CN202594790U - Hydrogen material-pressing, silicon powder blowing-cleaning device for trichlorosilane synthetic furnace - Google Patents
Hydrogen material-pressing, silicon powder blowing-cleaning device for trichlorosilane synthetic furnace Download PDFInfo
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- CN202594790U CN202594790U CN 201220010759 CN201220010759U CN202594790U CN 202594790 U CN202594790 U CN 202594790U CN 201220010759 CN201220010759 CN 201220010759 CN 201220010759 U CN201220010759 U CN 201220010759U CN 202594790 U CN202594790 U CN 202594790U
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- silica flour
- synthetic furnace
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- pipeline
- binder
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Abstract
The utility model relates to a hydrogen material-pressing, silicon powder blowing-cleaning device for a trichlorosilane synthetic furnace, and is applied to polysilicon. The device is characterized in that a hydrogen storing pot (8) is connected to the lower portion of a silicon powder feeding device (13) through a first hydrogen pipeline (9), the lower end of the silicon powder feeding device (13) is connected to an entrance of the trichlorosilane synthetic furnace (16) through a first material-pressing pipeline (15), an exit of the trichlorosilane synthetic furnace (16) is connected to the entrance of a cyclone separator (20) through a chlorosilane pipeline (21), the lower end of the cyclone separator (20) is connected to a silicon powder collecting device (19), the exit of the silicon powder collecting device (19) is connected to the entrance of the trichlorosilane synthetic furnace (16) through a second material-pressing pipeline (17), and a second hydrogen pipeline (2) is connected to the entrance of the silicon collecting device (19) through a third material-pressing pipeline (22).
Description
Technical field
The utility model relates to a kind of trichlorosilane synthetic furnace system hydrogen binder, purges cleaning silica flour device, particularly the hydrogen binder of trichlorosilane synthetic furnace (TCS synthetic furnace) binder and silica flour scoop blowback mode, purge cleaning silica flour device.
Background technology
Polysilicon semiconductor is the important foundation starting material of large-scale integrated circuit and photovoltaic industry; Prior art extensively adopts Siemens Method to prepare polysilicon; In trichlorosilane synthetic furnace, silica flour and hydrogen chloride gas precursor reactant generate trichlorosilane and hydrogen, reaction formula: Si+HCl → SiHCl
3+ H
2Temperature of reaction is controlled at about 320 ℃, has minor by-products dichloro-dihydro silicon and silicon tetrachloride to produce in this reaction process.In the trichlorosilane synthesis system; Silica flour is to join in the trichlorosilane synthetic furnace through charge line, and in the long-term constantly reinforced process, silica flour can stop up the silica flour charge line and cause the silica flour blanking obstructed; Influence the building-up reactions of trichlorosilane; Reduce production efficiency, for fear of wasting raw material and increasing cost, these silica flours need to recycle again.Traditional method is utilized pressure reduction to add feed bin from silica flour nitrogen or hydrogen chloride gas to carry out pressurising to silica flour charge line and trichlorosilane synthetic furnace, purge exactly.Used nitrogen or hydrogenchloride can get into the later separation operation in the lump with synthetic gas.Find that in actual production when utilizing nitrogen purging to remain in the silica flour in charge line, the equipment, nitrogen can remain in the trichlorosilane synthesis gas, influence follow-up synthetic gas separation circuit, cause that density of hydrogen reduces after the Separation and Recovery.Purge with hydrogen chloride gas; Owing in hydrogenchloride, contain a spot of water; When scavenging line, equipment, the chlorosilane gas reaction of playing a reversed role up in minor amount of water branch and the trichlorosilane synthetic furnace in the hydrogenchloride generates silicon-dioxide, makes charging system pipeline knot stifled; And the hydrogen chloride gas that is used for purging cognition makes the trichlorosilane synthetic furnace hydrogen chloride ratio excessive; Excessive hydrogenchloride can not all be participated in building-up reactions, and remaining hydrogenchloride can increase the load of hydrogen adsorption tower in the later separation operation, even causes hydrogen purity to reduce.Can solve above-mentioned shortcoming with hydrogen as the binder and the blowback silica flour scoop of trichlorosilane synthesis system, at present, with the hydrogen binder, purge the method and apparatus technology of clearing up silica flour and also do not appear in the newspapers.
Summary of the invention
The purpose of the utility model is the defective that will overcome prior art; Provide a kind of charging system pipeline that can make unobstructed; Reduce synthetic furnace binder subsequent handling load; Reduce the maintenance frequency of synthetic furnace binder system, improve trichlorosilane synthetic furnace hydrogen binder, the purging cleaning silica flour device of trichlorosilane quality.
