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| C14 | Grant of patent or utility model | ||
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| C56 | Change in the name or address of the patentee | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 310018, No. 2, No. 9, No. 17, Hangzhou economic and Technological Development Zone, Hangzhou, Zhejiang, Jianggan District Province, fourth floors Patentee after: Mstar Technology Ltd in Hangzhou Address before: 310018, No. 2, No. 9, No. 17, Hangzhou economic and Technological Development Zone, Hangzhou, Zhejiang, Jianggan District Province, fourth floors Patentee before: Hangzhou Jinggong Mechanical & Electrical Research Institute Co., Ltd. |
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Effective date of registration: 20170605 Address after: 312030 Zhejiang city of Shaoxing province Jianhu road Keqiao District No. 1809 Patentee after: Zhejiang Jinggong Science & Technology Co., Ltd. Address before: 310018, No. 2, No. 9, No. 17, Hangzhou economic and Technological Development Zone, Hangzhou, Zhejiang, Jianggan District Province, fourth floors Patentee before: Mstar Technology Ltd in Hangzhou |
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Granted publication date: 20130313 Termination date: 20180928 |
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| CF01 | Termination of patent right due to non-payment of annual fee |