CN202748161U - Environmental factor acquisition system and measuring apparatus for production process of semiconductor integrated circuit - Google Patents
Environmental factor acquisition system and measuring apparatus for production process of semiconductor integrated circuit Download PDFInfo
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- CN202748161U CN202748161U CN 201220051192 CN201220051192U CN202748161U CN 202748161 U CN202748161 U CN 202748161U CN 201220051192 CN201220051192 CN 201220051192 CN 201220051192 U CN201220051192 U CN 201220051192U CN 202748161 U CN202748161 U CN 202748161U
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Abstract
A conventional environment monitoring device is based on a 485/232 or field bus and has the disadvantages of a low transmission rate, poor anti-interference performance, a complex peripheral circuit, a low channel scanning speed, poor reliability and a long development cycle. The utility model provides an environmental factor acquisition system and a measuring apparatus for a production process of a semiconductor integrated circuit. The acquisition system comprises a plurality of sensor network units respectively used for sensing signals related to environmental factors, an A/D converting unit having a plurality of channels respectively connected with the sensor network units, a master controller unit connected with the output of the A/D converting unit and determining actual environmental factor values based on A/D converted signals related to environmental factors, and a TCP/IP interface unit connected with the master controller unit and sending the actual environmental factor values according to TCP/IP protocols. The environmental factor acquisition system provided by the utility model has the advantages of high reliability, a high transmission rate, a short development cycle, convenient debugging, capacity of remote monitoring and low cost.
Description
Technical field
The utility model relates to for the environmental factor acquisition system of semiconductor applications and the SIC (semiconductor integrated circuit) production technology measuring equipment that contains this system.
Background technology
Environmental factor is to affect SIC (semiconductor integrated circuit) production technology measuring equipment, the key factor of optical thin film and critical size measuring equipment performance particularly, therefore SIC (semiconductor integrated circuit) optical thin film and critical size measuring equipment be to temperature, pressure, and humidity has strict requirement.Measured thin film comprises film thickness, the optical property parameter of membraneous material, and the stress parameters of membraneous material etc., the critical size measurement comprises live width, height/depth, side wall angle, figure pattern etc.The measurement of device interior environmental parameter also not only is confined to the data processing of a certain test point, but requires multimetering, and realize remote data acquisition and focus on.
Carry out multimetering and the needs that focus on for satisfying the device interior environment, main environment monitoring device or the Fieldbus Based network control environment monitoring device that adopts based on 485/232 bus utilizes external multiway analog switch to realize multichannel measurement simultaneously in the market.Based on the environment monitoring device of 485/232 bus, transfer rate is low, and anti-interference is poor; Adopt external multiway analog switch to carry out channel selecting, need to consider switching speed, conducting resistance, leakage current.Bring into play its performance in order to make multi-way switch, need to be reasonably combined with interlock circuit, co-ordination sometimes for remedying the shortcoming of some performance, can cause circuit structure complicated, for fear of the interference between the passage, do in case of necessity for processing, meeting is so that peripheral circuit complexity too, the passage sweep velocity is low, poor reliability, the construction cycle is long.
The utility model content
In order to solve the problems of the prior art, a kind of high reliability that has is provided, high transfer rate, but the function of remote monitoring, and the construction cycle is short, is convenient to debugging, environmental factor acquisition system with low cost extremely is necessary.
According to an aspect of the present utility model, a kind of environmental factor acquisition system is provided, it is characterized in that, comprise such as lower member:
-a plurality of sensor networks unit, respectively the sensing signal relevant with environmental factor;
-A/D converting unit has a plurality of input channels, and those input channels are connected one by one with those sensor network unit;
-Main Control Unit links to each other with the output of this A/D converting unit, according to signal after the A/D conversion, relevant with environmental factor, determines actual environmental factor value;
-TCP/IP interface unit links to each other with this Main Control Unit, and according to ICP/IP protocol, the environmental factor value that this is actual is sent.
The characteristics such as it is high that above aspect of the present utility model has integrated level, compatible good, and data transmission is fast, and reliability is high, and the construction cycle is short, and is with low cost, and have following advantage:
1. circuit is simple, and real-time is good, and data transmission is convenient;
2. simple to operate, be applicable to concentrate short-range data acquisition to use;
3. adopt the tcp/ip communication agreement to carry out communication, be convenient to and film thickness measuring equipment main system compatibility, also the monitoring system of the environmental parameter to the semiconductor equipment of other support ICP/IP protocol easy to utilize.
