CN204034508U - A kind of absorption type exhaust gas processing device realizing hydrogen and reclaim - Google Patents
A kind of absorption type exhaust gas processing device realizing hydrogen and reclaim Download PDFInfo
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- CN204034508U CN204034508U CN201420552349.1U CN201420552349U CN204034508U CN 204034508 U CN204034508 U CN 204034508U CN 201420552349 U CN201420552349 U CN 201420552349U CN 204034508 U CN204034508 U CN 204034508U
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Abstract
A kind of absorption type exhaust gas processing device realizing hydrogen and reclaim.The utility model relates to silicon-based film solar cells and manufactures field, is specifically related to a kind of absorption type exhaust gas processing device realizing hydrogen and reclaim.The utility model is solve in existing vent gas treatment process the problem that cannot realize hydrogen and Ge element recovery.A kind of absorption type exhaust gas processing device realizing hydrogen recovery comprises spontaneous combustion bucket, adsorbing mechanism, cooling circulating water mechanism, tubular type palladium film purifier and air accumulator, spontaneous combustion bucket, adsorbing mechanism, cooling circulating water mechanism, tubular type palladium film purifier and air accumulator set gradually, uniformly on the bucket wall of spontaneous combustion bucket be arranged with multiple compressed-air line and multiple thermocouple, the gas outlet of cooling circulating water mechanism is provided with cooling circulating water mechanism gas pressure regulating valve.The utility model is used for the vent gas treatment in silicon-based film solar cells manufacture process.
Description
Technical field
The utility model relates to silicon-based film solar cells and manufactures field, is specifically related to a kind of absorption type exhaust gas processing device realizing hydrogen and reclaim.
Background technology
The process gas utilization rate of general hull cell manufacturing is about 20%, and the process tail gas of more than 80% can be sold out in exhaust treatment system, after becoming useless dust collection, transfers to environmental administration or unit to carry out degradation treatment.Need in silicon-based film solar cells production process to discharge a large amount of process tail gas, exhaust gas component mainly includes but not limited to: hydrogen, methane, silane, phosphine, germane, trimethyl borine, carbon dioxide etc.These tail gas directly enter in air can cause serious air pollution, and the gas of some kind is even containing severe toxicity.Therefore, need an exhaust treatment system to process accordingly these tail gas in technical process, air is not polluted after making it discharge.The traditional vent gas treatment mode in this field is the method adopting combustion of natural gas, after this exhaust treatment system compressed air mixes according to a certain percentage with natural gas, when tail gas enters treatment system, with firestone, mixed gas is lighted, temperature raises the burning-point reaching these tail gas instantaneously, and the tail gas that these are harmful becomes the oxide harmless to air.This processing mode has following defect: the natural gas lighted can be blown out when the first, tail gas moment, flow was large, cause system-down.The second, burning needs a large amount of natural gases, for area or the season of natural gas supply anxiety, can have a strong impact on the production in this manufacture field.Three, process tail gas is mainly disposed by combustion-type exhaust treatment system, do not relate to recovery, in fact these process tail gas purity are very high, price comparison is expensive, especially Ge element costly, if effective way recovery wherein one or more can be taked, be favourable for the cost control in production process.The absorption type exhaust treatment system that hydrogen reclaims can be realized and do not use combustion of natural gas process, add the flexibility of system application, can use in where district in office.Meanwhile, adopt adsorbent portion gas, only need carry out post processing to adsorbent, expensive Ge element of can purifying.Hydrogen is taked to the mode not processing, only reclaim, accomplished recycling of high-purity hydrogen.
Utility model content
The utility model cannot realize the problem of hydrogen and Ge element recovery in order to solve in existing vent gas treatment process, and then proposes a kind of absorption type exhaust gas processing device realizing hydrogen and reclaim.
The utility model is solve the problems of the technologies described above the technical scheme taked to be: the utility model comprises spontaneous combustion bucket, adsorbing mechanism, cooling circulating water mechanism, tubular type palladium film purifier and air accumulator, spontaneous combustion bucket, adsorbing mechanism, cooling circulating water mechanism, tubular type palladium film purifier and air accumulator set gradually, spontaneous combustion bucket is provided with spontaneous combustion bucket air inlet, between the spontaneous combustion bucket gas outlet of spontaneous combustion bucket and the adsorbing mechanism air inlet of adsorbing mechanism, between the adsorbing mechanism gas outlet of adsorbing mechanism and the cooling circulating water mechanism air inlet of cooling circulating water mechanism, between the cooling circulating water mechanism gas outlet of cooling circulating water mechanism and the tubular type palladium film purifier air inlet of tubular type palladium film purifier, all be connected by blast pipe between the tubular type palladium film purifier gas outlet of tubular type palladium film purifier and the air accumulator air inlet of air accumulator, uniformly on the bucket wall of spontaneous combustion bucket be arranged with multiple compressed-air line and multiple thermocouple, the gas outlet of cooling circulating water mechanism is provided with cooling circulating water mechanism gas pressure regulating valve.
