CN202713770U - Low-power integrated microwave microplasma source - Google Patents
Low-power integrated microwave microplasma source Download PDFInfo
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- CN202713770U CN202713770U CN 201220304537 CN201220304537U CN202713770U CN 202713770 U CN202713770 U CN 202713770U CN 201220304537 CN201220304537 CN 201220304537 CN 201220304537 U CN201220304537 U CN 201220304537U CN 202713770 U CN202713770 U CN 202713770U
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Abstract
The utility model discloses a low-power integrated microwave microplasma source. The low-power integrated microwave microplasma source comprises: a phase-locked loop frequency synthesizer; an adjustable attenuator which is connected with the phase-locked loop frequency synthesizer; a wideband power amplifier which is connected with the adjustable attenuator; a circulator which is connected with the wideband power amplifier; and a planar microstrip gradient spiral inductance coupling coil which is connected with the circulator. When the low-power integrated microwave microplasma source is in work, low-power microwave is inputted to the planar microstrip gradient spiral inductance coupling coil, so microwave microplasma is excited. According to the utility model, advantages, such as frequency adjustability, power adjustability, power source protection, small size, easy carry, etc., can be realized.
Description
Technical field
The utility model relates to the technical field of microwave plasma source, relates in particular to a kind of small-power integrated micro microplasma source.
Background technology
Low power microwave microplasma technology is a new and high technology that integrates microelectric technique, microwave technology and plasma technique that grew up in recent years, and it is that development along with the MEMS technology gets up.Microplasma comprises direct current microplasma, radio frequency microplasma and microwave microplasma.When discharge space further is reduced to nano-scale, just becomes and receive plasma.Low-loss, high isolation, volume are little because microelectromechanical systems (MEMS) has, low cost of manufacture, easily with the characteristics such as IC, MMIC circuit be integrated, can realize that the small-power of microwave plasma encapsulates and active integrated by MEMS technique.Therefore can make the structure and characteristics of plasma that huge change occurs in conjunction with MEMS technique microwave plasma.
Microwave plasma can be widely used in the high-tech areas such as new material, microelectronics and chemistry, miniaturization development along with microwave plasma, circuit size requires at grade, micron order even nanoscale, and the large-area microwave plasma of former the sort of centimetre even meter level is no longer applicable.In the research of microwave microplasma, the construction packages in low power microwave microplasma source and the system integration are very important two links.Small-power planar spiral inductor coupling microwave microplasma source adopts MEMS technique to play minute sized plasma by the micropower microwave excitation exactly, as making gas ionization with the microwave power that is no more than 1～3 watt, produce the plasma of 10 millimeters even 0.2 mm size.Because technique has a good application prospect in fields such as the sterilizing of Bio-MEMS, the processing of small-size materials, little chemical analysis system, microdrivers, thereby is subject to paying close attention to more and more widely.
The frequency range of 900MHz is mainly adopted in external low power microwave microplasma source of using at present, and power output is 4 watts, although simple in structure, can only be operated in single frequency and single power, namely frequency and power are all non-adjustable.If little structure and Frequency generated with plane gradual change spiral inductance coil changes, then need to redesign the hardware circuit of power source.
The utility model content
The utility model has overcome the defective of above-mentioned power source, has realized that better the frequency in low power microwave microplasma source is adjustable, power is adjustable, power source is protected and miniature portable.
Theoretical according to microwave circuit, adopt the system integration of phase-locked loop frequency synthesizer, adjustable attenuator, wideband power amplifer, circulator etc. can satisfy the requirement that radiating element encourages the microwave microplasma.Small-power integrated micro microplasma source is by the host computer procedure regulating frequency, phase-locked loop frequency synthesizer produces microwave signal, potentiometer is regulated attenuation, microwave power after wideband power amplifer amplifies is input on little band plane gradual change spiral inductance coil through circulator, has encouraged the microwave microplasma under normal pressure or low pressure condition.
The utility model proposes a kind of small-power integrated micro microplasma source, comprising:
Phase-locked loop frequency synthesizer;
Adjustable attenuator is connected with described phase-locked loop frequency synthesizer;
Wideband power amplifer is connected with described adjustable attenuator;
Circulator is connected with described wideband power amplifer;
Planar microstrip gradual change spiral inductance coupling coil is connected with described circulator.
