CN202646525U - Inner vibration absorption device of micro-electro-mechanical sensor - Google Patents
Inner vibration absorption device of micro-electro-mechanical sensor Download PDFInfo
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- CN202646525U CN202646525U CN 201220275301 CN201220275301U CN202646525U CN 202646525 U CN202646525 U CN 202646525U CN 201220275301 CN201220275301 CN 201220275301 CN 201220275301 U CN201220275301 U CN 201220275301U CN 202646525 U CN202646525 U CN 202646525U
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- vibration absorption
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- damping
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Abstract
The utility model discloses an inner vibration absorption device of a micro-electro-mechanical sensor. The inner vibration absorption device comprises the micro-electro-mechanical sensor, an anti-sliding bottom plate, a main control board of a posture measuring system, and a flexible printed circuit. The inner vibration absorption device is characterized by being provided with an upper vibration absorption concave sponge and a lower vibration absorption concave sponge; the lower vibration absorption concave sponge is fixedly arranged on the main control board of the posture measuring system by a double-faced patch; the micro-electro-mechanical sensor is suspended between the upper vibration absorption concave sponge and the lower vibration absorption concave sponge through a double-faced patch; the upper vibration absorption concave sponge is fixedly connected with the anti-sliding bottom plate; and one end of the flexible printed circuit passes through a groove on the upper vibration absorption concave sponge and is connected with the micro-electro-mechanical sensor, and the other end of the flexible printed circuit is connected with the main control board. According to the inner vibration absorption device, the micro-electro-mechanical sensor is fixed through the upper vibration absorption concave sponge, the lower vibration absorption concave sponge, the flexible printed circuit and the anti-sliding bottom plate, so as to avoid the accidental conditions that the micro-electro-mechanical sensor is included or is completely separated from a vibration absorption structure and the like under the condition that the micro-electro-mechanical sensor is violently vibrated; and therefore, a very good vibration-proof effect is achieved.
Description
Technical field
The utility model relates to micro-electro-mechanical sensors, specifically a kind of internal damping device of micro-electro-mechanical sensors.
Background technique
In designing MEMS, needs generally all are provided with MEMS sensor, micro-electro-mechanical gyroscope sensor for example, acceleration transducer, magnetic field sensors etc. easily are subjected to the micro electro mechanical device of vibration influence, more and more accurate along with measuring device, also just more and more faster to sensor measurement precision and employing speed, the also corresponding increase of impact that vibrations produce, therefore the vibration influence that reduces the micro-electro-mechanical sensors system can keep the stable operation of measuring device and sampled data more accurate, and fixedly the micro-electro-mechanical sensors system can not rock in the vibrations process at random yet.
Existing the micro-electro-mechanical sensors system is carried out damping modes, generally adopt the direct contact type shock-dampening method, along with more and more higher to micro-electro-mechanical sensors measuring accuracy parameter, can't satisfy application that shockproofness is large with sticking damping rubber.
The model utility content
The purpose of this utility model provides a kind of simplicity of design, compact structure, easy to use, cost is low and the internal damping device of micro-electro-mechanical sensors system output data stabilization.This device has not only been avoided when strenuous vibration so that sensing data produces the output of some singular signal, and built-in sponge also plays fixing micro-electro-mechanical sensors systemic effect.
The technological scheme that realizes the utility model purpose is:
A kind of internal damping device of micro-electro-mechanical sensors, comprise micro-electro-mechanical sensors, anti-slip base plate, the master control borad of attitude measurement system and flexible printed wiring, unlike the prior art be: also be provided with damping spill sponge and lower damping sponge, lower damping sponge is fixed on the master control borad of attitude measurement system by Double-face adhesive, micro-electro-mechanical sensors is suspended between upper damping spill sponge and the lower damping sponge by Double-face adhesive, upper damping spill sponge and anti-slip base plate are connected, flexible printed wiring one end passes the groove on the damping spill sponge and is connected with micro-electro-mechanical sensors, and the other end is connected with master control borad.
Described upper damping spill sponge is cuboid shape, thick 4mm, and the middle part is provided with groove.
Described lower damping sponge is cuboid shape, thick 4mm.
