CN202748161U - Environmental factor acquisition system and measuring apparatus for production process of semiconductor integrated circuit - Google Patents

Abstract

The existing environmental monitoring devices are based on 485/232 or fieldbus, with low transmission rate, poor anti-interference, complex peripheral circuits, low channel scanning speed, poor reliability, and long development cycle. The utility model provides an environmental factor acquisition system and a semiconductor Integrated circuit production process measurement equipment, the acquisition system includes: a plurality of sensor network units, respectively sensing signals related to environmental factors; A/D conversion unit, with multiple input channels, connected to these sensor network units one by one; The main controller unit is connected with the output of the A/D conversion unit, and determines the actual environmental factor value according to the signal related to the environmental factor after A/D conversion; and the TCP/IP interface unit is connected with the main controller The units are connected, and the actual environmental factor value is sent out according to the TCP/IP protocol. The utility model has high reliability, high transmission rate, short development cycle, convenient debugging, remote monitoring and low cost.

Description

Environmental factor acquisition system and semiconductor integrated circuit production process measurement equipment

technical field

The utility model relates to an environmental factor collection system used in the field of semiconductors and a semiconductor integrated circuit production process measurement device containing the system. the

Background technique

Environmental factors are important factors that affect the performance of semiconductor integrated circuit production process measurement equipment, especially optical thin films and critical dimension measurement equipment. Therefore, semiconductor integrated circuit optical thin films and critical dimension measurement equipment have strict requirements on temperature, pressure, and humidity. Thin film measurement includes film thickness, optical characteristic parameters of thin film material, stress parameters of thin film material, etc. Key dimension measurement includes line width, height/depth, side wall angle, graphic shape, etc. The measurement of the internal environmental parameters of the equipment is not limited to the data processing of a certain test point, but requires multi-point measurement, and realizes remote data collection and centralized processing. the

In order to meet the needs of multi-point measurement and centralized processing of the internal environment of the equipment, the environmental monitoring device based on the 485/232 bus or the network control environmental monitoring device based on the field bus are mainly used in the market, and the external multi-channel analog switch is used to realize multiple channel measurement. The environmental monitoring device based on 485/232 bus has low transmission rate and poor anti-interference performance; external multi-channel analog switches are used for channel selection, and switching speed, on-resistance, and leakage current need to be considered. In order to make the multi-channel switch play its performance, it needs to be reasonably matched and coordinated with the relevant circuits. Sometimes, to make up for the lack of certain performance, the circuit structure will be complicated. The peripheral circuit is too complex, the channel scanning speed is low, the reliability is poor, and the development cycle is long. the

Utility model content

In order to solve the problems in the existing technology, it is very necessary to provide an environmental factor acquisition system with high reliability, high transmission rate, remote monitoring function, short development cycle, easy debugging and low cost. the

According to one aspect of the present utility model, an environmental factor collection system is provided, which is characterized in that it includes the following components:

-Multiple sensor network units, which respectively sense signals related to environmental factors;

-A/D conversion unit, has a plurality of input channels, and these input channels are connected with these sensor network units one by one;

- The main controller unit is connected to the output of the A/D conversion unit, and determines the actual environmental factor value according to the signal related to the environmental factor after A/D conversion;

- A TCP/IP interface unit, connected to the main controller unit, and sends out the actual environmental factor value according to the TCP/IP protocol. the

The above aspects of the utility model have the characteristics of high integration, good compatibility, fast data transmission, high reliability, short development cycle, low cost, etc., and have the following advantages:

1. Simple circuit, good real-time performance, convenient data transmission;

2. Simple operation, suitable for centralized short-distance data collection applications;

3. The TCP/IP communication protocol is used for communication, which is easy to be compatible with the main system of the film thickness measurement equipment, and is also easy to popularize and apply to the monitoring system of environmental parameters on other semiconductor equipment supporting the TCP/IP protocol. the

According to a preferred embodiment of the present utility model, the sensor network unit includes a temperature sensor network, and the temperature sensor network includes a bridge composed of a temperature sensor and a resistance element; and/or,

The sensor network unit includes a pressure sensor network including differential pressure sensors. the

This preferred embodiment gives a more specific implementation of the acquisition system for acquiring temperature and/or pressure. the

According to a preferred embodiment of the present utility model, the system also includes the following components:

-Multiple signal processing units are connected between the sensor network unit and the input channel of the A/D conversion unit one by one, and the signal sensed by the sensor network unit is converted into a voltage signal of 0 to 5V and provided to the A/D conversion unit. the

