CN202558651U - Hydrogen recycling device for producing polycrystalline silicon - Google Patents
Hydrogen recycling device for producing polycrystalline silicon Download PDFInfo
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- CN202558651U CN202558651U CN2012202229721U CN201220222972U CN202558651U CN 202558651 U CN202558651 U CN 202558651U CN 2012202229721 U CN2012202229721 U CN 2012202229721U CN 201220222972 U CN201220222972 U CN 201220222972U CN 202558651 U CN202558651 U CN 202558651U
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- hydrogen
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- hydrogen gas
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- reduction furnace
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Abstract
The utility model discloses a hydrogen recycling device for producing polycrystalline silicon, belonging to the technical field of polycrystalline silicon production equipment; the hydrogen recycling device mainly comprises a first hydrogen buffer tank connected with a hydrogen manufacturing station; the first hydrogen buffer tank is respectively connected with a white carbon black hydrogen buffer and a reduction furnace; the hydrogen recycling device also comprises a second hydrogen buffer tank respectively connected with a dry hydrogen recycling pressurized separation purification device and an activated carbon adsorption tower; the second hydrogen buffer tank is connected with the reduction furnace; the second hydrogen buffer tank is communicated with the white carbon black hydrogen buffer by a first branch; and a check valve is arranged on the first branch. The hydrogen recycling device not only meets the demand of the reduction furnace for hydrogen, but also fully utilizes the excessive hydrogen, thus saving the resource, reducing the production cost and being widely applied to the polycrystalline silicon production.
Description
Technical field
The utility model relates to the production of polysilicon equipment technical field, relates in particular to a kind of production of polysilicon hydrogen re-use device that is used for.
Background technology
At present in the production of polysilicon, in the reduction furnace under the above high temperature of 1000 degree trichlorosilane and circulating hydrogen reaction generation polysilicon deposition, because of it reacts more complicated; Side reaction is many, has to report it mainly is the decomposition reaction of trichlorosilane, and the later stage has under the situation of dichloro-dihydro silicon; There is hydrogen reaction to generate, bigger in reduction gas mixture internal circulating load simultaneously, when the reduction furnace blow-on is many; Window hydrogen purge amount is bigger, in actual production, air-fuel mixture amount reach 3000 mark sides/time when above; System have 80--100 mark side/time hydrogen produce, be stable system pressure, reduce the hydrogen pressure fluctuation; Technology as shown in Figure 1, traditional: the high-purity hydrogen autoreduction stove 4 entering systems of the aquatic product of hydrogen generator station 1 electrolytic desalting purge the window of reduction furnace 4; In case produce indefinite form silicon choke system in the polysilicon production process, thereby influence production needs discharge unit hydrogen for guaranteeing system's hydrogen gas pressure stabilization; Traditional technology is to insert waste gas raffinate absorption unit 9 at activated carbon adsorber 6 places, continues or intermittent discharge; After the hydrogen that the preparation of WHITE CARBON BLACK is to use hydrogen generator station 1 to produce got into first hydrogen gas buffer 2, at burner noz(zle) place and air mixed burning preparation WHITE CARBON BLACK, traditional production process caused bigger hydrogen waste like this.
The utility model content
The utility model technical problem to be solved is: a kind of production of polysilicon hydrogen re-use device that is used for is provided, can either satisfies reduction furnace hydrogen needs, can unnecessary hydrogen be made full use of again, saved resource, reduced production cost.
For solving the problems of the technologies described above, the technical scheme of the utility model is: be used for production of polysilicon hydrogen re-use device, comprise first hydrogen gas buffer that connects hydrogen generator station, said first hydrogen gas buffer connects WHITE CARBON BLACK hydrogen gas buffer and reduction furnace respectively; Connect second hydrogen gas buffer that dry method reclaims pressurized with hydrogen separation purifier and activated carbon adsorber respectively, said second hydrogen gas buffer connects said reduction furnace; Be communicated with through first branch road between said second hydrogen gas buffer and the WHITE CARBON BLACK hydrogen gas buffer, said first branch road is provided with vacuum breaker.
As a kind of improvement, said first branch road is provided with first pressure regulator valve.
