CN202785991U

CN202785991U - Pore plate structure capable of reducing substrate deformation

Info

Publication number: CN202785991U
Application number: CN2012203874390U
Authority: CN
Inventors: 柯安
Original assignee: CHYI DING TECHNOLOGIES Co Ltd
Current assignee: CHYI DING TECHNOLOGIES Co Ltd
Priority date: 2012-08-06
Filing date: 2012-08-06
Publication date: 2013-03-13
Anticipated expiration: 2022-08-06

Abstract

The utility model provides a pore plate structure capable of reducing substrate deformation. The pore plate structure comprises an air conditioner, an air supplying chamber and at least one pore plate, wherein the air supplying chamber and the air conditioner are connected with each other through a circulation pipeline, the air supplying chamber can be arranged on a plafond of a dustless chamber, accommodating spaces are arranged in the air supplying chamber, the lower part of the air supplying chamber is provided with an opening, the pore plate is fixedly arranged at the opening of the lower part of the air supplying chamber and provided with a plurality of air flow pores, and included angles exist between the air flow pores and the pore plate and are less than 90 degrees. The included angles exist between the air flow pores and the pore plate and are less than 90 degrees, namely, inclination angles exist between the air flow pores and the pore plate, so that the bending deformation of a glass substrate can be reduced, the deficiency of product yield reduction caused due to the fact that the existing glass substrate is easily subjected to processing procedure error because of the bending deformation is avoided, and then, the pore plate structure can have an effect on product yield increase.

Description

Can reduce the AND DEWATERING FOR ORIFICE STRUCTURE of substrate distortion

Technical field

The utility model is a kind of AND DEWATERING FOR ORIFICE STRUCTURE that reduces the substrate distortion, espespecially can make air-flow that its airflow hole of described orifice plate blows out with an angle of inclination but not vertical direction blows to glass substrate, the flexural deformation of described glass substrate can be reduced, and then the effect of improving product yield can be reached.

Background technology

The dust free chamber 10 of general semi-conductor or panel industry, such as No. the 201217719th, TaiWan, China patent disclosure communique " clean room ", see also shown in Figure 1, it is by peace and quiet regional 11, give air chamber 12, air conditioning machinery 13, air cycle road 16, strainer 14 forms with several nozzle plates 15, wherein said peace and quiet regional 11 are provided with producing apparatus M, be located at described peace and quiet regional 11 ceiling for air chamber 12, described air cycle road 16 is to be connected with air conditioning machinery 13 to air chamber 12, described strainer 14 is provided in a side of on the described air cycle road 16 again, 15 of described nozzle plates are fixedly installed on to air chamber 12 lower opening, and described nozzle plate 15 is provided with several nozzles 151, be provided with nozzle 151 by described nozzle plate 15, and the wind speed can strengthen air and blown out by described nozzle 151 time with arrive distance, can effectively the heating of producing apparatus M be removed, simultaneously also can reduce the air global cycle amount of described dust free chamber, and then can make described " clean room " can reach the purpose of better air cycle effect.

Described existing " clean room ", though can reach the purpose of better air cycle effect, but described nozzle plate 15 its nozzles 151 are vertically downward, please cooperate again consult shown in Figure 2, when it applies to the dust free chamber 10 of panel industry, although the air-flow 21 that is blown out by described nozzle 151 also can reach the effect of cooling off described glass substrate 2, but described air-flow 21 can vertically blow to described glass substrate 2 surfaces with an angle of 90 degrees, so make easily described glass substrate 2 be subject to larger vertical power, cause described glass substrate 2 to produce larger flexural deformation, cause glass substrate 2 in the processing procedure in each stage, to form error, and then cause product yield to reduce, therefore improved necessity arranged in fact.

Therefore, how the disappearance such as above-mentioned is forgone, be the place of the technical difficulties that this case creator institute wish solves.