Preferred embodiment described sensor network unit comprises the temperature sensor network according to one of the present utility model, and this temperature sensor network comprises the electric bridge that is made of temperature sensor and resistive element; And/or,
Described sensor network unit comprises networks of pressure sensors, and this networks of pressure sensors comprises differential pressure pickup.
This has preferred embodiment provided the more concrete realization that is used for the acquisition system of collecting temperature and/or pressure.
According to of the present utility model one preferred embodiment, this system also comprises such as lower member:
-a plurality of signal processing units are connected between the input channel of sensor network unit and this A/D converting unit one by one, the signal of this sensor network unit sensing are converted to 0 to 5V voltage signal and offer this A/D converting unit.
Because the signal that the sensor network unit provides may be inconsistent with the input requirements of A/D converting unit, this signal processing unit that preferred embodiment provides is connected between sensor network unit and the A/D converting unit, plays the effect of Signal Matching.
According to of the present utility model one preferred embodiment, described Main Control Unit contains the Ethernet MAC controller;
The primary controller that described TCP/IP interface unit adopts ethernet controller to realize;
System also comprises such as lower member:
-host computer links to each other this host computer with this TCP/IP interface unit by Ethernet:
-send order based on ICP/IP protocol to described Main Control Unit;
-receive this actual environmental factor value that Main Control Unit sends based on ICP/IP protocol, and show, analyze and process this actual environmental factor value.
This preferred embodiment provides the host computer that is connected by Ethernet with Main Control Unit, is used for the operation Main Control Unit, and processes the environmental factor that collects, and more complete acquisition and processing system is provided.
According to of the present utility model one preferred embodiment, this system also comprises such as lower member:
-power supply links to each other with this A/D converting unit, Main Control Unit, TCP/IP interface unit and electric power is provided.
This embodiment provides more complete acquisition system.
Preferred embodiment described Main Control Unit is based on embedded OS according to one of the present utility model, four tasks of this Main Control Unit parallel running:
-main task creates other tasks, and receives order;
-command analysis task is resolved the order that receives;
-command process task when the order that parses is the environmental factor collection, obtains the signal relevant with environmental factor by a plurality of sensor networks unit with the A/D converting unit, and determines actual environmental factor value;
-transmission task offers the TCP/IP interface unit with the environmental factor value of reality and sends;
Carry out mutual co-ordination by certain coordination system between each task, this coordination system comprise following each:
-channel lamp;
-message queue.
According to a further preferred embodiment, each task is provided with overtime function, and this overtime function takies the Main Control Unit certain hour in this task and Main Control Unit discharged to other tasks after full and use.
This preferred embodiment adopts the mode of multitask to realize the function of main control unit, is convenient to software development and debugging, even a task generation problem also can not affect the operation of other tasks.So both improved the reliability of system, and also shortened the construction cycle simultaneously, so that debugged program becomes easily, so that data processing speed is fast, system real time is good.
Preferred embodiment described temperature sensor is the PT100 temperature sensor according to one, and described differential pressure pickup is the SDP1000 differential pressure pickup;
Described A/D converting unit is LTC1859;
Described Main Control Unit is ARM7 family chip LPC2478, and adopts Serial Peripheral Interface (SPI) (SPI) bus interconnected between the described A/D converting unit;
Described Main Control Unit is developed based on embedded OS ucos-II and uc-TCP/IP protocol stack.
This embodiment provides the employed concrete device model of this acquisition system and has realized system and the communication protocol of main control unit.
According to one preferred embodiment, this system is used for the monitoring of semiconductor integrated circuit apparatus internal environment.
According to another aspect of the present utility model, a kind of SIC (semiconductor integrated circuit) optical thin film and critical size measuring equipment are provided, it is characterized in that, comprise aforesaid environmental factor acquisition system, wherein, a plurality of sensor networks unit of this environmental factor acquisition system is positioned at the inside of this optical thin film and critical size measuring equipment, the signal that sensing is relevant with critical size measuring equipment internal environmental factor with this optical thin film.
