CN202661412U - X-ray automatic measuring device - Google Patents
X-ray automatic measuring device Download PDFInfo
- Publication number
- CN202661412U CN202661412U CN 201220319218 CN201220319218U CN202661412U CN 202661412 U CN202661412 U CN 202661412U CN 201220319218 CN201220319218 CN 201220319218 CN 201220319218 U CN201220319218 U CN 201220319218U CN 202661412 U CN202661412 U CN 202661412U
- Authority
- CN
- China
- Prior art keywords
- fixed
- air pump
- ray
- main shaft
- worktable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model provides an X-ray automatic measuring device. The measuring device comprises a frame, wherein a transformer, a rectifier and an air pump are arranged in the frame; a workbench is fixed at the upper end of the frame; an X-ray generator is fixed in the middle of the workbench through a bolt; angle instruments are respectively fixed on two sides of the workbench, a worm-gear pair is arranged inside each angle instrument, and a step motor is arranged on a worm; a main shaft is arranged on each angle instrument; the upper part of the main shaft penetrates outside the shell of the angle instrument; a sample table is fixed at the upper end of the main shaft, and connected with an air pump suction pipe; and the air pump suction pipe is connected with the air pump in the frame. According to the X-ray automatic measuring device, crystal can be automatically detected in a monocrystal producing process, so that radiation of X-ray to an operator can be reduced, the measurement accuracy can be improved, data recording can be facilitated, and the production efficiency can be improved.
Description
Technical field
The utility model relates to a kind of monitoring device of monocrystal material, particularly relates to a kind of X ray automatic measuring instrument.
Background technology
Need in the monocrystal material production run crystal bar and wafer are tested, check the arrangement angle of its internal crystal framework.The transmission inspection machine needs manual detection, and is higher to operator's requirement, and simultaneously error ratio is larger, and not only verify error is large but also operator's health has been brought X-radiation in long testing.Production efficiency is low simultaneously, and the data of checking can not in time be recorded and store.
The utility model content
The purpose of this utility model is defective and the deficiency that exists for overcoming above-mentioned prior art, and provide a kind of measurement range large, can satisfy 0 ° of-80 ° of measurement, and the high X ray automatic measuring instrument of automaticity.
The technical scheme that adopts is:
A kind of X ray automatic measuring instrument comprises body, is provided with transformer, rectifier and air pump in the body, and the body upper end is fixed with worktable, installs and fixes x ray generator by bolt in the middle of the worktable.The both sides of worktable are fixed with respectively angular instrument, be equiped with worm couple in the angular instrument, and stepper motor is installed on the worm screw, be equiped with a main shaft on the angular instrument, the top of main shaft passes outside the housing of angular instrument, the upper end of main shaft is fixed with sample stage, and sample stage connects an air pump suction pipe, and the air pump suction pipe air pump interior with being arranged on body is connected.Be fixed with scintillation detector and scrambler on the sample stage, X-ray is penetrated the monocrystalline reverberator is installed on the generator, and is furnished with electronic optical gate, realizes automatically control.Also be provided with the display that shows tested crystal peak value angle on the worktable.
The utility model has realized that monocrystal in process of production to the detection realization robotization of crystal, reduces X-ray to operator's radiation, improves measuring accuracy, is convenient to the record of data and has improved production efficiency.
Description of drawings
Fig. 1 is structural representation of the present utility model.
Embodiment
A kind of X ray automatic measuring instrument comprises body 3, is provided with transformer 1, rectifier 2 and air pump 16 in the body, and body 3 upper ends are fixed with worktable 4, installs and fixes x ray generator 10 by bolt in the middle of the worktable.The both sides of worktable are fixed with respectively angular instrument 6, be equiped with worm couple 7 in the angular instrument 6, and stepper motor 5 is installed on the worm screw, be equiped with a main shaft 8 on the angular instrument 6, the top of main shaft 8 passes outside the housing of angular instrument 6, the upper end of main shaft 8 is fixed with sample stage 13, and sample stage 13 connects an air pump suction pipe 9, and air pump suction pipe 9 air pump interior with being arranged on body 3 is connected.Be fixed with scintillation detector 15 and scrambler 14 on the sample stage, X-ray is penetrated monocrystalline reverberator 12 is installed on the generator 10, and is furnished with electronic optical gate, realizes automatically control.Also be provided with the display 11 that shows tested crystal peak value angle on the worktable 4.
Claims (1)
1. X ray automatic measuring instrument, comprise body, be provided with transformer in the body, rectifier and air pump, the body upper end is fixed with worktable, the middle part that it is characterized in that described worktable is fixed with x ray generator, the both sides of worktable are fixed with respectively angular instrument, be equiped with worm couple in the angular instrument, and stepper motor is installed on the worm screw, be equiped with a main shaft on the angular instrument, the top of main shaft passes outside the housing of angular instrument, and the upper end of main shaft is fixed with sample stage, and sample stage connects an air pump suction pipe, the air pump suction pipe air pump interior with being arranged on body is connected, be fixed with scintillation detector and scrambler on the sample stage, X-ray is penetrated the monocrystalline reverberator is installed on the generator, is provided with the display that shows tested crystal peak value angle on the worktable.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220319218 CN202661412U (en) | 2012-07-04 | 2012-07-04 | X-ray automatic measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220319218 CN202661412U (en) | 2012-07-04 | 2012-07-04 | X-ray automatic measuring device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202661412U true CN202661412U (en) | 2013-01-09 |
Family
ID=47456310
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220319218 Expired - Fee Related CN202661412U (en) | 2012-07-04 | 2012-07-04 | X-ray automatic measuring device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202661412U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104807840A (en) * | 2015-04-28 | 2015-07-29 | 苏州新材料研究所有限公司 | Sample fixing device for superconducting strip XRD texture measurement |
| CN107282465A (en) * | 2017-06-06 | 2017-10-24 | 安徽铜峰电子股份有限公司 | A kind of wafer angular sorter |
-
2012
- 2012-07-04 CN CN 201220319218 patent/CN202661412U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104807840A (en) * | 2015-04-28 | 2015-07-29 | 苏州新材料研究所有限公司 | Sample fixing device for superconducting strip XRD texture measurement |
| CN107282465A (en) * | 2017-06-06 | 2017-10-24 | 安徽铜峰电子股份有限公司 | A kind of wafer angular sorter |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130109 Termination date: 20150704 |
|
| EXPY | Termination of patent right or utility model |