CN102662234A - Light driving scanning micro-mirror - Google Patents
Light driving scanning micro-mirror Download PDFInfo
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- CN102662234A CN102662234A CN2012101797905A CN201210179790A CN102662234A CN 102662234 A CN102662234 A CN 102662234A CN 2012101797905 A CN2012101797905 A CN 2012101797905A CN 201210179790 A CN201210179790 A CN 201210179790A CN 102662234 A CN102662234 A CN 102662234A
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Abstract
The invention provides a light driving scanning micro-mirror, comprising micro-drivers, plane springs, a movable lens and a light cell. Output ends of the micro-drivers are connected with input ends of the plane springs; output ends of the plane springs are connected with an input end of the movable lens; and an output end of the light cell is connected with input ends of the micro-drivers. Each light driving scanning micro-mirror comprises one movable lens, two plane springs, two micro-drives and one light cell; and the movable lens is connected with the two plane springs; each plane spring is connected with one micro-driver. The light driving scanning micro-mirror provided by the invention is manufactured by using a silicone micromachining technology, and the lens can be directly driven through a specific wave length in incidence laser to scan, so that a lead wire bonding process related to the traditional electric connection is avoided.
Description
Technical field
The present invention relates to a kind of mems device that is used for optical scanning, particularly based on the optical drive principle of photoelectric conversion technique.
Background technology
Adopt micro-optical scanning device that silicon micromachining technology makes in optical scanning, optical imagery, there is very important application in fields such as laser projection.Particularly in optics based endoscopic imaging field; The image probe that is integrated with the micro-optical scanning device can be at the pipeline of the various diameters of human body (like blood vessel; Alimentary canal etc.) accomplish scanning in, combine, thereby obtain tissue two dimensional image or 3-D view with the optical imaging apparatus of outside.
Usually, the micro-optical scanning device all adopts aluminium or golden bonded between the pad of device surface and external metallization lead, to set up reliable and stable being electrically connected, thereby receives the external electric drive signal to accomplish scanning work.There is certain failure risk in the metal lead wire bonding technology.For some special applications, to use like above-mentioned optics based endoscopic imaging, the equipment in the human body of getting into needs as much as possible simplified design so that better reliability and security to be provided, and the further volume of reduction equipment.Because the micro-optical scanning device is used for optical scanning; Must have the movable lens surface that laser beam projects the micro-optical scanning device, therefore the possibility that adopts photoelectric conversion technique the portion of energy of incident laser light beam to be converted into the electric signal that drives the micro-optical scanning device is provided.
The present invention proposes a kind of mems device that is used for optical scanning, particularly based on the optical drive principle of photoelectric conversion technique, converts the portion of energy of incident laser light beam into drive the micro-optical scanning device electric signal through adopting photoelectric conversion technique.The present invention has exempted the metal lead wire bond sequence of traditional requisite mems device, has further dwindled volume, has further improved reliability and security.
Summary of the invention
The objective of the invention is to propose a kind of optical drive scanning micro-mirror, based on the optical drive principle of photoelectric conversion technique.
For realizing above-mentioned purpose, the present invention adopts technical scheme to be: it comprises microdrive, plane spring, movable lens and photoelectric cell.The output terminal of microdrive links to each other with the input end of plane spring, and the output terminal of plane spring links to each other with the input end of movable lens, and photronic output terminal links to each other with the input end of microdrive; Each device comprises 1 movable lens, 2 plane springs, 2 microdrives and 1 photoelectric cell, and movable lens links to each other with 2 plane springs, and each plane spring links to each other with 1 microdrive;
Described microdrive adopts micro-processing technology to process, based on the electrothermal drive principle, and by multilayer material, like silicon, silicon dioxide, metal, compositions such as metal oxide are used for converting the electric drive signal of outside input into mechanical deformation through bimetallic effect;
Described plane spring adopts micro-processing technology to process, and by multilayer material, like silicon, compositions such as silicon dioxide are used for the displacement of microdrive one end is passed to movable lens;
Described movable lens adopts micro-processing technology to process, by multilayer material, and like silicon, compositions such as silicon dioxide; The core of movable lens is the optical thin film that on silica-primed, deposits, and be used to reflect the incident laser light beam of specific wavelength, and the incident laser light beam of transmission different wave length is to photoelectric cell;
Described photoelectric cell adopts micro-processing technology to process, by multilayer material, and like silicon, compositions such as silicon dioxide; Photoelectric cell is positioned at the bottom of optical drive scanning micro-mirror, and is relative with movable lens, is used to receive the incident laser light beam through the specific wavelength of movable lens transmission, is translated into the electric signal that is used to drive microdrive;
Principle of work of the present invention is such: the incident laser light beam is made up of two kinds of wavelength different laser, and a kind of is work laser, and another kind is a driving laser.Work laser can depend on the requirement of optical imaging apparatus for the low coherent laser of single-frequency laser or broadband; Driving laser is a single-frequency laser, and photronic sensitive wave length is complementary in its wavelength and the optical drive scanning micro-mirror.The incident laser light beam at first projects on the movable lens of optical drive scanning micro-mirror, and incident angle is 45 ° to 90 °.The optical thin film of the core of movable lens on silica-primed, depositing is used for reflective operation laser, and the transmission driving laser.Driving laser passes the optical thin film of movable lens, is radiated on the photoelectric cell below the movable lens.Photoelectric cell is used to receive the driving laser through the movable lens transmission, is translated into the electric signal that is used to drive microdrive.Drive electric signal and make metal or silicon well heater in the microdrive produce heat, the temperature of microdrive is risen.Microdrive is that multilayer material constitutes, and material different has different thermal expansivity, and therefore along with temperature rises, deformation can take place microdrive, and is bent to thermal expansivity materials with smaller one lateral bending.One end of microdrive is fixed on the silicon chip, and the other end is connected on the movable lens through plane spring.Under the effect of different amplitude electric drive signals, the deformation of different amplitudes takes place in microdrive, makes the movable lens vibration, accomplishes scanning.