Description of drawings
By reading the detailed description that non-limiting example is done of doing with reference to the following drawings, other features, objects and advantages of the present utility model will become more apparent:
Fig. 1 is theory structure block diagram of the present utility model;
Fig. 2 is the process flow diagram of the main task carried out of the operating system of main control unit of the present utility model;
Fig. 3 is the process flow diagram of the command analysis task carried out of the operating system of main control unit of the present utility model;
Fig. 4 is the process flow diagram of the data acquisition task carried out of the operating system of main control unit of the present utility model;
Fig. 5 is the process flow diagram of the transmission task carried out of the operating system of main control unit of the present utility model.
Embodiment
Be elaborated below by specific embodiment.Need to prove, in the situation that do not conflict, embodiment and the feature among the embodiment among the application can make up mutually.
As shown in Figure 1, this environmental factor acquisition system comprises Main Control Unit 1 the most basically, sensor network unit 2, and A/D converting unit 4 and TCP/IP interface unit 5 consist of.Preferably, this environmental factor acquisition system also comprises signal processing unit 3, host computer 6 and power supply 7.The below will be described the function of these parts.
A plurality of sensor networks unit 2 is arranged in the position of paying close attention in the environment, respectively the sensing signal relevant with environmental factor.One preferred embodiment in, sensor network unit 2 comprises the temperature sensor network, this temperature sensor network comprises the electric bridge that is made of temperature sensor and resistive element, this temperature sensor for example is the PT100 temperature sensor.Another preferred embodiment in, the sensor network unit comprises networks of pressure sensors, this networks of pressure sensors comprises differential pressure pickup, this differential pressure pickup for example is the SDP1000 differential pressure pickup.Be appreciated that this environmental factor acquisition system is not limited to collecting temperature and pressure (pressure), other any environmental factors, for example humidity can be by native system by gathering with corresponding sensor.
A plurality of sensor networks unit 2 links to each other with a signal processing unit 3 respectively, each signal processing unit 3 respectively with a plurality of input channels of A/D converting unit 4 (CH1, CH2 ..., CH8) link to each other one by one.This signal processing unit is converted to 0 to 5V voltage signal with the signal of this sensor network unit sensing.Why signal processing unit 3 is provided, and is because the signal of sensor network unit sensing and the input requirements of A/D converting unit do not mate, and can't directly be processed by the A/D converting unit.Be appreciated that signal itself in sensor network unit sensing just meets in the situation of input requirements of A/D converting unit, this signal processing unit 3 is omissible.
A/D converting unit 4 is connected with Main Control Unit 1, be used for after the A/D conversion, the signal relevant with environmental factor offer Main Control Unit 1.In a concrete embodiment, A/D converting unit 4LTC1859 realizes, this A/D converter has the single-ended input of 8 passages, the passage sweep velocity can reach 100KHz, LTC1859 can bear the input voltage of 25V simultaneously, so that data acquisition is more reliable, adopts SPI (Serial Peripheral Interface (SPI)) bus communication between LTC1859 and the Main Control Unit simultaneously, message transmission rate is high, good reliability.
After Main Control Unit 1 obtains signal after the A/D conversion, relevant with environmental factor, determine the environmental factor value of reality, for example temperature or pressure.In a concrete embodiment, Main Control Unit 1 is realized by ARM7 family chip LPC2478, this chip has high speed Flash storer in the 512kB sheet, this Flash storer has memory interface and the accelerator architecture of 128 special bit widths, can make CPU to carry out in order the instruction device of Flash storer up to the system clock speed of 72MHz, LPC2478 comprises JTAG and Embedded Trace also with the real-time debug interface.
TCP/IP interface unit 5 links to each other with this Main Control Unit 1, according to ICP/IP protocol, this actual environmental factor value that Main Control Unit 1 is converted to is sent.
One preferred embodiment in, this system also comprises a host computer 6, this host computer is used for sending the order that gathers environmental factor based on ICP/IP protocol to Main Control Unit 1, with this actual environmental factor value that receives Main Control Unit 1 transmission based on ICP/IP protocol, and show, analyze and process this actual environmental factor value.Be appreciated that in the embodiment of another variation, this host computer 6 also can be independent of and be external in native system.
