CN202705460U - Dual-layer sealing structure for vacuum coating equipment - Google Patents
Dual-layer sealing structure for vacuum coating equipment Download PDFInfo
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- CN202705460U CN202705460U CN 201220331363 CN201220331363U CN202705460U CN 202705460 U CN202705460 U CN 202705460U CN 201220331363 CN201220331363 CN 201220331363 CN 201220331363 U CN201220331363 U CN 201220331363U CN 202705460 U CN202705460 U CN 202705460U
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- layer sealing
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Abstract
The utility model relates to a dual-layer sealing structure for vacuum coating equipment. The dual-layer sealing structure comprises a vacuum pump, wherein the vacuum pump is connected with a gas deflation hole 8 in a flange through a vacuum pipeline. The dual-layer sealing structure is characterized by consisting of an inner-layer sealing ring 3, an outer-layer sealing ring 4, a sealing flange 1 and a smooth surface flange 2; a sealing groove 6 is formed in the sealing surface of the sealing flange 1; the inner-layer sealing ring 3 and the outer-layer sealing ring 4 are embedded in the sealing groove 6; a gas deflation tank 7 is formed between two sealing rings; the gas deflation hole 8 is formed in the flange body and is connected with the vacuum pump through the gas deflation hole 8 and a vacuum pipeline; and gas between the two sealing rings can be exhausted by the vacuum pump to form a vacuum state, and thus the sealing effect is improved. The two sealing rings press the smooth surface flange 2 under the action of a bolt force or gravity and pressure difference force, so that the dual-layer sealing is formed. The dual-layer sealing structure disclosed by the utility model can realize the reliable sealing of the vacuum chamber. Meanwhile, the dual-layer sealing structure disclosed by the utility model has the advantages of simple structure, long service life and easiness in mounting and dismounting.
Description
[technical field]
The utility model relates to the vacuum coating film equipment technical field, is specifically related to a kind of double-layer sealing structure for vacuum coating film equipment.
[background technology]
Vacuum plating is a kind of technology that produces thin-film material.Emanate out from heating source at the atom of vacuum indoor material and get on the surface of plated body body.The prerequisite of vacuum plating is to guarantee that vacuum chamber has good stable vacuum tightness.At present, the single seal with elastometic washer of the many employings of vacuum coating film equipment seal form, this seal form is applicable to the sealing than primary sealing surface, adopts this kind sealing means the not good problem of sealing effectiveness to occur easily for larger trim.Especially for the cover plate of frequent switching, rubber ring is subjected to be easy to produce abnormal deformation and aging under the impact of repeated action power and temperature and other environmental factorss, shortens the work-ing life of rubber ring.Rubber ring is in case at local somewhere generation abnormal deformation and aging, will affect the acquisition of filming equipment vacuum tightness; And often change sealing member because of need, affect greatly production continuously, carry out normally.
[utility model content]
The utility model is exactly in order to solve deficiency of the prior art, and a kind of novel structure is provided, and sealing property is more reliable, a kind of double-layer sealing structure for vacuum coating film equipment of good stability.
For achieving the above object, a kind of double-layer sealing structure for vacuum coating film equipment is provided, comprise tongued and grooved flanges 1, light face flange 2, internal layer sealing-ring 3, outer sealing-ring 4, support 5, sealing groove 6, groove 7 loses heart, bleeder port 8 and vacuum pump, it is characterized in that offering sealing groove 6 on the trim of described tongued and grooved flanges 1, be provided with internal layer sealing-ring 3 and outer sealing-ring 4 in the sealing groove 6, offer the groove 7 that loses heart between internal layer sealing-ring 3 and the outer sealing-ring 4, the groove 7 that loses heart is provided with bleeder port 8, the groove 7 that loses heart connects vacuum pipe one end by bleeder port 8, and the vacuum pipe the other end connects vacuum pump.
Described internal layer sealing-ring 3 and outer sealing-ring 4 are embedded in the same sealing groove 6.
Separate by support 5 between described internal layer sealing-ring 3 and the outer sealing-ring 4.
Described support 5 is divided into some sections, is fixed on the tongued and grooved flanges 1 by screw, and support 5 lower surfaces offer the groove 7 that loses heart.
Described internal layer sealing-ring 3 and outer sealing-ring 4 are embedded in respectively in the two separate sealing grooves.
Described internal layer sealing-ring 3 and outer sealing-ring 4 compress light face flange 2 under the effect of bolt force or gravity and difference force, form double-layer sealing structure.
The utility model is compared with prior art, and it has adopted the structure of double-layer seal rings, so that sealing property is more reliable; And can not affect the stopping property of vacuum cavity because of the inefficacy of a sealing-ring wherein, prolong the work-ing life of big area sealed structure.Simultaneously, this sealed structure has simple in structure, the advantage of easily installing, dismantling.
