CN202543396U - Liquid surface temperature measurement device for mono-crystal furnace - Google Patents
Liquid surface temperature measurement device for mono-crystal furnace Download PDFInfo
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- CN202543396U CN202543396U CN2012200704059U CN201220070405U CN202543396U CN 202543396 U CN202543396 U CN 202543396U CN 2012200704059 U CN2012200704059 U CN 2012200704059U CN 201220070405 U CN201220070405 U CN 201220070405U CN 202543396 U CN202543396 U CN 202543396U
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Abstract
The utility model relates to a liquid surface temperature measurement device for a mono-crystal furnace. The liquid surface temperature measurement device comprises a liquid surface thermometer, an adjusting flange, an adjusting nut, an adjusting bolt, a small flange and quartz glass, wherein the liquid surface thermometer is fixed on the adjusting flange, one end of the adjusting bolt is screwed into the adjusting flange, the other end of the adjusting bolt is screwed into the small flange, the adjusting nut is screwed on the adjusting bolt, located below the adjusting flange and in contact with the adjusting flange, the adjusting flange is connected with the small flange through the adjusting nut and the adjusting bolt, the small flange comprises a flange hole, and the quartz glass is mounted in the flange hole of the small flange and located below the liquid surface thermometer. With the adoption of the liquid surface temperature measurement device for the mono-crystal furnace, the phenomena of inaccurate temperature, low crystal bar forming rate and the like are avoided when the crystal pulling of the mono-crystal furnace is carried out.
Description
Technical field:
The utility model relates to the electromechanics field, particularly a kind of single crystal growing furnace liquid level temperature measuring equipment that is used for solving problems such as single crystal growing furnace crystal pulling process generation temperature control is inaccurate, rod making rate is low.
Technical background:
Single crystal growing furnace is that polysilicon is converted into the indispensable equipment in the silicon single crystal technological process, and silicon single crystal is the basic material in photovoltaic generation and the semicon industry.Silicon single crystal is as the critical support material of advanced information society, is one of most important monocrystal material in the world at present, and it tightly is not the major function material of development computingmachine and unicircuit, is major function and the material that photovoltaic generation utilizes sun power yet.
General single crystal growing furnace does not adopt the liquid level temperature measuring equipment, causes phenomenons such as control accuracy is low, the crystal bar rod making rate is low easily.
Summary of the invention:
Given this, be necessary to provide a kind of single crystal growing furnace liquid level temperature measuring equipment that single crystal growing furnace crystal pulling process produces problems such as temperature control is inaccurate, rod making rate is low that is used for solving.
A kind of single crystal growing furnace liquid level temperature measuring equipment, it comprises the liquid level thermo detector, regulates flange, setting nut, adjusting bolt, little flange, silica glass.
The liquid level thermo detector is fixed on to be regulated on the flange; An end of regulating bolt screws in regulates flange; The other end of regulating bolt screws in little flange, and setting nut is tightened on to be regulated on the bolt and be positioned at the below of regulating flange and contact with regulating flange, regulates flange and is connected with little flange through setting nut, adjusting bolt; Little flange comprises flange hole, and silica glass is installed in the flange hole of little flange and is positioned at the below of liquid level thermo detector.
Preferably, also be provided with fixing threaded hole on the little flange, fixing threaded hole and flange hole are adjacent.
When adopting the utility model to carry out the single crystal growing furnace crystal pulling, the liquid fusion in the quartz crucible, the liquid level thermo detector sends infrared ray radiation to silicon liquid surface; Infrared rays feeds back to the liquid level thermo detector through silicon liquid then; The liquid level thermo detector changes into a temperature signal with the infrared rays that feeds back, but liquid level thermo detector self displays temperature signal, and operator can be according to the heating power of liquid level thermo detector temperature displayed control crystal pulling; Also can the liquid level thermo detector be connected to PLC through data line; The temperature signal of liquid level thermo detector sends PLC to, and the heating power through in the PLC control crystal pulling process guarantees the required temperature of crystal pulling process.So, in single crystal growing furnace crystal pulling process, phenomenons such as temperature is inaccurate, the crystal bar rod making rate is low have been avoided.
Description of drawings:
Accompanying drawing 1 is a single crystal growing furnace liquid level temperature measuring equipment structural representation.
Among the figure: single crystal growing furnace liquid level temperature measuring equipment 10, liquid level thermo detector 11, adjusting flange 12, setting nut 13, adjusting bolt 14, little flange 15, flange hole 151, fixing threaded hole 152, silica glass 16, seed crystal lifting gear 20, seed crystal rope 21, furnace top cover 22, crystal bar 23, heat shielding 24, silicon liquid 25, quartz crucible 26
Embodiment:
See also accompanying drawing, single crystal growing furnace liquid level temperature measuring equipment 10 comprises liquid level thermo detector 11, adjusting flange 12, setting nut 13, regulates bolt 14, little flange 15, silica glass 16.
