CN202693906U - Photic driving scanning micro-mirror - Google Patents
Photic driving scanning micro-mirror Download PDFInfo
- Publication number
- CN202693906U CN202693906U CN 201220258459 CN201220258459U CN202693906U CN 202693906 U CN202693906 U CN 202693906U CN 201220258459 CN201220258459 CN 201220258459 CN 201220258459 U CN201220258459 U CN 201220258459U CN 202693906 U CN202693906 U CN 202693906U
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- movable lens
- mirror
- microdrive
- silicon
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Abstract
The utility model provides a photic driving scanning micro-mirror comprising micro-drivers, plane springs, a movable lens and a photocell. An output end of each micro-driver is connected with an input end of each plane spring; an output end of each plane spring is connected with an input end of the movable lens; an output end of the photocell is connected with input ends of the micro-drivers; each device comprises one movable lens, two plane springs, two micro-drivers and one photocell; the movable lens is connected with the two plane springs; and each plane spring is connected with one micro-driver. The photic driving scanning micro-mirror is manufactured by adopting a silicon micro-machining technology and the lens is directly driven by driving laser with a specific wavelength in incidence laser to finish scanning, so that a lead wire bonding procedure which is related to the conventional electric connection is avoided.
Description
Technical field
The utility model relates to a kind of mems device for optical scanning, particularly based on the optical drive principle of photoelectric conversion technique.
Background technology
Adopt the micro-optical scanning device of silicon micromachining technology manufacturing in optical scanning, optical imagery, there is very important application in the fields such as laser projection.Particularly in optics based endoscopic imaging field, the image probe that is integrated with the micro-optical scanning device can be at the pipeline of the various diameters of human body (such as blood vessel, alimentary canal etc.) finish scanning in, combine with the optical imaging apparatus of outside, thereby obtain tissue two dimensional image or 3-D view.
Usually, the micro-optical scanning device all adopts aluminium or golden wire bonding technology to set up reliable and stable electrical connection between the pad of device surface and external metallization wire, thereby receives outside electric drive signal to finish scanning work.There is certain failure risk in the metal lead wire bonding technology.For some special applications, optics based endoscopic imaging described above is used, and the equipment in the human body of entering needs as much as possible simplified design so that better reliability and security to be provided, and the further volume of reduction equipment.Because the micro-optical scanning device is used for optical scanning, must have the movable lens surface that laser beam projects the micro-optical scanning device, therefore the possibility that adopts photoelectric conversion technique the portion of energy of incident laser light beam to be converted to the electric signal that drives the micro-optical scanning device is provided.
The utility model proposes a kind of mems device for optical scanning, particularly based on the optical drive principle of photoelectric conversion technique, by adopting photoelectric conversion technique the portion of energy of incident laser light beam is converted to the electric signal that drives the micro-optical scanning device.The utility model has been exempted the metal lead wire bond sequence of traditional requisite mems device, has further dwindled volume, has further improved reliability and security.
The utility model content
The purpose of this utility model is to propose a kind of optical drive scanning micro-mirror, based on the optical drive principle of photoelectric conversion technique.