[description of drawings]
Fig. 1 is the structural representation of the utility model embodiment 1;
Fig. 2 is the structural representation of the utility model embodiment 2;
As shown in the figure, among the figure: 1 is that tongued and grooved flanges 2 is vacuum chamber for the groove 8 that loses heart for bleeder port 9 for sealing groove 7 for support 6 for outer sealing-ring 5 for internal layer sealing-ring 4 for light face flange 3;
Specifying Fig. 1 is Figure of abstract of the present utility model.
[embodiment]
The utility model is described in further detail below in conjunction with accompanying drawing, and the structure of this device and principle are very clearly concerning this professional people.
The utility model solves and is a kind of double-layer sealing structure for vacuum coating film equipment, comprise vacuum pump, vacuum pump is connected with bleeder port on the flange by vacuum pipe, it is characterized in that: it is comprised of internal layer sealing-ring, outer sealing-ring and tongued and grooved flanges and light face flange.Have sealing groove on the tongued and grooved flanges trim, internal layer sealing-ring and outer sealing-ring are embedded in the sealing groove; Have disappointing groove between two sealing-rings, have a bleeder port on the flange body, the groove that loses heart links to each other with vacuum pump by bleeder port and vacuum pipe, can discharge the gas between two sealing-rings by vacuum pump, forms vacuum, improves sealing effectiveness.Two sealing-rings compress light face flange under the effect of bolt force or gravity and difference force, form double-layer seal.
On the basis of above-mentioned main technical schemes, can increase following further perfect technical scheme:
Internal layer sealing-ring and outer sealing-ring can be embedded in the same sealing groove, only need open a sealing groove on the tongued and grooved flanges trim, have simplified seal groove structure, have reduced difficulty of processing.Separate by support between the inside and outside two-layer sealing-ring in the same sealing groove, support plays the effect of fixed seal ring simultaneously.Support can be divided into some sections, is fixed on the tongued and grooved flanges body by screw, and the support lower surface has disappointing groove, is used for discharging the gas between two sealing-rings.Internal layer sealing-ring and outer sealing-ring also can be embedded in respectively in the two separate sealing grooves, need not support and fix, and have saved the support cost.But double-layer sealing structure is at right angle setting both, but also level is installed; For vertically arranged form, be bolted between two flanges, such as the sealing between plated film cavity and the cavity; For the form that level is installed, two sealing-rings compress light face flange under the effect of the gravity of tongued and grooved flanges and difference force, such as the sealing between cover plate and cavity, then can save bolt and connect.
Embodiment one:
As shown in Figure 1, present embodiment comprises vacuum pump, and vacuum pump is connected with bleeder port 8 on the flange by vacuum pipe, it is characterized in that: it is comprised of internal layer sealing-ring 3, outer sealing-ring 4, support 5 and tongued and grooved flanges 1 and light face flange 2.Have sealing groove 6 on tongued and grooved flanges 1 trim, internal layer sealing-ring 3 and outer sealing-ring 4 are embedded in the sealing groove 6, separate by support 5 between two sealing-rings, and support 5 is fixed on the tongued and grooved flanges 1 by screw, simultaneously two sealing-rings are fixed in the sealing groove 6; Support 5 can be divided into some sections, and the bottom has the groove 7 that loses heart, and has a bleeder port 8 on the light face flange 2, the groove 7 that loses heart links to each other with vacuum pump by bleeder port 8 and vacuum pipe, can discharge the gas between two sealing-rings by vacuum pump, form vacuum, improve sealing effectiveness.Two sealing-rings compress light face flange 2 under the effect of bolt force or gravity and difference force, form double-layer seal.
Embodiment two:
As shown in Figure 2, present embodiment comprises vacuum pump, and vacuum pump is connected with bleeder port 8 on the flange by vacuum pipe, it is characterized in that: it is comprised of internal layer sealing-ring 3, outer sealing-ring 4 and tongued and grooved flanges 1 and light face flange 2.Have two sealing grooves 6 on tongued and grooved flanges 1 trim, internal layer sealing-ring 3 and outer sealing-ring 4 are embedded in respectively in two sealing grooves 6, have the groove 7 that loses heart on tongued and grooved flanges 1 trim between two sealing-rings, the somewhere has a bleeder port 8 on tongued and grooved flanges 1 above the disappointing groove 7, the groove 7 that loses heart links to each other with vacuum pump by bleeder port 8 and vacuum pipe, can discharge the gas between two sealing-rings by vacuum pump, form vacuum, improve sealing effectiveness.Two sealing-rings compress light face flange 2 under the effect of bolt force or gravity and difference force, form double-layer seal.
Claims (6)
1. double-layer sealing structure that is used for vacuum coating film equipment, comprise tongued and grooved flanges (1), light face flange (2), internal layer sealing-ring (3), outer sealing-ring (4), support (5), sealing groove (6), groove (7) loses heart, bleeder port (8) and vacuum pump, it is characterized in that offering sealing groove (6) on the trim of described tongued and grooved flanges (1), be provided with internal layer sealing-ring (3) and outer sealing-ring (4) in the sealing groove (6), offer disappointing groove (7) between internal layer sealing-ring (3) and the outer sealing-ring (4), the groove (7) that loses heart is provided with bleeder port (8), the groove (7) that loses heart connects vacuum pipe one end by bleeder port (8), and the vacuum pipe the other end connects vacuum pump.
