CN202778186U - Washing rectifying tower for treating trichlorosilane synthetic tail gas - Google Patents
Washing rectifying tower for treating trichlorosilane synthetic tail gas Download PDFInfo
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- CN202778186U CN202778186U CN2012204754521U CN201220475452U CN202778186U CN 202778186 U CN202778186 U CN 202778186U CN 2012204754521 U CN2012204754521 U CN 2012204754521U CN 201220475452 U CN201220475452 U CN 201220475452U CN 202778186 U CN202778186 U CN 202778186U
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Abstract
The utility model discloses a washing rectifying tower for treating a trichlorosilane synthetic tail gas. The washing rectifying tower comprises a tower body; a synthetic tail gas inlet is arranged at the lower part of the tower body, a washed gas outlet is arranged at the upper part of the tower body, the interior of the tower body comprises a tower plate region, a sieve plate region and a baffle region which are sequentially connected from top to bottom, wherein the baffle region is arranged above the synthetic tail gas inlet and is internally provided with a zig-zag baffle in the radial direction, and an opening is arranged on the zig-zag baffle and used for removing solid impurities in the synthetic tail gas; a sieve plate region is internally provided with a sieve plate; and a tower plate region is internally provided with multiple layers of tower plates, and a downflow weir is arranged between the adjacent tower plates. According to the washing rectifying tower provided by the utility model, the washing and rectifying seperation of the synthetic tail gas are combined, the washed gas coming out of the upper part of the washing rectifying tower only contains very few metal impurities, the blocking on a follow-up system caused by the deposition of the metal impurities can be reduced, and the operational stability and continuity of the washing rectifying tower are increased.
Description
Technical field
The utility model relates to the trichlorosilane synthesis technical field, and more specifically, the utility model relates to a kind of washing rectifying column for the treatment of technique of trichlorosilane synthetic tail gas.
Background technology
Polysilicon is the crucial raw material of integrated circuit and photovoltaic generation, is the important content of the preferential theme of National Program for Medium-to Long-term Scientific and Technological Development manufacture field basic raw material.The industrialization technology of world's production of polysilicon mainly contains two kinds of techniques, namely improves Siemens process and silane thermal decomposition process technique.With productivity ratio, the improvement Siemens process accounts for 82% of aggregated capacity, and silane thermal decomposition process accounts for 18%, and advanced production of polysilicon technology is monopolized by a few company of the states such as U.S., day, moral always.And trichlorosilane has another name called trichlorosilane (SiHCl
3) for improveing the primary raw material of Siemens process production polysilicon.
The method of at present technique of trichlorosilane synthetic tail gas processing is mainly dry method dust and the dry and wet way dedusting combines, the shortcoming of dry method dust is having relatively high expectations to gas-solid separation equipment, and metal impurities adhere to tube wall easily, affect the continuity of system's operation, and the mode that adopts the dry and wet way dedusting to combine, can suitably reduce the separation requirement of gas-solid separation equipment, but its wet dedusting tower mostly is greatly scrubbing tower, gas still contains a large amount of metal impurities after the washing, affects the continuous and steady operation of follow-up system.
The utility model content
The utility model one of is intended to solve the problems of the technologies described above at least to a certain extent or provides at least a kind of useful commerce to select.For this reason, a purpose of the present utility model is to propose that a kind of stability is strong, continuity good, impurity-eliminating effect is significantly for the treatment of the washing rectifying column of technique of trichlorosilane synthetic tail gas.
The washing rectifying column for the treatment of technique of trichlorosilane synthetic tail gas according to the utility model example, described washing rectifying column comprises tower body, described tower body bottom is provided with the synthesis tail gas import, gas exported after tower body top was provided with washing, comprise the column plate district, sieve plate district and the baffle plate district that connect successively from top to bottom in the described tower body, wherein, described baffle plate district is positioned at described synthesis tail gas import top, described baffle plate radially arranges the herringbone baffle plate in the district, and described herringbone baffle plate is provided with opening to remove the solid impurity in the synthesis tail gas; Described sieve plate is provided with sieve plate in the district, and described sieve plate will screen to remove solid impurity remaining in the synthesis tail gas through the synthesis tail gas that described baffle plate district processes; Described column plate is provided with the multilayer column plate in the district, is provided with downflow weir between the adjacent tray, and metal impurities wherein will wash to remove through the synthesis tail gas that described sieve plate district processes in described column plate district.
