CN202715966U - Laser cutting device of thin-film solar cell - Google Patents
Laser cutting device of thin-film solar cell Download PDFInfo
- Publication number
- CN202715966U CN202715966U CN2012203176098U CN201220317609U CN202715966U CN 202715966 U CN202715966 U CN 202715966U CN 2012203176098 U CN2012203176098 U CN 2012203176098U CN 201220317609 U CN201220317609 U CN 201220317609U CN 202715966 U CN202715966 U CN 202715966U
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- film solar
- laser
- laser cutting
- cutting device
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The utility model discloses a laser cutting device of a thin-film solar cell. The laser cutting device is applied to a large-area thin-film solar cell panel and comprises a base, at least one laser heads and at least one prone scanner. A groove is arranged on the upper end face of the base, a workbench is arranged on the groove, and a locating guide column is arranged on two sides of the upper end face of the base in connecting mode. The laser head is arranged on the front end face of the locating guide column and is used for shooting laser beams to a specific position of the thin-film solar cell panel to cut. The probe scanner is arrange on the front end face of the locating guide column and on one side of the laser head, and is used for depth profile measurement after a laser process. And therefore, the laser cutting device of the thin-film solar cell can carry out real-time and full-regional depth profile measurement after a laser cutting process.
Description
Technical field
The utility model is the laser cutting device about a kind of thin-film solar cells, it can measure the probe scanning step (α-step) integrate with laser cutting device, after being applied to large area film solar battery panel laser processing procedure, can measure by the instant and region-wide depth section that carries out.
Background technology
General thin-film solar cells is that P type (eurymeric), I type (essence) and N-type (minus) semiconductor layer junction with different conduction properties is as the agent structure of light absorption and power conversion; When solar light irradiation in the P/I/N junction, portions of electronics thereby have enough energy, leave atom and become free electron, lose the atom of electronics thereby produce electric hole, see through p type semiconductor layer and n type semiconductor layer and attract respectively electric hole and electronics, positive electricity and negative electricity are separated, two ends thereby generation potential difference outside junction, connect external circuit at conductive layer, make electronics be able to by, and with again be combined in the electric hole of the P/I/N junction other end, just generation current in the circuit, again via wire transmission to load, so under illumination, cell piece can produce electric energy.
In general, must see through suitable little processing (Micromachining) instrument in the manufacturing process of thin film solar battery, reach better cutting and edge isolation (Edge Isolation) effect; The cutting mode that solar cell is commonly used traditionally is setting-out (Scribe) and sliver (Break), utilizes V font milling cutter to draw V-notch at cell piece, again with manually the cross section being disconnected; But the method can only be drawn straight line, and has reduced the real contact area of cell piece, the waste material.
Generally on the edge isolation practice, it is the method for using electric paste etching (Plasma Etching), namely neutral gas (for example oxygen) is split into ion and electronics, and must use voltage source (radio frequency or microwave) to produce electric field at material surface; Although the effect of electric paste etching is pretty good, equipment price is also relatively low, and is very high to personnel's requirement, and etching and processing can cause certain damage to the cell piece surface, if injure the junction of P/N, also will reduce its effective area.The practice of another kind of edge isolation, it is the method for using traditional blasting treatment, cover in the place that namely will use first shade (MASK) not need to spray, carry out the removal of silicon thin film material with the particle of high speed splash, and then reach the effect of edge isolation, yet, the residual sandblast powder of this method meeting, the step that therefore need to additionally clean; Moreover the mechanical stress that the sandblast process causes can exert an adverse impact for the use reliability of solar cell.
Existing another little machining tool, can reach better cutting and edge isolation effect, it is to utilize the laser cutting mode, make laser beam be focused onto on the object, form cone shape profile, can concentrate on the very little surface, allow object absorbing laser light beam, treat its energy heating material until material fusing and vaporization; Cutting accuracy and the repeatable accuracy of laser are higher, and cutting speed is also relatively very fast, and line of cut is very thin also more smooth.
Moreover, in the processing procedure of existing thin-film solar cells, needing through three laser cutting, its fabrication steps comprises: first step generates layer of transparent conductive layer (Transparent conductive oxide, TCO) at glass or metal substrate first; Second step, the transparency conducting layer that utilizes laser will stay groove divests; Third step then plates silicon thin film with sputter or plasma enhanced chemical vapor deposition method (Plasma Enhanced Chemical Vapor Deposition, PECVD) on transparency conducting layer; The 4th step divests with the silicon thin film that laser will stay groove again; The 5th step is carried out metal coating; The 6th step divests with the metal coating that laser will stay groove again.
