CN107469456A - A kind of metal recovery system for tearing golden degumming process - Google Patents
A kind of metal recovery system for tearing golden degumming process Download PDFInfo
- Publication number
- CN107469456A CN107469456A CN201610399599.XA CN201610399599A CN107469456A CN 107469456 A CN107469456 A CN 107469456A CN 201610399599 A CN201610399599 A CN 201610399599A CN 107469456 A CN107469456 A CN 107469456A
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- metal
- waste
- gas
- air draft
- unit cavity
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D36/00—Filter circuits or combinations of filters with other separating devices
- B01D36/04—Combinations of filters with settling tanks
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22B—PRODUCTION AND REFINING OF METALS; PRETREATMENT OF RAW MATERIALS
- C22B11/00—Obtaining noble metals
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22B—PRODUCTION AND REFINING OF METALS; PRETREATMENT OF RAW MATERIALS
- C22B7/00—Working up raw materials other than ores, e.g. scrap, to produce non-ferrous metals and compounds thereof; Methods of a general interest or applied to the winning of more than two metals
- C22B7/005—Separation by a physical processing technique only, e.g. by mechanical breaking
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2221/00—Applications of separation devices
- B01D2221/14—Separation devices for workshops, car or semiconductor industry, e.g. for separating chips and other machining residues
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Manufacturing & Machinery (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Life Sciences & Earth Sciences (AREA)
- Environmental & Geological Engineering (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geology (AREA)
- Filtration Of Liquid (AREA)
Abstract
The present invention relates to a kind of metal recovery system, specifically a kind of metal recovery system for tearing golden degumming process.Including unit cavity, by-pass filtration system and secondary filtration system, wherein by-pass filtration system is arranged in unit cavity, the preliminary recovery for metal；The secondary filtration system includes waste liquid apparatus for recovering metal and waste gas apparatus for recovering metal；The waste liquid apparatus for recovering metal is connected by drain line with the waste discharge interface of unit cavity, the metal recovery for waste liquid；The waste gas apparatus for recovering metal is connected by exhaust pipeline with the air draft interface of unit cavity, the metal recovery for waste gas.The present invention improves the organic efficiency for the noble metal for tearing golden degumming equipment, reduces the wasting of resources；Also directly reduce the burden on enterprises for human resources can be saved simultaneously, increase new growth point for enterprise.
Description
Technical field
The present invention relates to a kind of metal recovery system, specifically a kind of metal for tearing golden degumming process returns
Receipts system.
Background technology
During semiconductor tears golden degumming process, because the coating of crystal column surface is often expensive for gold, silver etc.
Metal, after removing photoresist, tear gold, metallic membrane and fine particle have all stayed in unit cavity and waste pipe
Lu Zhong, the recovery of noble metal turn into this road technique urgent problem to be solved.
The content of the invention
In view of the above-mentioned problems, it is an object of the invention to provide a kind of metal recovery system for tearing golden degumming process
System.The system can more effectively improve metal recovery efficiency by one-level, secondary filtration structure.
The purpose of the present invention is achieved through the following technical solutions：
A kind of metal recovery system for tearing golden degumming process, including unit cavity, by-pass filtration system and two
Level filtration system, wherein,
The by-pass filtration system is arranged in unit cavity, and the preliminary metal for tearing golden degumming process returns
Receive；
The secondary filtration system includes waste liquid apparatus for recovering metal and waste gas apparatus for recovering metal；
The waste liquid apparatus for recovering metal is connected by drain line with the waste discharge interface of unit cavity, is used for
The metal recovery of waste liquid；
The waste gas apparatus for recovering metal is connected by exhaust pipeline with the air draft interface of unit cavity, is used for
The metal recovery of waste gas.
The by-pass filtration system includes air draft screen pack and waste discharge mouth screen pack, the air draft screen pack and
Waste discharge mouth screen pack is respectively arranged on air draft interface and waste discharge interface.
The by-pass filtration system further comprises metal film baffle plate, and the metal film baffle plate setting is in unit
In cavity around wafer.
The waste gas apparatus for recovering metal includes gas-liquid separation box and gas liquid separating filtering net, the gas-liquid point
It is arranged at from screen pack in gas-liquid separation box, gas-liquid is respectively equipped with the top and bottom of the gas-liquid separation box
Separate the air draft of air draft interface and gas-liquid separating liquor drainage mouth, wherein gas-liquid separation air draft interface and unit cavity
Orifice, the gas-liquid separation leakage fluid dram connect with precipitated metal pond.