Described Double-face adhesive is elastic Double-face adhesive, and its four angles are circular, have increased its adhesive force.
The utility model has the advantages that: this internal damping device is fixed this micro-electro-mechanical sensors system by upper damping spill sponge, lower damping sponge and flexible printed wiring and anti-slip base plate, avoided micro-electro-mechanical sensors in the situation that sharp pounding, produce or break away from the fortuitous event such as shock-damping structure fully, can not exert an influence to this internal system sensor no matter shake about concussion still up and down, reached extraordinary shockproof effect, and simplicity of design, compact structure, cost is low.
Description of drawings
Fig. 1 is the structural representation of the internal damping device of a kind of micro-electro-mechanical sensors of the utility model.
Among the figure: 1. 5. times damping sponges of damping spill sponge 3. Double-face adhesives, 4. micro-electro-mechanical sensors, 6. master control borads, 7. flexible printed wirings on the anti-slip base plate 2..
Embodiment
With reference to Fig. 1, the internal damping device of a kind of micro-electro-mechanical sensors of the utility model is by anti-slip base plate 1, upper damping spill sponge 2, micro-electro-mechanical sensors 4, lower damping sponge 5 and master control borad 6 form, upper damping spill sponge 2 is provided with groove, and affixed with anti-slip base plate 1, on the micro-electro-mechanical sensors 4, lower two sides is connected with lower damping sponge 5 with upper damping spill sponge 2 respectively by Double-face adhesive 3, lower damping sponge 5 sticks on the master control borad 6 of attitude measurement system, the groove that flexible printed wiring 7 one ends pass on the damping spill sponge 2 is connected with micro-electro-mechanical sensors, and the other end is connected with master control borad 6.
The damping function of the dynamic interaction of damping spill sponge and lower damping sponge is carried out damping in the utility model utilization, theoretical based on lumped mass model particle system, analyzed the shock absorption principle of the isolation structure of micro-electro-mechanical sensors system, and analyzed the many particles system based on the lumped mass model, and the output data of the micro-electro-mechanical sensors system after the damping have been verified.Show from test and the simulation result of reality: bottom, top vibration-isolating system have certain damping effect, and utilizing up and down, the advantage of this individual system of damping does not need extra damping, also not needing provides extra damping space for device, simultaneously, this scheme is easily more accomplished in Practical Project, and has reduced production and debugging cost.
Claims (1)
1. the internal damping device of a micro-electro-mechanical sensors, comprise micro-electro-mechanical sensors, anti-slip base plate, the master control borad of attitude measurement system and flexible printed wiring, it is characterized in that: also be provided with damping spill sponge and lower damping sponge, lower damping sponge is fixed on the master control borad of attitude measurement system by Double-face adhesive, micro-electro-mechanical sensors is suspended between upper damping spill sponge and the lower damping sponge by Double-face adhesive, upper damping spill sponge and anti-slip base plate are connected, flexible printed wiring one end passes the groove on the damping spill sponge and is connected with micro-electro-mechanical sensors, and the other end is connected with master control borad.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220275301 CN202646525U (en) | 2012-06-12 | 2012-06-12 | Inner vibration absorption device of micro-electro-mechanical sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220275301 CN202646525U (en) | 2012-06-12 | 2012-06-12 | Inner vibration absorption device of micro-electro-mechanical sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202646525U true CN202646525U (en) | 2013-01-02 |
Family
ID=47415636
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220275301 Expired - Fee Related CN202646525U (en) | 2012-06-12 | 2012-06-12 | Inner vibration absorption device of micro-electro-mechanical sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202646525U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105783853A (en) * | 2016-03-03 | 2016-07-20 | 浙江大学 | Deformation monitoring system of cable for underwater carrier positioning |
-
2012
- 2012-06-12 CN CN 201220275301 patent/CN202646525U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105783853A (en) * | 2016-03-03 | 2016-07-20 | 浙江大学 | Deformation monitoring system of cable for underwater carrier positioning |
| CN105783853B (en) * | 2016-03-03 | 2018-05-15 | 浙江大学 | A kind of deformation monitoring system of hawser available for underwater vehicles positioning |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130102 Termination date: 20130612 |