Wherein, the frequency output area of described phase-locked loop frequency synthesizer is 2.3GHz to 2.6GHz.
Wherein, the attenuation range of described adjustable attenuator at-2dB to-17dB.
Wherein, the power stage scope of described wideband power amplifer is+and 20dBm is to+40dBm, and peak power is greater than 43dBm.
Wherein, the frequency range of described circulator is 2.3GHz to 2.5GHz, and insertion loss is 0.25dB to 0.3dB, and isolation is 20dB to 25dB.
Wherein, the number of turn of described planar microstrip gradual change spiral inductance coupling coil is 3; The coil width of described planar microstrip gradual change spiral inductance coupling coil is 100 μ m to 400 μ m, and coil-span is 100 μ m to 400 μ m,, described coil width and coil-span are reduced to inner ring gradually by the outer ring.
Wherein, further comprise matched load; Described matched load is connected with described circulator.
Wherein, the frequency range of described matched load be direct current to 2.7GHz, return loss is greater than 20dB, power capacity is 150 watts.
Wherein, further comprise match circuit, described match circuit connects described circulator and planar microstrip gradual change spiral inductance coupling coil.
Wherein, described phase-locked loop frequency synthesizer, adjustable attenuator, wideband power amplifer and circulator are arranged in the shielding box.
The small-power integrated micro microplasma source that the utility model provides is a kind of device that encourages the microwave microplasma, has that frequency is adjustable, power is adjustable, advantages such as power source protection and miniature portable.Small microwave power source and planar microstrip gradual change spiral inductance coupling coil integrated makes whole equipment miniaturization; Regulating host computer procedure makes the output frequency of phase-locked loop frequency synthesizer adjustable; The size that changes adjustable attenuator makes the output microwave power adjustable; And circulator can reduce impedance mismatch that the excitation of microwave microplasma brings to the impact of small microwave power source, plays the effect of protection small microwave power source.
Description of drawings
Fig. 1 is the system configuration schematic diagram in the utility model small-power integrated micro microplasma source.
Fig. 2 is the circuit diagram in present embodiment middle low power integrated micro microplasma source.
Embodiment
Below in conjunction with drawings and Examples embodiment of the present utility model is further described in detail, but should limit protection range of the present utility model with this.
Shown in Fig. 1-2,1-phase-locked loop frequency synthesizer, 2-adjustable attenuator, the 3-wideband power amplifer, 4-circulator, 5-matched load, 6-planar microstrip gradual change spiral inductance coupling coil, 7-match circuit, 8-interface circuit, the 9-USB interface, the 10-host computer, 21-PIN pipe, 22-3dB electric bridge, the 31-driving amplifier, 32-final stage wideband power amplifer.
As shown in Figure 1, small-power integrated micro microplasma of the present utility model source comprises: phase-locked loop frequency synthesizer 1, adjustable attenuator 2, wideband power amplifer 3, circulator 4 and planar microstrip gradual change spiral inductance coupling coil 6.Phase-locked loop frequency synthesizer 1, adjustable attenuator 2, wideband power amplifer 3, circulator 4 and planar microstrip gradual change spiral inductance coupling coil 6 connect successively.Phase-locked loop frequency synthesizer 1 is for generation of the microwave frequency oscillator signal of function admirable.Adjustable attenuator 2 is used for increasing the adjustable extent of microwave frequency oscillation signal power.Wideband power amplifer 3 is used for amplifying the microwave frequency oscillator signal of input, makes it the power level that reaches enough in broad frequency band.Circulator 4 is used for reducing impedance mismatch that the excitation of microwave microplasma brings to the impact of small microwave power source, plays the effect of protection small microwave power source.Planar microstrip gradual change spiral inductance coupling coil 6 is used for excitation microwave microplasma.
Wherein, the frequency output area of phase-locked loop frequency synthesizer 1 is 2.3GHz to 2.6GHz.
Wherein, the attenuation range of adjustable attenuator 2 at-2dB to-17dB.