For achieving the above object, the utility model adopts technical scheme to be: it comprises microdrive, plane spring, movable lens and photoelectric cell.The output terminal of microdrive links to each other with the input end of plane spring, and the output terminal of plane spring links to each other with the input end of movable lens, and photronic output terminal links to each other with the input end of microdrive; Each device comprises 1 movable lens, 2 plane springs, 2 microdrives and 1 photoelectric cell, and movable lens links to each other with 2 plane springs, and each plane spring links to each other with 1 microdrive;
Described microdrive adopts micro-processing technology to make, based on the electrothermal drive principle, and by multilayer material, such as silicon, silicon dioxide, metal, the compositions such as metal oxide are used for the electric drive signal of outside input is converted to mechanical deformation by bimetallic effect;
Described plane spring adopts micro-processing technology to make, and by multilayer material, such as silicon, the compositions such as silicon dioxide are used for the displacement of microdrive one end is passed to movable lens;
Described movable lens adopts micro-processing technology to make, by multilayer material, and such as silicon, the compositions such as silicon dioxide; The optical thin film of the core of movable lens for depositing in the silicon dioxide substrate, for the incident laser light beam of reflection specific wavelength, and the incident laser light beam of transmission different wave length is to photoelectric cell;
Described photoelectric cell adopts micro-processing technology to make, by multilayer material, and such as silicon, the compositions such as silicon dioxide; Photoelectric cell is positioned at the bottom of optical drive scanning micro-mirror, and is relative with movable lens, is used for receiving the incident laser light beam through the specific wavelength of movable lens transmission, is translated into for the electric signal that drives microdrive;
Principle of work of the present utility model is such: the incident laser light beam is comprised of two kinds of different laser of wavelength, and a kind of is work laser, and another kind is driving laser.Work laser can for the low coherent laser of single-frequency laser or broadband, depend on the requirement of optical imaging apparatus; Driving laser is single-frequency laser, and photronic sensitive wave length is complementary in its wavelength and the optical drive scanning micro-mirror.The incident laser light beam at first projects on the movable lens of optical drive scanning micro-mirror, and incident angle is 45 ° to 90 °.The optical thin film of the core of movable lens for depositing in the silicon dioxide substrate is used for reflective operation laser, and the transmission driving laser.Driving laser passes the optical thin film of movable lens, is radiated on the photoelectric cell below the movable lens.Photoelectric cell is used for receiving the driving laser through the movable lens transmission, is translated into for the electric signal that drives microdrive.Drive electric signal and make metal or silicon well heater in the microdrive produce heat, the temperature of microdrive is risen.Microdrive is that multilayer material consists of, and different materials has different thermal expansivity, and therefore along with temperature rises, deformation can occur microdrive, to the less material curving of thermal expansivity.One end of microdrive is fixed on the silicon chip, and the other end is connected on the movable lens by plane spring.Under the effect of different amplitude electric drive signals, the deformation of different amplitudes occurs in microdrive, makes the movable lens vibration, finishes scanning.
The utility model has following advantage owing to having adopted technique scheme:
1, exempted the metal lead wire bond sequence of traditional requisite mems device;
2, further dwindle device volume, improved reliability and security.
Description of drawings
Fig. 1 is structural representation of the present utility model;
Fig. 2 is work schematic diagram of the present utility model.
Embodiment
The utility model is described in further detail below in conjunction with drawings and Examples: shown in Fig. 1-2, it comprises microdrive 1, plane spring 2, movable lens 3 and photoelectric cell 4.The output terminal of microdrive 1 links to each other with the input end of plane spring 2, and the output terminal of plane spring 2 links to each other with the input end of movable lens 3, and the output terminal of photoelectric cell 4 links to each other with the input end of microdrive 1; Each device comprises 1 movable lens 3,2 plane springs 2,2 microdrives 1 and 1 photoelectric cell 4, and movable lens 3 links to each other with 2 plane springs 2, and each plane spring 2 links to each other with 1 microdrive 1;
Described microdrive 1 adopts micro-processing technology to make, based on the electrothermal drive principle, and by multilayer material, such as silicon, silicon dioxide, metal, the compositions such as metal oxide are used for the electric drive signal of outside input is converted to mechanical deformation by bimetallic effect;
Described plane spring 2 adopts micro-processing technology to make, and by multilayer material, such as silicon, the compositions such as silicon dioxide are used for the displacement of microdrive 1 one ends is passed to movable lens 3;
Described movable lens 3 adopts micro-processing technology to make, by multilayer material, and such as silicon, the compositions such as silicon dioxide; The optical thin film of the core of movable lens 3 for depositing in the silicon dioxide substrate, for the incident laser light beam of reflection specific wavelength, and the incident laser light beam of transmission different wave length is to photoelectric cell 4;
Described photoelectric cell 4 adopts micro-processing technology to make, by multilayer material, and such as silicon, the compositions such as silicon dioxide; Photoelectric cell is positioned at the bottom of optical drive scanning micro-mirror, and is relative with movable lens 3, is used for receiving the incident laser light beam through the specific wavelength of movable lens 3 transmissions, is translated into for the electric signal that drives microdrive 1;
Principle of work of the present utility model is such: the incident laser light beam at first projects on the movable lens 3 of optical drive scanning micro-mirror, and incident angle is 45 ° to 90 °.The optical thin film of the core of movable lens 3 for depositing in the silicon dioxide substrate is used for reflective operation laser, and the transmission driving laser.Driving laser passes the optical thin film of movable lens 3, is radiated on the photoelectric cell 4 below the movable lens 3.Photoelectric cell 4 is used for receiving the driving laser through the movable lens transmission, is translated into for the electric signal that drives microdrive 1.Drive electric signal and make metal or silicon well heater in the microdrive 1 produce heat, the temperature of microdrive 1 is risen.Microdrive 1 consists of for multilayer material, and different materials has different thermal expansivity, and therefore along with temperature rises, deformation can occur microdrive 1, to the less material curving of thermal expansivity.One end of microdrive 1 is fixed on the silicon chip, and the other end is connected on the movable lens 3 by plane spring 2.Under the effect of different amplitude electric drive signals, the deformation of different amplitudes occurs in microdrive 1, makes movable lens 3 vibrations, finishes scanning.
