CN202631448U - Salinity detection sensor based on micro-electromechanical system (MEMS) technology - Google Patents
Salinity detection sensor based on micro-electromechanical system (MEMS) technology Download PDFInfo
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- CN202631448U CN202631448U CN 201220193870 CN201220193870U CN202631448U CN 202631448 U CN202631448 U CN 202631448U CN 201220193870 CN201220193870 CN 201220193870 CN 201220193870 U CN201220193870 U CN 201220193870U CN 202631448 U CN202631448 U CN 202631448U
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Abstract
The utility model provides a salinity detection sensor based on the micro-electromechanical system (MEMS) technology. A microwave signal source (102) is connected with a first port (1) of an annular bridge (101), a sensor electrode (104) is connected with a second port (2) of the annular bridge (101), and a first MEMS terminal type microwave power sensor (1031) and a second MEMS terminal type microwave power sensor (1032) are respectively connected with a third port (3) and a fourth port (4) of the annular bridge (101). The salinity detection sensor removes various unfavorable effects of capacitance effect in saline solution on detection and has the advantages of being high in reliability, high in repeatability, excellent in performance, high in response speed, small in size, low in production cost and the like.
Description
Technical field
The utility model is to utilize detecting electrode under the different salinity different to the reflection coefficient of input microwave signal; Obtain the salinity value of salt solusion through the variable power of MEMS terminal type microwave power detector structure measurement reflected signal, belong to technical field of microelectronic devices.
Background technology
In recent years, the scale of expressway construction is very huge, and the monitoring and the maintenance of therefore a large amount of highway pavements become more and more important.Highway pavement is in the use of reality, and meeting icy on road produces adverse influence to whole pavement structure, and has increased the occurrence probability of traffic hazard greatly.The salinity detecting sensor can accurately be measured the concentration of deicer in the surface gathered water (principal ingredient is lime chloride, common salt, magnesium chloride etc.) and the apparent freezing point of ponding; Thereby the freezing temperature to highway pavement is measured and early warning in real time, therefore for the informationization of freeway facility and the prevention early warning of intellectuality and traffic hazard crucial meaning is arranged.The technology of measuring salinity at present is based on phase-shift detection method, the method for double pulse measurement, dynamic pulse method and frequency ratio juris and realizes; Its core is loaded on the conductance cell electrode with pulse or sine wave signal exactly, through the detection of conductivity variations in the variable concentrations salt solusion being realized the measurement of salinity value.But; Because the equivalent electrical circuit of salt solusion is the parallel connection of resistance and electric capacity, core is to detect the variation of salt solusion conductivity in above-mentioned detection method, therefore need the influence of salt solusion capacity effect be dropped to minimum; Yet; Because the complicacy of capacity effect makes it be difficult to eliminate, and has increased the complicacy and the response time of entire circuit.
Summary of the invention
Technical matters:The purpose of the utility model is to put forward a kind of salinity detecting sensor and detection method thereof based on the MEMS technology; The sensor of application invention can be eliminated the influence of capacity effect to detecting; Improve sensitivity, effect speed, reliability and the simplified structure of sensor; Solution is in the problem aspect many such as detection method, complicacy, reliability and production cost, thereby supports and guarantee for realizing that the commercial application of salinity detecting sensor in the road surface sensor system based on MEMS terminal type microwave power detector structure provides.
Technical scheme:For solving the problems of the technologies described above; The utility model provides a kind of salinity detecting sensor based on the MEMS technology, and this sensor comprises microwave signal source, ring-shape bridge, sensing electrode and a MEMS terminal type microwave power detector and the 2nd MEMS terminal type microwave power detector; Ring-shape bridge is provided with four ports, i.e. first port, second port, the 3rd port, the 4th port;
Microwave signal source is connected to first port of ring-shape bridge; Sensing electrode is connected to second port of ring-shape bridge, and a MEMS terminal type microwave power detector and the 2nd MEMS terminal type microwave power detector are connected respectively to the 3rd port and the 4th port of ring-shape bridge.
Preferably, a MEMS terminal type microwave power detector and the 2nd MEMS terminal type microwave power detector are used to realize importing the performance number measurement of microwave signal and reflected microwave signal and comparing.
