A kind of frock that is used for Cleaning Line cutting machine filter
Technical field
The utility model relates to the line cutting technology field, particularly relates to a kind of frock that is used for Cleaning Line cutting machine filter.
Background technology
Silicon is a kind of nonmetal semi-conducting material, and silicon chip is the main raw material(s) of solar battery sheet, also is used to make semiconductor devices and integrated circuit.
The directional solidification of silicon material forms silicon ingot, and the silicon material is melted in ingot furnace, can generate silicon ingot through a series of operation.Earlier silicon ingot is carried out cutting processing and obtain silico briquette, with wire cutting machine silico briquette is carried out slice processing then and obtain silicon chip with broken ingot machine.
During wire cutting machine cutting silico briquette, by the steel wire that adheres to slurry silico briquette is cut into silicon chip, the gauze of high speed rotating carries the slurry that has silicon-carbide particle and cuts according to production technology.
In the cutting process, can cause the cracked phenomenon that drops of silicon chip because of the influence of factors such as slurry density, slurry temperature or steel wire quality; The broken silicon wafers that drops in the cutting chamber will enter into the slurry cylinder along with the circulatory system, finally filtered by the filter of slurry cylinder.
Existing processing mode to broken silicon wafers is directly to wash the filter of slurry cylinder, reclaims broken silicon wafers by the serious offense filter screen, still, directly is flushed away attached to the slurry on broken silicon wafers and the filter, has polluted environment on the one hand, has wasted slurry on the other hand.
Therefore, how in the process of cleaning and filtrating equipment, effectively reclaiming attached to the slurry on broken silicon wafers and the filter when reclaiming broken silicon wafers, is that those skilled in the art are badly in need of the technical problem that solves at present.
The utility model content
The purpose of the utility model provides a kind of frock that is used for Cleaning Line cutting machine filter, during the filter of this frock Cleaning Line cutting machine, can when reclaiming broken silicon wafers, effectively reclaim attached to the slurry on broken silicon wafers and the filter.
In order to realize above-mentioned technical purpose; The utility model provides a kind of frock that is used for Cleaning Line cutting machine filter, comprises rack for cleaning and retracting device, and said rack for cleaning has flow channel for liquids; Said retracting device comprises contact pin box and slurry box; The bottom surface of said contact pin box has filtering holes, and the area of said filtering holes is less than or equal to the aperture area of said slurry box, and said contact pin box is positioned at said slurry box upside; The liquid that flows out from said flow channel for liquids gets into said slurry box after said contact pin box filters.
Preferably, said retracting device also comprises framework, and said contact pin box is placed on said frame upper side, and it is inner that said slurry box is placed on said framework.
Preferably, the inner bottom surface of said framework has slide rail, and said slurry box cooperates with said slide rail.
Preferably, the openend of said slurry box has overfall.
Preferably, the two sides of said slurry box all have said overfall, the said overfall symmetry of two sides and all be circular arc.
Preferably, the end face of said slurry box is provided with handle.
Preferably, said contact pin box and said slurry box all do not have upper surface, and the bottom surface of the bottom surface of said contact pin box, said slurry box is all identical with the bottom surface of said framework.
Preferably, the equal quadrangle in bottom surface of the bottom surface of the bottom surface of said contact pin box, said slurry box and said framework.
Preferably, said rack for cleaning upside has rinse bath, and the flow channel for liquids of said rinse bath is at least one through hole, and the outlet of said through hole is provided with said retracting device.
Preferably, the bottom of said rinse bath evenly is provided with three said through holes, and the outlet of each said through hole is provided with one group of said retracting device.
The frock that is used for Cleaning Line cutting machine filter that the utility model provides; Comprise rack for cleaning and retracting device; Rack for cleaning has flow channel for liquids, and retracting device comprises contact pin box and slurry box, and the bottom surface of contact pin box has filtering holes; The area of filtering holes is less than or equal to the aperture area of slurry box, and the contact pin box is positioned at slurry box upside; The liquid that flows out from flow channel for liquids gets into the slurry box after the contact pin box filters.
When this frock is used for the filter of Cleaning Line cutting machine; Filter is placed on the rack for cleaning washes; The liquid of washing and filtering device will carry broken silicon wafers and slurry flows out through flow channel for liquids, and the liquid that carries broken silicon wafers reclaims broken silicon wafers and slurry through the retracting device classification, and the contact pin box filters said liquid and collects broken silicon wafers; Liquid after the filtration carries slurry and flows into the slurry box, and this frock has also reclaimed slurry when reclaiming broken silicon wafers.