For the connected mode between host computer 6 and the TCP/IP interface unit 5, can be realized by a lot of technology.For example can connect by Ethernet.In this case, Main Control Unit 1 contains the Ethernet MAC controller, the primary controller that TCP/IP interface unit 5 adopts ethernet controller to realize.
Aspect power supply, power supply 7 and Main Control Unit 1, signal shaping network unit 3, A/D converting unit 4, TCP/IP interface unit 5 is electrically connected mutually, and its working power is provided.
More than introduced the function of each parts of native system, the below will be briefly described the operation of native system.
Host computer 6 is given an order to Main Control Unit 1, Main Control Unit 1 is according to the order of host computer 6, the corresponding modes of configuration A/D converting unit 4, start the A/D conversion, for example scan each input channel, and the A/D transformation result of each input channel is transferred to Main Control Unit 1 by the SPI interface.Main Control Unit 1 carries out data to be processed, draw the actual numerical value of each channel parameters, and these numerical value are delivered to TCP/IP interface unit 5, then TCP/IP interface unit 5 sends these data packings to host computer, be used for data and show, analyze and focus on.
Because Main Control Unit 1 need to carry out order reception, command analysis, A/D data receiver, the processing of A/D data and send this several functions, angle in specific implementation, in order to improve multi-functional reliability, one preferred embodiment in, Main Control Unit 1 adopts the processing mode of multitask to realize these functions.
Concrete, Main Control Unit 1 is developed based on embedded OS ucos-II and uc-TCP/IP protocol stack, and its task creation, management, scheduling and interrupt processing etc. finished by operating system.In the utility model, operating system has mainly created four tasks:
1) main task: mainly carry out initial work, create other tasks, make system be ready to receive the data acquisition command that host computer 6 is sent by TCP/IP, and receive order.
2) command analysis task: the order that receives is resolved by form.
3) command process task: when the order that parses was the environmental factor collection, fill order namely obtained the signal relevant with environmental factor by a plurality of sensor networks unit with the A/D converting unit, and determines actual environmental factor value;
4) transmission task: the environmental factor value of reality is offered TCP/IP interface unit 5 send.
The mechanism such as the signal lamp that then provides by operating system between the task, message queue are carried out mutual co-ordination.
When adopting the message queue mode to realize, Fig. 2 to Fig. 5 shows the flow process of each task.
As shown in Figure 2, after main task creates other tasks, wait for the order from host computer 6.After having order to arrive, inform that by message queue q1 the command analysis task goes to process.
As shown in Figure 3, the command analysis task is carried out command analysis after knowing that by message queue q1 order arrives.If the order mistake is then informed the transmission task by message queue q3, will order wrong the report to host computer 7.If order is correct, then inform that by message queue q2 the command process task goes to process.
As shown in Figure 4, the command process task knows that by message queue q2 order is correct, and it carries out data sampling and processing work.After finishing dealing with, inform the transmission task by message queue q3, so that deal with data is reported to host computer 7.
As shown in Figure 5, the transmission task is known by message queue q3 and is had information to be sent, namely orders mistake or deal with data, and then it sends to host computer 6 with this information.
Preferably, each task is provided with overtime function, and this overtime function takies the Main Control Unit certain hour in this task and Main Control Unit discharged to other tasks after full and use.
Certainly; the utility model also can have other various embodiments; in the situation that do not deviate from the utility model spirit and essence thereof; those of ordinary skill in the art can make various corresponding changes and distortion according to the utility model, but these corresponding changes and distortion all should belong to the protection domain of the appended claim of the utility model.
One of ordinary skill in the art will appreciate that all or part of step in the said method can come the instruction related hardware to finish by program, program can be stored in the computer-readable recording medium, such as ROM (read-only memory), disk or CD etc.Alternatively, all or part of step of above-described embodiment also can realize with one or more integrated circuit.Correspondingly, each unit in above-described embodiment can adopt the form of hardware to realize, also can adopt the form of software function module to realize.The utility model is not restricted to the combination of the hardware and software of any particular form.