The technical scheme of the utility model is: this device comprises silica flour feeder 13, trichlorosilane synthetic furnace 16, cyclonic separator 20, silica flour scoop 19; Be characterized in that hydrogen-holder 8 is connected to the bottom inlet 1303 of silica flour feeder 13 through first hydrogen gas lines 9 and first valve 12; The lower end of silica flour feeder 13 outlet 1304 is connected to the inlet 1602 of trichlorosilane synthetic furnace 16 through second valve 14, the first binder pipeline 15; The upper end outlet 1601 of trichlorosilane synthetic furnace 16 is connected to the inlet 2001 of cyclonic separator 20 through chlorosilane pipeline 21; The lower end of cyclonic separator 20 is connected to silica flour scoop 19 through the inlet 1901 of silica flour scoop 19, and the outlet of silica flour scoop 19 1903 is connected to the inlet 1603 of trichlorosilane synthetic furnace 16 through the 3rd valve 18, the second binder pipeline 17; First hydrogen gas lines 9 also connects second hydrogen gas lines 2, is connected to the inlet 1902 of silica flour scoop 19 through the 4th valve 23, the 3rd binder pipeline 22.
Another characteristics of the utility model are that the outlet 1301 on described silica flour feeder 13 connects the 4th binder pipeline 5, the 5th valve 4, hydrogen holding tank 7 successively.
Another characteristics of the utility model are also to connect nitrogen purge line 11, the 6th valve 26, nitrogen storage tank 10 successively in described first hydrogen gas lines 9.
Another characteristics of the utility model are on the pipeline between the outlet 1301 of described the 5th valve 4 and silica flour feeder 13, a tensimeter 24 to be housed.
Another characteristics of the utility model are that a transducer 25 is installed between the upper and lower ends of described trichlorosilane synthetic furnace 16.
Another characteristics of the utility model are on the pipeline between 1902 inlets of described the 3rd binder pipeline 22 and silica flour scoop 19, a tensimeter 27 to be housed.
The utlity model has following advantage and effect: 1, can effectively reduce the stifled and corrosion phenomenon of pipeline knot, trichlorosilane synthesis device operation life and turnaround will prolong greatly, and security and stability strengthens.2, can reduce hydrogen chloride content in the synthetic gas, and the load of follow-up synthetic gas separation circuit absorbing hydrogen chloride is reduced, save energy; And make the synthetic gas content that is sent to separation system keep stable; Can reduce hydrogen adsorption pressure, guarantee the normal efficient recovery of hydrogen, improve organic efficiency.3, make that the trichlorosilane synthesis system is stable more, High-efficient Production; And can reduce the maintenance manpower consumption, enhance productivity.
Description of drawings
Fig. 1 is the utility model structural representation.
Wherein: 1, silica flour intermediate bin; 2, hydrogen gas lines; 3, silica flour feeder valve; 4, hydrogen holding tank valve; 5, silica flour feeder binder pipeline; 6, hydrogenchloride storage tank; 7, hydrogen holding tank; 8, hydrogen-holder; 9, hydrogen gas lines; 10, nitrogen storage tank; 11, nitrogen purge line; 12, hydrogen-holder valve; 13, silica flour feeder; 1301, silica flour feeder upper outlet; 1302, silica flour feeder upper inlet; 1303, silica flour feeder lower inlet 1303; 1304, silica flour feeder outlet down; 14, outlet valve under the silica flour feeder; 15, binder pipeline; 16, trichlorosilane synthetic furnace (TCS synthetic furnace); 1601, trichlorosilane synthetic furnace outlet; 1602, trichlorosilane synthetic furnace left entry; 1603, trichlorosilane synthetic furnace right entry; 1604, trichlorosilane synthetic furnace lower inlet; 17, silica flour scoop binder pipeline; 18, silica flour scoop outlet valve; 19, silica flour scoop; 1901, cyclone inlet; 1902, silica flour scoop hydrogen inlet; 1903, silica flour scoop outlet; 20, cyclonic separator; 2001, cyclone inlet; 21, chlorosilane pipeline; 22, silica flour scoop inlet binder pipeline; 23, silica flour scoop inlet valve; 24, tensimeter; 25, transducer; 26, nitrogen storage tank valve; 27, tensimeter.