The present invention has following advantage owing to adopted technique scheme:
1, exempted the metal lead wire bond sequence of traditional requisite mems device;
2, further dwindle device volume, improved reliability and security.
Description of drawings
Fig. 1 is a structural representation of the present invention;
Fig. 2 is a work synoptic diagram of the present invention.
Embodiment
Below in conjunction with accompanying drawing and embodiment the present invention is described further: shown in Fig. 1-2, it comprises microdrive 1, plane spring 2, movable lens 3 and photoelectric cell 4.The output terminal of microdrive 1 links to each other with the input end of plane spring 2, and the output terminal of plane spring 2 links to each other with the input end of movable lens 3, and the output terminal of photoelectric cell 4 links to each other with the input end of microdrive 1; Each device comprises 2,2 microdrives 1 of 3,2 plane springs of 1 movable lens and 1 photoelectric cell 4, and movable lens 3 links to each other with 2 plane springs 2, and each plane spring 2 links to each other with 1 microdrive 1;
Described microdrive 1 adopts micro-processing technology to process, based on the electrothermal drive principle, and by multilayer material, like silicon, silicon dioxide, metal, compositions such as metal oxide are used for converting the electric drive signal of outside input into mechanical deformation through bimetallic effect;
Described plane spring 2 adopts micro-processing technology to process, and by multilayer material, like silicon, compositions such as silicon dioxide are used for the displacement of microdrive 1 one ends is passed to movable lens 3;
Described movable lens 3 adopts micro-processing technology to process, by multilayer material, and like silicon, compositions such as silicon dioxide; The core of movable lens 3 is the optical thin film that on silica-primed, deposits, and be used to reflect the incident laser light beam of specific wavelength, and the incident laser light beam of transmission different wave length is to photoelectric cell 4;
Described photoelectric cell 4 adopts micro-processing technology to process, by multilayer material, and like silicon, compositions such as silicon dioxide; Photoelectric cell is positioned at the bottom of optical drive scanning micro-mirror, and is relative with movable lens 3, is used to receive the incident laser light beam through the specific wavelength of movable lens 3 transmissions, is translated into the electric signal that is used to drive microdrive 1;
Principle of work of the present invention is such: the incident laser light beam at first projects on the movable lens 3 of optical drive scanning micro-mirror, and incident angle is 45 ° to 90 °.The optical thin film of the core of movable lens 3 on silica-primed, depositing is used for reflective operation laser, and the transmission driving laser.Driving laser passes the optical thin film of movable lens 3, is radiated on the photoelectric cell 4 below the movable lens 3.Photoelectric cell 4 is used to receive the driving laser through the movable lens transmission, is translated into the electric signal that is used to drive microdrive 1.Drive electric signal and make metal or silicon well heater in the microdrive 1 produce heat, the temperature of microdrive 1 is risen.Microdrive 1 constitutes for multilayer material, and material different has different thermal expansivity, and therefore along with temperature rises, deformation can take place microdrive 1, and is bent to thermal expansivity materials with smaller one lateral bending.One end of microdrive 1 is fixed on the silicon chip, and the other end is connected on the movable lens 3 through plane spring 2.Under the effect of different amplitude electric drive signals, the deformation of different amplitudes takes place in microdrive 1, makes movable lens 3 vibrations, accomplishes scanning.
The mechanical deflection angle of movable lens of the present invention is (0-45).
Claims (7)
1. optical drive scanning micro-mirror, it is characterized in that: it comprises microdrive, plane spring, movable lens and photoelectric cell.The output terminal of microdrive links to each other with the input end of plane spring, and the output terminal of plane spring links to each other with the input end of movable lens, and photronic output terminal links to each other with the input end of microdrive; Each device comprises 1 movable lens, 2 plane springs, 2 microdrives and 1 photoelectric cell, and movable lens links to each other with 2 plane springs, and each plane spring links to each other with 1 microdrive.
2. a kind of optical drive scanning micro-mirror as claimed in claim 1 is characterized in that: described microdrive adopts micro-processing technology to process, based on the electrothermal drive principle, and by multilayer material, like silicon, silicon dioxide, metal, compositions such as metal oxide.