The waste liquid apparatus for recovering metal includes precipitated metal pond and filtering basket, and the filtering basket is set
In in precipitated metal pond, be from top to bottom sequentially provided with the side wall in the precipitated metal pond waste liquid overfall,
Waste liquid outlet and waste liquid pump discharge.
The filtering basket is bolted on the inwall in precipitated metal pond and is in suspended state.
The air draft interface is two, and two air draft interfaces are symmetricly set in the both sides of unit cavity.
The bottom of the unit cavity is provided with two waste discharge interfaces, and two waste discharge interfaces pass through pipeline and metal
The inlet connection of sedimentation basin.
Advantages of the present invention is with good effect：
1. recovery system of the present invention is by one-level, secondary filtration structure, by waste liquid, waste gas recovery, significantly
The organic efficiency for the noble metal for tearing golden degumming equipment is improved, the wasting of resources is reduced, has responded modern industry
The principle of economizing；Also directly reduced the burden on enterprises, for enterprise's increase newly for human resources can be saved simultaneously
Growth point.
, can be to variable grain metal point in later maintenance 2. the present invention is made up of one-level, secondary recovery
Do not reclaimed.
3. multistage recovery of the invention forms by screen pack, it is easily installed, safeguards, improve production efficiency.
Brief description of the drawings
Fig. 1 is the structural representation of the present invention；
Wherein：1 is nozzle, and 2 be unit cavity, and 3 be wafer, and 4 be air draft screen pack, and 5 connect for air draft
Mouthful, 6 be electric rotating machine, and 7 be precipitated metal pond, and 8 be filtering basket, and 9 be metal film baffle plate, and 10 are
Remove photoresist arm, and 11 be waste discharge mouth screen pack, and 12 be waste discharge interface, and 13 be gas-liquid separation box air draft interface, and 14
Gas liquid separating filtering net, 15 be gas-liquid separator box, and 16 be gas-liquid separation leakage fluid dram, and 17 be waste liquid overflow
Mouthful, 18 be waste liquid outlet, and 19 be waste liquid pump discharge.
Embodiment
In order that the object, technical solutions and advantages of the present invention are clearer, below in conjunction with the accompanying drawings and specifically
The present invention will be described in detail for embodiment.
As shown in figure 1, a kind of metal recovery system for tearing golden degumming process provided by the invention, including list
First cavity 2, by-pass filtration system and secondary filtration system, wherein,
The by-pass filtration system is arranged in unit cavity 2, for tearing the preliminary metal of golden degumming process
Recovery；
The secondary filtration system includes waste liquid apparatus for recovering metal and waste gas apparatus for recovering metal；It is described useless
Liquid apparatus for recovering metal is connected by drain line with the waste discharge interface 12 of unit cavity 2, for waste liquid
Metal recovery；
The waste gas apparatus for recovering metal is connected by exhaust pipeline with the air draft interface 5 of unit cavity 2,
Metal recovery for waste gas.
The by-pass filtration system includes air draft screen pack 4, metal film baffle plate 9 and waste discharge mouth screen pack 11,
Wherein air draft screen pack 4 and waste discharge mouth screen pack 11 is respectively arranged at air draft interface 5 and waste discharge interface 12
On, the air draft screen pack 4 and waste discharge mouth screen pack 11 return to peeling off bulky grain metal and metal film
Receive.The metal film baffle plate 9 is arranged in unit cavity 2 around wafer 3, is tearing golden degumming process
In, institute's stripping metal film, under the action of the centrifugal force, adhere on metal film baffle plate 9, during later maintenance
Easy cleaning reclaims.
The waste gas apparatus for recovering metal includes gas described in gas-liquid separation box 15 and gas liquid separating filtering net 14
Liquid separating and filtering net 14 is bolted in gas-liquid separation box 15.The top of the gas-liquid separation box 15
Portion and bottom are respectively equipped with gas-liquid separation air draft interface 13 and gas-liquid separating liquor drainage mouth 16, wherein gas-liquid separation
Air draft interface 13 is connected by exhaust pipeline with the air draft interface 5 of unit cavity 2, the gas-liquid separation row
Liquid mouth 16 is connected by drain line with the inlet in precipitated metal pond 7.
The waste liquid apparatus for recovering metal includes precipitated metal pond 7 and filtering basket 8, the filtering basket 8
It is arranged in precipitated metal pond 7, waste liquid is from top to bottom sequentially provided with the side wall in the precipitated metal pond 7
Overfall 17, waste liquid outlet 18 and waste liquid pump discharge 19.Waste liquid overfall 17 is when precipitated metal pond
7 waste liquids collected, it is impossible to when being discharged in time from waste liquid outlet 18, waste liquid is drained by waste liquid overfall 17,
Avoid waste liquid from overflowing and pollute other regions.Waste liquid pump discharge 19 is after a period of time technique is carried out, and is such as needed more
Glue is changed, then needs to use pump, waste liquid is drained from waste liquid pump discharge 19.