As a kind of improvement, said first branch road is provided with chain trip valve.
Improve as another kind, be communicated with through second branch road between said first hydrogen gas buffer and second hydrogen gas buffer.
As further improvement, said second branch road is provided with second pressure regulator valve.
Owing to adopted technique scheme; The beneficial effect of the utility model is: since between second hydrogen gas buffer and the WHITE CARBON BLACK hydrogen gas buffer through the first branch road unilaterally connected, make hydrogen in second hydrogen gas buffer after satisfying reduction furnace window purging, can also be recovered in the WHITE CARBON BLACK hydrogen gas buffer; Rather than the direct discharging in the traditional technology; Make this part hydrogen be fully used, saved resource, reduced production cost.
Owing to be communicated with through second branch road between first hydrogen gas buffer and second hydrogen gas buffer; Make intrasystem pressure be effectively controlled; Better balance the hydrogen pressure between hydrogen generator station, WHITE CARBON BLACK surge tank and the reduction furnace; Also avoid simultaneously the activated carbon adsorber load bigger effectively, be prone to the problem of accident during hydrogen discharge.
Description of drawings
Below in conjunction with accompanying drawing and embodiment the utility model is further specified.
Fig. 1 is traditional process principle figure;
Fig. 2 is the process principle figure of the utility model embodiment;
Among the figure: 1, hydrogen generator station, 2, first hydrogen gas buffer, 3, the WHITE CARBON BLACK hydrogen gas buffer, 4, reduction furnace; 5, dry method reclaims the pressurized with hydrogen separation purifier, and 6, activated carbon adsorber, 7, second hydrogen gas buffer, 8, pneumatic adjusting valve; 9, waste gas absorption unit at residual night, 10, the hydrogen water seal, 11, spark arrester, 12, pneumatic cut-off valve; 13, chain trip valve, 14, first pressure regulator valve, 15, vacuum breaker, 16, second pressure regulator valve.
Embodiment
As shown in Figure 2, a kind of production of polysilicon hydrogen re-use device that is used for comprises first hydrogen gas buffer 2 that connects hydrogen generator station 1, and said first hydrogen gas buffer 2 connects WHITE CARBON BLACK hydrogen gas buffer 3 and reduction furnace 4 respectively; Connect second hydrogen gas buffer 7 that dry method reclaims pressurized with hydrogen separation purifier 5 and activated carbon adsorber 6 respectively, said second hydrogen gas buffer 7 connects said reduction furnace 4; Be communicated with through first branch road between said second hydrogen gas buffer 7 and the WHITE CARBON BLACK hydrogen gas buffer 3, said first branch road is provided with vacuum breaker 15, first pressure regulator valve 14 and chain trip valve 13.
Be communicated with through second branch road between said first hydrogen gas buffer 2 and second hydrogen gas buffer 7, said second branch road is provided with second pressure regulator valve 16.
Its production process is following:
The high-purity hydrogen of the aquatic product of hydrogen generator station 1 electrolytic desalting gets into first hydrogen gas buffer 2 and collects, and divides two-way to get into WHITE CARBON BLACK hydrogen gas buffer 3 and reduction furnace 4, and dry method reclaims pressurized with hydrogen separation purifier 5 and collected by second hydrogen gas buffer 7 with the hydrogen that activated carbon adsorber 6 obtains; By reduction furnace 4 entering systems, reduction furnace 4 windows are purged, and strengthen the hydrogen purge amount gradually; In case in the polysilicon production process, produce indefinite form silicon choke system, the purging amount does not generate to satisfy reduction furnace 4 late growing stages that indefinite form silicon is required to be as the criterion; Unnecessary hydrogen gets into WHITE CARBON BLACK hydrogen gas buffer 3 by first branch road; To produce WHITE CARBON BLACK, on first branch road, be provided with first pressure regulator valve 14 and chain trip valve 13, in case hydrogen superpressure or overtemperature; Adjust second pressure regulator valve 16 on second branch road; With the hydrogen pressure between balance hydrogen generator station 1, WHITE CARBON BLACK surge tank and the reduction furnace 4, set chain WHITE CARBON BLACK hydrogen gas buffer 3 pressure of pneumatic adjusting valve 8 pressure, the chain WHITE CARBON BLACK hydrogen gas buffer 3 of the pressure of first pressure regulator valve 14; First pressure regulator valve, 14 pressure are set a little less than pneumatic adjusting valve 8 pressure 0.02MPa; It is chain in WHITE CARBON BLACK hydrogen gas buffer 3 to set chain trip valve 13, in case WHITE CARBON BLACK hydrogen gas buffer 3 hydrogen usage are big, during insufficient pressure, hydrogen generator station 1 hydrogen carries out automatic ftercompction; It is chain in second hydrogen gas buffer 7 to set second pressure regulator valve, 16 pressure, hydrogen generator station 1 automatic ftercompction when pressure descends; It is chain in second hydrogen gas buffer 7 to set pneumatic cut-off valve 12, and hydrogen can pass through hydrogen water seal 10, spark arrester 11 carries out emptying, waste gas raffinate absorption unit 9 emptying pipelines and the parallelly connected setting of hydrogen water seal 10 emptying pipelines.