The beneficial effect that the utility model compared with prior art comprises is: the utility model achieves tail gas without natural gas processing, and achieves hydrogen recovery.Adsorbent Germane gas, can reprocessing adsorbent separately, realizes the recovery of Ge element.While improve vent gas treatment efficiency, to the recycling of untreated gas, achieve the management and control of cost.The mode that burning adds absorption can realize the vent gas treatment efficiency of more than 99%, and the purifying of hydrogen reclaims the high-purity hydrogen cost can saving again more than 50%, and the purity of the hydrogen collected can reach more than 6N.
Accompanying drawing explanation
Fig. 1 is the integrally-built schematic diagram of the utility model; Fig. 2 is the structural representation of spontaneous combustion bucket 1; Fig. 3 is the structural representation of adsorbing mechanism 2; The structural representation of Tu4Shi cooling circulating water mechanism 3; Fig. 5 is the structural representation of tubular type palladium film purifier 4; Fig. 6 is the structural representation of air accumulator 5.
Detailed description of the invention
Detailed description of the invention one: composition graphs 1 to Fig. 6 illustrates present embodiment, described in present embodiment, a kind of absorption type exhaust gas processing device realizing hydrogen recovery comprises spontaneous combustion bucket 1, adsorbing mechanism 2, cooling circulating water mechanism 3, tubular type palladium film purifier 4 and air accumulator 5, spontaneous combustion bucket 1, adsorbing mechanism 2, cooling circulating water mechanism 3, tubular type palladium film purifier 4 and air accumulator 5 set gradually, spontaneous combustion bucket 1 is provided with spontaneous combustion bucket air inlet 1-1, between the spontaneous combustion bucket gas outlet 1-2 of spontaneous combustion the bucket 1 and adsorbing mechanism air inlet 2-1 of adsorbing mechanism 2, between the adsorbing mechanism gas outlet 2-2 of the adsorbing mechanism 2 and cooling circulating water mechanism air inlet 3-1 of cooling circulating water mechanism 3, between the cooling circulating water mechanism gas outlet 3-2 of cooling circulating water the mechanism 3 and tubular type palladium film purifier air inlet 4-1 of tubular type palladium film purifier 4, all be connected by blast pipe between the tubular type palladium film purifier gas outlet 4-2 of tubular type palladium film the purifier 4 and air accumulator air inlet 5-1 of air accumulator 5, uniformly on the bucket wall of spontaneous combustion bucket 1 be arranged with multiple compressed-air line 1-3 and multiple thermocouple 1-4, the gas outlet 3-2 of cooling circulating water mechanism 3 is provided with cooling circulating water mechanism gas pressure regulating valve 6.
Detailed description of the invention two: composition graphs 1 to Fig. 6 illustrates present embodiment, described in present embodiment, spontaneous combustion bucket air inlet 1-1 is arranged on the upper end of spontaneous combustion bucket 1, and spontaneous combustion bucket gas outlet 1-2 is arranged on the lower end of spontaneous combustion bucket 1, the lateral wall of spontaneous combustion bucket 1 is enclosed with asbestos 1-5.Other composition is identical with detailed description of the invention one with connected mode.
Design like this utilizes the feature containing silane in tail gas, passes into compressed air combustion-supporting silane, burnt together by other gases by multiple compressed-air line 1-3.When compressed air passes into, make temperature too fast for avoiding burning, that takes segmented passes into compressed air, control the compressed air require of every section, monitored by multiple thermocouple 1-4, the temperature of spontaneous combustion bucket 1 inside can be made like this to remain on less than 250 degree, alleviate the temperature capacity of equipment, avoid the burning-point reaching hydrogen simultaneously.