Summary of the invention

Because existing " clean room ", because easily making glass substrate be subjected to larger vertical power flexural deformation, cause fabrication errors and product yield to reduce, therefore the purpose of this utility model is to provide a kind of AND DEWATERING FOR ORIFICE STRUCTURE that reduces the substrate distortion, by having angle between described airflow hole and the orifice plate, and the angle of described angle is less than 90 degree, also be to have an angle of inclination between described airflow hole and the orifice plate, and can make air-flow that its airflow hole of described orifice plate blows out with an angle of inclination but not vertical direction blows to glass substrate, can reduce the flexural deformation of described glass substrate, avoid existing glass substrate to form fabrication errors because of flexural deformation easily, the disappearance that causes product yield to reduce, and then can make the utility model can reach the effect of improving product yield.

For reaching the above object, the utility model provides a kind of AND DEWATERING FOR ORIFICE STRUCTURE that reduces the substrate distortion, and it comprises:

One air conditioning machinery;

One gives air chamber, and described giving between air chamber and the air conditioning machinery is connected with circulation line, and the described air chamber of giving can be for the ceiling that is arranged at dust free chamber, and described giving in the air chamber is provided with accommodation space, and the described air chamber below of giving is provided with opening again;

At least one orifice plate, described orifice plate are fixedly arranged on described opening part to the air chamber below, and described orifice plate is provided with several airflow holes, and has angle between described airflow hole and the orifice plate, and the angle of described angle is less than 90 degree again.

Wherein, described airflow hole two ends form inlet mouth and air outlet respectively at upper surface and the lower surface of described orifice plate.

Wherein, each described airflow hole is tilted to further being radial periphery direction towards described orifice plate the air outlet by inlet mouth.

Wherein, also contain at least one filter screen, and described filter screen is fixedly arranged on described in the accommodation space of air chamber.

By having angle between described airflow hole and the orifice plate, and the angle of described angle is less than 90 degree, also be to have an angle of inclination between described airflow hole and the orifice plate, and can make air-flow that its airflow hole of described orifice plate blows out with an angle of inclination but not vertical direction blows to glass substrate, can reduce the flexural deformation of described glass substrate, avoid existing glass substrate to form fabrication errors because of flexural deformation easily, the disappearance that causes product yield to reduce, and then can make the utility model can reach the effect of improving product yield.

Description of drawings

Fig. 1 is existing configuration diagram.

Fig. 2 is the existing diastrophic action synoptic diagram of glass substrate that causes.

Fig. 3 is configuration diagram of the present utility model.

Fig. 4 is the part synoptic diagram of its orifice plate of the utility model.

Fig. 5 is action synoptic diagram of the present utility model.

Description of reference numerals: 10-dust free chamber; The peace and quiet zone of 11-; 12-is to air chamber; The 13-air conditioning machinery; The 14-strainer; The 15-nozzle plate; The 151-nozzle; 16-air cycle road; The 2-glass substrate; The 21-air-flow; The 3-air conditioning machinery; The 35-circulation line; 4-is to air chamber; The 41-accommodation space; The 42-opening; The 5-filter screen; The 6-orifice plate; The 61-airflow hole; The 611-inlet mouth; The 612-air outlet; The 62-angle; The 7-dust free chamber; The M-producing apparatus.

Embodiment

For the effect that makes convenient simple and direct understanding other features of the present utility model of your auditor and advantage and reach can more manifest, hereby the utility model is cooperated accompanying drawing, be described in detail as follows:

See also shown in Figure 3ly, the utility model provides a kind of AND DEWATERING FOR ORIFICE STRUCTURE that reduces substrate distortion, and it comprises:

One air conditioning machinery 3;

One gives air chamber 4, and described giving between air chamber 4 and the air conditioning machinery 3 is connected with circulation line 35, and the described air chamber 4 of giving can be for the ceiling that is arranged at dust free chamber 7, and described giving in the air chamber 4 is provided with accommodation space 41, describedly again is provided with opening 42 to air chamber 4 belows;

At least one filter screen 5, described filter screen 5 are fixedly arranged on described in air chamber 4 its accommodation spaces 41;