3. a kind of optical drive scanning micro-mirror as claimed in claim 1 is characterized in that: the mechanical deflection angle of described movable lens is (0-45) degree.
4. a kind of optical drive scanning micro-mirror as claimed in claim 1 is characterized in that: described plane spring adopts micro-processing technology to process, by multilayer material, and like silicon, compositions such as silicon dioxide.
5. a kind of optical drive scanning micro-mirror as claimed in claim 1 is characterized in that: described movable lens adopts micro-processing technology to process, by multilayer material, and like silicon, compositions such as silicon dioxide.
6. a kind of optical drive scanning micro-mirror as claimed in claim 1 is characterized in that: the optical thin film of the core of described movable lens on silica-primed, depositing, and reflection wavelength is (300-980) nanometer, transmission peak wavelength is (1020-1550) nanometer.
7. a kind of optical drive scanning micro-mirror as claimed in claim 1 is characterized in that: described photoelectric cell adopts micro-processing technology to process, by multilayer material, and like silicon, compositions such as silicon dioxide; Photronic sensitive wave length is (1020-1550) nanometer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210179790.5A CN102662234B (en) | 2012-06-04 | 2012-06-04 | Light driving scanning micro-mirror |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210179790.5A CN102662234B (en) | 2012-06-04 | 2012-06-04 | Light driving scanning micro-mirror |
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| Publication Number | Publication Date |
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| CN102662234A true CN102662234A (en) | 2012-09-12 |
| CN102662234B CN102662234B (en) | 2015-04-01 |
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| CN201210179790.5A Expired - Fee Related CN102662234B (en) | 2012-06-04 | 2012-06-04 | Light driving scanning micro-mirror |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114699045A (en) * | 2022-03-24 | 2022-07-05 | 四川大学 | Portable photoacoustic microscopic imaging system and method based on scanning galvanometer |
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| US20050117235A1 (en) * | 2003-12-02 | 2005-06-02 | Samsung Electronics Co., Ltd. | Micro mirror and method for fabricating the same |
| JP2007286129A (en) * | 2006-04-12 | 2007-11-01 | Canon Inc | Image forming apparatus and method of controlling the same |
| JP2008046591A (en) * | 2006-07-18 | 2008-02-28 | Ricoh Co Ltd | Method of producing contact part of actuator, actuator, optical system and image forming apparatus |
| CN101393105A (en) * | 2007-09-20 | 2009-03-25 | 富士胶片株式会社 | Optical scanning element, driving method for same, and optical scanning probe employing optical scanning element |
| CN101488724A (en) * | 2009-02-19 | 2009-07-22 | 上海交通大学 | Electric heating micro driver of multiple polymer composite material |
| CN101852917A (en) * | 2010-03-31 | 2010-10-06 | 重庆大学 | Large turn angle piezoelectric scanning micromirror |
| CN202693906U (en) * | 2012-06-04 | 2013-01-23 | 凝辉(天津)科技有限责任公司 | Photic driving scanning micro-mirror |
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2012
- 2012-06-04 CN CN201210179790.5A patent/CN102662234B/en not_active Expired - Fee Related
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20050117235A1 (en) * | 2003-12-02 | 2005-06-02 | Samsung Electronics Co., Ltd. | Micro mirror and method for fabricating the same |
| JP2007286129A (en) * | 2006-04-12 | 2007-11-01 | Canon Inc | Image forming apparatus and method of controlling the same |
| JP2008046591A (en) * | 2006-07-18 | 2008-02-28 | Ricoh Co Ltd | Method of producing contact part of actuator, actuator, optical system and image forming apparatus |
| CN101393105A (en) * | 2007-09-20 | 2009-03-25 | 富士胶片株式会社 | Optical scanning element, driving method for same, and optical scanning probe employing optical scanning element |
| CN101488724A (en) * | 2009-02-19 | 2009-07-22 | 上海交通大学 | Electric heating micro driver of multiple polymer composite material |
| CN101852917A (en) * | 2010-03-31 | 2010-10-06 | 重庆大学 | Large turn angle piezoelectric scanning micromirror |
| CN202693906U (en) * | 2012-06-04 | 2013-01-23 | 凝辉(天津)科技有限责任公司 | Photic driving scanning micro-mirror |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114699045A (en) * | 2022-03-24 | 2022-07-05 | 四川大学 | Portable photoacoustic microscopic imaging system and method based on scanning galvanometer |
| CN114699045B (en) * | 2022-03-24 | 2023-09-01 | 四川大学 | Portable photoacoustic microscopic imaging system and method based on scanning galvanometer |
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| Publication number | Publication date |
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| CN102662234B (en) | 2015-04-01 |
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Effective date of registration: 20200918 Address after: 233000 No.10, building 32, Zone 8, Guangcai market, bengshan District, Bengbu City, Anhui Province Patentee after: Bengbu Shangwei Intellectual Property Operations Co.,Ltd. Address before: 300384 Tianjin Huayuan Industrial Park high tech Zone 2 Alex Hua Tian Road, Torch Hotel auxiliary building room 235 Patentee before: NYMPH (TIANJIN) TECHNOLOGY Co.,Ltd. |
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