In a kind of mode, said retracting device also comprises framework, and said contact pin box is placed on said frame upper side, and it is inner that said slurry box is placed on said framework.
Contact pin box and slurry box all are placed on the framework, and with respect to directly the contact pin box being placed on the slurry box, framework can be confirmed the relative position of contact pin box and slurry box accurately, can also avoid the landing of contact pin box simultaneously.
Further in the mode, the openend of said slurry box has overfall.
Filtering the liquid that flows into the slurry box through the contact pin box is the mixed liquor of slurry and water, and the silicon-carbide particle in the slurry in the mixed liquor can be deposited to the bottom of slurry box, and the liquid in the slurry box is with layering gradually, and the superiors are the mixed liquor of water and suspension.When the liquid in the slurry box increases gradually, be positioned at the water of the superiors and the mixed liquor of suspension in the slurry box and can pass through the overfall overflow.
In a kind of preferred mode, said rack for cleaning upside has rinse bath, and the flow channel for liquids of said rinse bath is at least one through hole, and the outlet of said through hole is provided with said retracting device.
The rack for cleaning upside is set to rinse bath, more convenient flushing to filter.Can also switch be set for the flow channel for liquids of rinse bath, when opening switch, the liquid of washing and filtering device flows out, and reclaims broken silicon wafers and slurry through the retracting device classification.
In the further preferred mode, the bottom of said rinse bath evenly is provided with three said through holes, and the outlet of each said through hole is provided with one group of said retracting device.
When the volume of rinse bath is big; Can in its bottom a plurality of through holes be set evenly according to the length of rinse bath; The outlet correspondence of each through hole is provided with a winding film magazine and slurry box, can clean a plurality of filters simultaneously, the velocity of discharge of liquid when a plurality of through holes can be accelerated to clean.
Description of drawings
Fig. 1 is the structural representation of a kind of specific embodiment of frock that is used for Cleaning Line cutting machine filter that the utility model provided;
Fig. 2 is the structural representation of the rack for cleaning of the described frock of Fig. 1;
Fig. 3 is the structural representation of the retracting device of the described frock of Fig. 1;
Fig. 4 is the structural representation of the contact pin box of retracting device shown in Figure 3;
Fig. 5 is the structural representation of the slurry box of retracting device shown in Figure 3;
Fig. 6 is the structural representation of the rack for cleaning of retracting device shown in Figure 3.
The specific embodiment
The core of the utility model provides a kind of frock that is used for Cleaning Line cutting machine filter, during the filter of this frock Cleaning Line cutting machine, can when reclaiming broken silicon wafers, effectively reclaim attached to the slurry on broken silicon wafers and the filter.
In order to make those skilled in the art person understand the utility model scheme better, the utility model is done further to specify below in conjunction with the accompanying drawing and the specific embodiment.
Please refer to Fig. 1 to Fig. 3; Fig. 1 is the structural representation of a kind of specific embodiment of frock that is used for Cleaning Line cutting machine filter that the utility model provided; Fig. 2 is the structural representation of the rack for cleaning of the described frock of Fig. 1, and Fig. 3 is the structural representation of the retracting device of the described frock of Fig. 1.
In a kind of concrete embodiment; The utility model provides a kind of frock that is used for Cleaning Line cutting machine filter, comprises rack for cleaning 1 and retracting device 2, and said rack for cleaning 1 has flow channel for liquids 11; Said retracting device 2 comprises contact pin box 21 and slurry box 22; The bottom surface of said contact pin box 21 has filtering holes 211, and the area of said filtering holes 211 is less than or equal to the aperture area of said slurry box 22, and said contact pin box 21 is positioned at said slurry box 22 upsides; The liquid that flows out from said flow channel for liquids 11 gets into said slurry box 22 after said contact pin box 21 filters.
When this frock is used for the filter of Cleaning Line cutting machine; Filter is placed on the rack for cleaning 1 washes; The liquid of washing and filtering device will carry broken silicon wafers and slurry flows out through flow channel for liquids 11, and the liquid that carries broken silicon wafers reclaims broken silicon wafers and slurry through retracting device 2 classification, and contact pin box 21 filters said liquid and collects broken silicon wafers; Liquid after the filtration carries slurry and flows into slurry box 22; This frock has also reclaimed slurry when reclaiming broken silicon wafers, has practiced thrift cost, has reduced wasting phenomenon.
In the concrete embodiment of another kind, said retracting device 2 also comprises framework 23, and said contact pin box 21 is placed on said framework 23 upsides, and said slurry box 22 is placed on said framework 23 inside.