Embodiment
As shown in Figure 1, this installs by silica flour feeder 13, trichlorosilane synthetic furnace (TCS synthetic furnace) 16, cyclonic separator 20, silica flour scoop 19, hydrogen holding tank 7; Hydrogen-holder 8, nitrogen storage tank 10 and pipeline, valve are formed; Be characterized in that hydrogen-holder 8 is connected to the bottom inlet 1303 of silica flour feeder 13 through first hydrogen gas lines 9 and first valve 12; The lower end of silica flour feeder 13 outlet 1304 is connected to the inlet 1602 of trichlorosilane synthetic furnace 16 through second valve 14, the first binder pipeline 15; The upper end outlet 1601 of trichlorosilane synthetic furnace 16 is connected to the inlet 2001 of cyclonic separator 20 through chlorosilane pipeline 21; The lower end of cyclonic separator 20 is connected to silica flour scoop 19 through the inlet 1901 of silica flour scoop 19, and the outlet of silica flour scoop 19 1903 is connected to the inlet 1603 of trichlorosilane synthetic furnace 16 through the 3rd valve 18, the second binder pipeline 17; First hydrogen gas lines 9 also connects second hydrogen gas lines 2, is connected to the inlet 1902 of silica flour scoop 19 through the 4th valve 23, the 3rd binder pipeline 22.Outlet 1301 on silica flour feeder 13 connects the 4th binder pipeline 5, the 5th valve 4, hydrogen holding tank 7 successively.On first hydrogen gas lines 9, also connect nitrogen purge line 11, the 6th valve 26, nitrogen storage tank 10 successively.One tensimeter 24 (PI) is housed on the pipeline between the outlet 1301 of the 5th valve 4 and silica flour feeder 13.One transducer 25 (PdI) is installed between the upper and lower ends of trichlorosilane synthetic furnace 16.On the pipeline between 1902 inlets of the 3rd binder pipeline 22 and silica flour scoop 19, a tensimeter 27 (PI) is housed.
During the equipment operation; Silica flour in the silica flour intermediate bin 1 joins in the silica flour feeder 13 gradually; Silica flour joins TCS synthetic furnace 16 through the first binder pipeline 15 by the inlet 1602 of TCS synthetic furnace 16 and carries out building-up reactions; The synthetic gas trichlorosilane comes out then to be passed into cyclonic separator 20 through chlorosilane pipeline 21 from exporting 1601; Through cyclonic separation silica flour is separated from trichlorosilane synthesis gas, the synthetic gas after the separation is discharged from cyclonic separator 20 top outlet lines, and the divided silicon pruinescence is collected in the silica flour scoop 19 of separator 20 bottoms; Collect silica flour and come out, continue to react through the inlet 1603 feeding TCS synthetic furnaces 16 of the second binder pipeline 17 again from TCS synthetic furnace 16 from the outlet 1903 of silica flour scoop 19.
The silica flour charge line since the time regular meeting phenomenons such as knot to occur stifled, and blanking is obstructed, so need carry out pressurising, the silica flour pressurising that knot gets lodged in the pipeline is reacted in TCS synthetic furnace 16 with gas, guarantee the unimpeded of charging system.The utility model adopts hydrogen to carry out binder; Hydrogen is come out by inlet 1303 entering, the outlet 1304 of silica flour feeder 13 from first hydrogen gas lines 9; The bottom first binder pipeline 15 is carried out pressurising; The assurance silica flour can not tied and get lodged in the pipeline, and it is unobstructed to influence blanking, through the switch and the flow size of first valve 12 and second valve, 14 control binder hydrogen.On first hydrogen gas lines 9, add nitrogen purge line 11, the 6th valve 26, nitrogen storage tank 10 easy accesses displacement, guarantee safety.Simultaneously; Silica flour scoop 19 needs regularly to purge when collecting silica flour, and the silica flour that overstocks at the silica flour scoop 19 and the second binder pipeline 17 is purged in the trichlorosilane synthetic furnace 16 fully; Guarantee that silica flour scoop 19 is not blocked, keep the second binder pipeline 17 unobstructed.
In actually operating, if silica flour charge line 15 knots are stifled, then the pressure reduction 25 (PdI) of trichlorosilane synthetic furnace 16 reduces, and silica flour feeder 13 the material level height occurs and reports to the police; Close the 7th valve 3 this moment, opens first valve, 12 beginning binders, and in the binder process, trichlorosilane synthetic furnace 16 pressure reduction 25 (PdI) raise gradually; When reaching the technology controlling and process requirement, promptly a binder process is accomplished, and first valve 12 is closed in the high elimination of reporting to the police of silica flour feeder 13 material levels this moment; Open the 5th valve 4, to 13 operations of releasing, when 13 pressure reach control and require; Close the 5th valve 4, open the 7th valve 3, continue reinforced.