2. a kind of double-layer sealing structure for vacuum coating film equipment as claimed in claim 1 is characterized in that described internal layer sealing-ring (3) and outer sealing-ring (4) are embedded in the same sealing groove (6).
3. a kind of double-layer sealing structure for vacuum coating film equipment as claimed in claim 1 is characterized in that separating by support (5) between described internal layer sealing-ring (3) and the outer sealing-ring (4).
4. a kind of double-layer sealing structure for vacuum coating film equipment as claimed in claim 3, it is characterized in that described support (5) is divided into some sections, be fixed on the tongued and grooved flanges (1) by screw, support (5) lower surface offers disappointing groove (7).
5. a kind of double-layer sealing structure for vacuum coating film equipment as claimed in claim 1 is characterized in that described internal layer sealing-ring (3) and outer sealing-ring (4) are embedded in respectively in the two separate sealing grooves.
6. a kind of double-layer sealing structure for vacuum coating film equipment as claimed in claim 1, it is characterized in that described internal layer sealing-ring (3) and outer sealing-ring (4) compress light face flange (2) under the effect of bolt force or gravity and difference force, form double-layer sealing structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220331363 CN202705460U (en) | 2012-07-09 | 2012-07-09 | Dual-layer sealing structure for vacuum coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220331363 CN202705460U (en) | 2012-07-09 | 2012-07-09 | Dual-layer sealing structure for vacuum coating equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202705460U true CN202705460U (en) | 2013-01-30 |
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ID=47585781
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220331363 Expired - Lifetime CN202705460U (en) | 2012-07-09 | 2012-07-09 | Dual-layer sealing structure for vacuum coating equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202705460U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104805412A (en) * | 2015-02-10 | 2015-07-29 | 中国建材国际工程集团有限公司 | Composite sealing system of vacuum coating apparatus |
| CN109958381A (en) * | 2017-12-14 | 2019-07-02 | 核工业西南物理研究院 | A kind of door for vacuum chamber sealing structure and vacuum chamber |
| CN113645794A (en) * | 2021-07-15 | 2021-11-12 | 北京遥测技术研究所 | Double-layer convolution type sealing structure and method based on height difference |
| CN113685425A (en) * | 2021-08-27 | 2021-11-23 | 中国核动力研究设计院 | Bolt sealing structure and pressure container of high-flux engineering test reactor |
-
2012
- 2012-07-09 CN CN 201220331363 patent/CN202705460U/en not_active Expired - Lifetime
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104805412A (en) * | 2015-02-10 | 2015-07-29 | 中国建材国际工程集团有限公司 | Composite sealing system of vacuum coating apparatus |
| CN109958381A (en) * | 2017-12-14 | 2019-07-02 | 核工业西南物理研究院 | A kind of door for vacuum chamber sealing structure and vacuum chamber |
| CN113645794A (en) * | 2021-07-15 | 2021-11-12 | 北京遥测技术研究所 | Double-layer convolution type sealing structure and method based on height difference |
| CN113645794B (en) * | 2021-07-15 | 2023-01-06 | 北京遥测技术研究所 | Double-layer convolution type sealing structure and method based on height difference |
| CN113685425A (en) * | 2021-08-27 | 2021-11-23 | 中国核动力研究设计院 | Bolt sealing structure and pressure container of high-flux engineering test reactor |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| EE01 | Entry into force of recordation of patent licensing contract |
Assignee: CNBM OPTOELECTRONIC EQUIPMENT (TAICANG) CO.,LTD. Assignor: China Triumph International Engineering Co.,Ltd. Contract record no.: 2015310000054 Denomination of utility model: Dual-layer sealing structure for vacuum coating equipment Granted publication date: 20130130 License type: Exclusive License Record date: 20150414 |
|
| LICC | Enforcement, change and cancellation of record of contracts on the licence for exploitation of a patent or utility model | ||
| EC01 | Cancellation of recordation of patent licensing contract | ||
| EC01 | Cancellation of recordation of patent licensing contract |
Assignee: CNBM OPTOELECTRONIC EQUIPMENT (TAICANG) CO.,LTD. Assignor: China Triumph International Engineering Co.,Ltd. Contract record no.: 2015310000054 Date of cancellation: 20190219 |
|
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20201229 Address after: No.1047 Tushan Road, Bengbu City, Anhui Province 233000 Patentee after: CHINA BUILDING MATERIALS BENGBU GLASS INDUSTRY DESIGN & RESEARCH INSTITUTE Co.,Ltd. Address before: 200063 27 / F, Zhongyuan Building, 2000 Zhongshan North Road, Putuo District, Shanghai Patentee before: China Triumph International Engineering Co.,Ltd. |
|
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20130130 |