Since the signal provided by the sensor network unit may not be consistent with the input requirements of the A/D conversion unit, the signal processing unit provided in this preferred embodiment is connected between the sensor network unit and the A/D conversion unit to play the role of signal matching. the

According to a preferred embodiment of the present utility model, the main controller unit includes an Ethernet media access controller;

Described TCP/IP interface unit adopts the main controller realized by Ethernet controller;

The system also includes the following components:

-The upper computer is connected to the TCP/IP interface unit through Ethernet, the upper computer:

-Sending commands to the main controller unit based on the TCP/IP protocol;

- Receive the actual environmental factor value sent by the main controller unit based on the TCP/IP protocol, and display, analyze and process the actual environmental factor value. the

This preferred embodiment provides a host computer connected to the main controller unit via Ethernet for operating the main controller unit and processing collected environmental factors, providing a more complete collection and processing system. the

According to a preferred embodiment of the present utility model, the system also includes the following components:

- a power supply, which is connected to the A/D conversion unit, the main controller unit, and the TCP/IP interface unit to provide power. the

This embodiment provides a more complete acquisition system. the

According to a preferred embodiment of the present utility model, the main controller unit is based on an embedded operating system, and the main controller unit runs four tasks in parallel:

- the main task, create other tasks, and receive commands;

-Command parsing task, parse the received command;

- command processing task, when the parsed command is environmental factor collection, obtain signals related to environmental factors through multiple sensor network units and A/D conversion units, and determine the actual environmental factor value;

-Send tasks, provide the actual environmental factor values to the TCP/IP interface unit to issue;

The tasks are coordinated with each other through a certain coordination mechanism, which includes any of the following:

- channel lights;

-message queue. the

According to a further preferred embodiment, each task is provided with a timeout function, and the timeout function releases the main controller unit to other tasks after the task occupies the main controller unit for a certain period of time. the

This preferred embodiment implements the functions of the main control unit in a multi-task manner, which is convenient for software development and debugging, and even if a problem occurs in one task, it will not affect the operation of other tasks. This not only improves the reliability of the system, but also shortens the development cycle, makes it easy to debug the program, makes the data processing speed fast, and the system has good real-time performance. the

According to a preferred embodiment, the temperature sensor is a PT100 temperature sensor, and the differential pressure sensor is a SDP1000 differential pressure sensor;

The A/D conversion unit is LTC1859;

Described master controller unit is ARM7 series chip LPC2478, adopts serial peripheral interface (SPI) bus interconnection between described A/D conversion unit;

The main controller unit is developed based on the embedded operating system ucos-II and uc-TCP/IP protocol stack. the

This implementation mode provides the specific device model used by the acquisition system and the system and communication protocol for realizing the main control unit. the

According to a preferred embodiment, the system is used for monitoring the internal environment of semiconductor integrated circuit equipment. the

According to another aspect of the present invention, there is provided a semiconductor integrated circuit optical thin film and critical dimension measurement equipment, which is characterized in that it includes the aforementioned environmental factor collection system, wherein a plurality of sensor network units of the environmental factor collection system are located in The interior of the optical film and critical dimension measurement device senses signals related to environmental factors within the optical film and critical dimension measurement device. the

Description of drawings

Other features, purposes and advantages of the present utility model will become more apparent by reading the detailed description of the non-limiting embodiment made with reference to the following drawings:

Fig. 1 is the principle structural block diagram of the present utility model;

Fig. 2 is the flow chart of the main task that the operating system of main control unit of the present utility model executes;

Fig. 3 is the flowchart of the command analysis task that the operating system of main control unit of the present utility model executes;

Fig. 4 is the flowchart of the data acquisition task that the operating system of main control unit of the present utility model executes;

Fig. 5 is a flow chart of the sending task performed by the operating system of the main control unit of the present invention. the

Detailed ways

The following will be described in detail through specific embodiments. It should be noted that, in the case of no conflict, the embodiments in the present application and the features in the embodiments can be combined with each other. the

As shown in FIG. 1 , the environmental factor collection system most basically includes a main controller unit 1 , a sensor network unit 2 , an A/D conversion unit 4 and a TCP/IP interface unit 5 . Preferably, the environmental factor collection system further includes a signal processing unit 3 , a host computer 6 and a power supply 7 . The functions of these components will be described below. the