Detailed description of the invention three: composition graphs 1 to Fig. 6 illustrates present embodiment, described in present embodiment, adsorbing mechanism air inlet 2-1 is arranged on the upper end of adsorbing mechanism 2, adsorbing mechanism gas outlet 2-2 is arranged on the lower end of adsorbing mechanism 2, adsorbing mechanism 2 inside is provided with chemosorbent 2-3, and the sidewall of adsorbing mechanism 2 is provided with observation window 2-4 and thermocouple 2-5.Other composition is identical with detailed description of the invention one with connected mode.
Design like this, after spontaneous combustion process, wherein can not have sufficient combustion or because the reason that compressed air passes into fault delivers to adsorbing mechanism 2 through discharge duct, containing chemosorbent 2-3 in adsorbing mechanism 2, gas can be adsorbed by some gas.After having adsorbed, gas in addition to hydrogen just can complete the treatment effeciency of more than 99%.
Detailed description of the invention four: composition graphs 1 to Fig. 6 illustrates present embodiment, described in present embodiment, the top of adsorbing mechanism 2 inside is provided with grid 2-6, and grid 2-6 is provided with active carbon 2-7.Other composition is identical with detailed description of the invention three with connected mode.
Detailed description of the invention five: composition graphs 1 to Fig. 6 illustrates present embodiment, described in present embodiment, cooling circulating water mechanism 3 comprises cooling tube 3-3, tank 3-4, cooling water intake 3-5, cooling water outlet 3-6 and discharge outlet 3-7, cooling tube 3-3 is U-shaped pipe, one end of cooling tube 3-3 is connected with cooling circulating water mechanism air inlet 3-1, the other end of cooling tube 3-3 is connected with cooling circulating water mechanism gas outlet 3-2, the two ends of cooling tube 3-3 are equipped with buckle 3-8, cooling tube 3-3 is placed in tank 3-4, the top of tank 3-4 sidewall is provided with cooling water outlet 3-6, the bottom of tank 3-4 sidewall is provided with cooling water intake 3-5, the lower end of tank 3-4 is provided with discharge outlet 3-7.Other composition is identical with detailed description of the invention one with connected mode.
Detailed description of the invention six: composition graphs 1 to Fig. 6 illustrates present embodiment, described in present embodiment, tubular type palladium film purifier air inlet 4-1 is arranged on the upper end of tubular type palladium film purifier 4, tubular type palladium film purifier gas outlet 4-2 is arranged on the lower end of tubular type palladium film purifier 4, and tubular type palladium film purifier 4 is provided with controller 4-3.Other composition is identical with detailed description of the invention one with connected mode.Wherein tubular type palladium film purifier 4 also can with absorption type purify mechanism replace, in-house being loaded with of absorption type purifying comprises molecular sieve, catalyst and getter.
Detailed description of the invention seven: composition graphs 1 to Fig. 6 illustrates present embodiment, described in present embodiment, air accumulator air inlet 5-1 is arranged on the bottleneck 5-2 of air accumulator 5, the upper end of bottleneck 5-2 is provided with valve 5-3, air accumulator air inlet 5-1 is provided with air accumulator gas pressure regulating valve 5-4, and the lower end of air accumulator 5 is provided with gas cylinder seat 5-5.Other composition is identical with detailed description of the invention one with connected mode.
Detailed description of the invention eight: composition graphs 1 to Fig. 6 illustrates present embodiment, between the spontaneous combustion bucket gas outlet 1-2 of spontaneous combustion bucket 1 described in present embodiment and the adsorbing mechanism air inlet 2-1 of adsorbing mechanism 2, between the adsorbing mechanism gas outlet 2-2 of the adsorbing mechanism 2 and cooling circulating water mechanism air inlet 3-1 of cooling circulating water mechanism 3, between the cooling circulating water mechanism gas outlet 3-2 of cooling circulating water the mechanism 3 and tubular type palladium film purifier air inlet 4-1 of tubular type palladium film purifier 4, blast pipe between the tubular type palladium film purifier gas outlet 4-2 of tubular type palladium film the purifier 4 and air accumulator air inlet 5-1 of air accumulator 5 is bellows.Other composition is identical with detailed description of the invention one with connected mode.