The utility model is not limited to above-mentioned concrete embodiment, and those of ordinary skill in the art is from above-mentioned design, and without performing creative labour, all conversion of having done all drop within the protection domain of the utility model.
Claims (5)
1. be used for production of polysilicon hydrogen re-use device, comprise first hydrogen gas buffer that connects hydrogen generator station, said first hydrogen gas buffer connects WHITE CARBON BLACK hydrogen gas buffer and reduction furnace respectively;
Connect second hydrogen gas buffer that dry method reclaims pressurized with hydrogen separation purifier and activated carbon adsorber respectively, said second hydrogen gas buffer connects said reduction furnace; It is characterized in that:
Be communicated with through first branch road between said second hydrogen gas buffer and the WHITE CARBON BLACK hydrogen gas buffer, said first branch road is provided with vacuum breaker.
2. the production of polysilicon hydrogen re-use device that is used for as claimed in claim 1, it is characterized in that: said first branch road is provided with first pressure regulator valve.
3. the production of polysilicon hydrogen re-use device that is used for as claimed in claim 1, it is characterized in that: said first branch road is provided with chain trip valve.
4. the production of polysilicon hydrogen re-use device that is used for as claimed in claim 1 is characterized in that: be communicated with through second branch road between said first hydrogen gas buffer and second hydrogen gas buffer.
5. the production of polysilicon hydrogen re-use device that is used for as claimed in claim 4, it is characterized in that: said second branch road is provided with second pressure regulator valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012202229721U CN202558651U (en) | 2012-05-18 | 2012-05-18 | Hydrogen recycling device for producing polycrystalline silicon |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012202229721U CN202558651U (en) | 2012-05-18 | 2012-05-18 | Hydrogen recycling device for producing polycrystalline silicon |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202558651U true CN202558651U (en) | 2012-11-28 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012202229721U Expired - Fee Related CN202558651U (en) | 2012-05-18 | 2012-05-18 | Hydrogen recycling device for producing polycrystalline silicon |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202558651U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104876224A (en) * | 2015-05-11 | 2015-09-02 | 山东博润工业技术股份有限公司 | Organosilicon waste recovery treatment device and treatment method thereof |
| CN116443881A (en) * | 2023-03-31 | 2023-07-18 | 云南通威高纯晶硅有限公司 | Method, system, computer equipment and readable storage medium for rapidly stopping polycrystalline silicon reduction furnace |
-
2012
- 2012-05-18 CN CN2012202229721U patent/CN202558651U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104876224A (en) * | 2015-05-11 | 2015-09-02 | 山东博润工业技术股份有限公司 | Organosilicon waste recovery treatment device and treatment method thereof |
| CN104876224B (en) * | 2015-05-11 | 2017-04-12 | 山东博润工业技术股份有限公司 | Organosilicon waste recovery treatment device and treatment method thereof |
| CN116443881A (en) * | 2023-03-31 | 2023-07-18 | 云南通威高纯晶硅有限公司 | Method, system, computer equipment and readable storage medium for rapidly stopping polycrystalline silicon reduction furnace |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20121128 Termination date: 20130518 |