The washing rectifying column for the treatment of technique of trichlorosilane synthetic tail gas according to the utility model example, the washing of synthesis tail gas separated with rectifying combine, with less wash out amount solid impurity and metal impurities are discharged, reduced the processing load of supplies consumption and follow-up system; After the washing out of washing rectifier, only contain the denier metal impurities the gas, can reduce because the metal impurities deposition to the obstruction of follow-up system, has improved operational stability and the continuity of washing rectifying column.
In addition, the washing rectifying column for the treatment of technique of trichlorosilane synthetic tail gas according to the above-mentioned example of the utility model can also have following additional technical characterictic:
Described herringbone baffle plate is provided with 3～5 layers, and each layer herringbone baffle plate axially is alternately distributed along tower body.
Described sieve plate is provided with 5～10 layers.
The sieve diameter of described sieve plate is 8～14mm, and described sieve plate is along the tower body axial distribution, and the sieve diameter of the sieve plate that distributes from top to bottom increases successively.
Column plate is sieve tray or solid tongue tower tray in the described column plate district.
Described column plate is provided with 10～20 layers.
Described tower body bottom is provided with leakage fluid dram to discharge the raffinate that produces through washing rectifying.
The operating pressure of described washing rectifying column is 0.15～0.25MPa.
The operating temperature of described washing rectifying column is 50～90 ℃.
Additional aspect of the present utility model and advantage in the following description part provide, and part will become obviously from the following description, or recognize by practice of the present utility model.
Description of drawings
Above-mentioned and/or additional aspect of the present utility model and advantage are from obviously and easily understanding becoming the description of example in conjunction with following accompanying drawing, wherein:
Fig. 1 is the structural representation for the treatment of the washing rectifying column of technique of trichlorosilane synthetic tail gas according to the utility model example;
Fig. 2 is the treatment system schematic diagram for the treatment of the technique of trichlorosilane synthetic tail gas of the washing rectifying column of technique of trichlorosilane synthetic tail gas that has according to the utility model example;
Fig. 3 is the process flow figure according to the treatment system of technique of trichlorosilane synthetic tail gas described in Fig. 2.
The specific embodiment
The below describes example of the present utility model in detail, and the example of described example is shown in the drawings, and wherein identical or similar label represents identical or similar element or the element with identical or similar functions from start to finish.Be exemplary below by the example that is described with reference to the drawings, be intended to for explaining the utility model, and can not be interpreted as restriction of the present utility model.
In description of the present utility model, it will be appreciated that, term " " center "; " vertically "; " laterally "; " length "; " width "; " thickness ", " on ", D score, " front ", " afterwards ", " left side ", " right side ", " vertically ", " level ", " top ", " end " " interior ", " outward ", " clockwise ", orientation or the position relationship of indications such as " counterclockwise " are based on orientation shown in the drawings or position relationship, only be for convenience of description the utility model and simplified characterization, rather than device or the element of indication or hint indication must have specific orientation, with specific orientation structure and operation, therefore can not be interpreted as restriction of the present utility model.
In addition, term " first ", " second " only are used for describing purpose, and can not be interpreted as indication or hint relative importance or the implicit quantity that indicates indicated technical characterictic.Thus, one or more these features can be expressed or impliedly be comprised to the feature that is limited with " first ", " second ".In description of the present utility model, the implication of " a plurality of " is two or more, unless clear and definite concrete restriction is arranged in addition.
In the utility model, unless clear and definite regulation and restriction are arranged in addition, broad understanding should be done in the terms such as term " installation ", " linking to each other ", " connection ", " fixing ", for example, can be to be fixedly connected with, and also can be to removably connect, or connect integratedly; Can be mechanical connection, also can be to be electrically connected; Can be directly to link to each other, also can indirectly link to each other by intermediary, can be the connection of two element internals.For the ordinary skill in the art, can understand as the case may be the concrete meaning of above-mentioned term in the utility model.