Yet, behind the laser cutting processing procedure of existing thin-film solar cells, need to use in addition the line of cut measuring equipment, as: light microscope is inspected method, the probe scanning step measures method and electron microscope is inspected method, yet still there is a little shortcoming in these device detection modes, as:
1. the light microscope method of inspecting can be found out the line of cut width, but is difficult for finding out its degree of depth.
2. the probe scanning step measures method and only can do local the measurement, and need do follow-up test piece and process, and upper time-consuming, the more not accurate and easy fragmentation of operation.
3. the electron microscope method of inspecting also only can be done local the measurement, and review process need vacuumize, also easier fragmentation when the somewhat expensive of use, operating cost.
The design people is provided a kind of laser cutting device of thin-film solar cells, in the hope of reaching the purpose of better practical value because the disappearance of the cutter sweep of existing thin-film solar cells studies improvement again.
The utility model content
The purpose of this utility model provides a kind of laser cutting device of thin-film solar cells, it can measure the probe scanning step with laser cutting device and integrate, after being applied to large area film solar battery panel laser processing procedure, can measure by the instant and region-wide depth section that carries out.
Purpose and effect for the laser cutting device that reaches thin-film solar cells of the present utility model, the utility model proposes a kind of laser cutting device of thin-film solar cells, comprise: a pedestal, this pedestal upper surface is provided with a groove, one workbench is set on this groove, and this pedestal upper surface dual-side is equipped with a location lead; At least one laser head, this laser head are arranged at this positioning guide column front end face, in order to laser beam is penetrated the specific location to the thin-film solar cells panel, to cut; At least one probe scanning device, this probe scanning device is arranged at this positioning guide column front end face, is positioned at a side of this laser head, measures as depth section behind the laser processing procedure.
As mentioned above, the laser cutting device of thin-film solar cells of the present utility model wherein, is provided with a mobile device between this groove and this workbench, can make relative this positioning guide column of this workbench move forward and backward.
As mentioned above, the laser cutting device of thin-film solar cells of the present utility model wherein, is provided with straight line motor and a propeller in this positioning guide column, for this laser head and relative this positioning guide column move left and right of this probe.
As mentioned above, the laser cutting device of thin-film solar cells of the present utility model, wherein, this probe scanning device further includes an elevating mechanism, carries out lifting action for this probe.
In sum, the utility model measures the probe scanning step with laser cutting device and combines, and its institute's tool advantage on implementing is:
1. after can be applicable to large area film solar battery panel laser processing procedure, carry out the measurement of depth section.
2. can immediately measure, need not to wait for that the laser cutting processing procedure finishes to measure fully again.
3. can region-widely carry out arbitrarily depth section and measure, improve the existing fragmentation that needs and measure to carry out the part.
4. in the processing procedure, do not need again the extra process fragmentation to remove to carry out depth section and measure, not only save time and the cost-saving.
Description of drawings
Fig. 1 is the laser cutting device stereogram of the utility model thin-film solar cells;
Fig. 2 is movable workbench view of the present utility model;
Fig. 3 is that probe scanning device of the present utility model rises schematic diagram;
Fig. 4 is that probe scanning device of the present utility model is fallen schematic diagram.
The main element label declaration:
1 pedestal, 2 workbench
3 positioning guide columns, 4 laser heads
5 probe scanning devices, 51 elevating mechanisms
6 mobile devices, 7 thin-film solar cells panels
The specific embodiment
Understand for technical characterictic of the present utility model, purpose and effect being had more clearly, now contrast the description of drawings specific embodiment of the present utility model:
At first, see also shown in Figure 1, laser cutting device stereogram for thin-film solar cells of the present utility model, the laser cutting device of this thin-film solar cells includes: a pedestal 1, this pedestal 1 upper surface is provided with a groove, one workbench 2 is set on this groove, can be for putting large area film solar battery panel 7 on this workbench, group is provided with a mobile device 6 between this workbench 2 and this groove, can make the laser head 4 on these workbench 2 relative these positioning guide columns 3 move forward and backward (seeing also shown in Figure 2), the laser beam that sends in order to this laser head 4 cuts this thin-film solar cells panel 7, this pedestal 1 upper surface dual-side is equipped with a location lead 3, be provided with a straight line motor and propeller (not shown) in this positioning guide column 3, for this laser head 4 and this probe scanning device 5 relative these positioning guide column 3 move left and right; At least one laser head 4, this laser head 4 are arranged at this positioning guide column 3 front end faces, in order to laser beam is penetrated the specific location to the thin-film solar cells panel 7, to cut; At least one probe scanning device 5, this probe scanning device 5 are arranged at this positioning guide column 3 front end faces, are positioned at a side of this laser head 4, measure as the laser cut line depth section behind the laser processing procedure.