Wherein, the power stage scope of wideband power amplifer 3 is+and 20dBm is to+40dBm, and peak power is greater than 43dBm.
Wherein, the frequency range of circulator 4 is 2.3GHz to 2.5GHz, and insertion loss is 0.25dB to 0.3dB, and isolation is 20dB to 25dB.
Wherein, the number of turn of planar microstrip gradual change spiral inductance coupling coil 6 is 3; The coil width of planar microstrip gradual change spiral inductance coupling coil 6 is 100 μ m to 400 μ m,, coil-span is 100 μ m to 400 μ m,, coil width and coil-span are reduced to inner ring gradually by the outer ring.
Wherein, further comprise matched load 5; Matched load 5 is connected with circulator 4.
Wherein, the frequency range of matched load 5 be direct current to 2.7GHz, return loss is greater than 20dB, power capacity is 150 watts.
Wherein, further comprise match circuit 7, match circuit 7 connects circulator 4 and planar microstrip gradual change spiral inductance coupling coil 6.
Wherein, phase-locked loop frequency synthesizer 1, adjustable attenuator 2, wideband power amplifer 3 and circulator 4 are arranged in the shielding box.
The chip of phase-locked loop frequency synthesizer 1 is ADF4350 in the present embodiment, and the output frequency of phase-locked loop frequency synthesizer 1 is 2.45GHz, and overall phase noise is-73dBc to be-87dBc/Hz at frequency deviation 1kHz at frequency deviation 100kHz.Phase-locked loop frequency synthesizer 1 is connected with host computer 10 by interface circuit 8 and USB interface 9.Host computer 10 sends data by USB interface 9 to interface circuit 8, and interface circuit 8 is finished the conversion of USB interface 9 to three line serial ports by microcontroller chip CY7C68013, realizes the transfer of data of host computer 10 and phase-locked loop frequency synthesizer 1.
The chip of circulator 4 is MAFR-000488 in the present embodiment, and the chip of 50 Ω matched loads 5 is E150N50X4.
The little number of turn with gradual change spiral inductance coupling coil 6 of present embodiment midplane is 3, and coil width and coil-span ecto-entad reduce gradually, and innermost circle terminal open circuit.The input of planar microstrip gradual change spiral inductance coupling coil 6 uses sub-miniature A connector.
The little metal material with the employing of the coiler part in the gradual change spiral inductance coupling coil 6 high conductivity of present embodiment midplane, the metal material of this high conductivity is gold.
The little substrate sections with gradual change spiral inductance coupling coil 6 of present embodiment midplane adopts high temperature resistant, corrosion resistant low loss dielectric substrate, and this low loss dielectric substrate is aluminium oxide ceramics.
As shown in Figure 2, provide a kind of small-power integrated micro microplasma source in the present embodiment, comprise frequency source synthesizer 1, adjustable attenuator 2, wideband power amplifer 3, circulator 4, match circuit 7 and planar microstrip gradual change spiral inductance coupling coil 6, above-mentioned each parts connect successively.Phase-locked loop frequency synthesizer 1, adjustable attenuator 2, wideband power amplifer 3 and circulator 4 are arranged in the shielding box.50 Ω matched loads 5 are connected with circulator 4.
During work, phase-locked loop frequency synthesizer 1 is connected with host computer 10 by interface circuit 8, USB interface 9 successively.Produced the microwave frequency oscillator signal of 2.45GHz by host computer 10 control phase-locked loop frequency synthesizers 1, amplitude by adjustable attenuator 2 adjusting microwave frequency oscillator signals, make the attenuation of adjustable attenuator 2 be-8dB, the driving amplifier 31 that the microwave frequency oscillator signal is input to wideband power amplifer 3 successively carries out power amplification with final stage wideband power amplifer 32, and the power of this microwave frequency oscillator signal was+32dBm after process was amplified.After the microwave frequency oscillator signal amplifies through microwave power through circulator 4 feed-in planar microstrip gradual change spiral inductance coupling coils 6, under the air pressure conditions of 0.04Torr to 10Torr, encourage the microwave microplasma, thereby realized low power microwave microplasma source.