Claims (8)
1. an environmental factor acquisition system is characterized in that, comprises such as lower member:
-a plurality of sensor networks unit (2), respectively the sensing signal relevant with environmental factor;
-A/D converting unit (4) has a plurality of input channels, and those input channels are connected one by one with those sensor network unit;
-Main Control Unit (1) links to each other with the output of this A/D converting unit, according to signal after the A/D conversion, relevant with environmental factor, determines actual environmental factor value;
-TCP/IP interface unit (5) links to each other with this Main Control Unit, and according to ICP/IP protocol, the environmental factor value that this is actual is sent.
2. system according to claim 1 is characterized in that, described sensor network unit comprises the temperature sensor network, and this temperature sensor network comprises the electric bridge that is made of temperature sensor and resistive element; And/or,
Described sensor network unit comprises networks of pressure sensors, and this networks of pressure sensors comprises differential pressure pickup.
3. system according to claim 2 is characterized in that, this system also comprises such as lower member:
-a plurality of signal processing units (3) are connected between the input channel of sensor network unit and this A/D converting unit one by one, the signal of this sensor network unit sensing are converted to 0 to 5V voltage signal and offer this A/D converting unit.
4. system according to claim 1 is characterized in that, described Main Control Unit contains the Ethernet MAC controller;
The primary controller that described TCP/IP interface unit adopts ethernet controller to realize;
This system also comprises such as lower member:
-host computer (6) links to each other by Ethernet with this TCP/IP interface unit, and this host computer sends order to described Main Control Unit, and shows, analyzes and focus on data.
5. system according to claim 1 is characterized in that, this system also comprises such as lower member:
-power supply (7) links to each other with this A/D converting unit, Main Control Unit, TCP/IP interface unit and electric power is provided.
6. system according to claim 2 is characterized in that, described temperature sensor is the PT100 temperature sensor, and described differential pressure pickup is the SDP1000 differential pressure pickup;
Described A/D converting unit is LTC1859;
Described Main Control Unit is ARM7 family chip LPC2478, and adopts Serial Peripheral Interface (SPI) (SPI) bus interconnected between the described A/D converting unit.
7. system according to claim 1 is characterized in that, this system is used for the monitoring of semiconductor integrated circuit apparatus internal environment.
8. a SIC (semiconductor integrated circuit) production technology measuring equipment is used for measuring optical thin film and critical size, it is characterized in that, comprises according to claim 1 each described environmental factor acquisition system in-7, wherein,
A plurality of sensor networks unit of this environmental factor acquisition system is positioned at the inside of this optical thin film and critical size measuring equipment, the signal that sensing is relevant with critical size measuring equipment internal environmental factor with this optical thin film.
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| Application Number | Priority Date | Filing Date | Title |
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| CN 201220051192 CN202748161U (en) | 2012-02-16 | 2012-02-16 | Environmental factor acquisition system and measuring apparatus for production process of semiconductor integrated circuit |
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| CN 201220051192 CN202748161U (en) | 2012-02-16 | 2012-02-16 | Environmental factor acquisition system and measuring apparatus for production process of semiconductor integrated circuit |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105784175A (en) * | 2016-04-26 | 2016-07-20 | 哈尔滨工程大学 | High-precision multipoint temperature measurement system based on WIFI communication |
| CN107977162A (en) * | 2016-10-21 | 2018-05-01 | 财团法人工业技术研究院 | recorder system and data recording method thereof |
-
2012
- 2012-02-16 CN CN 201220051192 patent/CN202748161U/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105784175A (en) * | 2016-04-26 | 2016-07-20 | 哈尔滨工程大学 | High-precision multipoint temperature measurement system based on WIFI communication |
| CN107977162A (en) * | 2016-10-21 | 2018-05-01 | 财团法人工业技术研究院 | recorder system and data recording method thereof |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: Environmental factor acquisition system and measuring apparatus for production process of semiconductor integrated circuit Effective date of registration: 20190121 Granted publication date: 20130220 Pledgee: Shanghai Xingcheng Investment Management Co., Ltd. Pledgor: Raintree Scientific Instruments (Shanghai) Corporation Registration number: 2019310000002 |
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| PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20191029 Granted publication date: 20130220 Pledgee: Shanghai Xingcheng Investment Management Co., Ltd. Pledgor: Ruili Scientific Instruments (Shanghai) Co., Ltd. Registration number: 2019310000002 |
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| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20130220 |