In the utility model, unless clear and definite regulation and restriction are arranged in addition, First Characteristic Second Characteristic it " on " or D score can comprise that the first and second features directly contact, can comprise that also the first and second features are not directly contacts but by the other feature contact between them.And, First Characteristic Second Characteristic " on ", " top " and " above " comprise First Characteristic directly over Second Characteristic and oblique upper, or only represent that the First Characteristic level height is higher than Second Characteristic.First Characteristic Second Characteristic " under ", " below " and " below " comprise First Characteristic directly over Second Characteristic and oblique upper, or only represent that the First Characteristic level height is less than Second Characteristic.
Below in conjunction with the washing rectifying column for the treatment of technique of trichlorosilane synthetic tail gas of accompanying drawing specific descriptions according to the utility model example.
Particularly, as shown in Figure 1, comprise according to the washing rectifying column for the treatment of technique of trichlorosilane synthetic tail gas of the utility model example: tower body 10.
Wherein, baffle plate district 40 is positioned at synthesis tail gas import 11 tops, and herringbone baffle plate 41 radially is set in the baffle plate district 40, and herringbone baffle plate 41 is provided with opening 411 to remove the solid impurity in the synthesis tail gas.
Be provided with sieve plate 31 in the sieve plate district 30, sieve plate 31 will screen to remove solid impurity remaining in the synthesis tail gas through the synthesis tail gas that baffle plate district 40 processes.
Be provided with multilayer column plate 21 in the column plate district 20, be provided with downflow weir 22 between the adjacent tray 21, metal impurities wherein will wash to remove through the synthesis tail gas that sieve plate district 30 processes in column plate district 20.
Thus, the washing rectifying column for the treatment of technique of trichlorosilane synthetic tail gas according to the utility model example, the washing of synthesis tail gas separated combining with rectifying, with less wash out amount solid impurity and metal impurities are discharged, reduced the processing load of supplies consumption and follow-up system; After the washing out of washing rectifier, only contain the denier metal impurities the gas, can reduce because the metal impurities deposition to the obstruction of follow-up system, has improved operational stability and the continuity of washing rectifying column.
In one example, herringbone baffle plate 41 is provided with 3～5 layers, and each layer herringbone baffle plate 41 axially is alternately distributed along tower body 10.Thus, most solid particle polluter in the technique of trichlorosilane synthetic tail gas can be removed in this zone, it is entered in the cleaning solution discharge as raffinate.
Further, in one example, sieve plate 31 is provided with 5～10 layers.Advantageously, in one example, the sieve diameter of sieve plate 31 is 8～14mm, and sieve plate 31 is along tower body 10 axial distribution, and the sieve diameter of the sieve plate 31 that distributes from top to bottom increases successively.Thus, solid impurity remaining in the technique of trichlorosilane synthetic tail gas and the metal impurities of fraction can be removed in this zone, can avoid the solid particle polluter in the synthesis tail gas that its upper area is resulted in blockage simultaneously.
Selection about the column plate 21 in the column plate district 20 does not have particular restriction, sieve tray or the solid tongue tower tray that for example can commonly use for those of ordinary skills.Preferably, in one example, column plate 21 is provided with 10～20 layers.Thus, the most of metal impurities in the technique of trichlorosilane synthetic tail gas can be removed in this zone, the metals content impurity that washs in the rear gas is enough hanged down consequently still can not deposit and blocking pipe under the state of deep cooling.
Advantageously, in one example, tower body 10 bottoms are provided with leakage fluid dram 13 to discharge the raffinate that produces through washing rectifying.Thus, the solid particle polluter of removing in the baffle plate district 40 enters and can be used as raffinate behind the cleaning solution and discharge from leakage fluid dram 13.
In order to guarantee the normal operation of the utility model washing rectifying column, and guarantee dust removal rate, preferably, in one example, the operating pressure that can control described washing rectifying column is 0.15～0.25MPa, and operating temperature is 50～90 ℃.
The treatment system for the treatment of the technique of trichlorosilane synthetic tail gas of the washing rectifying column of technique of trichlorosilane synthetic tail gas have according to the utility model example is described below in conjunction with Fig. 2.
Preferably, the treatment system of described technique of trichlorosilane synthetic tail gas comprises: washing rectifying column, pre-cooler 50, cryogenic system 60 and buffer unit 70.
Described washing rectifying column is used for synthesis tail gas is washed rectifying to remove solid and metal impurities wherein, obtains washing rear gas.