The above is preferred embodiment of the present utility model only, is not to limit practical range of the present utility model.Have in the technical field under any and usually know the knowledgeable, within not breaking away from spirit and scope of the present utility model, when doing various changes and retouching, the utility model protection range should be as the criterion with the protection range that claims were defined.
Claims (10)
1. a small-power integrated micro microplasma source is characterized in that, comprising:
Phase-locked loop frequency synthesizer (1);
Adjustable attenuator (2) is connected with described phase-locked loop frequency synthesizer (1);
Wideband power amplifer (3) is connected with described adjustable attenuator (2);
Circulator (4) is connected with described wideband power amplifer (3);
Planar microstrip gradual change spiral inductance coupling coil (6) is connected with described circulator (4).
2. small-power integrated micro microplasma source as claimed in claim 1 is characterized in that the frequency output area of described phase-locked loop frequency synthesizer (1) is 2.3GHz to 2.6GHz.
3. small-power integrated micro microplasma source as claimed in claim 1 is characterized in that, the attenuation range of described adjustable attenuator (2) at-2dB to-17dB.
4. small-power integrated micro microplasma source as claimed in claim 1 is characterized in that, and the power stage scope of described wideband power amplifer (3) is+and 20dBm is to+40dBm, and peak power is greater than 43dBm.
5. small-power integrated micro microplasma source as claimed in claim 1 is characterized in that the frequency range of described circulator (4) is 2.3GHz to 2.5GHz, and insertion loss is 0.25dB to 0.3dB, and isolation is 20dB to 25dB.
6. small-power integrated micro microplasma source as claimed in claim 1 is characterized in that the number of turn of described planar microstrip gradual change spiral inductance coupling coil (6) is 3; The coil width of described planar microstrip gradual change spiral inductance coupling coil (6) is 100 μ m to 400 μ m, and coil-span is 100 μ m to 400 μ m,, described coil width and coil-span are reduced to inner ring gradually by the outer ring.
7. small-power integrated micro microplasma source as claimed in claim 1 is characterized in that, further comprises matched load (5); Described matched load (5) is connected with described circulator (4).
8. small-power integrated micro microplasma source as claimed in claim 7 is characterized in that, the frequency range of described matched load (5) be direct current to 2.7GHz, return loss is greater than 20dB, power capacity is 150 watts.
9. small-power integrated micro microplasma source as claimed in claim 1 is characterized in that, further comprises match circuit (7), and described match circuit (7) connects described circulator (4) and planar microstrip gradual change spiral inductance coupling coil (6).
10. small-power integrated micro microplasma source as claimed in claim 1 is characterized in that described phase-locked loop frequency synthesizer (1), adjustable attenuator (2), wideband power amplifer (3) and circulator (4) are arranged in the shielding box.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220304537 CN202713770U (en) | 2012-06-27 | 2012-06-27 | Low-power integrated microwave microplasma source |
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| Application Number | Priority Date | Filing Date | Title |
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| CN 201220304537 CN202713770U (en) | 2012-06-27 | 2012-06-27 | Low-power integrated microwave microplasma source |
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| CN202713770U true CN202713770U (en) | 2013-01-30 |
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| CN 201220304537 Expired - Fee Related CN202713770U (en) | 2012-06-27 | 2012-06-27 | Low-power integrated microwave microplasma source |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102740580A (en) * | 2012-06-27 | 2012-10-17 | 华东师范大学 | Small-power microwave microplasma integration source |
| CN103731141A (en) * | 2013-12-24 | 2014-04-16 | 电子科技大学 | Microwave plasma lamp sweep source system based on phase-locked loop |
-
2012
- 2012-06-27 CN CN 201220304537 patent/CN202713770U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102740580A (en) * | 2012-06-27 | 2012-10-17 | 华东师范大学 | Small-power microwave microplasma integration source |
| CN102740580B (en) * | 2012-06-27 | 2015-08-19 | 华东师范大学 | A kind of Small-power microwave microplasma integration source |
| CN103731141A (en) * | 2013-12-24 | 2014-04-16 | 电子科技大学 | Microwave plasma lamp sweep source system based on phase-locked loop |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130130 Termination date: 20130627 |