In one embodiment of the invention, the filtering basket 8 is bolted on precipitated metal pond 7
On inwall and it is in suspended state.
The air draft interface 5 is two, and two air draft interfaces 5 are symmetricly set in the both sides of unit cavity 2,
Two air draft interfaces 5 are connected by pipeline with the gas-liquid separation air draft interface 13 of the gas-liquid separation box 15.
The bottom of the unit cavity 2 is provided with two waste discharge interfaces 12, and two waste discharge interfaces 12 pass through pipeline
Connected with the inlet in precipitated metal pond 7.
The two-stage precipitation filtration system, stripping metal particle is recovered by filtration by physical sedimentation effect.
The present invention operation principle be：
During golden degumming process is torn, wafer 3 rotates at a high speed in the presence of electric rotating machine 6, removes photoresist
Arm 10 drives nozzle 1 to carry out tearing golden degumming process in crystal column surface, in the presence of glue is removed, is attached to
Metal membrane-coating on wafer 3 strips down, metal film with going glue to flow in the unit cavity 2,
The metal of larger particles is stayed in unit cavity 2 under the filtration of waste discharge mouth screen pack 11.While by
In air draft extraction and the effect of exhaust outlet screen pack 4, a part of metal membrane-coating filters down, so right
Metal film forms by-pass filtration recovery.Smaller particle metal flows through waste discharge interface 12 by waste liquid again and imports metal
In sedimentation basin 7, filtering basket 8 is provided with waste liquid porch, secondary filtration net is provided with filtering basket 8,
Being recovered by filtration again can be carried out to the metal of smaller particle in above-mentioned waste liquid.Exhaust pipeline is by air draft interface 5
The waste gas brought, wherein the metal with smaller particle, is imported in gas-liquid separation box 15.In gas-liquid separation
In box 15, gas liquid separating filtering net 14 is filtered again to above-mentioned granular metal, reaches secondary recovery
Purpose, the waste liquid under accumulating, imported again in precipitated metal pond 7 through gas-liquid separation leakage fluid dram 16.
The present invention effectively can be recovered by filtration to tearing the metal peeled off in golden degumming process, cost-effective,
Create and be worth for enterprise.
Embodiments of the present invention are the foregoing is only, are not intended to limit the scope of the present invention.It is all
Any modification, equivalent substitution and improvements made within the spirit and principles in the present invention, extension etc.,
Comprising within the scope of the present invention.
Claims (8)
- A kind of 1. metal recovery system for tearing golden degumming process, it is characterised in that：Including unit cavity (2), By-pass filtration system and secondary filtration system, wherein,The by-pass filtration system is arranged in unit cavity (2), for tearing the preliminary gold of golden degumming process Category recovery；The secondary filtration system includes waste liquid apparatus for recovering metal and waste gas apparatus for recovering metal；The waste liquid apparatus for recovering metal passes through drain line and the waste discharge interface (12) of unit cavity (2) Connection, the metal recovery for waste liquid；The waste gas apparatus for recovering metal passes through exhaust pipeline and the air draft interface (5) of unit cavity (2) Connection, the metal recovery for waste gas.
- 2. the metal recovery system according to claim 1 for tearing golden degumming process, it is characterised in that： The by-pass filtration system includes air draft screen pack (4) and waste discharge mouth screen pack (11), the air draft Filter screen (4) and waste discharge mouth screen pack (11) are respectively arranged at air draft interface (5) and waste discharge interface (12) On.
- 3. the metal recovery system according to claim 2 for tearing golden degumming process, it is characterised in that： The by-pass filtration system further comprises metal film baffle plate (9), and the metal film baffle plate (9) is arranged at Around unit cavity (2) interior wafer (3).
- 4. the metal recovery system according to claim 1 for tearing golden degumming process, it is characterised in that： The waste gas apparatus for recovering metal includes gas-liquid separation box (15) and gas liquid separating filtering net (14), described Gas liquid separating filtering net (14) is arranged in gas-liquid separation box (15), the gas-liquid separation box (15) Top and bottom be respectively equipped with gas-liquid separation air draft interface (13) and gas-liquid separating liquor drainage mouth (16), its Middle gas-liquid separation air draft interface (13) connects with the air draft interface (5) of unit cavity (2), the gas Liquid separating liquor drainage mouth (16) connects with precipitated metal pond (7).