A plurality of sensor network units 2 are arranged at places of interest in the environment, and respectively sense signals related to environmental factors. In a preferred embodiment, the sensor network unit 2 includes a temperature sensor network, and the temperature sensor network includes a bridge composed of a temperature sensor and a resistance element, and the temperature sensor is, for example, a PT100 temperature sensor. In another preferred embodiment, the sensor network unit includes a pressure sensor network, and the pressure sensor network includes a differential pressure sensor, such as an SDP1000 differential pressure sensor. It can be understood that the system for collecting environmental factors is not limited to collecting temperature and pressure (pressure), and any other environmental factors, such as humidity, can be collected by the system by using corresponding sensors. the

A plurality of sensor network units 2 are respectively connected to a signal processing unit 3, and each signal processing unit 3 is respectively connected to a plurality of input channels (CH1, CH2, ..., CH8) of the A/D conversion unit 4 one by one connected. The signal processing unit converts the signal sensed by the sensor network unit into a voltage signal of 0 to 5V. The reason why the signal processing unit 3 is provided is that the signal sensed by the sensor network unit does not match the input requirements of the A/D conversion unit, and cannot be directly processed by the A/D conversion unit. It can be understood that the signal processing unit 3 can be omitted when the signal sensed by the sensor network unit itself meets the input requirements of the A/D conversion unit. the

The A/D converting unit 4 is connected with the main controller unit 1 and used for providing the A/D converted signal related to environmental factors to the main controller unit 1 . In a specific implementation, the A/D conversion unit 4LTC1859 is implemented. The A/D converter has 8-channel single-ended input, and the channel scanning speed can reach 100KHz. At the same time, the LTC1859 can withstand an input voltage of 25V, making data acquisition It is more reliable. At the same time, SPI (Serial Peripheral Interface) bus communication is adopted between LTC1859 and the main controller unit, with high data transmission rate and good reliability. the

The main controller unit 1 determines the actual value of the environmental factor, such as temperature or pressure, after obtaining the A/D converted signal related to the environmental factor. In a specific embodiment, the main controller unit 1 is realized by the ARM7 series chip LPC2478, which has a 512kB on-chip high-speed Flash memory, and the Flash memory has a special 128-bit wide memory interface and accelerator architecture, which can make the CPU With a system clock speed of up to 72MHz to sequentially execute the instruction device of the Flash memory, the LPC2478 also has a real-time debug interface, including JTAG and embedded trace. the

The TCP/IP interface unit 5 is connected with the main controller unit 1, and sends out the actual environmental factor value converted by the main controller unit 1 according to the TCP/IP protocol. the

In a preferred embodiment, the system also includes a host computer 6, which is used to send commands for collecting environmental factors to the main controller unit 1 based on the TCP/IP protocol, and to receive the host controller based on the TCP/IP protocol. The actual environmental factor value sent by unit 1, and display, analyze and process the actual environmental factor value. It can be understood that, in another variant embodiment, the host computer 6 can also be independent from and externally connected to the system. the

The connection mode between the host computer 6 and the TCP/IP interface unit 5 can be realized by many techniques. For example it can be connected via Ethernet. In this case, the main controller unit 1 contains an Ethernet media access controller, and the TCP/IP interface unit 5 adopts a main controller realized by an Ethernet controller. the

In terms of power supply, the power supply 7 is electrically connected with the main controller unit 1, the signal processing network unit 3, the A/D conversion unit 4, and the TCP/IP interface unit 5 to provide its working power. the

The functions of each component of the system have been introduced above, and the operation process of the system will be briefly described below. the

The host computer 6 sends a command to the main controller unit 1, and the main controller unit 1 configures the corresponding mode of the A/D conversion unit 4 according to the command of the host computer 6, and starts the A/D conversion, such as scanning each input channel, and The A/D conversion result of each input channel is transmitted to the main controller unit 1 through the SPI interface. The main controller unit 1 performs data processing to obtain the actual value of each channel parameter, and sends these values to the TCP/IP interface unit 5, and the TCP/IP interface unit 5 packs these data and then sends them to the host computer for use in Data display, analysis and centralized processing. the

Since the main controller unit 1 needs to perform multiple functions such as command reception, command analysis, A/D data reception, A/D data processing and sending, in terms of specific implementation, in order to improve the reliability of the multi-function, in a preferred In the implementation manner, the main controller unit 1 adopts a multi-task processing method to realize these functions. the

Specifically, the main controller unit 1 is developed based on the embedded operating system ucos-II and uc-TCP/IP protocol stack, and its task creation, management, scheduling and interrupt processing are all completed by the operating system. In the utility model, the operating system mainly creates four tasks:

1) Main task: Mainly perform initialization work, create other tasks, and make the system ready to receive the data acquisition command sent by the upper computer 6 through TCP/IP, and receive the command. the