Liquid level thermo detector 11 is fixed on to be regulated on the flange 12; An end of regulating bolt 14 screws in regulates flange 12; The other end of regulating bolt 14 screws in little flange 15; Setting nut 13 is tightened on to be regulated on the bolt 14 and is positioned at the below of regulating flange 12 and contact with regulating flange 12, regulate flange 12 through setting nut 13, regulate bolt 14 and be connected with little flange 15, the position of adjusting flange 12, setting nut 13 and 14 pairs of liquid level thermo detectors 11 of adjusting bolt has adjustable effect; Little flange 15 comprises flange hole 151, and silica glass 16 is installed in the flange hole 151 of little flange 15 and is positioned at the below of liquid level thermo detector 11.
In this embodiment, single crystal growing furnace liquid level temperature measuring equipment 10 is installed in and carries out the measurement of silicon liquid temp in the following crystal pulling apparatus:
Crystal pulling apparatus comprises seed crystal lifting gear 20, seed crystal rope 21, furnace top cover 22, crystal bar 23, heat shielding 24, silicon liquid 25, quartz crucible 26, and furnace top cover 22 is the Water-cooling Welding fitting, and heat shielding 24 is the thermal field graphite piece.
Little flange 15 also comprises fixing threaded hole 152, and fixing threaded hole 152 is adjacent with flange hole 151, penetrates in the fixing threaded hole 152 of little flange 15 with screw and is tightened on the furnace top cover 22; Thereby make liquid level temperature measuring equipment 10 be fixed on the furnace top cover 22; Furnace top cover 22 is positioned at heat shielding 24 tops, and heat shielding 24 is positioned at quartz crucible 26 tops, and seed crystal rope 21 is installed in the seed crystal lifting gear 20; The seed crystal 21 lower ends suspensions crystal bar 23 of restricting; Crystal bar 23 is grown in pulling process, and heat shielding 24 is used to locate the position of crystal bar 23, and silicon liquid 25 is contained in the quartz crucible 26.
When adopting the utility model to carry out the single crystal growing furnace crystal pulling, the liquid fusion in the quartz crucible, liquid level thermo detector 11 sends infrared ray radiation to silicon liquid 25 surfaces; Infrared rays feeds back to liquid level thermo detector 11 through silicon liquid 25 then; Liquid level thermo detector 11 changes into a temperature signal with the infrared rays that feeds back, but liquid level thermo detector 11 self displays temperature signal, and operator can be according to the heating power of liquid level thermo detector 11 temperature displayed control crystal pulling; Also can liquid level thermo detector 11 be connected to PLC through data line; The temperature signal of liquid level thermo detector 11 sends PLC to, and the heating power through in the PLC control crystal pulling process guarantees the required temperature of crystal pulling process.So, in single crystal growing furnace crystal pulling process, phenomenons such as temperature is inaccurate, the crystal bar rod making rate is low have been avoided.
Claims (2)
1. single crystal growing furnace liquid level temperature measuring equipment is characterized in that: this single crystal growing furnace liquid level temperature measuring equipment comprises the liquid level thermo detector, regulates flange, setting nut, adjusting bolt, little flange, silica glass; The liquid level thermo detector is fixed on to be regulated on the flange; An end of regulating bolt screws in regulates flange; The other end of regulating bolt screws in little flange, and setting nut is tightened on to be regulated on the bolt and be positioned at the below of regulating flange and contact with regulating flange, regulates flange and is connected with little flange through setting nut, adjusting bolt; Little flange comprises flange hole, and silica glass is installed in the flange hole of little flange and is positioned at the below of liquid level thermo detector.
2. single crystal growing furnace liquid level temperature measuring equipment as claimed in claim 1 is characterized in that: also be provided with fixing threaded hole on the little flange, fixing threaded hole and flange hole are adjacent.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012200704059U CN202543396U (en) | 2012-02-29 | 2012-02-29 | Liquid surface temperature measurement device for mono-crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012200704059U CN202543396U (en) | 2012-02-29 | 2012-02-29 | Liquid surface temperature measurement device for mono-crystal furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202543396U true CN202543396U (en) | 2012-11-21 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012200704059U Expired - Lifetime CN202543396U (en) | 2012-02-29 | 2012-02-29 | Liquid surface temperature measurement device for mono-crystal furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202543396U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103290486A (en) * | 2012-02-29 | 2013-09-11 | 宁夏日晶新能源装备股份有限公司 | Liquid level temperature measuring device for single crystal furnace |
| CN116026487A (en) * | 2023-03-31 | 2023-04-28 | 内蒙古晶环电子材料有限公司 | Liquid level temperature measuring method, liquid level temperature measuring device, computer equipment and storage medium |
-
2012
- 2012-02-29 CN CN2012200704059U patent/CN202543396U/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103290486A (en) * | 2012-02-29 | 2013-09-11 | 宁夏日晶新能源装备股份有限公司 | Liquid level temperature measuring device for single crystal furnace |
| CN116026487A (en) * | 2023-03-31 | 2023-04-28 | 内蒙古晶环电子材料有限公司 | Liquid level temperature measuring method, liquid level temperature measuring device, computer equipment and storage medium |
| CN116026487B (en) * | 2023-03-31 | 2023-08-08 | 内蒙古晶环电子材料有限公司 | Liquid level temperature measuring method, liquid level temperature measuring device, computer equipment and storage medium |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20121121 |
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| CX01 | Expiry of patent term |