The synthesis gas of trichlorosilane synthetic furnace 16 gets into through 2001 imports of chlorosilane pipeline 21 from cyclonic separator 20, and after the process cyclonic separation was removed a part of silica flour, the top from 20 exported out and gets into the two-stage cloth envelop collector further except that silica flour; Pressure reduction between the two-stage cloth envelop collector begins to raise, and is high during to controlling index, explains that cloth envelop collector is blocked; This moment, cyclonic separator needed blowback; Open the 4th valve 23, hydrogen gets into silica flour scoops 19 through the 3rd binder pipeline 22 by 1902 inlets of silica flour scoop 19 and carries out pressurising, when its pressure is charged to the 0.5Mpa left and right sides; Open and react by inlet 1603 entering trichlorosilane synthetic furnaces 16 again after silica flour scoop 19 bottoms the 3rd valve 18 is depressed into the bottom second binder pipeline 17 by outlet 1903 with silica flour; When the pressure display of finding tensimeter 27 reduces fast, explain and pass through the hydrogen blowback, suffered overstocking to purge fully basically to 16 at 19 and 17 silica flour; Close 23, blowback end of processing of the 4th valve this moment.
Claims (6)
1. a trichlorosilane synthetic furnace hydrogen binder, purging are cleared up the silica flour device, comprise silica flour feeder (13), trichlorosilane synthetic furnace (16), cyclonic separator (20), silica flour scoop (19); It is characterized in that hydrogen-holder (8) is connected to the bottom inlet (1303) of silica flour feeder (13) through first hydrogen gas lines (9) and first valve (12); The lower end outlet (1304) of silica flour feeder (13) is connected to the inlet (1602) of trichlorosilane synthetic furnace (16) through second valve (14), the first binder pipeline (15); The upper end outlet (1601) of trichlorosilane synthetic furnace (16) is connected to the inlet (2001) of cyclonic separator (20) through chlorosilane pipeline (21); The lower end of cyclonic separator (20) is connected to silica flour scoop (19) through the inlet (1901) of silica flour scoop (19), and the outlet (1903) of silica flour scoop (19) is connected to the inlet (1603) of trichlorosilane synthetic furnace (16) through the 3rd valve (18), the second binder pipeline (17); First hydrogen gas lines (9) also connects second hydrogen gas lines (2), is connected to the inlet (1902) of silica flour scoop (19) through the 4th valve (23), the 3rd binder pipeline (22).
2. trichlorosilane synthetic furnace hydrogen binder as claimed in claim 1, purging cleaning silica flour device is characterized in that the outlet (1301) on described silica flour feeder (13) connects the 4th binder pipeline (5), the 5th valve (4), hydrogen holding tank (7) successively.
According to claim 1 or claim 2 trichlorosilane synthetic furnace hydrogen binder, purge cleaning silica flour device, it is characterized in that described first hydrogen gas lines (9) also connects nitrogen purge line (11), the 6th valve (26), nitrogen storage tank (10) successively.
4. trichlorosilane synthetic furnace hydrogen binder as claimed in claim 2, purging cleaning silica flour device is characterized in that on the pipeline between the outlet (1301) of described the 5th valve (4) and silica flour feeder (13), a tensimeter (24) being housed.
According to claim 1 or claim 2 trichlorosilane synthetic furnace hydrogen binder, purge cleaning silica flour device, it is characterized in that between the upper and lower ends of described trichlorosilane synthetic furnace (16), being equipped with a transducer (25).
According to claim 1 or claim 2 trichlorosilane synthetic furnace hydrogen binder, purge cleaning silica flour device, it is characterized in that on the pipeline between the inlet (1902) of described the 3rd binder pipeline (22) and silica flour scoop (19), a tensimeter (27) being installed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220010759 CN202594790U (en) | 2012-01-11 | 2012-01-11 | Hydrogen material-pressing, silicon powder blowing-cleaning device for trichlorosilane synthetic furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220010759 CN202594790U (en) | 2012-01-11 | 2012-01-11 | Hydrogen material-pressing, silicon powder blowing-cleaning device for trichlorosilane synthetic furnace |
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| Publication Number | Publication Date |
|---|---|
| CN202594790U true CN202594790U (en) | 2012-12-12 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220010759 Expired - Lifetime CN202594790U (en) | 2012-01-11 | 2012-01-11 | Hydrogen material-pressing, silicon powder blowing-cleaning device for trichlorosilane synthetic furnace |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106629740A (en) * | 2016-12-29 | 2017-05-10 | 内蒙古盾安光伏科技有限公司 | Trichlorosilane cold hydrogenation production system and process |
-
2012
- 2012-01-11 CN CN 201220010759 patent/CN202594790U/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106629740A (en) * | 2016-12-29 | 2017-05-10 | 内蒙古盾安光伏科技有限公司 | Trichlorosilane cold hydrogenation production system and process |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: 810007 No.1, Jinsi Road, Chengdong economic and Technological Development Zone, Xining City, Qinghai Province Patentee after: Asia silicon (Qinghai) Co.,Ltd. Address before: 810007 Qinghai city of Xining province Dongchuan Industrial Park, Xining economic and Technological Development Zone No. 1 gold Guilu Patentee before: ASIA SILICON (QINGHAI) Co.,Ltd. |
|
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20121212 |