At least one orifice plate 6, described orifice plate 6 is fixedly arranged on described opening 42 places to air chamber 4 belows, please cooperate again consult shown in Figure 4, described orifice plate 6 is provided with several airflow holes 61, please consult again shown in Figure 3, and has angle 62 between described airflow hole 61 and the orifice plate 6, the angle of described angle 62 is less than 90 degree again, in addition, please consult again shown in Figure 4, described airflow hole 61 two ends can form inlet mouth 611 and air outlet 612 respectively at upper surface and the lower surface of described orifice plate 6, and each described airflow hole 61 is tilted to can further being radial periphery direction towards described orifice plate 6 air outlet 612 by inlet mouth 611, thus, can guarantee all can be radial outside dispersion by the air that flow out the air outlet 612 of described airflow hole 61;

See also Fig. 3, shown in Figure 5, be provided with several airflow holes 61 by described orifice plate 6, and has angle 62 between described airflow hole 61 and the orifice plate 6, the angle of described angle 62 is less than 90 degree again, also be to have an angle of inclination between described airflow hole 61 and the orifice plate 6, and can make air-flow 21 that described orifice plate 6 its airflow holes 61 blow out with an angle of inclination but not vertical direction blows to glass substrate 2, and as shown in Figure 5, and make described air-flow 21 flow through larger areal extent and farther distance at described glass substrate 2, can reach better cooling performance to described glass substrate 2, also can reduce simultaneously the vertical power that described glass substrate 2 bears, and can reduce the flexural deformation of described glass substrate 2, avoid existing glass substrate 2 to form fabrication errors because of flexural deformation easily, the disappearance that causes product yield to reduce, and then can make the utility model can reach the effect of improving product yield; In addition, please cooperate again consult shown in Figure 4, tilted to further being radial periphery direction towards described orifice plate 6 air outlet 612 by inlet mouth 611 by each described airflow hole 61 again, and can guarantee that all air-flows 21 all are that the direction that spreads outward blows to described glass substrate 2, except the glass substrate 2 that can make different positions all can reach average cooling performance, also can avoid the air-flow 21 of different directions to cause payment or sinuous flow because of staggered or contact, cause the problem to the cooling performance variation of described glass substrate 2, and then can make the utility model can have the effect that reaches better cooling performance concurrently.

For making the utility model more show its progressive and practicality, hereby as follows with one comparative analysis of existing do:

Xian You Ji Shu ﹕

1, air-flow vertically blows to glass substrate, causes glass substrate to have larger flexural deformation.

2, product yield reduces.

The utility model You Dian ﹕

1, air-flow tool angle of inclination blows to glass substrate, can effectively reduce the flexural deformation of glass substrate.

But 2 improving product yields.

3, can reach better cooling performance to glass substrate.

Claims

1. one kind can be reduced the AND DEWATERING FOR ORIFICE STRUCTURE that substrate is out of shape, and it is characterized in that it comprises:

One air conditioning machinery;

One gives air chamber, and described giving between air chamber and the air conditioning machinery is connected with circulation line, describedly is arranged at the ceiling of dust free chamber to air chamber, and described giving in the air chamber is provided with accommodation space, and the described air chamber below of giving is provided with opening again;

2. the AND DEWATERING FOR ORIFICE STRUCTURE that reduces the substrate distortion according to claim 1 is characterized in that, described airflow hole two ends form inlet mouth and air outlet respectively at upper surface and the lower surface of described orifice plate.

3. the AND DEWATERING FOR ORIFICE STRUCTURE that reduces the substrate distortion according to claim 2 is characterized in that, each described airflow hole is tilted to further being radial periphery direction towards described orifice plate the air outlet by inlet mouth.

4. each described AND DEWATERING FOR ORIFICE STRUCTURE that reduces the substrate distortion in 3 according to claim 1 is characterized in that, also contain at least one filter screen, and described filter screen is fixedly arranged on described in the accommodation space of air chamber.