Gas carries out precooling after 50 pairs of washings of pre-cooler, obtains gas after the first condensate liquid and the precooling.
Wherein, described washing rectifying column is according to the described washing rectifying column for the treatment of technique of trichlorosilane synthetic tail gas of above-mentioned example.
Advantageously, in one example, described predetermined quality percentage is 15%～50%.Thus, can improve the rate of recovery of technique of trichlorosilane synthetic tail gas.
Because the washing rectifying column for the treatment of technique of trichlorosilane synthetic tail gas according to above-mentioned example has above-mentioned technique effect, therefore, the treatment system that has a technique of trichlorosilane synthetic tail gas of described washing rectifying column for the treatment of technique of trichlorosilane synthetic tail gas also has corresponding technique effect.
The below describes the handling process of the treatment system of above-mentioned technique of trichlorosilane synthetic tail gas further combined with Fig. 3.
Particularly, as shown in Figure 3, the processing method of described technique of trichlorosilane synthetic tail gas can may further comprise the steps:
A) technique of trichlorosilane synthetic tail gas is added the washing rectifying column and wash rectifying to remove solid and metal impurities wherein, obtain washing rear gas;
B) gas after the described washing is carried out precooling, obtain gas after the first condensate liquid and the precooling;
C) with gas after the described precooling and refrigerant heat exchange condensation, obtain the second condensate liquid and fixed gas, and with mixing with described the first condensate liquid after described the second condensate liquid intensification, obtain the condensation material;
D) described condensation material is carried out buffered, obtain cushioning the condensation material;
E) the buffering condensation material of selection predetermined quality percentage returns the washing rectifying column as phegma and washs rectifying.
About step a), it will be appreciated that employed washing rectifying column is according to the described washing rectifying column for the treatment of technique of trichlorosilane synthetic tail gas of above-mentioned example in the step a).Because the washing rectifying column for the treatment of technique of trichlorosilane synthetic tail gas according to above-mentioned example has above-mentioned technique effect, therefore, the processing method of described technique of trichlorosilane synthetic tail gas also has corresponding technique effect.
Particularly, the concrete processing procedure of technique of trichlorosilane synthetic tail gas in described washing rectifying column can for:
The technique of trichlorosilane synthetic tail gas that with air pressure is 0.2～0.25MPa enters in the tower from the synthesis tail gas import 11 of tower body 10 bottoms, and operating pressure is 0.15～0.25MPa in the control tower, and operating temperature is 50～90 ℃, and the cat head operating temperature is 30～50 ℃.Solid impurity in the technique of trichlorosilane synthetic tail gas and metal impurities are removed after the enrichment by baffle plate district 40, sieve plate district 30 and column plate district 20 respectively, and discharge from leakage fluid dram 13 with raffinate and to enter subsequent handling, gas then enters pre-cooler 50 and carries out precooling treatment after the washing.
In step c), the operation of gas after the described precooling and refrigerant heat exchange condensation specifically can be comprised:
C-1) with gas after the described precooling and refrigerant heat exchange condensation, obtain the second condensate liquid and fixed gas;
C-2) gas after described the second condensate liquid and the described washing is carried out heat exchange and process, make described the second condensate liquid be warming up to 30～40 ℃;
C-3) the second condensate liquid after will heating up mixes with described the first condensate liquid, obtains the condensation material.
In addition, do not have particular restriction about the processing method of described fixed gas, it can be discharged, and to control its discharge temperature be-20～-10 ℃.
D) described condensation material is carried out buffered, obtain cushioning the condensation material.
In order to improve the rate of recovery of technique of trichlorosilane synthetic tail gas, the buffering condensation material that can select predetermined quality percentage returns the washing rectifying column as phegma and washs rectifying.Preferably, in one example, described predetermined quality percentage is 15%～50%, and all the other condensate liquids are discharged and entered the subsequent purification separation circuit.
In the description of this specification, the description of reference term " example ", " some examples ", " example ", " concrete example " or " some examples " etc. means to be contained at least one example of the present utility model or the example in conjunction with specific features, structure, material or the characteristics of this example or example description.In this manual, the schematic statement of above-mentioned term not necessarily referred to identical example or example.And the specific features of description, structure, material or characteristics can be with suitable mode combinations in any one or more examples or example.