The mechanical deflection angle of movable lens described in the utility model is (0-45).
Claims (7)
1. optical drive scanning micro-mirror, it is characterized in that: it comprises microdrive, plane spring, movable lens and photoelectric cell.The output terminal of microdrive links to each other with the input end of plane spring, and the output terminal of plane spring links to each other with the input end of movable lens, and photronic output terminal links to each other with the input end of microdrive; Each device comprises 1 movable lens, 2 plane springs, 2 microdrives and 1 photoelectric cell, and movable lens links to each other with 2 plane springs, and each plane spring links to each other with 1 microdrive.
2. a kind of optical drive scanning micro-mirror as claimed in claim 1 is characterized in that: described microdrive adopts micro-processing technology to make, based on the electrothermal drive principle, and by multilayer material, such as silicon, silicon dioxide, metal, the compositions such as metal oxide.
3. a kind of optical drive scanning micro-mirror as claimed in claim 1, it is characterized in that: the mechanical deflection angle of described movable lens is the 0-45 degree.
4. a kind of optical drive scanning micro-mirror as claimed in claim 1 is characterized in that: described plane spring adopts micro-processing technology to make, by multilayer material, and such as silicon, the compositions such as silicon dioxide.
5. a kind of optical drive scanning micro-mirror as claimed in claim 1 is characterized in that: described movable lens adopts micro-processing technology to make, by multilayer material, and such as silicon, the compositions such as silicon dioxide.
6. a kind of optical drive scanning micro-mirror as claimed in claim 1 is characterized in that: the optical thin film of the core of described movable lens for depositing in the silicon dioxide substrate, and reflection wavelength is the 300-980 nanometer, transmission peak wavelength is the 1020-1550 nanometer.
7. a kind of optical drive scanning micro-mirror as claimed in claim 1 is characterized in that: described photoelectric cell adopts micro-processing technology to make, by multilayer material, and such as silicon, the compositions such as silicon dioxide; Photronic sensitive wave length is the 1020-1550 nanometer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220258459 CN202693906U (en) | 2012-06-04 | 2012-06-04 | Photic driving scanning micro-mirror |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220258459 CN202693906U (en) | 2012-06-04 | 2012-06-04 | Photic driving scanning micro-mirror |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202693906U true CN202693906U (en) | 2013-01-23 |
Family
ID=47549498
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220258459 Expired - Fee Related CN202693906U (en) | 2012-06-04 | 2012-06-04 | Photic driving scanning micro-mirror |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202693906U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102662234A (en) * | 2012-06-04 | 2012-09-12 | 凝辉(天津)科技有限责任公司 | Light driving scanning micro-mirror |
-
2012
- 2012-06-04 CN CN 201220258459 patent/CN202693906U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102662234A (en) * | 2012-06-04 | 2012-09-12 | 凝辉(天津)科技有限责任公司 | Light driving scanning micro-mirror |
| CN102662234B (en) * | 2012-06-04 | 2015-04-01 | 凝辉(天津)科技有限责任公司 | Light driving scanning micro-mirror |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130123 Termination date: 20140604 |