2) Command parsing task: parse the received command according to the format. the

3) Command processing task: when the parsed command is environmental factor collection, execute the command, that is, obtain signals related to environmental factors through multiple sensor network units and A/D conversion units, and determine the actual environmental factor value;

4) Sending task: provide the actual environmental factor value to the TCP/IP interface unit 5 and send it. the

The tasks are coordinated with each other through mechanisms such as semaphores and message queues provided by the operating system. the

Figure 2 to Figure 5 show the flow of each task when the message queue is implemented. the

As shown in FIG. 2 , after the main task creates other tasks, it waits for commands from the upper computer 6 . After a command arrives, the command parsing task is notified to process it through the message queue q1. the

As shown in Figure 3, the command parsing task performs command parsing after learning the arrival of the command through the message queue q1. If the command is wrong, the sending task is notified through the message queue q3 to report the command wrong to the host computer 7 . If the command is correct, the command processing task is informed to process through the message queue q2. the

As shown in Figure 4, the command processing task knows that the command is correct through the message queue q2, and it performs data collection and processing. After the processing is completed, the sending task is notified through the message queue q3 to report the processing data to the host computer 7 . the

As shown in FIG. 5 , the sending task knows through the message queue q3 that there is information to be sent, that is, a command error or processing data, and then it sends the information to the host computer 6 . the

Preferably, each task is provided with a timeout function, and the timeout function releases the main controller unit to other tasks after the task occupies the main controller unit for a certain period of time. the

Certainly, the utility model also can have other various embodiments, under the situation of not departing from the spirit and essence of the utility model, those skilled in the art can make various corresponding changes and distortions according to the utility model, but these Corresponding changes and deformations should all belong to the scope of protection of the appended claims of the utility model. the

Those of ordinary skill in the art can understand that all or part of the steps in the above method can be completed by instructing related hardware through a program, and the program can be stored in a computer-readable storage medium, such as a read-only memory, a magnetic disk, or an optical disk. Optionally, all or part of the steps in the foregoing embodiments may also be implemented using one or more integrated circuits. Correspondingly, each unit in the foregoing embodiments may be implemented in the form of hardware, or may be implemented in the form of software function modules. The invention is not limited to any specific combination of hardware and software. the

Claims (8)

1. An environmental factor acquisition system, characterized in that, comprises the following components: - a plurality of sensor network units (2), respectively sensing signals related to environmental factors; -A/D conversion unit (4), has a plurality of input channels, and these input channels are connected with these sensor network units one by one; - The main controller unit (1), connected to the output of the A/D conversion unit, determines the actual environmental factor value according to the signal related to the environmental factor after A/D conversion; - A TCP/IP interface unit (5), connected to the main controller unit, sends out the actual environmental factor value according to the TCP/IP protocol. 2. The system according to claim 1, wherein the sensor network unit comprises a temperature sensor network comprising a bridge made of temperature sensors and resistance elements; and/or, The sensor network unit includes a pressure sensor network including differential pressure sensors. 3. The system according to claim 2, wherein the system further comprises the following components: -A plurality of signal processing units (3), connected between the sensor network unit and the input channel of the A/D conversion unit, convert the signal sensed by the sensor network unit into a voltage signal of 0 to 5V and provide it to the A/D conversion unit. 4. The system of claim 1, wherein the main controller unit comprises an Ethernet media access controller; The TCP/IP interface unit adopts a main controller realized by an Ethernet controller; The system also includes the following components: - An upper computer (6), connected to the TCP/IP interface unit via Ethernet, the upper computer sends commands to the main controller unit, and displays, analyzes and centrally processes data. the 5. The system according to claim 1, further comprising the following components: - A power supply (7), connected to and providing power to the A/D conversion unit, main controller unit, and TCP/IP interface unit. 6. The system according to claim 2, wherein the temperature sensor is a PT100 temperature sensor, and the differential pressure sensor is a SDP1000 differential pressure sensor; The A/D conversion unit is LTC1859; The main controller unit is an ARM7 series chip LPC2478, which is interconnected with the A/D conversion unit by a serial peripheral interface (SPI) bus. 7. The system according to claim 1, characterized in that the system is used for internal environment monitoring of semiconductor integrated circuit equipment. 8. A semiconductor integrated circuit production process measuring device, used for measuring optical films and critical dimensions, characterized in that it includes the environmental factor acquisition system according to any one of claims 1-7, wherein, Multiple sensor network units of the environmental factor acquisition system are located inside the optical thin film and critical dimension measuring equipment, and sense signals related to the internal environmental factors of the optical thin film and critical dimension measuring equipment. the

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