- 5. the metal recovery system according to claim 1 for tearing golden degumming process, it is characterised in that： The waste liquid apparatus for recovering metal includes precipitated metal pond (7) and filtering basket (8), the filtering basket (8) be arranged in precipitated metal pond (7), in the side wall of the precipitated metal pond (7) from top to bottom according to It is secondary to be provided with waste liquid overfall (17), waste liquid outlet (18) and waste liquid pump discharge (19).
- 6. the metal recovery system according to claim 5 for tearing golden degumming process, it is characterised in that： The filtering basket (8) is bolted on the inwall of precipitated metal pond (7) and in suspention State.
- 7. the metal recovery system according to claim 1 for tearing golden degumming process, it is characterised in that： The air draft interface (5) is two, and two air draft interfaces (5) are symmetricly set in unit cavity (2) Both sides.
- 8. the metal recovery system according to claim 1 for tearing golden degumming process, it is characterised in that： The bottom of the unit cavity (2) is provided with two waste discharge interfaces (12), and two waste discharge interfaces (12) are logical The inlet that pipeline is crossed with precipitated metal pond (7) connects.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610399599.XA CN107469456A (en) | 2016-06-07 | 2016-06-07 | A kind of metal recovery system for tearing golden degumming process |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610399599.XA CN107469456A (en) | 2016-06-07 | 2016-06-07 | A kind of metal recovery system for tearing golden degumming process |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107469456A true CN107469456A (en) | 2017-12-15 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610399599.XA Pending CN107469456A (en) | 2016-06-07 | 2016-06-07 | A kind of metal recovery system for tearing golden degumming process |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108079661A (en) * | 2018-01-24 | 2018-05-29 | 宁波润华全芯微电子设备有限公司 | Apparatus for recovering metal after a kind of stripping technology |
| CN110735036A (en) * | 2018-07-19 | 2020-01-31 | 沈阳芯源微电子设备股份有限公司 | Metal recovery system after peeling processes |
| CN110735035A (en) * | 2018-07-19 | 2020-01-31 | 沈阳芯源微电子设备股份有限公司 | Metal recovery and classification waste discharge device for wafer photoresist and metal stripping process |
| CN111057861A (en) * | 2019-11-28 | 2020-04-24 | 中海油太原贵金属有限公司 | Method for recovering precious metal from wire drawing lubricating fluid |
| CN115445307A (en) * | 2022-08-30 | 2022-12-09 | 沈阳芯源微电子设备股份有限公司 | Filter equipment and tear gold equipment |
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| CN204424227U (en) * | 2015-02-17 | 2015-06-24 | 天津三安光电有限公司 | A kind of wafer surface metal-stripping system |
| CN105321855A (en) * | 2014-07-31 | 2016-02-10 | 东京毅力科创株式会社 | Substrate processing system and substrate cleaning method |
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| CN101150047A (en) * | 2006-09-20 | 2008-03-26 | 大日本网目版制造株式会社 | Substrate treatment apparatus and substrate treatment method |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108079661A (en) * | 2018-01-24 | 2018-05-29 | 宁波润华全芯微电子设备有限公司 | Apparatus for recovering metal after a kind of stripping technology |
| CN110735036A (en) * | 2018-07-19 | 2020-01-31 | 沈阳芯源微电子设备股份有限公司 | Metal recovery system after peeling processes |
| CN110735035A (en) * | 2018-07-19 | 2020-01-31 | 沈阳芯源微电子设备股份有限公司 | Metal recovery and classification waste discharge device for wafer photoresist and metal stripping process |
| CN111057861A (en) * | 2019-11-28 | 2020-04-24 | 中海油太原贵金属有限公司 | Method for recovering precious metal from wire drawing lubricating fluid |
| CN115445307A (en) * | 2022-08-30 | 2022-12-09 | 沈阳芯源微电子设备股份有限公司 | Filter equipment and tear gold equipment |
| CN115445307B (en) * | 2022-08-30 | 2024-02-27 | 沈阳芯源微电子设备股份有限公司 | Filter equipment and tear golden equipment |
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| PB01 | Publication | ||
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| CB02 | Change of applicant information |
Address after: 110168 No. 16 Feiyun Road, Hunnan District, Shenyang City, Liaoning Province Applicant after: Shenyang Core Source Microelectronic Equipment Co., Ltd. Address before: 110168 No. 16 Feiyun Road, Hunnan New District, Shenyang City, Liaoning Province Applicant before: Shenyang Siayuan Electronic Equipment Co., Ltd. |
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| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20171215 |