Operation principle
The course of work of the present utility model is divided into following several stage: the first stage, because processing step each in silicon-based film solar cells production technology relates to silane gas process, utilize the feature that silane gas burning-point is very low, a spontaneous combustion bucket 1 is settled in the first stage, pass into compressed air, ignite silane gas, utilize the high temperature of silane spontaneous combustion first burn a part other gases; Second stage, unburned completely tail gas will pass into the adsorbing mechanism 2 that chemosorbent 2-3 is housed, in conjunction with the gaseous species that need process, the main component of chemosorbent 2-3 is cupric oxide and potassium permanganate, also be preinstalled with the grid 2-6 of carrying active carbon 2-7 on the top of adsorbing mechanism 2, can adsorb in advance.By adsorbent, by clean for other gas treatment in tail gas except hydrogen.Adsorbent Germane gas, can reprocessing adsorbent separately, realizes the recovery of Ge element, phase III, even if due in prior process during silane spontaneous combustion temperature also can not reach the burning-point of hydrogen, so do not relate to the process of hydrogen, hydrogen can emit, at hydrogen discharge pipe rear end access tubular type palladium film purifier 4, in tubular type palladium film purifier 4 front end, cooling circulating water mechanism 3 and cooling circulating water mechanism gas pressure regulating valve 6 are installed, control discharge hydrogen temperature out and pressure, utilize tubular type palladium film purifier 4 that the hydrogen of discharge is carried out purified pool, the purity can recovering hydrogen reaches more than 6N, the collection that air accumulator 5 carries out high-purity hydrogen is connected in tubular type palladium film purifier 4 rear end.
When whole system breaks down, as adsorbent reaches critical condition, adsorption capacity is not strong, when can not reach more than 99% the treatment effeciency of gas, do not avoid other impurity and hydrogen to mix and enter tubular type palladium film purifier 4, cause palladium film " poisoning " to lose efficacy, at this moment can be closed the inlet valve of tubular type palladium film purifier 4 front end by controller 4-3, start and force air draft, other gases are discharged from tail gas emptying pipe.
Claims (8)
1. the absorption type exhaust gas processing device that can realize hydrogen and reclaim, it is characterized in that: described a kind of absorption type exhaust gas processing device realizing hydrogen recovery comprises spontaneous combustion bucket (1), adsorbing mechanism (2), cooling circulating water mechanism (3), tubular type palladium film purifier (4) and air accumulator (5), spontaneous combustion bucket (1), adsorbing mechanism (2), cooling circulating water mechanism (3), tubular type palladium film purifier (4) and air accumulator (5) set gradually, spontaneous combustion bucket (1) is provided with spontaneous combustion bucket air inlet (1-1), between the spontaneous combustion bucket gas outlet (1-2) of spontaneous combustion bucket (1) and the adsorbing mechanism air inlet (2-1) of adsorbing mechanism (2), between the adsorbing mechanism gas outlet (2-2) of adsorbing mechanism (2) and cooling circulating water mechanism air inlet (3-1) of cooling circulating water mechanism (3), between cooling circulating water mechanism gas outlet (3-2) of cooling circulating water mechanism (3) and tubular type palladium film purifier air inlet (4-1) of tubular type palladium film purifier (4), all be connected by blast pipe between tubular type palladium film purifier gas outlet (4-2) of tubular type palladium film purifier (4) and the air accumulator air inlet (5-1) of air accumulator (5), uniformly on the bucket wall of spontaneous combustion bucket (1) be arranged with multiple compressed-air line (1-3) and multiple thermocouple (1-4), the gas outlet (3-2) of cooling circulating water mechanism (3) is provided with cooling circulating water mechanism gas pressure regulating valve (6).
2. according to claim 1 a kind of realize hydrogen reclaim absorption type exhaust gas processing device, it is characterized in that: described spontaneous combustion bucket air inlet (1-1) is arranged on the upper end of spontaneous combustion bucket (1), spontaneous combustion bucket gas outlet (1-2) is arranged on the lower end of spontaneous combustion bucket (1), the lateral wall of spontaneous combustion bucket (1) is enclosed with asbestos (1-5).
3. according to claim 1 a kind of realize hydrogen reclaim absorption type exhaust gas processing device, it is characterized in that: described adsorbing mechanism air inlet (2-1) is arranged on the upper end of adsorbing mechanism (2), adsorbing mechanism gas outlet (2-2) is arranged on the lower end of adsorbing mechanism (2), adsorbing mechanism (2) inside is provided with chemosorbent (2-3), and the sidewall of adsorbing mechanism (2) is provided with observation window (2-4) and thermocouple (2-5).
4. according to claim 3 a kind of realize hydrogen reclaim absorption type exhaust gas processing device, it is characterized in that: the top of described adsorbing mechanism (2) inside is provided with grid (2-6), and grid (2-6) is provided with active carbon (2-7).