As mentioned above, in preferred embodiment of the present utility model, this mobile device 6 can further be included as straight line motor and a propeller, and it is different from aforementioned line motor and the propeller that is arranged in the positioning guide column 3.
See also again Fig. 3, shown in Figure 4, it is the main partial enlarged drawing of looking of the utility model probe scanning device lifting, wherein, this probe scanning device 5 further includes an elevating mechanism 51, carry out lifting action for this probe scanning device 5, make probe contact this panel surface to reach, the depth section that carries out instant and region-wide property measures, to obtain the degree of depth and the width curve data of laser cut line.
As mentioned above, the laser cutting device of thin-film solar cells of the present utility model, wherein, this elevating mechanism 51 is a lift motor.
Whereby, the utility model is the probe scanning step to be measured with laser cutting device integrate, and after being applied to large area film solar battery panel laser processing procedure, can instant and region-wide property carry out the depth section measurement, not only saves time and the cost-saving.
The above only is the schematic specific embodiment of the utility model, is not to limit scope of the present utility model.Any those skilled in the art, the equivalent variations of having done under the prerequisite that does not break away from design of the present utility model and principle and modification all should belong to the scope that the utility model is protected.
Claims (5)
1. the laser cutting device of a thin-film solar cells is characterized in that, the laser cutting device of this thin-film solar cells comprises:
One pedestal, this pedestal upper surface is provided with a groove, and a workbench is set on this groove, and this pedestal upper surface dual-side is equipped with a location lead;
At least one laser head, this laser head are arranged at this positioning guide column front end face;
At least one probe scanning device, it is arranged at this positioning guide column front end face, is positioned at a side of this laser head.
2. the laser cutting device of thin-film solar cells as claimed in claim 1 is characterized in that, is provided with a mobile device between this groove and this workbench.
3. the laser cutting device of thin-film solar cells as claimed in claim 1 is characterized in that, is provided with straight line motor and a propeller in this positioning guide column.
4. the laser cutting device of thin-film solar cells as claimed in claim 1 is characterized in that, this probe scanning device further includes an elevating mechanism.
5. the laser cutting device of thin-film solar cells as claimed in claim 4 is characterized in that, this elevating mechanism is a lift motor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012203176098U CN202715966U (en) | 2012-07-03 | 2012-07-03 | Laser cutting device of thin-film solar cell |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012203176098U CN202715966U (en) | 2012-07-03 | 2012-07-03 | Laser cutting device of thin-film solar cell |
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| Publication Number | Publication Date |
|---|---|
| CN202715966U true CN202715966U (en) | 2013-02-06 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012203176098U Expired - Fee Related CN202715966U (en) | 2012-07-03 | 2012-07-03 | Laser cutting device of thin-film solar cell |
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| Country | Link |
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| CN (1) | CN202715966U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103567645A (en) * | 2013-11-13 | 2014-02-12 | 江苏华风电子有限公司 | Diaphragm laser cutting device |
| CN106925899A (en) * | 2015-12-31 | 2017-07-07 | 辰炜电子股份有限公司 | Laser cutting apparatus and its method |
| CN113224204A (en) * | 2021-04-15 | 2021-08-06 | 山东交通学院 | Cutting device for photovoltaic cell |
| CN114559164A (en) * | 2022-02-10 | 2022-05-31 | 江苏龙恒新能源有限公司 | Solar cell back laser grooving device |
| CN115592278A (en) * | 2022-11-24 | 2023-01-13 | 张家港博佑光电科技有限公司（Cn） | Solar wafer laser cutting machine |
-
2012
- 2012-07-03 CN CN2012203176098U patent/CN202715966U/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103567645A (en) * | 2013-11-13 | 2014-02-12 | 江苏华风电子有限公司 | Diaphragm laser cutting device |
| CN103567645B (en) * | 2013-11-13 | 2016-01-13 | 江苏华风电子有限公司 | Diaphragm laser cutting device |
| CN106925899A (en) * | 2015-12-31 | 2017-07-07 | 辰炜电子股份有限公司 | Laser cutting apparatus and its method |
| CN113224204A (en) * | 2021-04-15 | 2021-08-06 | 山东交通学院 | Cutting device for photovoltaic cell |
| CN113224204B (en) * | 2021-04-15 | 2023-06-23 | 山东交通学院 | Cutting device for photovoltaic cell |
| CN114559164A (en) * | 2022-02-10 | 2022-05-31 | 江苏龙恒新能源有限公司 | Solar cell back laser grooving device |
| CN115592278A (en) * | 2022-11-24 | 2023-01-13 | 张家港博佑光电科技有限公司（Cn） | Solar wafer laser cutting machine |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130206 Termination date: 20140703 |
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| EXPY | Termination of patent right or utility model |