CN202614431U - Induction head of pressure sensor - Google Patents
Induction head of pressure sensor Download PDFInfo
- Publication number
- CN202614431U CN202614431U CN 201220187821 CN201220187821U CN202614431U CN 202614431 U CN202614431 U CN 202614431U CN 201220187821 CN201220187821 CN 201220187821 CN 201220187821 U CN201220187821 U CN 201220187821U CN 202614431 U CN202614431 U CN 202614431U
- Authority
- CN
- China
- Prior art keywords
- pressure transducer
- induction head
- sensor chip
- inductive head
- pressure sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Abstract
The utility model relates to an induction head of a pressure sensor, and specifically relates to an induction head of a pressure sensor for measuring pressure. The induction head of the pressure sensor comprises a metal base and a sensor chip, wherein the metal base is pipe shaped, one end of the metal base is provided with a bottom cover forming a metal diaphragm, and the other end is provided with a port; the sensor chip includes a silicon chip on which four foil gauges are integrated, and the four foil gauges are connected to form a Wheatstone bridge by metallization deposition. The induction head is characterized in that the sensor chip is bonded to the metal diagram by a glass light-melting method. With the induction head of the pressure sensor, the precision measurement of pressure can be achieved.
Description
Technical field
The utility model relates to a kind of pressure transducer.Specifically, be to be used for the inductive head of pressure transducer of gaging pressure.
Background technology
Know all that at electronic applications the inductive head of pressure transducer is made up of with sticking on the sensor chip on the metallic membrane of metab metab.Wherein, the connected mode between sensor chip and metallic membrane all is to adopt that heating makes the fixing glue fusing to fixing glue, and foil gauge is sunk in the fixing glue, realizes the stickup of foil gauge with this.Though adopt fixing glue can realize the stickup of foil gauge, fixing glue length service time one is easy to generate creep, makes that pressure signal is delivered to generation drift the foil gauge process from diaphragm when measuring.Therefore, adopt fixing glue to paste the pressure transducer inductive head that foil gauge is processed, be difficult to realize the accurate measurement of pressure.Again since four foil gauges be in silicon chip around.
The utility model content
The problem that the utility model requires to solve provides a kind of pressure transducer inductive head.Adopt this pressure transducer inductive head, can realize the accurate measurement of pressure.
For overcoming the above problems, take following technical scheme:
The pressure transducer inductive head of the utility model comprises metab and sensor chip, and said metab is a tubulose, and the one of which end is useful on the back cover that constitutes metallic membrane, and its other end leaves port; Said sensor chip contains silicon chip, is integrated with four foil gauges on the silicon chip, and these four foil gauges are linked to be Wheatstone bridge through metallic deposition.Be characterized in that said sensor chip adopts the little molten mode of glass to stick on the said metallic membrane.
Said four foil gauges be in silicon chip around.The outside surface of said metallic membrane is a uneven surface.Said metab is the stainless steel base.
Take such scheme, have the following advantages:
Can find out by such scheme,, sensor chip embedded in the glass of fusing, realize the stickup of sensor chip because the utility model is that glass dust is printed on the metallic membrane through screen printing technique, and is heated to the semi-molten state with glass dust.With adopt fixing glue to paste foil gauge in the background technology to compare, pressure signal is delivered to the drift that is produced the foil gauge process from diaphragm when having avoided the long and creep that produces fixing glue service time and having measured.Therefore, adopt glass dust heating back to paste the pressure transducer inductive head that foil gauge is processed, can realize the accurate measurement of pressure.
Description of drawings
Fig. 1 is the pressure transducer inductive head structural representation with the utility model;
Fig. 2 is the schematic top plan view of Fig. 1.
Embodiment
Below in conjunction with accompanying drawing and embodiment the utility model is done further explain:
As depicted in figs. 1 and 2, the pressure transducer inductive head of the utility model comprises metab and sensor chip 2.Said metab is a tubulose, and the one of which end is processed with the back cover that is used to constitute metallic membrane 3, and an end excircle of this back cover is to being processed with outer lug boss 4.The other end of metab is uncovered shape to constitute port 5.Said sensor chip 2 contains silicon chip 201, is integrated with four foil gauges 6 around the silicon chip 201, and these four foil gauges are linked to be Wheatstone bridge through metallic deposition.
The pressure transducer inductive head method of preparation the utility model is:
Earlier said metallic membrane 3 is carried out shot blast, make the outside surface of metallic membrane 3 form uneven surface with compressed air shotblasting machine.
Afterwards, adopt screen process press that glass dust is printed onto on the uneven surface of metallic membrane 3.
Afterwards; It is that 550 ℃ heating furnace heats that the metab that will have glass dust is put into temperature, when the glass dust on its metallic membrane 3 is the fritting state, sensor chip 2 is put on the glass dust; And continue heating, make in the glass solution 1 after sensor chip 2 embeds fusing;
At last, stop heating, let its natural cooling, process the pressure transducer inductive head.
Claims (4)
1. the pressure transducer inductive head comprises metab and sensor chip (2), and said metab is a tubulose, and the one of which end is useful on the back cover that constitutes metallic membrane (3), and its other end leaves port (5); Said sensor chip (2) contains silicon chip (201), is integrated with four foil gauges (6) on the silicon chip (201), and these four foil gauges are linked to be Wheatstone bridge through metallic deposition; It is characterized in that said sensor chip (2) adopts the little molten mode of glass to stick on the said metallic membrane (3).
2. pressure transducer inductive head according to claim 1, it is characterized in that said four foil gauges (6) be in silicon chip (201) around.
3. pressure transducer inductive head according to claim 1, the outside surface that it is characterized in that said metallic membrane (3) is a uneven surface.
4. according to each described pressure transducer inductive head in the claim 1～3, it is characterized in that said metab is the stainless steel base.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220187821 CN202614431U (en) | 2012-04-28 | 2012-04-28 | Induction head of pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220187821 CN202614431U (en) | 2012-04-28 | 2012-04-28 | Induction head of pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202614431U true CN202614431U (en) | 2012-12-19 |
Family
ID=47348120
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220187821 Expired - Lifetime CN202614431U (en) | 2012-04-28 | 2012-04-28 | Induction head of pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202614431U (en) |
-
2012
- 2012-04-28 CN CN 201220187821 patent/CN202614431U/en not_active Expired - Lifetime
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20121219 |