Contact pin box 21 all is placed on the framework 23 with slurry box 22; With respect to directly contact pin box 21 being placed on the slurry box 22; Framework 23 can be confirmed the relative position of contact pin box 21 and slurry box 22 accurately, guarantees that filtered fluid flows into slurry box 22, and framework 23 can also be avoided 21 landings of contact pin box simultaneously.
Concrete, said framework 23 inner bottom surfaces have slide rail, and said slurry box 22 cooperates with said slide rail.
The liquid that slurry box 22 is collected skids off slurry box 22 more for a long time, the slurry mixed liquor is handled reclaimed, and slurry box 22 can also continue to collect the slurry mixed liquor then.Certainly, slurry box 22 can also adopt other dismountable mode to cooperate with framework 23.
Please refer to Fig. 4 to Fig. 6, Fig. 4 is the structural representation of the contact pin box of retracting device shown in Figure 3, and Fig. 5 is the structural representation of the slurry box of retracting device shown in Figure 3, and Fig. 6 is the structural representation of the rack for cleaning of retracting device shown in Figure 3.
In a kind of preferred mode, the openend of said slurry box 22 has overfall 221.
Filtering the liquid that flows into slurry box 22 through contact pin box 21 is the mixed liquor of slurry and water, and the silicon-carbide particle in the slurry in the mixed liquor can be deposited to the bottom of slurry box 22, and the liquid in the slurry box 22 is with layering gradually, and the superiors are the mixed liquor of water and suspension.When the liquid in the slurry box 22 increases gradually, be positioned at the water of the superiors and the mixed liquor of suspension in the slurry box 22 and can pass through the overfall overflow.
Concrete, the two sides of said slurry box 22 all have said overfall 221 symmetries of 221, two sides of said overfall and all are circular arc.
Obviously, the quantity of overfall 221, shape and position all are not limited to the described situation of the foregoing description, and the overfall that can satisfy any amount, shape and the position of stratified liquid overflow all is fine.
In a kind of concrete mode, the end face of said slurry box 22 is provided with handle 222, can extract slurry box 22 more easily.
In the another kind of concrete mode, said contact pin box 21 does not all have upper surface with said slurry box 22, and the bottom surface of the bottom surface of said contact pin box 21, said slurry box 22 is all identical with the bottom surface of said framework 23.
Contact pin box 21, slurry box 22 and framework 23 threes' bottom surface also can be different, and when three's bottom surface was identical, the three combined more neat, and is practical.
Preferably, the equal quadrangle in bottom surface of the bottom surface of the bottom surface of said contact pin box 21, said slurry box 22 and said framework 23.Certainly, contact pin box 21, slurry box 22 and framework 23 threes' bottom surface also can be other shapes.
A kind of preferred embodiment in, said rack for cleaning 1 upside has rinse bath 12, the flow channel for liquids 11 of said rinse bath 12 is at least one through hole 13, the outlet of said through hole 13 is provided with said retracting device 2.
Rack for cleaning 1 upside is set to rinse bath 12, more convenient flushing to filter.Can also switch be set for the flow channel for liquids 11 of rinse bath 12, when opening switch, the liquid of washing and filtering device flows out said rinse bath 12.
Between the outlet of through hole 13 and the retracting device 2 transition apparatus can also be set, for example funnel can guarantee that like this cleaning fluid all flows into retracting device 2 classification and reclaims.
Concrete, the bottom of said rinse bath 12 evenly is provided with three said through holes 13, and the outlet of each said through hole 13 is provided with one group of said retracting device 2.
When the volume of rinse bath 12 is big, can in its bottom a plurality of through holes 13 be set evenly according to the length of rinse bath 12, the outlet correspondence of each through hole 13 is provided with one group of retracting device 2.Can realize cleaning simultaneously a plurality of filters, a plurality of through holes 13 can be accelerated the velocity of discharge of cleaning fluid.
Certainly, the size of this frock and shape can be according to the production needs designs of reality.The long-term contact with water of this frock, the material that first-selection is difficult for getting rusty.
More than the frock that is used for Cleaning Line cutting machine filter that the utility model provided has been carried out detailed introduction.Used concrete example among this paper the principle and the embodiment of the utility model are set forth, the explanation of above embodiment just is used to help to understand the method and the core concept thereof of the utility model.Should be understood that; For those skilled in the art; Under the prerequisite that does not break away from the utility model principle, can also carry out some improvement and modification to the utility model, these improvement and modification also fall in the protection domain of the utility model claim.