5. according to claim 1 a kind of realize hydrogen reclaim absorption type exhaust gas processing device, it is characterized in that: described cooling circulating water mechanism (3) comprises cooling tube (3-3), tank (3-4), cooling water intake (3-5), cooling water outlet (3-6) and discharge outlet (3-7), cooling tube (3-3) is U-shaped pipe, one end of cooling tube (3-3) is connected with cooling circulating water mechanism air inlet (3-1), the other end of cooling tube (3-3) is connected with cooling circulating water mechanism gas outlet (3-2), the two ends of cooling tube (3-3) are equipped with buckle (3-8), cooling tube (3-3) is placed in tank (3-4), the top of tank (3-4) sidewall is provided with cooling water outlet (3-6), the bottom of tank (3-4) sidewall is provided with cooling water intake (3-5), the lower end of tank (3-4) is provided with discharge outlet (3-7).
6. according to claim 1 a kind of realize hydrogen reclaim absorption type exhaust gas processing device, it is characterized in that: described tubular type palladium film purifier air inlet (4-1) is arranged on the upper end of tubular type palladium film purifier (4), tubular type palladium film purifier gas outlet (4-2) is arranged on the lower end of tubular type palladium film purifier (4), and tubular type palladium film purifier (4) is provided with controller (4-3).
7. according to claim 1 a kind of realize hydrogen reclaim absorption type exhaust gas processing device, it is characterized in that: described air accumulator air inlet (5-1) is arranged on the bottleneck (5-2) of air accumulator (5), the upper end of bottleneck (5-2) is provided with valve (5-3), air accumulator air inlet (5-1) is provided with air accumulator gas pressure regulating valve (5-4), and the lower end of air accumulator (5) is provided with gas cylinder seat (5-5).
8. according to claim 1 a kind of realize hydrogen reclaim absorption type exhaust gas processing device, it is characterized in that: between the spontaneous combustion bucket gas outlet (1-2) of described spontaneous combustion bucket (1) and the adsorbing mechanism air inlet (2-1) of adsorbing mechanism (2), between the adsorbing mechanism gas outlet (2-2) of adsorbing mechanism (2) and cooling circulating water mechanism air inlet (3-1) of cooling circulating water mechanism (3), between cooling circulating water mechanism gas outlet (3-2) of cooling circulating water mechanism (3) and tubular type palladium film purifier air inlet (4-1) of tubular type palladium film purifier (4), blast pipe between tubular type palladium film purifier gas outlet (4-2) of tubular type palladium film purifier (4) and the air accumulator air inlet (5-1) of air accumulator (5) is bellows.
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| CN201420552349.1U CN204034508U (en) | 2014-09-24 | 2014-09-24 | A kind of absorption type exhaust gas processing device realizing hydrogen and reclaim |
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| CN201420552349.1U CN204034508U (en) | 2014-09-24 | 2014-09-24 | A kind of absorption type exhaust gas processing device realizing hydrogen and reclaim |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108434969A (en) * | 2018-05-25 | 2018-08-24 | 郑州天点科技有限公司 | The thin-film solar cells exhaust treatment system of computer control |
| CN114033968A (en) * | 2021-10-29 | 2022-02-11 | 深圳市氢瑞燃料电池科技有限公司 | Liquid hydrogen storage device of fuel cell |
-
2014
- 2014-09-24 CN CN201420552349.1U patent/CN204034508U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108434969A (en) * | 2018-05-25 | 2018-08-24 | 郑州天点科技有限公司 | The thin-film solar cells exhaust treatment system of computer control |
| CN114033968A (en) * | 2021-10-29 | 2022-02-11 | 深圳市氢瑞燃料电池科技有限公司 | Liquid hydrogen storage device of fuel cell |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20190202 Address after: Room 103, Building 2, Office District, Olympic Village, Chaoyang District, Beijing Patentee after: HANNENG PHOTOVOLTAIC TECHNOLOGY CO., LTD. Address before: 155113 No. 888, Qiyi Road, Taibao Town, Sifangtai District, Shuangyashan City, Heilongjiang Province Patentee before: Heilongjiang Hanergy Thin-Film Solar Co., Ltd. |
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| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20190308 Address after: Room 107, Building 2, Olympic Village Street Comprehensive Office District, Chaoyang District, Beijing Patentee after: Han energy mobile Energy Holding Group Co., Ltd. Address before: Room 103, Building 2, Office District, Olympic Village, Chaoyang District, Beijing Patentee before: HANNENG PHOTOVOLTAIC TECHNOLOGY CO., LTD. |