Although illustrated and described example of the present utility model, those having ordinary skill in the art will appreciate that: can carry out multiple variation, modification, replacement and modification to these examples in the situation that does not break away from principle of the present utility model and aim, scope of the present utility model is limited by claim and equivalent thereof.
Claims (9)
1. washing rectifying column for the treatment of technique of trichlorosilane synthetic tail gas, it is characterized in that, described washing rectifying column comprises tower body, described tower body bottom is provided with the synthesis tail gas import, gas exported after tower body top was provided with washing, comprise the column plate district, sieve plate district and the baffle plate district that connect successively from top to bottom in the described tower body
Wherein, described baffle plate district is positioned at described synthesis tail gas import top, and described baffle plate radially arranges the herringbone baffle plate in the district, and described herringbone baffle plate is provided with opening to remove the solid impurity in the synthesis tail gas;
Described sieve plate is provided with sieve plate in the district, and described sieve plate will screen to remove solid impurity remaining in the synthesis tail gas through the synthesis tail gas that described baffle plate district processes;
Described column plate is provided with the multilayer column plate in the district, is provided with downflow weir between the adjacent tray, and metal impurities wherein will wash to remove through the synthesis tail gas that described sieve plate district processes in described column plate district.
2. the washing rectifying column for the treatment of technique of trichlorosilane synthetic tail gas according to claim 1 is characterized in that, described herringbone baffle plate is provided with 3～5 layers, and each layer herringbone baffle plate axially is alternately distributed along tower body.
3. the washing rectifying column for the treatment of technique of trichlorosilane synthetic tail gas according to claim 1 is characterized in that, described sieve plate is provided with 5～10 layers.
4. the washing rectifying column for the treatment of technique of trichlorosilane synthetic tail gas according to claim 3, it is characterized in that, the sieve diameter of described sieve plate is 8～14mm, and described sieve plate is along the tower body axial distribution, and the sieve diameter of the sieve plate that distributes from top to bottom increases successively.
5. the washing rectifying column for the treatment of technique of trichlorosilane synthetic tail gas according to claim 1 is characterized in that, column plate is sieve tray or solid tongue tower tray in the described column plate district.
6. the washing rectifying column for the treatment of technique of trichlorosilane synthetic tail gas according to claim 5 is characterized in that, described column plate is provided with 10～20 layers.
7. the washing rectifying column for the treatment of technique of trichlorosilane synthetic tail gas according to claim 1 is characterized in that, described tower body bottom is provided with leakage fluid dram to discharge the raffinate that produces through washing rectifying.
8. the washing rectifying column for the treatment of technique of trichlorosilane synthetic tail gas according to claim 1 is characterized in that, the operating pressure of described washing rectifying column is 0.15～0.25MPa.
9. the washing rectifying column for the treatment of technique of trichlorosilane synthetic tail gas according to claim 1 is characterized in that, the operating temperature of described washing rectifying column is 50～90 ℃.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012204754521U CN202778186U (en) | 2012-09-17 | 2012-09-17 | Washing rectifying tower for treating trichlorosilane synthetic tail gas |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012204754521U CN202778186U (en) | 2012-09-17 | 2012-09-17 | Washing rectifying tower for treating trichlorosilane synthetic tail gas |
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| Publication Number | Publication Date |
|---|---|
| CN202778186U true CN202778186U (en) | 2013-03-13 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012204754521U Withdrawn - After Issue CN202778186U (en) | 2012-09-17 | 2012-09-17 | Washing rectifying tower for treating trichlorosilane synthetic tail gas |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102861494A (en) * | 2012-09-17 | 2013-01-09 | 中国恩菲工程技术有限公司 | Washing and rectifying tower for treating trichlorosilane synthesized tail gas |
-
2012
- 2012-09-17 CN CN2012204754521U patent/CN202778186U/en not_active Withdrawn - After Issue
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102861494A (en) * | 2012-09-17 | 2013-01-09 | 中国恩菲工程技术有限公司 | Washing and rectifying tower for treating trichlorosilane synthesized tail gas |
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| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20130313 Effective date of abandoning: 20141126 |
|
| RGAV | Abandon patent right to avoid regrant |