The utility model also provides a kind of salinity detection method based on the MEMS technology; This method comprises the steps: that microwave signal source produces microwave signal; And microwave signal is sent to ring-shape bridge through first port; Microwave signal is sent to sensing electrode and the 2nd MEMS terminal type microwave power detector through second port and the 4th port respectively after ring-shape bridge distributes; Because the equivalent parallel resistance of the variable concentrations salt solusion that sensing electrode is sensed is different with capacitance; Therefore the reflection coefficient that is sent to the microwave signal of sensing electrode can change along with the difference of concentration of salt solution; Be sent to a MEMS terminal type microwave power detector through the 3rd port through ring-shape bridge once more by the microwave signal of sensing electrode reflected back, the signal power value that measures through relatively a MEMS terminal type microwave power detector and the 2nd MEMS terminal type microwave power detector realizes the detection of salinity value.
Beneficial effect:Owing to the restriction of examined method, the salinity detecting sensor receives the influence of capacity effect in testing process, increased the complicacy of testing circuit greatly and reduced response speed for a long time.Salinity detecting sensor in the utility model based on MEMS terminal type microwave power detector structure; The conductivity measurement of traditional salinity detection method and the thinking restriction of capacity effect have been broken through; Searched out the method for utilizing resistance and changes in capacitance to detect simultaneously; And pass through the measurement that MEMS terminal type microwave power detector structure realizes signal, make sensitivity, complicacy, response speed and the reliability of salinity detecting sensor that bigger improvement all arranged.
Description of drawings
Fig. 1 is based on the composition structural drawing of the salinity detecting sensor of MEMS technology.
Wherein have: microwave signal source 102, ring-shape bridge 101, sensing electrode 104 and a MEMS terminal type microwave power detector 1031 and the 2nd MEMS terminal type microwave power detector 1032; Ring-shape bridge is provided with four ports, i.e. first port one, second port, 2, the three ports, 3, the four ports 4;
Fig. 2 is ring-shape bridge and MEMS terminal type microwave power detector structural representation.
Wherein have: ring-shape bridge 101, a MEMS terminal type microwave power detector 1031 and the 2nd MEMS terminal type microwave power detector 1032, ring-shape bridge first port one, second port, 2, the three ports, 3, the four ports 4, build-out resistor r1 and thermoelectricity push away e1.
Embodiment
Below in conjunction with accompanying drawing the utility model is further specified.
Referring to Fig. 1-2, the salinity detecting sensor based on the MEMS technology that the utility model provides comprises microwave signal source 102, ring-shape bridge 101, sensing electrode 104 and a MEMS terminal type microwave power detector 1031 and the 2nd MEMS terminal type microwave power detector 1032; Ring-shape bridge 101 is provided with four ports, i.e. first port one, second port, 2, the three ports, 3, the four ports 4;
Microwave signal source 102 is connected to first port one of ring-shape bridge 101; Sensing electrode 104 is connected to second port, 2, the one MEMS terminal type microwave power detectors 1031 of ring-shape bridge 101 and the 3rd port 3 and the 4th port 4 that the 2nd MEMS terminal type microwave power detector 1032 is connected respectively to ring-shape bridge 101.
The one MEMS terminal type microwave power detector 1031 and the 2nd MEMS terminal type microwave power detector 1032 are used to realize importing the performance number measurement of microwave signal and reflected microwave signal and comparing.
The utility model also provides a kind of salinity detection method based on the MEMS technology; This method comprises the steps: that microwave signal source 102 produces microwave signal; And microwave signal is sent to ring-shape bridge 101 through first port one; Microwave signal is sent to sensing electrode 104 and the 2nd MEMS terminal type microwave power detector 1032 through second port 2 and the 4th port 4 respectively after ring-shape bridge 101 distributes; Because the equivalent parallel resistance of the variable concentrations salt solusion that sensing electrode 104 is sensed is different with capacitance; Therefore the reflection coefficient that is sent to the microwave signal of sensing electrode 104 can change along with the difference of concentration of salt solution; Be sent to a MEMS terminal type microwave power detector 1031 through the 3rd port 3 through ring-shape bridge 101 once more by the microwave signal of sensing electrode 104 reflected backs, the detection of the signal power value realization salinity value that measures through MEMS terminal type microwave power detector 1031 relatively and the 2nd MEMS terminal type microwave power detector 1032.
The salinity detecting sensor of using in the utility model based on MEMS terminal type microwave power detector structure can realize the commercial application of salinity detection module in the road surface sensor system, and then promotes the development of whole road surface sensor system industry.
The utility model utilizes the variation of equivalent parallel resistance and capacitance in the salt solusion to be detected to realize detection method and the MEMS terminal type microwave power detector structure that the microwave signal reflection coefficient changes; Solve the various adverse effects of capacity effect to detecting in the salt solusion, and had high reliability, high repeatability, excellent performance, fast response speed, little volume, low characteristics such as production cost.
The salinity detecting sensor based on MEMS terminal type microwave power detector structure in the utility model is different from the above-mentioned detection method of utilizing conductivity; It utilizes corresponding admittance (comprising resistance and the electric capacity) reflection coefficient different to microwave signal of variable concentrations salt solusion; Detect the size of the microwave signal power that is reflected through MEMS terminal type microwave power detector, thereby obtain the salinity value.Comparatively speaking; Salinity detecting sensor based on MEMS terminal type microwave power detector structure has following principal feature: once, this detection method owing to self considered the influence of capacity effect in the salt solusion, so do not need complicated circuitry to eliminate capacity effect; Two, this detection method has fast response speed; Three, MEMS terminal type microwave power detector have highly sensitive, the linearity good, volume is little, advantages of simple structure and simple; This makes whole salinity detecting sensor have the high performance complicacy that reduces entire device simultaneously; Thereby greatly improve its reliability and consistance, and reduced cost; Four, the utility model is owing to adopt MEMS terminal type microwave power detector structure, so volume is less.
Based on above characteristics; The utility model of can finding out has clearly well solved the various adverse effects of capacity effect to detecting in the salt solusion of mentioning in the preceding text; And have high reliability, high repeatability, excellent performance, fast response speed, little volume, low advantages such as production cost, well satisfied in the road surface sensor system basic demand to salinity detecting sensor module.Therefore, the salinity detecting sensor based on MEMS terminal type microwave power detector structure has using value and vast market potentiality preferably.
Distinguish whether to be the standard of this sensor following:
(a) adopt ring-shape bridge to carry out the distribution of microwave signal,
(b) adopt the admittance of induction salt solusion to change the method that realizes detection,
(c) adopt MEMS terminal type microwave power detector structure detection microwave signal performance number.
The structure that satisfies above three standards promptly should be regarded as this structure based on the salinity detecting sensor of MEMS terminal type microwave power detector structure.
The above is merely the preferred embodiments of the utility model; The protection domain of the utility model does not exceed with above-mentioned embodiment; As long as the equivalence that those of ordinary skills do according to the utility model institute disclosure is modified or changed, all should include in the protection domain of putting down in writing in claims.
Claims (1)
1. salinity detecting sensor based on MEMS technology, it is characterized in that: this sensor comprises microwave signal source (102), ring-shape bridge (101), sensing electrode (104) and a MEMS terminal type microwave power detector (1031) and the 2nd MEMS terminal type microwave power detector (1032); Ring-shape bridge (101) is provided with four ports, i.e. first port (1), second port (2), the 3rd port (3), the 4th port (4);
Microwave signal source (102) is connected to first port (1) of ring-shape bridge (101); Sensing electrode (104) is connected to second port (2) of ring-shape bridge (101), and a MEMS terminal type microwave power detector (1031) and the 2nd MEMS terminal type microwave power detector (1032) are connected respectively to the 3rd port (3) and the 4th port (4) of ring-shape bridge (101).
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| Application Number | Priority Date | Filing Date | Title |
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| CN 201220193870 CN202631448U (en) | 2012-05-03 | 2012-05-03 | Salinity detection sensor based on micro-electromechanical system (MEMS) technology |
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| CN 201220193870 CN202631448U (en) | 2012-05-03 | 2012-05-03 | Salinity detection sensor based on micro-electromechanical system (MEMS) technology |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102680499A (en) * | 2012-05-03 | 2012-09-19 | 东南大学 | Sensor and method for detecting salinity based on micro-electromechanical system (MEMS) technology |
| CN105021663A (en) * | 2015-07-30 | 2015-11-04 | 东南大学 | Salinity measurement method |
-
2012
- 2012-05-03 CN CN 201220193870 patent/CN202631448U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102680499A (en) * | 2012-05-03 | 2012-09-19 | 东南大学 | Sensor and method for detecting salinity based on micro-electromechanical system (MEMS) technology |
| CN105021663A (en) * | 2015-07-30 | 2015-11-04 | 东南大学 | Salinity measurement method |
| CN105021663B (en) * | 2015-07-30 | 2017-07-28 | 东南大学 | A kind of salimity measurement method |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20121226 Termination date: 20170503 |
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| CF01 | Termination of patent right due to non-payment of annual fee |